Ivo Utke

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Administrative data

Teaching & PhD

Past EPFL PhD Students

Berger Luisa , Bernau Laurent , Friedli Vinzenz ,

Courses

Nanofabrication with focused electron and ion beams

Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.