[100] Diamond diffractive optics-recent progress and perspectives

M. Kiss; S. Mi; G. Huszka; N. Quack

DOI : 10.1515/aot-2020-0052

[99] Method for flattening substrates or layers using 3d printing and etching

M. Kiss; T. Graziosi; N. Quack; N. Restori

[98] Shining Diamond: from Micro- and Nano-Engineering to Quantum Photonics

S. Mi / N. Quack (Dir.)

[97] Integrated photonic devices in single crystal diamond

S. Mi; M. Kiss; T. Graziosi; N. Quack

DOI : 10.1088/2515-7647/aba171

[96] Diffractive optical elements in single crystal diamond

T. Wildi; M. Kiss; N. Quack

DOI : 10.1364/OL.393679

[95] Compact broadband suspended silicon photonic directional coupler

H. Sattari; A. Y. Takabayashi; Y. Zhang; P. Verheyen; W. Bogaerts  et al.

DOI : 10.1364/OL.394470

[94] Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

A. Toros; M. K. Kiss; T. Graziosi; S. Mi; R. Berrazouane  et al.

DOI : 10.1016/j.diamond.2020.107839

[93] Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers

G. Huszka; N. Malpiece; M. Naamoun; A. Mereuta; A. Caliman  et al.

DOI : 10.1016/j.diamond.2020.107744

[92] MEMS for Photonic Integrated Circuits

C. Errando-Herranz; A. Y. Takabayashi; P. Edinger; H. Sattari; K. B. Gylfason  et al.

DOI : 10.1109/JSTQE.2019.2943384

[91] MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

N. Quack; H. Sattari; A. Y. Takabayashi; Y. Zhang; P. Verheyen  et al.

DOI : 10.1109/JQE.2019.2946841

[90] Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

P. Edinger; C. Errando-Herranz; A. Y. Takabayashi; H. Sattari; N. Quack  et al.

[89] Optical element

G. Huszka; N. Quack; M. Kiss

[88] Distributed optical fiber sensing based on frequency-scanned phase-sensitive optical time-domain reflectometry

L. Zhang / L. Thévenaz (Dir.)

[87] MORPHIC: Programmable photonic circuits enabled by silicon photonic MEMS

W. Bogaerts; H. Sattari; P. Edinger; A. Y. Takabayashi; I. Zand  et al.

[86] Non-contact polishing of a crystalline layer or substrate by ion beam etching

N. Quack; S. Mi; T. Graziosi; A. Toros

[85] High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

M. Kiss; T. Graziosi; A. Toros; T. Scharf; C. Santschi  et al.

DOI : 10.1364/OE.27.030371

[84] FCC-hh: The Hadron Collider: Future Circular Collider Conceptual Design Report Volume 3

A. Abada; M. Abbrescia; S. S. AbdusSalam; I. Abdyukhanov; J. Abelleira Fernandez  et al.

DOI : 10.1140/epjst/e2019-900087-0

[83] HE-LHC: The High-Energy Large Hadron Collider Future Circular Collider Conceptual Design Report Volume 4

A. Abada; M. Abbrescia; S. S. AbdusSalam; I. Abdyukhanov; J. Abelleira Fernandez  et al.

DOI : 10.1140/epjst/e2019-900088-6

[82] Silicon Photonic MEMS Phase-Shifter

H. Sattari; T. Graziosi; M. Kiss; T. J. Seok; S. Han  et al.

DOI : 10.1364/OE.27.018959

[81] FCC Physics Opportunities: Future Circular Collider Conceptual Design Report Volume 1

A. Abada; M. Abbrescia; S. S. AbdusSalam; I. Abdyukhanov; J. A. Fernandez  et al.

DOI : 10.1140/epjc/s10052-019-6904-3

[80] FCC-ee: The Lepton Collider: Future Circular Collider Conceptual Design Report Volume 2

