Ivo Utke

Teaching & PhD

PhD Students

Minzoni Camilla,

Past EPFL PhD Students

Berger Luisa , Bernau Laurent , Friedli Vinzenz ,


Nanofabrication with focused electron and ion beams

Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.