Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

A. Toros; M. Kiss; T. Graziosi; H. Sattari; P. Gallo et al.

MICROSYSTEMS AND NANOENGINEERING. 2018.

DOI : 10.1038/s41378-018-0014-5.

Large-Scale Polarization-Insensitive Silicon Photonic MEMS Switches

S. Han; T. Seok; K. Yu; N. Quack; R. Muller et al.

JOURNAL OF LIGHTWAVE TECHNOLOGY. 2018.

DOI : 10.1109/JLT.2018.2791502.

Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

T. Graziosi; S. Mi; M. Kiss; N. Quack

ADVANCES IN PHOTONICS OF QUANTUM COMPUTING, MEMORY, AND COMMUNICATION XI. 2018.

DOI : 10.1117/12.2290177.

Electronic-Photonic Integrated Circuit for 3D Microimaging

B. Behroozpour; P. A. M. Sandborn; N. Quack; T.-J. Seok; Y. Matsui et al.

Ieee Journal Of Solid-State Circuits. 2017.

DOI : 10.1109/Jssc.2016.2621755.

Large-Scale Silicon Photonic Switches

M. C. Wu; T. J. Seok; S. Han; N. Quack

2016. 21st OptoElectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS) , Niigata, JAPAN , JUL 03-07, 2016.

Die Level Release of Silicon Photonic MEMS

J. Jacobs; T. Graziosi; M. Kiss; S. Han; T. J. Scok et al.

2016. International Conference on Optical MEMS and Nanophotonics (OMN) .

Scalable Row/Column Addressing of Silicon Photonic MEMS Switches

N. Quack; T. J. Seok; S. Han; R. S. Muller; M. C. Wu

2016. International Conference on Optical MEMS and Nanophotonics (OMN) , Jerusalem, ISRAEL , AUG, 2015. p. 561-564.

DOI : 10.1109/Lpt.2016.2515106.

Highly Scalable Digital Silicon Photonic MEMS Switches

T. J. Seok; N. Quack; S. Han; R. S. Muller; M. C. Wu

2016. Optical Fiber Communications Conference and Exhibition (OFC) , Los Angeles, CA , MAR 22-26, 2015. p. 365-371.

DOI : 10.1109/Jlt.2015.2496321.

Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers

T. J. Seok; N. Quack; S. Han; R. S. Muller; M. C. Wu

Optica. 2016.

DOI : 10.1364/OPTICA.3.000064.

Scalable Row/Column Addressing of Silicon Photonic MEMS Switches

N. Quack; T. J. Seok; S. Han; R. S. Muller; M. C. Wu

IEEE Photonics Technology Letters. 2016.

DOI : 10.1109/LPT.2016.2515106.

Chip-Scale Electro-Optical 3D FMCW Lidar with 8μm Ranging Precision

B. Behroozpour; P. A. M. Sandborn; N. Quack; T. J. Seok; Y. Matsui et al.

2016. 63rd IEEE International Solid-State Circuits Conference (ISSCC) , San Francisco, CA , JAN 31-FEB 04, 2016.

Engineering Nano-Opto-Electromechanical Systems

N. Quack; M. C. Wu

2015. Frontiers in Nanophotonics , Ascona, Switzerland , 30 August 2015 - 4 September 2015.

Large-Scale, MEMS-Actuated Silicon Photonic Switches

M. C. Wu; T. J. Seok; S. Han; N. Quack

2015. Photonics in Switching 2015 , Florence, Italy , 22-25 September 2015.

MEMS-Enabled Scalable Silicon Photonic Switches

M. C. Wu; T. J. Seok; S. Han; N. Quack

2015. Frontiers in Optics 2015 , San Jose, California United States , 18–22 October 2015.

DOI : 10.1364/FIO.2015.FW3B.2.

Highly Scalable Digital Silicon Photonic MEMS Switches

T. J. Seok; N. Quack; S. Han; R. S. Muller; M. C. Wu

Journal of Lightwave Technology. 2015.

DOI : 10.1109/JLT.2015.2496321.

