Niels Quack
EPFL STI IMT GR-QUA
BM 5142 (Bâtiment BM)
Station 17
CH-1015 Lausanne
+41 21 693 73 83
+41 21 693 47 46
Office: BM 5142
EPFL > STI > IMT > GR-QUA
+41 21 693 73 83
EPFL > E > E-DOC > EDMI-ENS
+41 21 693 73 83
EPFL > STI > STI-SMT > SMT-ENS
+41 21 693 73 83
EPFL > ENT-R > CMI > CMI-CD
Fields of expertise
Integrated Transducers
Photonic Micro- & Nanosystems
Micro- and Nanofabrication
Photonic MEMS
Integrated Photonics
Diamond Photonics
Photonic Switches
Silicon Photonics
Optical MEMS
Heterogeneous Integration
Tunable Optical Microsystems
Microspectrometers
Mid-Infrared Photonics
MicroLIDAR
Photonic Micro- & Nanosystems
Micro- and Nanofabrication
Photonic MEMS
Integrated Photonics
Diamond Photonics
Photonic Switches
Silicon Photonics
Optical MEMS
Heterogeneous Integration
Tunable Optical Microsystems
Microspectrometers
Mid-Infrared Photonics
MicroLIDAR
Biography
Prof. Dr. Niels Quack received the M.Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland, in 2005, and the Dr.Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Zürich, Switzerland, in 2010. From 2011 to 2015, he was Postdoctoral Researcher and Visiting Scholar with the Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center, University of California, Berkeley, CA, USA. From 2014 to 2015, he was Senior MEMS Engineer with Sercalo Microtechnology, Neuchâtel, Switzerland. He is currently an SNSF Assistant Professor with Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He has authored and co-authored more than 50 papers in leading technical journals and conferences. His research interests include photonic micro and nanosystems, with an emphasis on diamond photonics and silicon photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN) and served as General Chair of the IEEE OMN 2018 and the Latsis Symposium 2019 on Diamond Photonics. He is a Senior Member of IEEE, Member of The Optical Society (OSA) and life member of SPIE.
Awards and Grants
2020 - Outstanding Paper Award nature.com/micronano/
2015 - IEEE Senior Member
2015 - SNSF Professorship
2015 - Best Poster Award, Photonics for Disaggregated Data Centers, OIDA, Los Angeles, USA (co-authored)
2015 - OFC Top Scored Paper, Los Angeles, USA (co-authored, highlighted in OFC press release and awarded as Tingye Li Innovation Prize)
2014 - OFC Top Scored Paper, San Francisco, USA (co-authored)
2013 - NMC Travel Award, Stanford, USA
2013 - IEEE MEMS Outstanding Paper Award, Taipei, Taiwan (co-authored)
2012 - CIS User Grant, 2012, Stanford, USA
2005 - Prix de la Commune d'Ecublens, EPFL, Lausanne, Switzerland
2004 - SSBE, Max Anliker Memorial Poster Award, Zürich, Switzerland
2000 - VEGR Best Matura Project Award, Zürich, Switzerland
2015 - IEEE Senior Member
2015 - SNSF Professorship
2015 - Best Poster Award, Photonics for Disaggregated Data Centers, OIDA, Los Angeles, USA (co-authored)
2015 - OFC Top Scored Paper, Los Angeles, USA (co-authored, highlighted in OFC press release and awarded as Tingye Li Innovation Prize)
2014 - OFC Top Scored Paper, San Francisco, USA (co-authored)
2013 - NMC Travel Award, Stanford, USA
2013 - IEEE MEMS Outstanding Paper Award, Taipei, Taiwan (co-authored)
2012 - CIS User Grant, 2012, Stanford, USA
2005 - Prix de la Commune d'Ecublens, EPFL, Lausanne, Switzerland
2004 - SSBE, Max Anliker Memorial Poster Award, Zürich, Switzerland
2000 - VEGR Best Matura Project Award, Zürich, Switzerland
Professional course
Senior MEMS Engineer
sercalo Microtechnology ltd.
