Fields of expertise
Photonic Micro- & Nanosystems
Micro- and Nanofabrication
Tunable Optical Microsystems
Awards and Grants
2015 - IEEE Senior Member
2015 - SNSF Professorship
2015 - Best Poster Award, Photonics for Disaggregated Data Centers, OIDA, Los Angeles, USA (co-authored)
2015 - OFC Top Scored Paper, Los Angeles, USA (co-authored, highlighted in OFC press release and awarded as Tingye Li Innovation Prize)
2014 - OFC Top Scored Paper, San Francisco, USA (co-authored)
2013 - NMC Travel Award, Stanford, USA
2013 - IEEE MEMS Outstanding Paper Award, Taipei, Taiwan (co-authored)
2012 - CIS User Grant, 2012, Stanford, USA
2005 - Prix de la Commune d'Ecublens, EPFL, Lausanne, Switzerland
2004 - SSBE, Max Anliker Memorial Poster Award, Zürich, Switzerland
2000 - VEGR Best Matura Project Award, Zürich, Switzerland
Senior MEMS Engineer
sercalo Microtechnology ltd.
Integrated Photonics Laboratory, Berkeley Sensor and Actuator Center
University of California, Berkeley
Doctor of Sciences
Master of Science
 Integrated photonic devices in single crystal diamond
Journal Of Physics-Photonics
DOI : 10.1088/2515-7647/aba171
 Diffractive optical elements in single crystal diamond
DOI : 10.1364/OL.393679
 Compact broadband suspended silicon photonic directional coupler
DOI : 10.1364/OL.394470
 MEMS for Photonic Integrated Circuits
Ieee Journal Of Selected Topics In Quantum Electronics
DOI : 10.1109/JSTQE.2019.2943384
 MEMS-Enabled Silicon Photonic Integrated Devices and Circuits
Ieee Journal Of Quantum Electronics
DOI : 10.1109/JQE.2019.2946841
 MORPHIC: Programmable photonic circuits enabled by silicon photonic MEMS2020-01-01. Conference on Silicon Photonics XV , San Francisco, CA , Feb 03-06, 2020. p. 1128503.
DOI : 10.1117/12.2540934.
 Non-contact polishing of a crystalline layer or substrate by ion beam etching
 FCC Physics Opportunities: Future Circular Collider Conceptual Design Report Volume 1
European Physical Journal C
DOI : 10.1140/epjc/s10052-019-6904-3
 Freestanding Silicon Photonic Ring and Disk Resonators2019-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Daejeon, SOUTH KOREA , Jul 28-Aug 01, 2019. p. 212-213.
 Silicon Photonic Broadband Suspended Directional Coupler2019-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Daejeon, SOUTH KOREA , Jul 28-Aug 01, 2019. p. 214-215.
 Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
 Single crystalline diamond diffractive optical elements and method of fabricating the same
 Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits2019-01-01. Optical Fiber Communications Conference and Exhibition (OFC) , San Diego, CA , Mar 03-07, 2019.
 Single crystal diamond micro-disk resonators by focused ion beam milling
DOI : 10.1063/1.5051316
 Digital Silicon Photonic MEMS Phase-Shifter2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 217-218.
 Characterization of crystallographically etched single crystal diamond diffraction gratings2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 173-174.
 Size control of self-organized gold nanoparticles on nanopatterned single crystal diamond2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 94-95.
 Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators2018-01-01. International Conference on Optical MEMS and Nanophotonics (OMN) , Lausanne, SWITZERLAND , Jul 29-Aug 02, 2018. p. 20-21.
 Silicon photonic MEMS variable optical attenuator2018-01-01. Conference on MOEMS and Miniaturized Systems XVII , San Francisco, CA , Jan 30-31, 2018. p. 105450H.
DOI : 10.1117/12.2317507.