50x50 Digital Silicon Photonic Switches with MEMS-Actuated Adiabatic Couplers

T. J. Seok; N. Quack; S. Han; M. C. Wu

2015. Optical Fiber Communication Conference , Los Angeles, California , 2015. p. M2B.4.

DOI : 10.1364/OFC.2015.M2B.4.

Large-Port-Count MEMS Silicon Photonics Switches

M. C. Wu; S. Han; T. J. Seok; N. Quack

2015. Optical Fiber Communication Conference , Los Angeles, California , 2015. p. M2B.3.

DOI : 10.1364/OFC.2015.M2B.3.

Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration

P. A. Sandborn; B. Behroozpour; J. Ferrara; A. Gerke; S. Han et al.

GOMACTech, St. Louis, MO, USA, March 23-26, 2015.

Large-scale silicon photonic switches with movable directional couplers

S. Han; T. J. Seok; N. Quack; B.-W. Yoo; M. C. Wu

Optica. 2015.

DOI : 10.1364/OPTICA.2.000370.

Row/Column Addressing of Scalable Silicon Photonic MEMS Switches

N. Quack; T. J. Seok; S. Han; W. Zhang; R. S. Muller et al.

International Conference on Optical MEMS and Nanophotonics (IEEE OMN), Jerusalem, Israel, August 2-6, 2015.

64x64 Low-Loss and Broadband Digital Silicon Photonic MEMS Switches

T. J. Seok; N. Quack; S. Han; W. Zhang; R. S. Muller et al.

Conference on Optical Communications (ECOC 2015), Valencia, Spain, 27 September - 1 October 2015.

Method for Increasing the Operating Distance of MEMS LIDAR beyond Brownian Noise Limitation

B. Behroozpour; N. Quack; P. Sandborn; S. Gerke; W. Yang et al.

2014. CLEO: Applications and Technology , San Jose, California , 2014. p. AW3H.2.

DOI : 10.1364/CLEO_AT.2014.AW3H.2.

Monolithic Large-Scale Optical Switches Using Silicon Photonic MEMS

M. C. Wu; S. Han; T. J. Seok; N. Quack

2014. 2014 OptoElectronics and Communication Conference and Australian Conference on Optical Fibre Technology (OECC/ACOFT 2014) , Melbourne, Australia , July 6-10, 2014. p. 625.

Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time

S. Han; T. J. Seok; N. Quack; B.-W. Yoo; M. C. Wu

2014. Optical Fiber Communication Conference , San Francisco, California , 2014. p. M2K.2.

DOI : 10.1364/OFC.2014.M2K.2.

Development of a FMCW LADAR Source Chip Using MEMS-Electronic-Photonic Heterogeneous Integration

N. Quack; B. Behroozpour; J. Ferrara; A. Gerke; S. Han et al.

GOMACTech, Charleston, SC, USA, March 31 - April 3, 2014.

Integrated VCSEL-Microlens Scanner With Large Scan Range

J. B. Chou; N. Quack; M. C. Wu

Journal of Microelectromechanical Systems. 2014.

DOI : 10.1109/JMEMS.2014.2315810.

Results of the Test of Industrially Manufactured HTS Current Leads With Novel Design Features

R. Wesche; P. Bruzzone; S. March; C. Mueller; M. Vogel et al.

Ieee Transactions On Applied Superconductivity. 2014.

DOI : 10.1109/Tasc.2013.2281121.

Linear Frequency Chirp Generation Employing Opto-electronic Feedback Loop and Integrated Silicon Photonics

P. Sandborn; N. Quack; N. Hoghooghi; J. B. Chou; J. Ferrara et al.

2013. CLEO , San Jose, CA, USA , June 9-14, 2013..

Phase Noise Spectrum and Carrier Power Modeling of High Performance Optomechanical Oscillators

A. Grine; K. E. Grutter; T. Rocheleau; N. Quack; T. Beyazoglu et al.

2013. CLEO: QELS_Fundamental Science , CLEO: QELS_Fundamental Science (2013) , 2013. p. QTh4E.2.

DOI : 10.1364/CLEO_QELS.2013.QTh4E.2.

