Fields of expertise
Flexible and Printed Electronics
Energy Harvesting and PowerMEMS
Smart Sensing Systems
Advanced Gas Sensing Technologies
Microfabrication and Printing technologies
Microsystems Integration and Packaging
MissionEnvironmentally-friendly technology is a rapidly growing research area and many micro and nano technologies are being developed to tackle the environmental problems. These technologies must enable the effective use of resources and energy in their realization and their application. Microtechnology is a tool that can contribute at mitigating environmental issues. The development of the next generation of Microsystems should lead to sustainable, reusable, recyclable and environmental friendly devices and systems. The research program of the MEMS and Printed Microsystem group at EPFL-LMTS is towards microtechnologies for sustainable development, envisioning environmental friendly processes for MEMS production and their use in applications that could bring benefits to the environment.
Research areas and themes include:
Environmental sensors and technologies based on MST
Green microtechnologies and micromanufacturing
Ultra low energy MEMS technologies: production and operation
Energy saving and harvesting technologies: green and environmental applications
Dr. ès Sciences
Université de Neuchâtel
Master in Applied Sciences
Ecole Polytechnique de Montréal
Real-Time Multi-Ion Detection in the Sweat Concentration Range Enabled by Flexible, Printed, and Microfluidics-Integrated Organic Transistor ArraysAdvanced Materials Technologies. 2020-08-16. DOI : 10.1002/admt.202000328.
Fryns type mesomelic dysplasia of the upper limbs caused by inverted duplications of the HOXD gene clusterEuropean Journal Of Human Genetics. 2020-03-01. DOI : 10.1038/s41431-019-0522-2.
3D-Integration Of Printed Electrochemical Sensors In Pet Microfluidics For Biochemical Sensing2019-01-01. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 2464-2467. DOI : 10.1109/TRANSDUCERS.2019.8808497.
Fully Fdm 3D Printed Flexible Capacitive And Resistive Transducers2019-01-01. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 2440-2443. DOI : 10.1109/TRANSDUCERS.2019.8808268.
Triboelectric‐TFT Flip‐Flop for Bistable Latching of Dielectric Elastomer ActuatorsAdvanced Electronic Materials. 2019-07-30. DOI : 10.1002/aelm.201900205.
Design and Optimization of a Low Power and Fast Response Viscometer Used for Determination of the Natural Gas Wobbe IndexIEEE Sensors Journal. 2019-07-12. DOI : 10.1109/JSEN.2019.2928479.
Triboelectric freestanding flapping film generator for energy harvesting from gas flow in pipesSmart Materials and Structures. 2019-06-21. DOI : 10.1088/1361-665X/ab0840.
Calibration Tools for Scanning Thermal Microscopy Probes Used in Temperature Measurement ModeJournal of Heat Transfer. 2019-05-14. DOI : 10.1115/1.4043381.
All-printed low-power metal oxide gas sensors on polymeric substratesFlexible And Printed Electronics. 2019-03-01. DOI : 10.1088/2058-8585/aaf848.
Large area scanning thermal microscopy and infrared imaging systemMeasurement Science and Technology. 2019-02-14. DOI : 10.1088/1361-6501/aafa96.
Nonlinear piezoelectric vibration energy harvester with frequency-tuned impacting resonators for improving broadband performance at low frequenciesSmart Materials And Structures. 2019-02-01. DOI : 10.1088/1361-665X/aaf358.
Highly transparent humidity sensor with thin cellulose acetate butyrate and hydrophobic AF1600X vapor permeating layers fabricated by screen printingSensors and Actuators B: Chemical. 2018-10-12. DOI : 10.1016/j.snb.2018.10.061.
Microfabricated high temperature sensing platform dedicated to scanning thermal microscopy (SThM)Sensors and Actuators A. 2018-06-01. DOI : 10.1016/j.sna.2018.04.011.
Architecture for the efficient manufacturing by printing of heated, planar, resistive transducers on polymeric foil for gas sensingSensors and Actuators B. 2018-04-01. DOI : 10.1016/j.snb.2017.11.108.