A. Abada; M. Abbrescia; S. S. AbdusSalam; I. Abdyukhanov; J. A. Fernandez  et al.

DOI : 10.1140/epjst/e2019-900045-4

[79] Non-contact polishing of single crystal diamond by ion beam etching

S. Mi; A. Toros; T. Graziosi; N. Quack

DOI : 10.1016/j.diamond.2019.01.007

[78] Freestanding Silicon Photonic Ring and Disk Resonators

Y. Zhang; A. Y. Takabayashi; H. Sattari; N. Quack

[77] Silicon Photonic Broadband Suspended Directional Coupler

H. Sattari; A. Y. Takabayashi; Y. Zhang; N. Quack

[76] Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

K. M. Howell / L. G. Villanueva Torrijo (Dir.)

[75] Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

T. Graziosi / N. Quack (Dir.)

[74] Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

N. Quack; A. Toros; M. Kiss; T. Graziosi; P. Gallo

[73] Single crystalline diamond diffractive optical elements and method of fabricating the same

N. Quack; M. Kiss; T. Graziosi

[72] Advanced Diamond Microfabrication for Microoptics and Photonics

M. K. Kiss / N. Quack (Dir.)

[71] Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

N. Quack; H. Sattari; A. Y. Takabayashi; Y. Zhang; P. Edinger  et al.

[70] Single crystal diamond micro-disk resonators by focused ion beam milling

T. Graziosi; S. Mi; M. Kiss; N. Quack

DOI : 10.1063/1.5051316

[69] Digital Silicon Photonic MEMS Phase-Shifter

J. Henriksson; T. J. Seok; J. Luo; K. Kwon; N. Quack  et al.

[68] Characterization of crystallographically etched single crystal diamond diffraction gratings

M. Kiss; T. Gipziosi; A. Toros; T. Scharf; O. J. F. Martin  et al.

[67] Size control of self-organized gold nanoparticles on nanopatterned single crystal diamond

S. Mi; C. Santschi; M. Kiss; O. J. F. Martin; N. Quack

[66] Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators

T. Graziosi; S. Mi; M. Kiss; N. Quack

[65] Silicon photonic MEMS variable optical attenuator

T. Graziosi; H. Sattari; T. J. Seok; S. Han; M. C. Wu  et al.

[64] Trapezoidal Diffraction Grating Beam Splitters in Single Crystal Diamond

M. Kiss; T. Graziosi; N. Quack

DOI : 10.1117/12.2290557

[63] Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

A. Toros; M. Kiss; T. Graziosi; H. Sattari; P. Gallo  et al.

DOI : 10.1038/s41378-018-0014-5

[62] Large-Scale Polarization-Insensitive Silicon Photonic MEMS Switches

S. Han; T. Seok; K. Yu; N. Quack; R. Muller  et al.

DOI : 10.1109/JLT.2018.2791502

[61] Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

T. Graziosi; S. Mi; M. Kiss; N. Quack

DOI : 10.1117/12.2290177

[60] Geometric Integrators for Nonadiabatic Molecular Quantum Dynamics Induced by the Interaction with the Electromagnetic Field

A. K. F. Patoz / J. Vanicek (Dir.)

[59] Electronic-Photonic Integrated Circuit for 3D Microimaging

B. Behroozpour; P. A. M. Sandborn; N. Quack; T.-J. Seok; Y. Matsui  et al.

DOI : 10.1109/Jssc.2016.2621755

[58] Large-Scale Silicon Photonic Switches

M. C. Wu; T. J. Seok; S. Han; N. Quack

[57] Die Level Release of Silicon Photonic MEMS

J. Jacobs; T. Graziosi; M. Kiss; S. Han; T. J. Scok  et al.

[56] Scalable Row/Column Addressing of Silicon Photonic MEMS Switches

N. Quack; T. J. Seok; S. Han; R. S. Muller; M. C. Wu

[55] Highly Scalable Digital Silicon Photonic MEMS Switches

T. J. Seok; N. Quack; S. Han; R. S. Muller; M. C. Wu

[54] Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers

T. J. Seok; N. Quack; S. Han; R. S. Muller; M. C. Wu

DOI : 10.1364/OPTICA.3.000064

[53] Chip-Scale Electro-Optical 3D FMCW Lidar with 8μm Ranging Precision

B. Behroozpour; P. A. M. Sandborn; N. Quack; T. J. Seok; Y. Matsui  et al.

[52] Engineering Nano-Opto-Electromechanical Systems

N. Quack; M. C. Wu

[51] Large-Scale, MEMS-Actuated Silicon Photonic Switches

M. C. Wu; T. J. Seok; S. Han; N. Quack

[50] MEMS-Enabled Scalable Silicon Photonic Switches

M. C. Wu; T. J. Seok; S. Han; N. Quack

[49] 50x50 Digital Silicon Photonic Switches with MEMS-Actuated Adiabatic Couplers