Enhancement of mechanical Q for low phase noise optomechanical oscillators

T. O. Rocheleau; A. J. Grine; K. E. Grutter; R. A. Schneider; N. Quack et al.

2013. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) , Taipei, Taiwan , January 20-24, 2013. p. 118-121.

DOI : 10.1109/MEMSYS.2013.6474191.

Through Silicon Vias and thermocompression bonding using inkjet-printed gold nanoparticles for heterogeneous MEMS integration

N. Quack; J. Sadie; V. Subramanian; M. C. Wu

2013. 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) , Barcelona, Spain , June 16-20, 2013. p. 834-837.

DOI : 10.1109/Transducers.2013.6626896.

Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration

N. Quack; J. Ferrara; S. Gambini; S. Han; C. Keraly et al.

GOMACTech, Las Vegas, NV, USA, March 11-14 ,2013.

3D Imaging: Sub-mm Resolution Ranging using a Chip-scale MEMS FMCW LIDAR Source

N. Quack; B. Behroozpour; J. Ferrara; A. Gerke; S. Han et al.

Berkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, September 17-18, 2013.

Droplet-on-Demand Inkjet-filled TSVs as a Pathway to Cost-efficient Chip Stacking

J. Sadie; N. Quack; M. C. Wu; V. Subramanian

IMPAS 2013, 46th International Symposium on Microelectronics, Orlando, FL, USA, 30 September – 3 October, 2013.

Self-aligned VCSEL-microlens scanner with large scan range

N. Quack; J. B. Chou; M. C. Wu

2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) , Paris, France , January 29 - February 2, 2012. p. 656-659.

DOI : 10.1109/MEMSYS.2012.6170272.

A Platform for On-Chip Silica Optomechanical Oscillators with Integrated Waveguides

K. E. Grutter; A. Grine; M.-K. Kim; N. Quack; T. Rocheleau et al.

2012. CLEO: Science and Innovations , San Jose, California , 2012. p. CW1M.5.

DOI : 10.1364/CLEO_SI.2012.CW1M.5.

Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references

A. J. Grine; N. Quack; K. Grutter; T. O. Rocheleau; J. Huang et al.

2012. 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics , Banff, AB, Canada , August 6-9, 2012. p. 51-52.

DOI : 10.1109/OMEMS.2012.6318797.

Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration

N. Quack; S. Han; M. C. Wu

International Nano-Optoelectronics Workshop, UC Berkeley and Stanford University, CA, USA, August 7-15, 2012.

MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)

N. Quack; J. B. Chou; J. Ferrara; S. Gambini; S. Han et al.

Berkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, March 7-9, 2012.

Development of HTS current leads for industrial fabrication

R. Wesche; M. Boersch; P. Bruzzone; F. Holdener; E. Iten et al.

2012. MT-22, International Conference on Magnet Technology , Marseille, France , September 11-16, 2011.

DOI : 10.1109/Tasc.2011.2178013.

MEMS Lens Scanner

N. Quack; J. B. Chou; M. C. Wu

Berkeley Sensor and Actuator Center (BSAC), Research Review, Berkeley, CA, USA, September 13, 2011.

Tunable Resonant Cavity Enhanced Detectors for Mid-Infrared Gas Spectroscopy

F. Felder; M. Fill; M. Rahim; H. Zogg; N. Quack et al.

MIOMD-X, 10th International Conference on Mid-Infrared Optoelectronics: Materials and Devices, Shanghai, China, September 5-9, 2010.

Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenides

H. Zogg; M. Rahim; A. Khiar; M. Fill; F. Felder et al.

Opto-Electronics Review. 2010.

DOI : 10.2478/s11772-010-1028-5.

Lead salt resonant cavity enhanced detector with MEMS mirror

F. Felder; M. Fill; M. Rahim; H. Zogg; N. Quack et al.

Physics Procedia. 2010.

DOI : 10.1016/j.phpro.2010.01.150.