Low-power printed micro-hotplates through aerosol jetting of gold on thin polyimide membranesMicroelectronic Engineering. 2018-03-17. DOI : 10.1016/j.mee.2018.03.013.
Soft triboelectric generators by the use of cost-effective elastomers and simple casting processSensors and Actuators A. 2018-03-01. DOI : 10.1016/j.sna.2017.12.018.
Self-powered triboelectric touch sensor made of 3D printed materialsNano Energy. 2018. DOI : 10.1016/j.nanoen.2018.07.038.
Nanoscale thermal imaging of active devices by fluorescent SThM2017-12-25. 23rd International Workshop Thermal Investigations of ICs and Systems (Therminics) , Amsterdam, The Netherlands, September 26-29, 2017. p. 4 p.. DOI : 10.1109/THERMINIC.2017.8233839.
Additive manufacturing on 3D surfaces2017-09-06. Additive Manufacturing in Products and Applications, Zurich, Switzerland. p. 137-144. DOI : 10.1007/978-3-319-66866-6_13.
Low-power heating platform for the characterization and calibration of scanning thermal probes2017-08-25. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 334. DOI : 10.3390/proceedings1040334.
Design, fabrication and optimization of a silicon MEMS natural gas sensor2017-08-17. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 470. DOI : 10.3390/proceedings1040470.
Aerosol jet printing of miniaturized, low power flexible micro-hotplates2017-08-17. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 316. DOI : 10.3390/proceedings1040316.
3D printed materials based triboelectric device for energy harvesting and sensing2017-08-16. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 580. DOI : 10.3390/proceedings1040580.
Soft triboelectric band for sensing of and energy scavenging from body motion2017-08-09. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 387. DOI : 10.3390/proceedings1040387.
Fully casted stretchable triboelectric device for energy harvesting and sensing made of elastomeric materials2017-07-27. Transducers 2017, Kaohsiung, Taïwan, June 18-22, 2017. p. 1813-1816. DOI : 10.1109/TRANSDUCERS.2017.7994422.
Full integration of a dielectric elastomer actuator with a flexible 1 kV thin-film transistor2017-07-27. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taïwan, June 18-22, 2017. p. 2063-2066. DOI : 10.1109/TRANSDUCERS.2017.7994479.
Lightweight, Room-Temperature CO2 Gas Sensor Based on Rare-Earth Metal-Free Composites- An Impedance StudyAcs Applied Materials & Interfaces. 2017. DOI : 10.1021/acsami.7607379.
Electrically conductive fabric based stretchable triboelectric energy harvester2016-12-09. PowerMEMS 2016, Paris, France, December 6-9, 2016. p. 012005. DOI : 10.1088/1742-6596/773/1/012005.
Fully casted soft power generating triboelectric shoe insole2016-12-09. PowerMEMS 2016, Paris, France, December 6-9, 2016. p. 012097. DOI : 10.1088/1742-6596/773/1/012097.
High resolution SThM microscopy with fluorescent nanoprobes2016-09-30. Nanoscale and Microscale Heat Transfer V, Santorini, Greece, September 26-30, 2016. p. 4 pp..
Tubular gas preconcentrators based on inkjet printed micro-hotplates on foilSensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.121.
Fully inkjet printed SnO2 gas sensor on plastic substrateSensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.042.
Smart RFID Label with a Printed Multisensor Platform for Environmental MonitoringFlexible and Printed Electronics. 2016. DOI : 10.1088/2058-8585/1/2/025003.
Green paper-based piezoelectronics for sensors and actuatorsSensors and Actuators A. 2016. DOI : 10.1016/j.sna.2016.04.024.
Micromachined temperature calibration tool for contact Scanning Thermal Microscope probes2015. 21st International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Paris, France, Sept. 30 - Oct. 2 2015. p. 1-5. DOI : 10.1109/THERMINIC.2015.7389643.
Green piezoelectric for autonomous smart textile2015. 15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), Boston, MA, DEC 01-04, 2015. p. 012082. DOI : 10.1088/1742-6596/660/1/012082.
Characterization of Piezoelectric PDMS-Nanoparticle Composites2015. PowerMEMS 2015, Boston, USA, December 1-4, 2015. p. 012078. DOI : 10.1088/1742-6596/660/1/012078.
