Ivo Utke
Teaching & PhD
PhD Students
Minzoni Camilla,Past EPFL PhD Students
Berger Luisa , Bernau Laurent , Friedli Vinzenz ,Courses
Nanofabrication with focused electron and ion beams
Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.