|
|
|
Paul Muralt
|
|
Ceramics Laboratory
|
Prof. / Dr.sc.nat.
birth date: 16.07.1954
nationality: Swiss
|
office(s):
MXC237
phone(s): [+41 21 69] 34957
|
|
|
BIOGRAPHY
|
Paul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. He is group leader for thin films and MEMS devices, specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. He gives lectures in thin film deposition and micro patterning. He authored or co-authored more than 200 scientific articles. He is senior member of IEEE. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF).
Coordinator of FP6 Project 3D-DEMO (http://www.3d-demo.org/)
Organizer and Chairman of the 2nd International Workshop on Piezoelectric MEMS(http://www.piezomems2011.org/)
|
|
MAIN PUBLICATIONS
|
Texture control of PbTiO3 and PZT thin films with TiO2 seeding, P. Muralt T. Maeder, L. Sagalowicz, S. Hiboux, S. Scalese, D. Naumovic, R.G.Agostino, N. Xanthopoulos, H. J. Mathieu, L. Patthey, E.L. Bullock, J. Appl. Phys. 83, 3835-3841 (1998)
Fabrication and characterization of PZT thin-film vibrators for micromotors, P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. G. Brooks, N. Setter, and R. Luthier, Sensors and Actuators A 48, 157-165 (1995)
Site controlled nucleation and growth of small ferroelectric PZT single crystals, S. Bühlmann, P. Muralt, S. Von Allmen, Appl.Phys.Lett. 84, 2614-16 (2004)
Properties of AlN thin films for piezoelectric transducers and microwave filter applications, M.-A. Dubois, P. Muralt, Appl. Phys. Lett. 74, 3032-34 (1999)
Stress and piezoelectric properties of AlN thin films deposited onto metal electrodes by pulsed direct current reactive sputtering, M.-A. Dubois, P. Muralt, J.Appl.Phys. 89 (11), 6389-6395 (2001)
Piezoelectric Pb(Zrx,Ti1-x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors, N. Ledermann, P. Muralt, J. Baborowski1, M. Forster and J-P. Pellaux, J. Micromech. Microeng. 14, 1650–1658 (2004)
Mixed titania - lead oxide seed layers for PZT growth on Pt(111): a study on nucleation, texture and properties, S. Hiboux, P. Muralt, J. Eur. Electroceramic Soc. 24, 1593-1596 (2004)
Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size, S. Bühlmann, B. Dwir, J. Baborowski, P. Muralt, Appl.Phys.Lett. 80, 3195-3197 (2002)
Thin film pyroelectric array as a detector for an infrared gas spectrometer, B. Willing, M. Kohli, P. Muralt, and O. Oehler, Infrared Physics and Technology 39, 443-449 (1998)
PZT thin films for micro sensors and actuators: a review, P. Muralt, J.Micromech.Microeng. 10 (2), 136-146 (2000)
Micromachined infrared detectors based on pyroelectric thin films, P. Muralt, Rep.Progr.Physics 64, 1339-1388 (2001)
Scanning tunneling potentiometry, P. Muralt and D.W. Pohl, Appl.Phys.Lett. 48, 514-516 (1986)
Semiconductor heterojunction studied by scanning tunneling microscopy and potentiometry, P. Muralt, H. Meier, D.W. Pohl, and H.W. Salemink, Appl.Phys.Lett. 50, 1352-1354 (1987)
Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1-x)O3 thin films, M.-A. Dubois, P. Muralt, Sensors and Actuators 77, 106-112 (1999)
Polarization reversal due to charge injection in ferroelectric thin films, S. Bühlmann, E. Colla, P. Muralt, Phys.Rev.B 72, 214120 (2005)
|
|
Publication list
|
|
|
|
2011
|
E. Milyutin, P. Muralt, Electromechanical coupling in shear mode FBAR with piezoelectric modulated thin film, IEEE Trans. TUFFC Letter 58, 685-688 (2011).