 Trapezoidal Diffraction Grating Beam Splitters in Single Crystal Diamond
COMPONENTS AND PACKAGING FOR LASER SYSTEMS IV
DOI : 10.1117/12.2290557
 Large-Scale Polarization-Insensitive Silicon Photonic MEMS Switches
JOURNAL OF LIGHTWAVE TECHNOLOGY
DOI : 10.1109/JLT.2018.2791502
 Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling
ADVANCES IN PHOTONICS OF QUANTUM COMPUTING, MEMORY, AND COMMUNICATION XI
DOI : 10.1117/12.2290177
 Electronic-Photonic Integrated Circuit for 3D Microimaging
Ieee Journal Of Solid-State Circuits
DOI : 10.1109/Jssc.2016.2621755
 Large-Scale Silicon Photonic Switches2016. 21st OptoElectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS) , Niigata, JAPAN , JUL 03-07, 2016.
 Die Level Release of Silicon Photonic MEMS2016. International Conference on Optical MEMS and Nanophotonics (OMN) .
 Scalable Row/Column Addressing of Silicon Photonic MEMS Switches2016. International Conference on Optical MEMS and Nanophotonics (OMN) , Jerusalem, ISRAEL , AUG, 2015. p. 561-564.
DOI : 10.1109/Lpt.2016.2515106.
 Highly Scalable Digital Silicon Photonic MEMS Switches2016. Optical Fiber Communications Conference and Exhibition (OFC) , Los Angeles, CA , MAR 22-26, 2015. p. 365-371.
DOI : 10.1109/Jlt.2015.2496321.
 Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers
DOI : 10.1364/OPTICA.3.000064
 Chip-Scale Electro-Optical 3D FMCW Lidar with 8μm Ranging Precision2016. 63rd IEEE International Solid-State Circuits Conference (ISSCC) , San Francisco, CA , JAN 31-FEB 04, 2016.
 Engineering Nano-Opto-Electromechanical Systems2015. Frontiers in Nanophotonics , Ascona, Switzerland , 30 August 2015 - 4 September 2015.
 Large-Scale, MEMS-Actuated Silicon Photonic Switches2015. Photonics in Switching 2015 , Florence, Italy , 22-25 September 2015.
 MEMS-Enabled Scalable Silicon Photonic Switches2015. Frontiers in Optics 2015 , San Jose, California United States , 18–22 October 2015.
DOI : 10.1364/FIO.2015.FW3B.2.
 50x50 Digital Silicon Photonic Switches with MEMS-Actuated Adiabatic Couplers2015. Optical Fiber Communication Conference , Los Angeles, California , 2015. p. M2B.4.
DOI : 10.1364/OFC.2015.M2B.4.
 Large-Port-Count MEMS Silicon Photonics Switches2015. Optical Fiber Communication Conference , Los Angeles, California , 2015. p. M2B.3.
DOI : 10.1364/OFC.2015.M2B.3.
 Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous IntegrationGOMACTech, St. Louis, MO, USA, March 23-26, 2015.
 Large-scale silicon photonic switches with movable directional couplers
DOI : 10.1364/OPTICA.2.000370
 Row/Column Addressing of Scalable Silicon Photonic MEMS SwitchesInternational Conference on Optical MEMS and Nanophotonics (IEEE OMN), Jerusalem, Israel, August 2-6, 2015.
 64x64 Low-Loss and Broadband Digital Silicon Photonic MEMS SwitchesConference on Optical Communications (ECOC 2015), Valencia, Spain, 27 September - 1 October 2015.
 Method for Increasing the Operating Distance of MEMS LIDAR beyond Brownian Noise Limitation2014. CLEO: Applications and Technology , San Jose, California , 2014. p. AW3H.2.
DOI : 10.1364/CLEO_AT.2014.AW3H.2.
 Monolithic Large-Scale Optical Switches Using Silicon Photonic MEMS2014. 2014 OptoElectronics and Communication Conference and Australian Conference on Optical Fibre Technology (OECC/ACOFT 2014) , Melbourne, Australia , July 6-10, 2014. p. 625.
 Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time2014. Optical Fiber Communication Conference , San Francisco, California , 2014. p. M2K.2.
