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Associate Professor Microsystems for Space Technologies Laboratory

Herbert Shea Microsystems for Space Technologies Laboratory Associate Professor web site: http://lmts.epfl.ch office(s): BM3110 JD14N05 phone(s): [+41 21 69] 36663,0327205584 MISSION My lab develops highly reliable MEMS for use in Spacecraft, as well as innovative polymer MEMS micro-actuators. More info on the Microsystems for Space Technologies Lab at: http://lmts.epfl.ch Education PhD, Physics, Harvard University, 1997 MA, Physics, Harvard University, 1993 BSc, Physics, McGill University, 1991 Professional course Postdoctoral Fellow, IBM TJ Watson Research Center, Yorktown Heights, NY, USA, 1997-1999 Member of Technical Staff, Bell Labs, Lucent Technologies, 1999-2001 Technical Manager, MEMS Reliability Group, Bell Labs, Lucent Technologies, 2001-2004 Assistant Professor, Tenure Track, LMTS, EPFL, 2004 - 2011 Associate Professor, LMTS, EPFL, 2011 - present Recent Invited talks • SPIE EAP Actuators & Devices (EAPAD) 2011, "Miniaturized EAPs with compliant electrodes fabricated by ion implantation", March 2011, San Diego, USA • SPIE Photonics West 2011, MOEMS-MEMS, "The effects of radiation on MEMS", January 2011, San Francisco, USA • MRS Spring Meeting 2010, "Highly Stretchable Transparent Electrodes Made by Ion Implantation of Elastomers", April 2010, San Francisco, USA • SPIE Photonics West 2009, “MEMS for pico-satellites”, January 2009, San Jose, USA • International Conference in MEMS 2009 (ICMEMS 09), “Micromachined Dielectric Elastomer Actuators with Ion Implanted Electrodes”, January 2009, Chennai, India • Micro 08 “Microsystèmes en orbite”, September 2008, Neuchatel, Switzerland • IWPSD 2007, “Micromachined electric propulsion using ionic liquids as fuel”, 14th International Workshop on the Physics of Semiconductor Devices, Mumbai, India, December 2007. • SPIE Photonics West 2006, “Reliability of MEMS for space applications”, January 25, 2006, San Jose, CA, USA • 3rd World Congress on Biomimetics, Artificial Muscles & Nano-Bio, Keynote Speaker: “Microactuators based on Ion-Implanted Electroactive Polymer Membranes”, May 2006, Lausanne, Switzerland • OMEMS 2004, “Design for Reliability of Drift-Free MEMS Micromirrors”, August 25, 2004, Takamatsu, Japan Conference papers, Thesis, Patents Link to my lab's journal and conference papers, thesis and patents MAIN PUBLICATIONS F. Vecchio, V. Venkatraman, H. R. Shea, T. Maeder, and P. Ryser. Dispensing and Hermetic Sealing Rb in a Miniature Reference Cell for Integrated Atomic Clocks. Sensors and Actuators A: Physical, 2011. Remplissage sous bain de dodécane de la cellule de référence de l’horloge atomique. [ DOI | Details | Full Text ] G. Alici, A. Punning, and H. R. Shea. Enhancement of actuation ability of ionic-type conducting polymer actuators using metal ion implantation. Sensors and Actuators B: Chemical, 157:72-84, 2011. [ DOI | Details | Full Text | Link ] S. Sundaram, M. Tormen, B. Timotijevic, R. Lockhart, T. Overstolz, R. P. Stanley, and H. Shea. Vibration and shock reliability of MEMS: modeling and experimental validation. Journal of Micromechanics and Microengineering, 21:045022, 2011. [ DOI | Details | Full Text | Link ] M. Niklaus and H. Shea. Electrical conductivity and Young's modulus of flexible nanocomposites made by metal ion implantation of Polydimethylsiloxane: the relationship between nanostructure and macroscopic properties. Acta Materialia, 59:830-840, 2011. [ DOI | Details | Full Text | Link ] P. The voz, J. D. Adams, H. Shea, H. Bruus, and H. T. Soh. Acoustophoretic Synchronization of Mammalian Cells in Microchannels. Analytical Chemistry, 82(7):3094-3098, 2010. [ DOI | Details | Full Text | Link ] J. W. Choi, S. Rosset, M. Niklaus, J. Adleman, H. Shea, and D. Psaltis. 