T. J. Seok; N. Quack; S. Han; M. C. Wu

[48] Large-Port-Count MEMS Silicon Photonics Switches

M. C. Wu; S. Han; T. J. Seok; N. Quack

[47] Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration

P. A. Sandborn; B. Behroozpour; J. Ferrara; A. Gerke; S. Han  et al.

[46] Large-scale silicon photonic switches with movable directional couplers

S. Han; T. J. Seok; N. Quack; B.-W. Yoo; M. C. Wu

DOI : 10.1364/OPTICA.2.000370

[45] Row/Column Addressing of Scalable Silicon Photonic MEMS Switches

N. Quack; T. J. Seok; S. Han; W. Zhang; R. S. Muller  et al.

[44] 64x64 Low-Loss and Broadband Digital Silicon Photonic MEMS Switches

T. J. Seok; N. Quack; S. Han; W. Zhang; R. S. Muller  et al.

[43] Method for Increasing the Operating Distance of MEMS LIDAR beyond Brownian Noise Limitation

B. Behroozpour; N. Quack; P. Sandborn; S. Gerke; W. Yang  et al.

[42] Monolithic Large-Scale Optical Switches Using Silicon Photonic MEMS

M. C. Wu; S. Han; T. J. Seok; N. Quack

[41] Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time

S. Han; T. J. Seok; N. Quack; B.-W. Yoo; M. C. Wu

[40] Development of a FMCW LADAR Source Chip Using MEMS-Electronic-Photonic Heterogeneous Integration

N. Quack; B. Behroozpour; J. Ferrara; A. Gerke; S. Han  et al.

[39] Integrated VCSEL-Microlens Scanner With Large Scan Range

J. B. Chou; N. Quack; M. C. Wu

DOI : 10.1109/JMEMS.2014.2315810

[38] Results of the Test of Industrially Manufactured HTS Current Leads With Novel Design Features

R. Wesche; P. Bruzzone; S. March; C. Mueller; M. Vogel  et al.

DOI : 10.1109/Tasc.2013.2281121

[37] Linear Frequency Chirp Generation Employing Opto-electronic Feedback Loop and Integrated Silicon Photonics

P. Sandborn; N. Quack; N. Hoghooghi; J. B. Chou; J. Ferrara  et al.

[36] Phase Noise Spectrum and Carrier Power Modeling of High Performance Optomechanical Oscillators

A. Grine; K. E. Grutter; T. Rocheleau; N. Quack; T. Beyazoglu  et al.

[35] Enhancement of mechanical Q for low phase noise optomechanical oscillators

T. O. Rocheleau; A. J. Grine; K. E. Grutter; R. A. Schneider; N. Quack  et al.

[34] Through Silicon Vias and thermocompression bonding using inkjet-printed gold nanoparticles for heterogeneous MEMS integration

N. Quack; J. Sadie; V. Subramanian; M. C. Wu

[33] Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration

N. Quack; J. Ferrara; S. Gambini; S. Han; C. Keraly  et al.

[32] 3D Imaging: Sub-mm Resolution Ranging using a Chip-scale MEMS FMCW LIDAR Source

N. Quack; B. Behroozpour; J. Ferrara; A. Gerke; S. Han  et al.

[31] Droplet-on-Demand Inkjet-filled TSVs as a Pathway to Cost-efficient Chip Stacking