A. Dabirian, Y. Kuzminykh, S.C. Sandu, S. Harada, E. Wagner, P. Brodard, G. Benvenuti, S. Rushworth, P. Muralt, P. Hoffmann, Combinatorial high-vacuum chemical vapor deposition of textured hafnium-doped lithium niobate thin films on sapphire, Crystal Growth & Design 11, 203-209 (2011).
A. Artieda, P. Muralt, 4.3 GHz composite thin film bulk acoustic resonator for miniaturized atomic clocks, Appl. Phys. Lett. 98, 262902 (2011).
R. Matloub, A. Artieda, E. Milyutin, P. Muralt, Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic wave resonators, Appl.Phys.Lett. 99, 092903 (2011).
|
|
2010
|
Publications:
E. Milyutin, S. Harada, D. Martin, J.F. Carlin, N. Grandjean, V. Savu, O. Vasquez-Mena, J. Brugger, P. Muralt, Sputtering of AlN thin films: Control of polarity by seed layer, J. Vac. Sci. Technol. B 28, L61 (2010).
G. Deng, P. Muralt, Annealing effects on electrical properties and defects of CaCu3Ti4O12 thin films deposited by pulsed laser deposition, Phys.Rev.B 81, 224111 (2010).
A. Artieda, C. Sandu, P. Muralt, Highly piezoelectric thin films grown on amorphous, insulating substrate, J.Vac.Sci.Tech. A 28, 390-393 (2010).
S. Rey-Mermet, Y. Yan, C. Sandu, G. Deng, P. Muralt, Nanoporous YSZ film in electrolyte membrane of Micro-Solid Oxide Fuel Cell, Thin Solid Films 518, 4743-46 (2010).
A. Noeth, T. Yamada, P. Muralt, A.K. Tagantsev, N. Setter, Tunable Thin Film Bulk Acoustic Wave Resonator Based on BaxSr1-xTiO3 Thin Film, IEEE TRANS. ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL 57, 379-385 (2010).
A. Dabirian, Y. Kuzminykh, B. Afra, S. Harada, E. Wagner, C. S. Sandu, G. Benvenuti, S. Rushworth, P. Muralt, P. Hoffmann, Combinatorial discovery and optimization of amorphous HfO2-Nb2O5 mixture with improved transparency, Electrochemical and solid-state letters 13, G60-G63 (2010).
|
|
2009
|
Publications:
S. Diziain, S. Harada, R. Salut, P. Muralt, and M.-P. Bernal, Strong improvement in the photonic stop-band edge sharpness of a lithium niobate photonic crystal slab, Appl.Phys.Lett. 95, no. 101103 (2009).
P. Muralt, R.G. Polcawich, S. Trolier-McKinstry, Piezoelectric thin films for sensors, actuators and energy harvesting, MRS Bulletin 35, 658-664 (2009).
P. Muralt, J. Conde, A. Artieda, F. Martin and M. Cantoni, Piezoelectric materials parameters for piezoelectric thin films in GHz applications, International Journal of Microwave and Wireless Technologies 1, 19-27 (2009).
A. Artieda, M. Barbieri, C. Silviu Sandu, and P. Muralt, Effect of substrate roughness on c-oriented AlN thin films, J. Appl. Phys. 105, 024504 (2009)
G. Deng, Z. He, and P. Muralt, Physical aspects of colossal dielectric constant material CaCu3Ti4O12 thin films, J. Appl. Phys. 105, 084106 (2009)
T. Yamada, C.S. Sandu, M. Gureev, V. Sherman, A. Noeth, P. Muralt, A.K. Tagantsev, N. Setter, Self-Assembled Perovskite-Fluorite Oblique Nanostructures for Adaptive (Tunable) Electronics, Adv. Mat. 21, 1363-1367 (2009).
P. Muralt, M. Marzencki, B. Belgacem, F. Calame, S. Basrour, Vibration Energy Harvesting with PZT Micro Device, PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, Procedia Chemistry 1, 1191-1194 (2009).