3-dimensional electrode patterning within a microfluidic channel using metal ion implantation. Lab on a Chip, 10:783-788, 2010. [ DOI | Details | Full Text | Link ] A. Cimatti, M. Robberto, . a. et al., H. Shea, and . a. et al. SPACE: the spectroscopic all-sky cosmic explorer. Experimental Astronomy, 23:39-66, 2009. [ DOI | Details | Full Text | Link ] S. Rosset, M. Niklaus, P. Dubois, and H. Shea. Large-Stroke Dielectric Elastomer Actuators With Ion- Implanted Electrodes. Journal of Microelectromechanical Systems, 18(6):1300-1308, 2009. [ DOI | Details | Full Text | Link ] P. Carazzetti and H. Shea. Electrical breakdown at low pressure for planar microelectromechanical systems with 10- to 500-micron gaps. Journal of Micro/Nanolithography, MEMS, and MOEMS,, 8(3):031305, 2009. [ DOI | Details | Full Text | Link ] H. Shea. Radiation sensitivity of microelectromechanical system devices. Journal of Micro/Nanolithography, MEMS, and MOEMS, 8(3):031303, 2009. [ DOI | Details | Full Text | Link ] R. Krpoun, K. Smith, J. Stark, and H. Shea. Tailoring the hydraulic impedance of out-of-plane micromachined electrospray sources with integrated electrodes. Applied Physics Letters, 94:163502, 2009. [ DOI | Details | Full Text | Link ] R. Krpoun and H. Shea. Integrated out-of-plane nanoelectrospray thruster arrays for spacecraft propulsion. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 19:045019-045029, 2009. [ DOI | Details | Full Text | Link ] P. Dubois, C. Botteron, V. Mitev, C. Menon, P.-A. Farine, P. Dainesi, A. Ionescu, and H. Shea. Ad-Hoc Wireless Sensor Networks For Exploration Of Solar-System Bodies. Acta Astronautica, Volume 64(Issues 5-6):470 - 478, 2009. [ DOI | Details | Full Text | Link ] S. Rosset, M. Niklaus, P. Dubois, and H. Shea. Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers. Advanced Functional Materials, 19:470 - 478, 2009. [ DOI | Details | Full Text | Link ] P. Carazzetti, P. Renaud, and H. Shea. Micromachined chip-scale plasma light source. Sensors and Actuators A, 154:275-280, 2009. [ DOI | Details | Full Text | Link ] P. Dubois, S. Rosset, M. Niklaus, M. Dadras, and H. Shea. Metal Ion Implanted Compliant Electrodes in Dielectric Electroactive Polymer (EAP) Membranes. Advances in Science and Technology, 61:18-25, 2008. special issue, CIMTEC 2008 conference. [ DOI | Details | Full Text | Link ] R. Krpoun and H. R. Shea. A method to determine the onset voltage of single and arrays of electrospray emitters. Journal of Applied Physics, 104(6):064511, 2008. [ DOI | Details | Full Text | Link ] M. Niklaus, S. Rosset, M. Dadras, P. Dubois, and S. Herbert. Microstructure of 5 keV gold-implanted polydimethylsiloxane. Scripta Materialia, 59:893-896, 2008. [ DOI | Details | Full Text | Link ] M. Bodendorfer, K. Altwegg, P. Wurz, and H. Shea. Identification of the ECR zone in the SWISSCASE ECR ion source. Nuclear Instruments and Methods in Physics Research B, 266:4788-4793, 2008. [ DOI | Details | Full Text | Link ] P. Dubois, S. Rosset, M. Niklaus, M. Dadras, and H. Shea. Voltage control of the resonance frequency of dielectric electroactive polymer (DEAP) membranes. Journal of Microelectromechanical Systems, 17:1072 - 1081, 2008. [ DOI | Details | Full Text | Link ] S. Rosset, M. Niklaus, P. Dubois, and H. R. Shea. Mechanical characterization of a dielectric elastomer microactuator with ion-implanted electrodes. Sensors and Actuators A: Physical, 144(1):185-193, 2008. [ DOI | Details | Full Text | Link ] M. Bodendorfer, K. Altwegg, H. Shea, and P. Wurz. Field structure and electron life times in the MEFISTO electron cyclotron resonance ion source. Nuclear Instruments and Methods in Physics Research B, 266:820-828, 2008. [ DOI | Details | Full Text | Link ] P. Dubois, S. Rosset, S. Koster, J. Stauffer, S. Mikhaïlov, M. Dadras, N.