2014-2015
Postdoctoral Researcher
Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center
University of California, Berkeley
2011-2015
Education
Doctor of Sciences
ETH Zürich
2005-2010
Master of Science
EPF Lausanne
2000-2005
Publications
Infoscience publications
Main Publications
2020
[100] Integrated photonic devices in single crystal diamond
Journal Of Physics-Photonics
2020-10-01
DOI : 10.1088/2515-7647/aba171
[99] Diffractive optical elements in single crystal diamond
Optics Letters
2020-07-01
DOI : 10.1364/OL.393679
[98] Compact broadband suspended silicon photonic directional coupler
Optics Letters
2020-06-01
DOI : 10.1364/OL.394470
[97] Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes
Diamond and Related Materials
2020-04-05
DOI : 10.1016/j.diamond.2020.107839
[96] Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers
Diamond And Related Materials
2020-04-01
DOI : 10.1016/j.diamond.2020.107744
[95] MEMS for Photonic Integrated Circuits
Ieee Journal Of Selected Topics In Quantum Electronics
2020-03-01
DOI : 10.1109/JSTQE.2019.2943384
[94] MEMS-Enabled Silicon Photonic Integrated Devices and Circuits
Ieee Journal Of Quantum Electronics
2020-02-01
DOI : 10.1109/JQE.2019.2946841
[93] MORPHIC: Programmable photonic circuits enabled by silicon photonic MEMS
2020-01-01. Conference on Silicon Photonics XV , San Francisco, CA , Feb 03-06, 2020. p. 1128503.DOI : 10.1117/12.2540934.
[92] Non-contact polishing of a crystalline layer or substrate by ion beam etching
2020.
Patent number(s) :
WO2020021501
2019
[91] High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching
Optics Express
2019-10-07
DOI : 10.1364/OE.27.030371
[90] FCC-hh: The Hadron Collider: Future Circular Collider Conceptual Design Report Volume 3
European Physical Journal-Special Topics
2019-07-01
DOI : 10.1140/epjst/e2019-900087-0
[89] HE-LHC: The High-Energy Large Hadron Collider Future Circular Collider Conceptual Design Report Volume 4
The European Physical Journal Special Topics
2019-07-01
DOI : 10.1140/epjst/e2019-900088-6
[88] Silicon Photonic MEMS Phase-Shifter
Optics Express
2019-06-24
DOI : 10.1364/OE.27.018959
[87] FCC Physics Opportunities: Future Circular Collider Conceptual Design Report Volume 1
European Physical Journal C
2019-06-05
DOI : 10.1140/epjc/s10052-019-6904-3
[86] FCC-ee: The Lepton Collider: Future Circular Collider Conceptual Design Report Volume 2
European Physical Journal-Special Topics
2019-06-01
DOI : 10.1140/epjst/e2019-900045-4
[85] Non-contact polishing of single crystal diamond by ion beam etching
Diamond And Related Materials
2019-02-01
DOI : 10.1016/j.diamond.2019.01.007
[84] Freestanding Silicon Photonic Ring and Disk Resonators
2019-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Daejeon, SOUTH KOREA , Jul 28-Aug 01, 2019. p. 212-213.[83] Silicon Photonic Broadband Suspended Directional Coupler
2019-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Daejeon, SOUTH KOREA , Jul 28-Aug 01, 2019. p. 214-215.[82] Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity
Lausanne, EPFL, 2019.DOI : 10.5075/epfl-thesis-7238.
[81] Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators
Lausanne, EPFL, 2019.DOI : 10.5075/epfl-thesis-9862.
[80] Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
2019.
Patent number(s) :
CN111417747
EP3676426
US2020199780
WO2019043432
EP3676426
US2020199780
WO2019043432
[79] Single crystalline diamond diffractive optical elements and method of fabricating the same
2019.
Patent number(s) :
EP3676427
CN111279023
WO2019043570
CN111279023
WO2019043570
[78] Advanced Diamond Microfabrication for Microoptics and Photonics
Lausanne, EPFL, 2019.DOI : 10.5075/epfl-thesis-9771.
[77] Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits
2019-01-01. Optical Fiber Communications Conference and Exhibition (OFC) , San Diego, CA , Mar 03-07, 2019.2018
[76] Single crystal diamond micro-disk resonators by focused ion beam milling
Apl Photonics
2018-12-01
DOI : 10.1063/1.5051316
[75] Digital Silicon Photonic MEMS Phase-Shifter
2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 217-218.[74] Characterization of crystallographically etched single crystal diamond diffraction gratings
2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 173-174.[73] Size control of self-organized gold nanoparticles on nanopatterned single crystal diamond
2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 94-95.[72] Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators
2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 20-21.[71] Silicon photonic MEMS variable optical attenuator
2018-01-01. Conference on MOEMS and Miniaturized Systems XVII , San Francisco, CA , Jan 30-31, 2018. p. 105450H.DOI : 10.1117/12.2317507.