DOI : 10.1364/OFC.2014.M2K.2.
 Development of a FMCW LADAR Source Chip Using MEMS-Electronic-Photonic Heterogeneous IntegrationGOMACTech, Charleston, SC, USA, March 31 - April 3, 2014.
 Integrated VCSEL-Microlens Scanner With Large Scan Range
Journal of Microelectromechanical Systems
DOI : 10.1109/JMEMS.2014.2315810
 Results of the Test of Industrially Manufactured HTS Current Leads With Novel Design Features
Ieee Transactions On Applied Superconductivity
DOI : 10.1109/Tasc.2013.2281121
 Linear Frequency Chirp Generation Employing Opto-electronic Feedback Loop and Integrated Silicon Photonics2013. CLEO , San Jose, CA, USA , June 9-14, 2013..
 Phase Noise Spectrum and Carrier Power Modeling of High Performance Optomechanical Oscillators2013. CLEO: QELS_Fundamental Science , CLEO: QELS_Fundamental Science (2013) , 2013. p. QTh4E.2.
DOI : 10.1364/CLEO_QELS.2013.QTh4E.2.
 Enhancement of mechanical Q for low phase noise optomechanical oscillators2013. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) , Taipei, Taiwan , January 20-24, 2013. p. 118-121.
DOI : 10.1109/MEMSYS.2013.6474191.
 Through Silicon Vias and thermocompression bonding using inkjet-printed gold nanoparticles for heterogeneous MEMS integration2013. 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) , Barcelona, Spain , June 16-20, 2013. p. 834-837.
DOI : 10.1109/Transducers.2013.6626896.
 Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous IntegrationGOMACTech, Las Vegas, NV, USA, March 11-14 ,2013.
 3D Imaging: Sub-mm Resolution Ranging using a Chip-scale MEMS FMCW LIDAR SourceBerkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, September 17-18, 2013.
 Droplet-on-Demand Inkjet-filled TSVs as a Pathway to Cost-efficient Chip StackingIMPAS 2013, 46th International Symposium on Microelectronics, Orlando, FL, USA, 30 September – 3 October, 2013.
 Self-aligned VCSEL-microlens scanner with large scan range2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) , Paris, France , January 29 - February 2, 2012. p. 656-659.
DOI : 10.1109/MEMSYS.2012.6170272.
 A Platform for On-Chip Silica Optomechanical Oscillators with Integrated Waveguides2012. CLEO: Science and Innovations , San Jose, California , 2012. p. CW1M.5.
DOI : 10.1364/CLEO_SI.2012.CW1M.5.
 Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references2012. 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics , Banff, AB, Canada , August 6-9, 2012. p. 51-52.
DOI : 10.1109/OMEMS.2012.6318797.
 Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous IntegrationInternational Nano-Optoelectronics Workshop, UC Berkeley and Stanford University, CA, USA, August 7-15, 2012.
 MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)Berkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, March 7-9, 2012.
 Development of HTS current leads for industrial fabrication2012. MT-22, International Conference on Magnet Technology , Marseille, France , September 11-16, 2011.
DOI : 10.1109/Tasc.2011.2178013.
 MEMS Lens ScannerBerkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, September 13, 2011.
 Tunable Resonant Cavity Enhanced Detectors for Mid-Infrared Gas SpectroscopyMIOMD-X, 10th International Conference on Mid-Infrared Optoelectronics: Materials and Devices, Shanghai, China, September 5-9, 2010.
 Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenides
DOI : 10.2478/s11772-010-1028-5
 Lead salt resonant cavity enhanced detector with MEMS mirror2010. 14th International conference on Narrow Gap Semiconductors and Systems . p. 1127-1131.
DOI : 10.1016/j.phpro.2010.01.150.
 IV-VI Mid-IR Tunable Lasers and Detectors with External Resonant Cavities2009. Optics and Photonics, Infrared Spaceborne Remote Sensing and Instrumentation XVII , San Diego, CA, USA , August 2-6, 2009.
 Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenidesEuropean Materials Research Society (EMRS), Warsaw, Poland, September 14-18, 2009.
 Lead Salt Resonant Cavity Enhanced Detector with MEMS MirrorNGS-14, 14th International Conference on Narrow Gap Semiconductors, Sendai, Japan, July 13-17, 2009.
 Narrow band tunable resonant cavity enhanced detectors for 3 - 10 μm wavelength1th European Symposium on Semiconductor Detectors, Wildbad Kreuth, Germany, June 7-11, 2009.
 Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced DetectorsMicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 19, 2009.
 Micromirrors for integrated tunable mid-infrared detectors and emittersETH, 2009.
DOI : 10.3929/ethz-a-005994709.
 A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors
DOI : 10.1016/j.mee.2008.12.064
 A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors34th international conference on Micro and Nano Engineering (MNE), Athens, Greece, September 15-18, 2008.
 Mid-Infrared Tunable Resonant Cavity Enhanced Detectorsnternational Conference on Mid- Infrared Optoelectronics: Materials and Devices (MIOMD) IX, Freiburg, Germany, September 7-11, 2008.
 Durchstimmbare resonanzverstärkte Detektoren für das mittlere InfrarotDeutschsprachiger Workshop für Molekularstrahlepitaxie (DMBE), Zürich, Switzerland, September 1-2, 2008.
 Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors2008. 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics , Freiburg, Germany , August, 11-14, 2008. p. 174-175.
DOI : 10.1109/OMEMS.2008.4607885.
 Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors, MicroNanoFabricationAnnual Review Meeting, Lausanne, Switzerland, May 20, 2008.
 Micro and Nanosystems PlatformIndustry Day, Zürich, Switzerland, March 19, 2008.
 Mid-Infrared Tunable Resonant Cavity Enhanced Detectors
Sensors (Basel, Switzerland)
DOI : 10.3390/s8095466
 Epitaxial Lead Chalcogenides on Si for Mid-IR Detectors and Emitters Including Cavities
Journal of Electronic Materials
DOI : 10.1007/s11664-008-0429-0
 Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors
Journal of Optics A: Pure and Applied Optics
DOI : 10.1088/1464-4258/10/4/044015
 Vertically moving micromirror for detectors in the mid infrared
Sensors and Actuators A: Physical
DOI : 10.1016/j.sna.2007.06.013
 Wavelength Tunable Resonant Cavity Enhanced Photodetectors Based on Lead-Salts Grown by MBE2008.
DOI : 10.1007/978-1-4020-8425-6_34.
 Electrostatically actuated micromirror for resonant cavity enhanced detectors2007. 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) , Hyogo, Japan , January 21-25, 2007. p. 711-714.
DOI : 10.1109/MEMSYS.2007.4432997.
 Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors2007. 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics , Hualien, Taiwan , July 16 - august 12, 2007. p. 165-166.
DOI : 10.1109/OMEMS.2007.4373892.
 Epitaxial lead-chalcogenides on Si for mid-IR detectors and emitters including cavitiesU.S. Workshop on the physics and chemistry of II-VI materials, Baltimore, Maryland, USA, 30 October – 1 November 2007.
 Epitaxial lead-chalcogenides on Si for mid-IR detectors and emitters including cavitiesAITA, Advanced Infrared Technology and Applications International Workshop, Leon, Mexico, October 8-12, 2007.
 MEMS Mirrors for the use in Resonant Cavity Enhanced Detectors33rd International Conference on Micro- and Nano-Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007.
 Wavelength tunable Resonant Cavity Enhanced Photodetectors based on lead-salts grown by MBEThirteenth International Conference on Narrow Gap Semiconductors, Guildford UK, July 8-12 2007.
 Wavelength tunable resonant cavity enhanced detectors8th International Conference on Mid- Infrared Optoelectronics: Materials and Devices, Bad Ischl, Austria, May 14-17, 2007.
 Electrostatically Actuated Micromirror for Resonant Cavity Enhanced DetectorsMicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 8, 2007.
Teaching & PhD