Henry Yu

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shao-chi.yu@epfl.ch +41 21 693 49 81

Citizenship : Taiwan

EPFL STI IMT LMIS1
BM 3114 (Bâtiment BM)
Station 17
CH-1015 Lausanne

Web site: Web site: https://lmis1.epfl.ch/

EPFL > ETU > EDOC > EDMI

Web site: Web site: https://go.epfl.ch/edmi

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Administrative data

Fields of expertise

Micro/Nano fabrication 
Capillary-assisted particle assembly 
Microsystems

Professional course

Principal engineer

MEMS R&D

Taiwan Semiconductor Manufacturing Company (tsmc)

2008-2016


Education

M.Sc.

Physics

National Taiwan University

2007

B.Sc.

Physics

National Taiwan University

2004

B.Eng.

Civil Engineering

National Taiwan University

2004

Publications

Infoscience publications

Selected publications