Thomas Lehnert
Teaching & PhD
Teaching
Microengineering
Past EPFL PhD Students
Cornaglia Matteo , Dahan Elodie Deborah , Dong Li , Krenger Roger Philippe , Liu Yang , Moser Yves , Padovani Rima , Viri Vittorio ,Courses
Materials and technology of microfabrication
The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on materials and multidisciplinarity.