Yves Bellouard
Associate Professor
yves.bellouard@epfl.ch +41 21 695 43 74 http://galatea.epfl.ch
EPFL STI IMT GALATEA
MC A1 288 (Bâtiment MC)
Rue de la Maladière 71b, CP 526
2002 Neuchâtel 2
Web site: Web site: https://galatea.epfl.ch
+41 21 695 43 74
EPFL
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SMT-ENS
Fields of expertise
Micromanufacturing
Femtosecond laser processing
Smart materials
System design at the microscale
Femtosecond laser processing
Smart materials
System design at the microscale
Biography
Dr. Yves Bellouard is Associate Professor in Microengineering at Ecole Polytechnique Fédérale de Lausanne (EPFL) in Switzerland, where he heads the Galatea lab and the Richemont Chair in micromanufacturing.He received a BS in Theoretical Physics and a MS in Applied Physics from Université Pierre et Marie Curie in Paris, France in 1994-1995 and a PhD in Microengineering from Ecole Polytechnique Fédérale de Lausanne (EPFL) in Lausanne, Switzerland in 2000. Before joining EPFL in 2015, he was Associate Professor at Eindhoven University of Technologies (TU/e) in the Netherlands and prior to that, Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for about four years where he started working on femtosecond laser processing of glass materials. From 2010 until 2013, Yves Bellouard initiated and coordinated the Femtoprint project, a European research initiative aiming at investigating a table-top printer for microsystems ('3D printing of microsystems'). In 2013, he received an ERC Starting Grant (Consolidator-2012) and in 2018, an ERC Proof-of-Concept from the European Research Council. In 2013, he received a JSPS Fellowship from the Japan Society for the Promotion of Science.
His current research interests are in advanced manufacturing in general and more specifically on laser-based methods to tailor material properties including laser-based self-organization processes.
Awards
Best Teacher Award (Microengineering section)
2019-2020
EPFL
ERC Proof-of-concept
2018
European Research Council
JSPS Fellowship Science
2013
Japan Society for the Promotion of Science
ERC Starting / Consolidator Grant (transition phase)
2012
European Research Council
Excellentie funds
2008
Eindhoven University of Technology
Omega Scientific Award
2001
Fondation du Prix Omega
Publications
Infoscience publications
Journals
2024
Femtosecond-laser direct-write photoconductive patterns on tellurite glass
Physical Review Applied. 2024. DOI : 10.1103/PhysRevApplied.21.014008.2023
Single-Layer Subwavelength Femtosecond-Laser-Induced Confined Nanocrystallization in Multistack Dielectrics
Physical Review Applied. 2023-04-12. DOI : 10.1103/PhysRevApplied.19.044035.Formation Mechanism of Elemental Te Produced in Tellurite Glass Systems by Femtosecond Laser Irradiation
Advanced Materials. 2023-02-07. DOI : 10.1002/adma.202210446.All-glass miniature GHz repetition rate femtosecond laser cavity
Optica. 2023. DOI : 10.1364/OPTICA.496503.High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation
Optics Express. 2023. DOI : 10.1364/OE.497584.Third-harmonic generation monitoring of femtosecond-laser-induced in-volume functional modifications
Optica. 2023. DOI : 10.1364/OPTICA.486746.2022
Femtosecond laser-shockwave induced densification in fused silica
Optical Materials Express. 2022-07-01. DOI : 10.1364/OME.462915.Ultrafast Laser Direct-Writing of Self-Organized Microstructures in Ge-Sb-S Chalcogenide Glass
Frontiers in Physics. 2022-04-14. DOI : 10.3389/fphy.2022.883319.Glass-in-glass infiltration for 3D micro-optical composite components
Optics Express. 2022-04-07. DOI : 10.1364/OE.451026.Abnormal temperature dependent elastic properties of fused silica irradiated by ultrafast lasers
Physical Review Materials. 2022-03-04. DOI : 10.1103/PhysRevMaterials.6.033602.On the behavior of uniaxial static stress loaded micro-scale fused silica beams at room temperature
Journal of Non-Crystalline Solids: X. 2022-01-19. DOI : 10.1016/j.nocx.2022.100083.Wavelength-multiplexed single-shot ptychography
Ultramicroscopy. 2022. DOI : 10.1016/j.ultramic.2021.113418.2021
Ultrafast laser interaction with transparent multi-layer SiO2/Si3N4 films
Journal of Applied Physics. 2021-12-29. DOI : 10.1063/5.0065726.Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining
Optics Express. 2021-10-12. DOI : 10.1364/OE.435163.Highly motile nanoscale magnetic artificial cilia
Proceedings Of The National Academy Of Sciences Of The United States Of America. 2021-08-25. DOI : 10.1073/pnas.2104930118.3D metal freeform micromanufacturing
Journal of Manufacturing Processes. 2021-06-23. DOI : 10.1016/j.jmapro.2021.06.002.On the use of a digital twin to enhance femtosecond laser inscription of arbitrary phase patterns
Journal of Physics: Photonics. 2021-05-25. DOI : 10.1088/2515-7647/abf743.Contactless Optical Packaging Concept for Laser to Fiber Coupling