IV-VI Mid-IR Tunable Lasers and Detectors with External Resonant Cavities

H. Zogg; M. Rahim; A. Khiar; M. Fill; F. Felder et al.

2009. Optics and Photonics, Infrared Spaceborne Remote Sensing and Instrumentation XVII , San Diego, CA, USA , August 2-6, 2009.

Mid infrared resonant cavity detectors and lasers with epitaxial lead-chalcogenides

H. Zogg; M. Rahim; A. Khiar; M. Fill; F. Felder et al.

European Materials Research Society (EMRS), Warsaw, Poland, September 14-18, 2009.

Lead Salt Resonant Cavity Enhanced Detector with MEMS Mirror

F. Felder; M. Rahim; M. Fill; H. Zogg; N. Quack et al.

NGS-14, 14th International Conference on Narrow Gap Semiconductors, Sendai, Japan, July 13-17, 2009.

Narrow band tunable resonant cavity enhanced detectors for 3 - 10 μm wavelength

F. Felder; N. Quack; S. Blunier; M. Fill; M. Rahim et al.

1th European Symposium on Semiconductor Detectors, Wildbad Kreuth, Germany, June 7-11, 2009.

Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder et al.

MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 19, 2009.

Micromirrors for integrated tunable mid-infrared detectors and emitters

N. Quack / J. Dual (Dir.)

ETH, 2009.

DOI : 10.3929/ethz-a-005994709.

A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors

N. Quack; P. Rüst; S. Blunier; J. Dual; F. Felder et al.

Microelectronic Engineering. 2009.

DOI : 10.1016/j.mee.2008.12.064.

A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors

N. Quack; P. Rust; S. Blunier; J. Dual; F. Felder et al.

34th international conference on Micro and Nano Engineering (MNE), Athens, Greece, September 15-18, 2008.

Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

F. Felder; M. Rahim; M. Fill; M. Arnold; H. Zogg et al.

nternational Conference on Mid- Infrared Optoelectronics: Materials and Devices (MIOMD) IX, Freiburg, Germany, September 7-11, 2008.

Durchstimmbare resonanzverstärkte Detektoren für das mittlere Infrarot

F. Felder; M. Rahim; M. Fill; M. Arnold; H. Zogg et al.

Deutschsprachiger Workshop für Molekularstrahlepitaxie (DMBE), Zürich, Switzerland, September 1-2, 2008.

Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors

N. Quack; P. Rust; S. Blunier; J. Dual; F. Felder et al.

2008. 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics , Freiburg, Germany , August, 11-14, 2008. p. 174-175.

DOI : 10.1109/OMEMS.2008.4607885.

Electrostatically Actuated Micromirrors for Resonant Cavity Enhanced Detectors, MicroNanoFabrication

N. Quack; P. Rust; S. Blunier; J. Dual; M. Arnold et al.

Annual Review Meeting, Lausanne, Switzerland, May 20, 2008.

Micro and Nanosystems Platform

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder et al.

Industry Day, Zürich, Switzerland, March 19, 2008.

Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

N. Quack; S. Blunier; J. Dual; F. Felder; M. Arnold et al.

Sensors (Basel, Switzerland). 2008.

DOI : 10.3390/s8095466.

Epitaxial Lead Chalcogenides on Si for Mid-IR Detectors and Emitters Including Cavities

H. Zogg; M. Arnold; F. Felder; M. Rahim; C. Ebneter et al.

Journal of Electronic Materials. 2008.

DOI : 10.1007/s11664-008-0429-0.

Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder et al.

Journal of Optics A: Pure and Applied Optics. 2008.

DOI : 10.1088/1464-4258/10/4/044015.

Vertically moving micromirror for detectors in the mid infrared

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder et al.

Sensors and Actuators A: Physical. 2008.

DOI : 10.1016/j.sna.2007.06.013.

Wavelength Tunable Resonant Cavity Enhanced Photodetectors Based on Lead-Salts Grown by MBE

F. Felder; A. Arnold; C. Ebneter; M. Rahim; H. Zogg

2008.

DOI : 10.1007/978-1-4020-8425-6_34.

