Cyrille Hibert

EPFL CMI
BM 1124 (Bâtiment BM)
Station 17
CH-1015 Lausanne

EPFLETUSIE-SSIE-PG

Cyrille Hibert is a plasma physicist and senior microfabrication specialist with more than 25 years of experience in dry etching and cleanroom process development. He obtained his PhD in Plasma Physics from the University of Orléans in 1998, where he studied atmospheric plasma discharges for gas purification.

He joined the EPFL Center for MicroNanoTechnology (CMi) in 2000 as Head of Etching Processes, and in 2015 expanded his responsibilities to Process Integration Coordinator. Since 2018, he has been leading the Process Team at CMi, driving developments in silicon and advanced materials for MEMS and nanofabrication.

Alongside his EPFL activities, he worked part-time as an independent consultant from 2008 to 2025, supporting startups in scaling microfabrication technologies from R&D to industrial production.

In 2025, after completing a CAS in Industrial Decarbonization, he also took on a complementary role supporting sustainability initiatives at CMi. In this context, he founded the Swiss Academic Cleanroom Sustainability Network, aimed at collaboratively addressing the environmental challenges facing next‑generation cleanrooms, while continuing his primary mission as Head of the Process Team.

Teaching & PhD

Past EPFL PhD Students as codirector

Marcelo Bento Pisani