[70] Trapezoidal Diffraction Grating Beam Splitters in Single Crystal Diamond
COMPONENTS AND PACKAGING FOR LASER SYSTEMS IV
2018
DOI : 10.1117/12.2290557
[69] Precision micro-mechanical components in single crystal diamond by deep reactive ion etching
MICROSYSTEMS AND NANOENGINEERING
2018
DOI : 10.1038/s41378-018-0014-5
[68] Large-Scale Polarization-Insensitive Silicon Photonic MEMS Switches
JOURNAL OF LIGHTWAVE TECHNOLOGY
2018
DOI : 10.1109/JLT.2018.2791502
[67] Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling
ADVANCES IN PHOTONICS OF QUANTUM COMPUTING, MEMORY, AND COMMUNICATION XI
2018
DOI : 10.1117/12.2290177
2017
[66] Geometric Integrators for Nonadiabatic Molecular Quantum Dynamics Induced by the Interaction with the Electromagnetic Field
Lausanne, EPFL, 2017.DOI : 10.5075/epfl-thesis-8145.
[65] Electronic-Photonic Integrated Circuit for 3D Microimaging
Ieee Journal Of Solid-State Circuits
2017
DOI : 10.1109/Jssc.2016.2621755
2016
[64] Large-Scale Silicon Photonic Switches
2016. 21st OptoElectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS) , Niigata, JAPAN , JUL 03-07, 2016.[63] Die Level Release of Silicon Photonic MEMS
2016. International Conference on Optical MEMS and Nanophotonics (OMN) .[62] Scalable Row/Column Addressing of Silicon Photonic MEMS Switches
2016. International Conference on Optical MEMS and Nanophotonics (OMN) , Jerusalem, ISRAEL , AUG, 2015. p. 561-564.DOI : 10.1109/Lpt.2016.2515106.
[61] Highly Scalable Digital Silicon Photonic MEMS Switches
2016. Optical Fiber Communications Conference and Exhibition (OFC) , Los Angeles, CA , MAR 22-26, 2015. p. 365-371.DOI : 10.1109/Jlt.2015.2496321.
[60] Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers
Optica
2016
DOI : 10.1364/OPTICA.3.000064
[59] Chip-Scale Electro-Optical 3D FMCW Lidar with 8μm Ranging Precision
2016. 63rd IEEE International Solid-State Circuits Conference (ISSCC) , San Francisco, CA , JAN 31-FEB 04, 2016.2015
[58] Engineering Nano-Opto-Electromechanical Systems
2015. Frontiers in Nanophotonics , Ascona, Switzerland , 30 August 2015 - 4 September 2015.[57] Large-Scale, MEMS-Actuated Silicon Photonic Switches
2015. Photonics in Switching 2015 , Florence, Italy , 22-25 September 2015.[56] MEMS-Enabled Scalable Silicon Photonic Switches
2015. Frontiers in Optics 2015 , San Jose, California United States , 18–22 October 2015.DOI : 10.1364/FIO.2015.FW3B.2.
[55] 50x50 Digital Silicon Photonic Switches with MEMS-Actuated Adiabatic Couplers
2015. Optical Fiber Communication Conference , Los Angeles, California , 2015. p. M2B.4.DOI : 10.1364/OFC.2015.M2B.4.
[54] Large-Port-Count MEMS Silicon Photonics Switches
2015. Optical Fiber Communication Conference , Los Angeles, California , 2015. p. M2B.3.DOI : 10.1364/OFC.2015.M2B.3.
[53] Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration
GOMACTech, St. Louis, MO, USA, March 23-26, 2015.[52] Large-scale silicon photonic switches with movable directional couplers
Optica
2015
DOI : 10.1364/OPTICA.2.000370
[51] Row/Column Addressing of Scalable Silicon Photonic MEMS Switches
International Conference on Optical MEMS and Nanophotonics (IEEE OMN), Jerusalem, Israel, August 2-6, 2015.[50] 64x64 Low-Loss and Broadband Digital Silicon Photonic MEMS Switches
Conference on Optical Communications (ECOC 2015), Valencia, Spain, 27 September - 1 October 2015.2014
[49] Method for Increasing the Operating Distance of MEMS LIDAR beyond Brownian Noise Limitation