Electrostatically actuated micromirror for resonant cavity enhanced detectors

N. Quack; I. Zust; S. Blunier; J. Dual; M. Arnold et al.

2007. 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) , Hyogo, Japan , January 21-25, 2007. p. 711-714.

DOI : 10.1109/MEMSYS.2007.4432997.

Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder et al.

2007. 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics , Hualien, Taiwan , July 16 - august 12, 2007. p. 165-166.

DOI : 10.1109/OMEMS.2007.4373892.

Epitaxial lead-chalcogenides on Si for mid-IR detectors and emitters including cavities

H. Zogg; M. Arnold; F. Felder; M. Rahim; C. Ebneter et al.

U.S. Workshop on the physics and chemistry of II-VI materials, Baltimore, Maryland, USA, 30 October – 1 November 2007.

Epitaxial lead-chalcogenides on Si for mid-IR detectors and emitters including cavities

H. Zogg; M. Arnold; F. Felder; M. Rahim; C. Ebneter et al.

AITA, Advanced Infrared Technology and Applications International Workshop, Leon, Mexico, October 8-12, 2007.

MEMS Mirrors for the use in Resonant Cavity Enhanced Detectors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder et al.

33rd International Conference on Micro- and Nano-Engineering (MNE 2007), Copenhagen, Denmark, September 23-26, 2007.

Wavelength tunable Resonant Cavity Enhanced Photodetectors based on lead-salts grown by MBE

F. Felder; M. Arnold; C. Ebneter; M. Rahim; H. Zogg et al.

Thirteenth International Conference on Narrow Gap Semiconductors, Guildford UK, July 8-12 2007.

Wavelength tunable resonant cavity enhanced detectors

M. Arnold; F. Felder; C. Ebneter; M. Rahim; H. Zogg et al.

8th International Conference on Mid- Infrared Optoelectronics: Materials and Devices, Bad Ischl, Austria, May 14-17, 2007.

Electrostatically Actuated Micromirror for Resonant Cavity Enhanced Detectors

N. Quack; S. Blunier; J. Dual; M. Arnold; F. Felder et al.

MicroNanoFabrication Annual Review Meeting, Lausanne, Switzerland, May 8, 2007.

Narrowband Resonant Cavity Enhanced mid-IR Photodetectors tuneable within a broad wavelength region

F. Felder; M. Arnold; M. Rahim; C. Ebneter; H. Zogg et al.

EUROMBE 14, 14th European Molecular Beam Epitaxy Workshop, Granada, Spain, March 5-7, 2007.

Resonant Cavity Photodetektoren für Infrarotsensoren mit durchstimmbarer Wellenlänge

M. Arnold; F. Felder; M. Rahim; N. Quack; S. Blunier et al.

Deutschsprachiger Workshop für Molekularstrahlepitaxie (DMBE), Hamburg, Germany, September 26-27, 2006.

Towards High Frequency 3D Magnetic Resonators Exploring Microfabricated Bimorph Cantilever Structures

N. Quack; P. Linderholm; A. Bertsch; P. Renaud

EPFL Latsis Symposium on Negative Refraction, Lausanne, Switzerland, February 28 - March 2, 2005.

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

G. Boero; I. Utke; T. Bret; N. Quack; M. Todorova et al.

Virtual Journal of Nanoscale Science & Technology. 2005.

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

G. Boero; I. Utke; T. Bret; N. Quack; M. Todorova et al.

Applied Physics Letters. 2005.

DOI : 10.1063/1.1856134.

Extended Depth-of-Field for Color Images in Light Microscopy: Image Fusion and 3D Visualization

B. Forster; D. Van De Ville; J. Berent; N. Quack; D. Sage et al.

Proceedings of the 2004 Annual Meeting of the Swiss Society of Biomedical Engineering (SSBE'04), Zürich, Switzerland, September 2-3, 2004.

Etude cinétique de systèmes de faible énergie par une technique de saut de température

B. Markwalder / E. S. Kovats (Dir.)

Lausanne, EPFL, 1992.

DOI : 10.5075/epfl-thesis-1070.