-F. de Rooij, and H. Shea. Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes. Sensors and Actuators A: Physical, 130-131:147-154, 2006. [ DOI | Details | Full Text ] H. R. Shea, A. Gasparyan, H. B. Chan, S. Arney, R. E. Frahm, D. López, S. Jin, and R. P. McConnell. Effects of electrical leakage currents on MEMS reliability and performance. IEEE Transactions on Device and Materials Reliability, 4(2):198-206, 2004. [ DOI | Details | Full Text | Link ] V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop. Beam-steering micromirrors for large optical cross-connects. JOURNAL OF LIGHTWAVE TECHNOLOGY, 21(3):634-642, 2003. [ DOI | Details | Link ] J. Kim, C. Nuzman, B. Kumar, D. Lieuwen, J. Kraus, A. Weiss, C. Lichtenwalner, A. Papazian, R. Frahm, N. Basavanhally, D. Ramsey, V. Aksyuk, F. Pardo, M. Simon, V. Lifton, H. Chan, M. Haueis, A. Gasparyan, H. Shea, S. Arney, C. Bolle, P. Kolodner, R. Ryf, D. Neilson, and J. Gates. 1100 x 1100 Port MEMS-based optical crossconnect with 4-dB maximum loss. IEEE PHOTONICS TECHNOLOGY LETTERS, 15(11):1537-1539, 2003. [ DOI | Details | Link ] V. Aksyuk, S. Arney, N. Basavanhally, D. Bishop, C. Bolle, C. Chang, R. Frahm, A. Gasparyan, J. Gates, R. George, C. Giles, J. Kim, P. Kolodner, T. Lee, D. Neilson, C. Nijander, C. Nuzman, M. Paczkowski, A. Papazian, F. Pardo, D. Ramsey, R. Ryf, R. Scotti, H. Shea, and M. Simon. 238 x 238 Micromechanical optical cross connect. IEEE PHOTONICS TECHNOLOGY LETTERS, 15(4):587-589, 2003. [ DOI | Details | Link ] H. Shea, R. Martel, and P. Avouris. Electrical transport in rings of single-wall nanotubes: one- dimensional localization. PHYSICAL REVIEW LETTERS, 84(19):4441-4444, 2000. [ DOI | Details ] R. Martel, H. Shea, and P. Avouris. Rings of single-walled carbon nanotubes. NATURE, 398:299, 1999. [ DOI | Details | Link ] P. Avouris, T. Hertel, R. Martel, T. Schmidt, H. Shea, and R. Walkup. Carbon nanotubes: nanomechanics, manipulation, and electronic devices. APPLIED SURFACE SCIENCE, 141:201-209, 1999. [ DOI | Details | Link ] H. Shea, R. Martel, T. Hertel, T. Schmidt, and P. Avouris. Manipulation of carbon nanotubes and properties of nanotube fied-effect transistors and rings. Microelectronic Engineering 1999, 46:101-104, 1999. [ DOI | Details | Link ] R. Martel, T. Schmidt, H. R. Shea, T. Hertel, and P. Avouris. Single- and multi-wall carbon nanotube field-effect transistors. APPLIED PHYSICS LETTERS, 73(17):2447-2449, 1998. [ DOI | Details | Full Text | Link ] H. R. Shea and M. Tinkham. Transition temperature of Josephson junction arrays with long-range interaction. Physical Review Letters, 79(12):2324-2327, 1997. [ DOI | Details | Full Text ] H. Shea, M. Itzler, and M. Tinkham. Inductance effects and dimensionality crossover in hybrid superconducting arrays. Physical Review B, 51(18):12690-12697, 1995. [ DOI | Details | Full Text | Link ] Links from EPFL-LMTS Lab webpage People Research Activities Funding Sources Publications Teaching Book on MEMS Reliability Springer has just published a book co-authored by Herb on MEMS Reliability.

Teaching Microengineering Reliability of MEMS [en] (SMX SMT) Reliability of MEMS (EDOC) [en] Scaling in MEMS [en] Scaling laws in micro- and nanosystems [en] (SMX SMT) Statics and Dynamics [fr] (SMT) Phd programs Microsystems and Microelectronics Phd Students Akbari Samin Bandi Tobias Chakraborty Subha Dandavino Simon Gebbers Pit Ghose Kaustav Lalgudi Venkatraman Vinu Maffli Luc Shintake Jun Past Phd students: Bodendorfer Michael Krpoun Renato Niklaus Muhamed Rosset Samuel