Gas Preconcentrator Made by Rolling up a Printed Hotplate on Foil2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 265-268. DOI : 10.1016/j.proeng.2015.08.602.
Capacitive Strain Sensors Inkjet-printed on PET Fibers for Integration in Industrial Textile2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 279-282. DOI : 10.1016/j.proeng.2015.08.613.
Single Layer Gold Hotplate, Printed on Polyimide, with Heater Used as Sensing Current Drain for Metal-oxide Gas Sensor2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 707-710. DOI : 10.1016/j.proeng.2015.08.764.
Inkjet Printed SnO2 Gas Sensor on Plastic Substrate2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 75-78. DOI : 10.1016/j.proeng.2015.08.569.
Room temperature Si-Ti thermopile THz sensorMicrosystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2015. DOI : 10.1007/s00542-014-2252-2.
Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissueBiomedical Microdevices. 2015. DOI : 10.1007/s10544-015-9981-6.
Harvesting Energy From a Rotating Gear Using an AFM-Like MEMS Piezoelectric Frequency Up-Converting Energy HarvesterJournal of Microelectromechanical Systems. 2015. DOI : 10.1109/JMEMS.2014.2349794.
Preconcentration Modeling for the Optimization of a Micro Gas Preconcentrator Applied to Environmental MonitoringAnalytical Chemistry. 2015. DOI : 10.1021/acs.analchem.5b00400.
Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresistJournal of Micromechanics and Microengineering. 2015. DOI : 10.1088/0960-1317/25/4/045013.
Polylactic acid as a biodegradable material for all-solution-processed organic electronic devicesOrganic Electronics. 2015. DOI : 10.1016/j.orgel.2014.11.010.
Inkjet and microcontact printing of functional materials on foil for the fabrication of pixel-like capacitive vapor microsensorsOrganic Electronics. 2015. DOI : 10.1016/j.orgel.2014.10.041.
Spectroscopy in a micro-fabricated Rb cell with anti-relaxation wall-coating2014. 28th European Frequency and Time Forum EFTF 2014, Neuchâtel, Switzerland, June 23-26, 2014. p. 554-557.
Printing And Encapsulation Of Electrical Conductors On Polylactic Acid (Pla) For Sensing Applications2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)', u'27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)'], San Francisco, USA, January 26-30, 2014. p. 532-535.
Large Arrays Of Inkjet-Printed Mems Microbridges On Foil2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)', u'27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)'], San Francisco, USA, January 26-30, 2014. p. 506-509.
On The Optimization And Performances Of A Compact Piezoelectric Impact Mems Energy Harvester2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014. p. 429-432.
A Wearable System Of Micromachined Piezoelectric Cantilevers Coupled To A Rotational Oscillating Mass For On-Body Energy Harvesting2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014. p. 370-373.
Frequency up-converting Vibration Energy Harvester with Multiple Impacting Beams for Enhanced Wideband Operation at Low Frequencies2014. p. 1517-1520. DOI : 10.1016/j.proeng.2014.11.587.
Gas Sensing Properties of Metal-decorated Tungsten Oxide Nanowires Directly Grown onto Flexible Polymeric Hotplates2014. p. 700-703. DOI : 10.1016/j.proeng.2014.11.633.
MEMS-based Porous Silicon Preconcentrators Filled with Carbopack-B for Explosives Detection2014. p. 84-87. DOI : 10.1016/j.proeng.2014.11.271.
Development of a MEMS Preconcentrator for Micro-gas Chromatography AnalysesProcedia Engineering. 2014. DOI : 10.1016/j.proeng.2014.11.413.
Study of bending reliability and electrical properties of platinum lines on flexible polyimide substratesMicroelectronics Reliability. 2014. DOI : 10.1016/j.microrel.2014.06.015.
Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and ValidationJournal of Microelectromechanical Systems. 2014. DOI : 10.1109/Jmems.2014.2314702.
Design and development of sensing RFID Tags on flexible foil compatible with EPC Gen 2IEEE Sensors Journal. 2014. DOI : 10.1109/JSEN.2014.2335417.