Y. Yan, S. Rey-Mermet, Z.B. He, G. Deng G, P. Muralt, Micro Solid Oxide Fuel Cell in Silicon Technology with Reinforced Electrolyte Membrane, PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, Procedia Chemistry 1, 1207-1210 (2009).
|
|
2008
|
Publications
A. Bieberle-Hutter, D. Beckel, A. Infortuna, U. P. Muecke, J. L.M. Rupp, L. J. Gauckler, S. Rey-Mermet, P. Muralt, N. R. Bieri, N. Hotz, M. J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, T. Hocker, A micro-solid oxide fuel cell system as battery replacement, Journal of Power Sources 177, 123–130 (2008).
G. Deng, N. Xanthopoulos, and P. Muralt, Chemical nature of colossal dielectric constant of CaCu3Ti4O12 thin film by pulsed laser deposition, Appl.Phys.Lett. 92, art. 172909 (2008).
P. Muralt, Piezoelectrics in Micro and Nanosystems: Solutions for a Wide Range of Applications, J. Nanosci. Nanotechnol. 8, 2560–2567 (2008).
P. Muralt, Recent Progress in Materials Issues for Piezoelectric MEMS, J.Am.Ceram.Soc. 91, 1385-96 (2008). (invited feature article)
J. Conde, P. Muralt, Characterization of sol-gel PZT in thin film bulk acoustic resonators, IEEE Trans. UFFC 55, 1373-1379 (2008).
S. Rey-Mermet, P. Muralt, Solid Oxide fuel cell membranes supported by nickel grid anode, Solid State Ionics 179, 1497-1500 (2008).
S. Bühlmann, P. Muralt, Electrical Nanoscale Training of Piezoelectric Response Leading to Theoretically Predicted Ferroelastic Domain Contributions in PZT Thin Films, Adv. Mater. 20, 3090-95 (2008).
A. Artieda, P. Muralt, High-Q AlN/SiO2 symmetric composite Thin Film Bulk Acoustic Wave Resonators, IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control 55, 2463-2468 (2008).
E. Milyutin, S. Gentil, P. Muralt, Shear mode BAW resonator based on c-axis oriented AlN thin film, J. Appl.Phys. 104, no. 084508 (2008).
P. Muralt, "Piezoelectric thin films for innovations in the field of MEMS and Biosensors", Chapter 15 in: "Piezoelectricity, Evolution and Future of a Technology", edited by W. Heywang, K. Lubitz, W. Wersing, Springer Series in Materials Science, vol. 114, Springer Berlin, Heidelberg, 2008.
|
|
2007
|
Publications
P. Muralt, News and views: Ferroelectric thin films: The emancipation of ferroelectricity, Nature Materials 60, 8-9 (2007).
F. Calame, P. Muralt, Growth and properties of gradient free sol-gel lead zirconate titanate thin films, Appl.Phys.Lett. 90, 062907 (2007).
K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, S. Tiedke, Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices, IEEE Trans. UFFC 54, 8-14 (2007).
D. Su, T. Yamada, V.O. Sherman, A.K. Tagantsev, P. Muralt, N. Setter, Annealing effect on dislocations in SrTiO3/LaAlO3 heterostructures, J.Appl.Phys. 101, 064102 (2007).
Y. Meyer, T. Verdot, M. Collet, J. Baborowski, P. Muralt, Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices, Smart.Mater.Struct. 16, 128-134 (2007).
B. Belgacem, F. Calame, P. Muralt, Piezoelectric ultrasonic transducers with thick PZT sol-gel films, J. Electroceramics 19, 369-373 (2007).
F. Tyholdt, F. Calame, K. Prume, H. Ræder, P. Muralt, Chemically derived seeding layer for {100}-textured PZT thin films, J. Electroceramics 19, 311-314 (2007).
T. Yamada, V.O. Sherman, D. Su, P. Muralt, A.K. Tagantsev, N. Setter, Growth process approaches for improved properties of tunable ferroelectric thin films, J.Eur.Ceram.Soc. 27, 3753-58 (2007).
T. Yamada, P. Muralt, V.O. Sherman et al, Epitaxial growth of BaSrTiO thin films on Al2O3(0001) using ultrathin TiN layer as a sacrificial template, Appl-Phys.Lett, 90, 142911 (2007).