J. Sadie; N. Quack; M. C. Wu; V. Subramanian

[30] Self-aligned VCSEL-microlens scanner with large scan range

N. Quack; J. B. Chou; M. C. Wu

[29] A Platform for On-Chip Silica Optomechanical Oscillators with Integrated Waveguides

K. E. Grutter; A. Grine; M.-K. Kim; N. Quack; T. Rocheleau  et al.

[28] Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references

A. J. Grine; N. Quack; K. Grutter; T. O. Rocheleau; J. Huang  et al.

[27] Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration

N. Quack; S. Han; M. C. Wu

[26] MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)

N. Quack; J. B. Chou; J. Ferrara; S. Gambini; S. Han  et al.

[25] Development of HTS current leads for industrial fabrication

R. Wesche; M. Boersch; P. Bruzzone; F. Holdener; E. Iten  et al.

[24] MEMS Lens Scanner

N. Quack; J. B. Chou; M. C. Wu

[23] Tunable Resonant Cavity Enhanced Detectors for Mid-Infrared Gas Spectroscopy

F. Felder; M. Fill; M. Rahim; H. Zogg; N. Quack  et al.

[22] Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenides

H. Zogg; M. Rahim; A. Khiar; M. Fill; F. Felder  et al.

DOI : 10.2478/s11772-010-1028-5

[21] Lead salt resonant cavity enhanced detector with MEMS mirror

F. Felder; M. Fill; M. Rahim; H. Zogg; N. Quack  et al.

[20] IV-VI Mid-IR Tunable Lasers and Detectors with External Resonant Cavities

H. Zogg; M. Rahim; A. Khiar; M. Fill; F. Felder  et al.

[19] Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenides

H. Zogg; M. Rahim; A. Khiar; M. Fill; F. Felder  et al.

[18] Lead Salt Resonant Cavity Enhanced Detector with MEMS Mirror

F. Felder; M. Rahim; M. Fill; H. Zogg; N. Quack  et al.

[17] Narrow band tunable resonant cavity enhanced detectors for 3 - 10 μm wavelength

F. Felder; N. Quack; S. Blunier; M. Fill; M. Rahim  et al.

[16] Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder  et al.

[15] Micromirrors for integrated tunable mid-infrared detectors and emitters

N. Quack / J. Dual (Dir.)

[14] A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors

N. Quack; P. Rüst; S. Blunier; J. Dual; F. Felder  et al.

DOI : 10.1016/j.mee.2008.12.064

[13] A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors

N. Quack; P. Rust; S. Blunier; J. Dual; F. Felder  et al.

[12] Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

F. Felder; M. Rahim; M. Fill; M. Arnold; H. Zogg  et al.

[11] Durchstimmbare resonanzverstärkte Detektoren für das mittlere Infrarot

F. Felder; M. Rahim; M. Fill; M. Arnold; H. Zogg  et al.

[10] Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors

N. Quack; P. Rust; S. Blunier; J. Dual; F. Felder  et al.

[9] Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors, MicroNanoFabrication

N. Quack; P. Rust; S. Blunier; J. Dual; M. Arnold  et al.

[8] Micro and Nanosystems Platform

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder  et al.

[7] Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

N. Quack; S. Blunier; J. Dual; F. Felder; M. Arnold  et al.

DOI : 10.3390/s8095466

[6] Epitaxial Lead Chalcogenides on Si for Mid-IR Detectors and Emitters Including Cavities

H. Zogg; M. Arnold; F. Felder; M. Rahim; C. Ebneter  et al.

DOI : 10.1007/s11664-008-0429-0

[5] Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder  et al.

DOI : 10.1088/1464-4258/10/4/044015

[4] Vertically moving micromirror for detectors in the mid infrared

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder  et al.

DOI : 10.1016/j.sna.2007.06.013

[3] Wavelength Tunable Resonant Cavity Enhanced Photodetectors Based on Lead-Salts Grown by MBE

F. Felder; A. Arnold; C. Ebneter; M. Rahim; H. Zogg

[2] Electrostatically actuated micromirror for resonant cavity enhanced detectors

N. Quack; I. Zust; S. Blunier; J. Dual; M. Arnold  et al.

[1] Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder  et al.