2014. CLEO: Applications and Technology , San Jose, California , 2014. p. AW3H.2.DOI : 10.1364/CLEO_AT.2014.AW3H.2.
[48] Monolithic Large-Scale Optical Switches Using Silicon Photonic MEMS
2014. 2014 OptoElectronics and Communication Conference and Australian Conference on Optical Fibre Technology (OECC/ACOFT 2014) , Melbourne, Australia , July 6-10, 2014. p. 625.[47] Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time
2014. Optical Fiber Communication Conference , San Francisco, California , 2014. p. M2K.2.DOI : 10.1364/OFC.2014.M2K.2.
[46] Development of a FMCW LADAR Source Chip Using MEMS-Electronic-Photonic Heterogeneous Integration
GOMACTech, Charleston, SC, USA, March 31 - April 3, 2014.[45] Integrated VCSEL-Microlens Scanner With Large Scan Range
Journal of Microelectromechanical Systems
2014
DOI : 10.1109/JMEMS.2014.2315810
[44] Results of the Test of Industrially Manufactured HTS Current Leads With Novel Design Features
Ieee Transactions On Applied Superconductivity
2014
DOI : 10.1109/Tasc.2013.2281121
2013
[43] Linear Frequency Chirp Generation Employing Opto-electronic Feedback Loop and Integrated Silicon Photonics
2013. CLEO , San Jose, CA, USA , June 9-14, 2013..[42] Phase Noise Spectrum and Carrier Power Modeling of High Performance Optomechanical Oscillators
2013. CLEO: QELS_Fundamental Science , CLEO: QELS_Fundamental Science (2013) , 2013. p. QTh4E.2.DOI : 10.1364/CLEO_QELS.2013.QTh4E.2.
[41] Enhancement of mechanical Q for low phase noise optomechanical oscillators
2013. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) , Taipei, Taiwan , January 20-24, 2013. p. 118-121.DOI : 10.1109/MEMSYS.2013.6474191.
[40] Through Silicon Vias and thermocompression bonding using inkjet-printed gold nanoparticles for heterogeneous MEMS integration
2013. 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) , Barcelona, Spain , June 16-20, 2013. p. 834-837.DOI : 10.1109/Transducers.2013.6626896.
[39] Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration
GOMACTech, Las Vegas, NV, USA, March 11-14 ,2013.[38] 3D Imaging: Sub-mm Resolution Ranging using a Chip-scale MEMS FMCW LIDAR Source
Berkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, September 17-18, 2013.[37] Droplet-on-Demand Inkjet-filled TSVs as a Pathway to Cost-efficient Chip Stacking
IMPAS 2013, 46th International Symposium on Microelectronics, Orlando, FL, USA, 30 September – 3 October, 2013.2012
[36] Self-aligned VCSEL-microlens scanner with large scan range
2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) , Paris, France , January 29 - February 2, 2012. p. 656-659.DOI : 10.1109/MEMSYS.2012.6170272.
[35] A Platform for On-Chip Silica Optomechanical Oscillators with Integrated Waveguides
2012. CLEO: Science and Innovations , San Jose, California , 2012. p. CW1M.5.DOI : 10.1364/CLEO_SI.2012.CW1M.5.
[34] Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references
2012. 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics , Banff, AB, Canada , August 6-9, 2012. p. 51-52.DOI : 10.1109/OMEMS.2012.6318797.
[33] Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration
International Nano-Optoelectronics Workshop, UC Berkeley and Stanford University, CA, USA, August 7-15, 2012.[32] MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)
Berkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, March 7-9, 2012.[31] Development of HTS current leads for industrial fabrication
2012. MT-22, International Conference on Magnet Technology , Marseille, France , September 11-16, 2011.DOI : 10.1109/Tasc.2011.2178013.
2011
[30] MEMS Lens Scanner
Berkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, September 13, 2011.2010
[29] Tunable Resonant Cavity Enhanced Detectors for Mid-Infrared Gas Spectroscopy
MIOMD-X, 10th International Conference on Mid-Infrared Optoelectronics: Materials and Devices, Shanghai, China, September 5-9, 2010.[28] Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenides
Opto-Electronics Review
2010
DOI : 10.2478/s11772-010-1028-5
[27] Lead salt resonant cavity enhanced detector with MEMS mirror
2010. 14th International conference on Narrow Gap Semiconductors and Systems . p. 1127-1131.DOI : 10.1016/j.phpro.2010.01.150.