Y. Adachi, P. Muralt, N. Setter, Effects of film orientation on ferroelectric and piezoelectric properties of La substituted BTO thin films, Jap.J.Appl.Phys. 46, 686-690 (2007).
M. Prestat, A. Infortuna, S. Korrodi, S. Rey-Mermet, P. Muralt, L. J. Gauckler, Oxygen reduction at thin dense LaSrCoFeO electrodes, J.Electroceramics 18, 111-120 (2007).
K. Brinkman, Y.Wang, D. Su, A. Tagantsev, P. Muralt, N. Setter, The impact of chemical ordering on the dielectric properties of lead scandium tantalate thin films, J.Appl.Phys. 102, 044110 (2007).
G. Deng, T. Yamada, P. Muralt, Evidence for the existence of a metal-insulator-semiconductor junction at the electrode interfaces of CaCu3Ti4O12 thin film capacitors, Appl.Phys.Lett. 91, 202903 (2007).
I. Stolitchnov, L. Mailin, P. Muralt, N. Setter, Non-volatile gate effect in the PZT/AlGaN/GaN heterostructure, J.Eur.Ceram.Soc. 27, 4307-4311 (2007).
H. Raeder, F. Tyholdt, W. Booij, F. Calame, N.P. Ostbo, R. Bredesen, K. Prume, G. Rijnders, P. Muralt, Taking piezoelectric microsystems from the laboratory to production, J. Electroceramics 19, 357-362 (2007).
F. Calame, P. Muralt, Novel 3D piezoelectric thin film structures for micromechanics, J. Electroceramics 19, 399-402 (2007).
K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, S. Tiedke, Extensive electrochemical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals, J. Electroceramics 19, 404-411 (2007).
T. Matsushima, S. Xiong, H. Kawada, H. Yamanaka, P. Muralt, A highly sensitive PZT thin film ultrasonic micro-sensor with a grooved diaphragm, IEEE Trans. UFFC 54, 2439-2445 (2007).
A. Noeth, T. Yamada, V.O. Sherman, P. Muralt, A. Tagantsev, N. Setter, Tuning of DC bias-induced resonances in micromachined BST thin film capacitors, J. Appl.Phys. 102, no. 114110 (2007).
D. Su, A. Infortuna, P. Muralt, N. Setter, Transmission-electron-microscopy study of quasi-epitaxial tungsten-bronze (Sr2.5Ba2.5Nb10O30) thin film on perovskite (SrTO3) single crystal, J. Mater.Res. 22, 157-163 (2007).
|
|
Completed PhD thesis
|
2011:
Evgeny Milyutin: "Theoretical and Experimental Study of Piezoelectric Modulated AlN Thin Films for Shear Mode BAW Resonators", EPFL no. 5113.
2010:
Alvaro Artieda: "AlN thin film structures for high-Q resonators", EPFL no 4685
2009:
Janine Conde: "High coupling materials for thin film bulk acoustic wave resonators", EPFL no. 4489.
2008:
Samuel Rey-Mermet: "Micro fabricated solid oxide fuel cells", EPFL no. 4175.
2007:
Florian Calame: "Novel Three-dimensional micromachined structures for piezoelectric MEMS and related issues in PZT thin film growth", EPFL no. 3820.
|
|
| Skills |
Thin Films
Piezoelectrics
Pyroelectrics
Ferroelectrics
Micro-Electro-Mechanical Systems |
|
| Teaching |
Materials Science and Engineering
|
|
| Phd programs |
- Materials Science and Engineering (edoc)
|
|
| Phd Students |
Chidambaram Nachiappan
Jiang Bo
Matloub Aghdam Ramin
Mazzalai Andrea
Yan Yan
|
|
|
| Information on Courses |
1)Lecture notes, exercises, etc. are normally stored on the my.epfl server
2)The lextures on Micro and Nano structuration for PhD students start on February 21 at 0815 in MXF1 (2011)
|
|
| NEWS |
|
Piezo-MEMS workshop at EPFL: http://www.piezomems2011.org
|
|
Adjunct Professor