Repeatability in laser material processing is challenging due to high-speed dynamics. To address this issue, the course provides an overview of laser theory, laser-material interaction, various types of sensors (acoustic & optic), data acquisition, online monitoring, and control via machine learning
Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.
Provide understanding of the optical properties of materials, principles of laser operation and properties of generated light. Comprehension of basics of interaction between laser light and materials will allow analysis of the physics and chemsitry of laser processes.