IEEE Transactions on Components, Packaging and Manufacturing Technology. 2021-05-18. DOI : 10.1109/TCPMT.2021.3080513.Direct-write laser-induced self-organization and metallization beyond the focal volume in tellurite glass
Physical Review Materials. 2021-05-14. DOI : 10.1103/PhysRevMaterials.5.055201.Vibration monitoring based on optical sensing of mechanical nonlinearities in glass suspended waveguides
Optics Express. 2021-03-23. DOI : 10.1364/OE.414191.2020
ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining
International Journal of Applied Glass Science. 2020-09-27. DOI : 10.1111/ijag.15857.Laser-induced densification of fused silica using spatially overlapping sub-30fs pulses
Journal Of Applied Physics. 2020-08-28. DOI : 10.1063/5.0011317.Lens aberration compensation in interference microscopy
Optics and Lasers in Engineering. 2020-05-01. DOI : 10.1016/j.optlaseng.2020.106015.Elastic properties of self-organized nanogratings produced by femtosecond laser exposure of fused silica
Physical Review Materials. 2020-02-27. DOI : 10.1103/PhysRevMaterials.4.023607.Ablation in Externally Applied Electric and Magnetic Fields
Nanomaterials. 2020-01-21. DOI : 10.3390/nano10020182.2019
A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser
Micromachines. 2019-09-01. DOI : 10.3390/mi10090611.Local tuning of fused silica thermal expansion coefficient using femtosecond laser
Physical Review Materials. 2019-05-10. DOI : 10.1103/PhysRevMaterials.3.053802.2018
Self-organized nanostructures forming under high-repetition rate femtosecond laser bulk-heating of fused silica
Optics Express. 2018. DOI : 10.1364/OE.26.014024.Effect of the Combination of Femtosecond Laser Pulses Exposure on the Etching Rate of Fused Silica in Hydrofluoric Acid
JOURNAL OF LASER MICRO NANOENGINEERING. 2018. DOI : 10.2961/jlmn.2018.01.0006.A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser
MICROMACHINES. 2018. DOI : 10.3390/mi9040164.2017
Unraveling Brittle-Fracture Statistics from Intermittent Patterns Formed During Femtosecond Laser Exposure
Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.8.054013.Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications
Optics Express. 2017. DOI : 10.1364/Oe.25.026280.Ultrafast Laser to Tailor Material Properties: An Enabling Tool in Advanced Three-dimensional Micromanufacturing
Chimia. 2017. DOI : 10.2533/chimia.2017.295.Laser-Induced Transition between Nonlinear and Linear Resonant Behaviors of a Micromechanical Oscillator
Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.7.064002.Plasmon-less surface enhanced Raman spectra induced by self-organized networks of silica nanoparticles produced by femtosecond lasers
Optics Express. 2017. DOI : 10.1364/Oe.25.009587.2016
Femtosecond laser direct-write waveplates based on stress-induced birefringence
Optics Express. 2016. DOI : 10.1364/Oe.24.027239.Stress-state manipulation in fused silica via femtosecond laser irradiation
Optica. 2016. DOI : 10.1364/Optica.3.001285.2015
Deep-UV fluorescence lifetime imaging microscopy
Photonics Research. 2015. DOI : 10.1364/Prj.3.000283.Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser
Journal Of Micromechanics And Microengineering. 2015. DOI : 10.1088/0960-1317/25/10/105009.Non-contact sub-nanometer optical repositioning using femtosecond lasers
Optics Express. 2015. DOI : 10.1364/Oe.23.029258.Structural, electrical and magnetic characterization of in-situ crystallized ZnO:Co thin films synthesized by reactive magnetron sputtering
Materials Chemistry And Physics. 2015. DOI : 10.1016/j.matchemphys.2015.04.037.Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiation
Optics Letters. 2015. DOI : 10.1364/Ol.40.003623.A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser
Micromachines. 2015. DOI : 10.3390/mi6091365.On the anisotropy of stress-distribution induced in glasses and crystals by non-ablative femtosecond laser exposure
Optics Express. 2015. DOI : 10.1364/OE.23.000086.Tailored surface birefringence by femtosecond laser assisted wet etching
Optics Express. 2015. DOI : 10.1364/OE.23.001428.High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation
Optica. 2015. DOI : 10.1364/OPTICA.2.000329.Laser-assisted morphing of complex three dimensional objects
Optics Express. 2015. DOI : 10.1364/OE.23.017355.Transition and self-healing process between chaotic and self-organized patterns observed during femtosecond laser writing
Optics Express. 2015. DOI : 10.1364/OE.23.016993.2014
Kinetics of laser-assisted carbon nanotube growth
Physical Chemistry Chemical Physics. 2014. DOI : 10.1039/c4cp00061g.Miniaturized Reaction Chamber for Optimized Laser-Assisted Carbon Nanotube Growth
Journal of Laser Micro/Nanoengineering. 2014. DOI : 10.2961/jlmn.2014.02.0007.Design and Fabrication of a Prototype Actuator for Fourier Transform Interferometry
Progress in Optomechatronic Technologies. 2014. DOI : 10.1007/978-3-319-05711-8_10.Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching
Micromachines. 2014. DOI : 10.3390/mi5030697.2013
Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass
Optics Express. 2013. DOI : 10.1364/OE.21.003946.In-situ localized carbon nanotube growth inside partially sealed enclosures
AIP Advances. 2013. DOI : 10.1063/1.4821952.Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation
Optics Express. 2013. DOI : 10.1364/OE.21.024942.Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass
Optical Materials Express. 2013. DOI : 10.1364/OME.3.001428.2012
Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes
Journal of Applied Physics. 2012. DOI : 10.1063/1.4745874.The Femtoprint Project
Journal of Laser Micro/Nanoengineering. 2012. DOI : 10.2961/jlmn.2012.01.0001.Direct volume variation measurements in fused silica specimens exposed to femtosecond laser
Optical Materials Express. 2012. DOI : 10.1364/OME.2.000789.Lab on a chip technologies for algae detection: a review
Journal of Biophotonics. 2012. DOI : 10.1002/jbio.201200051.Optical classification of algae species with a glass lab-on-a-chip
Lab on a Chip. 2012. DOI : 10.1039/c2lc21091f.Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching
Applied Physics Letters. 2012. DOI : 10.1063/1.4750236.2011
On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]
Optical Materials Express. 2011. DOI : 10.1364/OME.1.000816.Optofluidic lab-on-a-chip for rapid algae population screening
Biomedical Optics Express. 2011. DOI : 10.1364/BOE.2.000658.Femtosecond-laser generation of self-organized bubble patterns in fused silica
Optics Express. 2011. DOI : 10.1364/OE.19.006807.2010
Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materials
Optics Express. 2010. DOI : 10.1364/OE.18.024673.Dynamical Observation of Femtosecond-Laser-Induced Bubbles in Water Using a Single Laser Source for Probing and Sensing
Applied Physics Express. 2010. DOI : 10.1143/APEX.3.127101.Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy
Optics Express. 2010. DOI : 10.1364/OE.18.021490.Femtosecond laser micromachining of fused silica molds
Optics Express. 2010. DOI : 10.1364/OE.18.021826.On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015039.In situ monitoring of single-wall carbon nanotube laser assisted growth
Nanotechnology. 2010. DOI : 10.1088/0957-4484/21/7/075602.2008
Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films
Applied Physics A. 2008. DOI : 10.1007/s00339-007-4331-z.Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to lowenergy femtosecond laser pulses
Optics Express. 2008. DOI : 10.1364/OE.16.019520.Time dependent growth of vertically aligned carbon nanotube forest using a laser activated catalytical CVD method
physica status solidi (b). 2008. DOI : 10.1002/pssb.200879576.2006
Thermal conductivity contrast measurement of fused silica exposed to low-energy femtosecond laser pulses
Applied Physics Letters. 2006. DOI : 10.1063/1.2363957.Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses
Optics Express. 2006. DOI : 10.1364/OE.14.008360.2005
Laser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory properties
Acta Materialia. 2005. DOI : 10.1016/j.actamat.2005.07.022.Adaptive Scanning Optical Microscope (ASOM): A multidisciplinary optical microscope design for large field of view and high resolution imaging
Optics Express. 2005. DOI : 10.1364/OPEX.13.006504.Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica
Optics Express. 2005. DOI : 10.1364/OPEX.13.006635.2004
Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
Optics Express. 2004. DOI : 10.1364/OPEX.12.002120.2001
Contribution aux concepts de « micro et nanofactory »
Nano et Micro Technologies. 2001.Contribution to the Micro- and Nanofactory Concepts
Nano and Micro Technologies. 2001.Teaching & PhD
Teaching
Microengineering
PhD Students
Cheayto Camar, Duret Antoine, Gribaudo Ernesto, Lentz Martin Thibaud, Stathaki Chrysoula, Yayla Mahmut Sinan,Past EPFL PhD Students
Athanasiou Christos Edouardos , Benketaf Samuel Youcef , Bernard Olivier , Borasi Luciano , Casamenti Enrico , Nazir Saood Ibni , Radhakrishnan Arunkrishnan , Ricca Ruben , Torun Gözden , Vlugter Pieter , Yang Tao ,Courses
Manufacturing technologies
This course gives an introduction to production methods and manufacturing technologies used in microengineering. The focus is given on the understanding of physical phenomena underlying the processes, the relation between materials, manufacturing processes and design, as well as economical aspects.
Products design & systems engineering
This course will cover all the aspects of product design and system engineering from learning relevant methods to the actual implementation in a hands-on practice of product development.
Advanced Photonics
The course offers an overview on selected advanced photonics topics. It targets students with a broad photonics background or equivalent, who are willing to broaden their knowledge in the discipline. The course is given by lecturers from both EPFL and FEMTO-ST.