2009
[26] IV-VI Mid-IR Tunable Lasers and Detectors with External Resonant Cavities
2009. Optics and Photonics, Infrared Spaceborne Remote Sensing and Instrumentation XVII , San Diego, CA, USA , August 2-6, 2009.[25] Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenides
European Materials Research Society (EMRS), Warsaw, Poland, September 14-18, 2009.[24] Lead Salt Resonant Cavity Enhanced Detector with MEMS Mirror
NGS-14, 14th International Conference on Narrow Gap Semiconductors, Sendai, Japan, July 13-17, 2009.[23] Narrow band tunable resonant cavity enhanced detectors for 3 - 10 μm wavelength
1th European Symposium on Semiconductor Detectors, Wildbad Kreuth, Germany, June 7-11, 2009.[22] Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors
MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 19, 2009.[21] Micromirrors for integrated tunable mid-infrared detectors and emitters
ETH, 2009.DOI : 10.3929/ethz-a-005994709.
[20] A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors
Microelectronic Engineering
2009
DOI : 10.1016/j.mee.2008.12.064
2008
[19] A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors
34th international conference on Micro and Nano Engineering (MNE), Athens, Greece, September 15-18, 2008.[18] Mid-Infrared Tunable Resonant Cavity Enhanced Detectors
nternational Conference on Mid- Infrared Optoelectronics: Materials and Devices (MIOMD) IX, Freiburg, Germany, September 7-11, 2008.[17] Durchstimmbare resonanzverstärkte Detektoren für das mittlere Infrarot
Deutschsprachiger Workshop für Molekularstrahlepitaxie (DMBE), Zürich, Switzerland, September 1-2, 2008.[16] Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors
2008. 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics , Freiburg, Germany , August, 11-14, 2008. p. 174-175.DOI : 10.1109/OMEMS.2008.4607885.
[15] Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors, MicroNanoFabrication
Annual Review Meeting, Lausanne, Switzerland, May 20, 2008.[14] Micro and Nanosystems Platform
Industry Day, Zürich, Switzerland, March 19, 2008.[13] Mid-Infrared Tunable Resonant Cavity Enhanced Detectors
Sensors (Basel, Switzerland)
2008
DOI : 10.3390/s8095466
[12] Epitaxial Lead Chalcogenides on Si for Mid-IR Detectors and Emitters Including Cavities
Journal of Electronic Materials
2008
DOI : 10.1007/s11664-008-0429-0
[11] Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors
Journal of Optics A: Pure and Applied Optics
2008
DOI : 10.1088/1464-4258/10/4/044015
[10] Vertically moving micromirror for detectors in the mid infrared
Sensors and Actuators A: Physical
2008
DOI : 10.1016/j.sna.2007.06.013
[9] Wavelength Tunable Resonant Cavity Enhanced Photodetectors Based on Lead-Salts Grown by MBE
2008.DOI : 10.1007/978-1-4020-8425-6_34.
2007
[8] Electrostatically actuated micromirror for resonant cavity enhanced detectors
2007. 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) , Hyogo, Japan , January 21-25, 2007. p. 711-714.DOI : 10.1109/MEMSYS.2007.4432997.
[7] Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors
2007. 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics , Hualien, Taiwan , July 16 - august 12, 2007. p. 165-166.DOI : 10.1109/OMEMS.2007.4373892.
[6] Epitaxial lead-chalcogenides on Si for mid-IR detectors and emitters including cavities
U.S. Workshop on the physics and chemistry of II-VI materials, Baltimore, Maryland, USA, 30 October – 1 November 2007.[5] Epitaxial lead-chalcogenides on Si for mid-IR detectors and emitters including cavities
AITA, Advanced Infrared Technology and Applications International Workshop, Leon, Mexico, October 8-12, 2007.[4] MEMS Mirrors for the use in Resonant Cavity Enhanced Detectors
33rd International Conference on Micro- and Nano-Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007.[3] Wavelength tunable Resonant Cavity Enhanced Photodetectors based on lead-salts grown by MBE
Thirteenth International Conference on Narrow Gap Semiconductors, Guildford UK, July 8-12 2007.[2] Wavelength tunable resonant cavity enhanced detectors
8th International Conference on Mid- Infrared Optoelectronics: Materials and Devices, Bad Ischl, Austria, May 14-17, 2007.[1] Electrostatically Actuated Micromirror for Resonant Cavity Enhanced Detectors
MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 8, 2007.Other publications
Doctoral Thesis
Niels Quack, Micromirrors for integrated tunable mid-infrared detectors and emitters, Doctoral Thesis ETH Zürich, (2009), Diss. ETH No. 18702, ETH Zürich, Switzerland. Full Text Access
Teaching & PhD
Teaching
Microengineering