Antonia Neels
Unité: EDMX-ENS
Enseignement & Phd
Enseignement
Programmes doctoraux
- Doctoral Program in Microsystems and Microelectronics
Doctorants
Cours
CCMX Advanced Course - Advanced X-ray Diffraction Methods for Coatings: strain, defects and deformation analysis of thin films
After introducing thin film and HR-XRD characterisation methods, theory and limitations are discussed, including examples and how the film structure influences its characteristics. Protocols are presented for establishing reproducible and reliable measure...