Development of a New Generation of Ammonia Sensors on Printed Polymeric HotplatesAnalytical Chemistry. 2014. DOI : 10.1021/ac501908c.
Microfabricated alkali vapor cell with anti-relaxation wall coatingApplied Physics Letters. 2014. DOI : 10.1063/1.4891248.
DC and AC scanning thermal microscopy using micro-thermoelectric probeHigh Temperatures-High Pressures. 2014.
Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer levelSensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2014.01.032.
Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substratesSmart Materials and Structures. 2014. DOI : 10.1088/0964-1726/23/4/045041.
Properties and Printability of Inkjet and Screen-Printed Silver Patterns for RFID AntennasJournal Of Electronic Materials. 2014. DOI : 10.1007/s11664-013-2893-4.
RF-TSVs COMPATIBLE WITH HARSH-ENVIRONMENT POST-PROCESSING FOR “VIA-FIRST” 3D INTEGRATION2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 830-833.
PRINTED MICRO-HOTPLATES ON FLEXIBLE SUBSTRATES FOR GAS SENSING2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 1059-1062.
LEAK RATE AND RELIABILITY OF LOW TEMPERATURE THIN-FILM INDIUM BONDING2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 814-817.
SELF-STANDING PRINTED HUMIDITY SENSOR WITH THERMO-CALIBRATION AND INTEGRATED HEATER2013. Transducers 2013, Barcelona, Spain, June 16-20, 2013. p. 838-841.
Flexible and Robust Multilayer Micro-Vibrational Harvesters for High Acceleration Environments2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012113.
On the experimental determination of the efficiency of piezoelectric impact-type energy harvesters using a rotational flywheel2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012137.
Multiphysics finite element model of a frequency-amplifying piezoelectric energy harvester with impact coupling for low-frequency vibrations2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012090.
High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMSProceedings of SPIE - The International Society for Optical Engineering. 2013. DOI : 10.1117/12.2006216.
Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substratesJournal Of Applied Physics. 2013. DOI : 10.1063/1.4829023.
Decreasing the size of printed comb electrodes by the introduction of a dielectric interlayer for capacitive gas sensors on polymeric foil: Modeling and fabricationSensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.sob.2013.01.008.
Quantitative thermal microscopy using thermoelectric probe in passive modeReview of Scientific Instruments. 2013. DOI : 10.1063/1.4824069.
Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile ApplicationsIEEE Sensors Journal. 2013. DOI : 10.1109/JSEN.2013.2257167.
Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stabilitySensors and Actuators B: Chemical. 2013. DOI : 10.1016/j.snb.2012.11.025.
Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packagingJournal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/7/075007.
An Automatic Test Bench for Complete Characterization of Vibration-Energy HarvestersIEEE Transactions on Instrumentation and Measurement. 2013. DOI : 10.1109/TIM.2013.2265452.
Foil-to-foil lamination and electrical interconnection of printed components on flexible substratesMicroelectronic Engineering. 2013. DOI : 10.1016/j.mee.2013.04.040.
A robust platform for textile integrated gas sensorsSensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.snb.2012.11.099.
Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocksJournal of Applied Physics. 2013. DOI : 10.1063/1.4789942.
Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensationJournal of Micromechanics and Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025012.
Effect of low-temperature processing on dry film photoresist properties for flexible electronicsJournal of Polymer Science Part B: Polymer Physics. 2013. DOI : 10.1002/polb.23240.
Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)Sensors and Actuators A: Physical. 2013. DOI : 10.1016/j.sna.2012.11.025.
Physical and electrical properties of ink-jet and screen printed patterns for RFID HF antennas2012. 2012 IEEE International Conference on RFID-Technologies and Applications (RFID-TA), Nice, France, November 5-7, 2012. p. 188-192. DOI : 10.1109/RFID-TA.2012.6404508.
Capillary self-alignment dynamics for R2R manufacturing of mesoscopic system-in-foil devices2012. 4rd Electronics System Integration Technology Conference ESTC 2012, Amsterdam, Netherlands, September 17, 2012. p. 6.
PZT-BASED ENERGY HARVESTERS ON PLASTIC FOIL OPTIMIZED THROUGH THEORETICAL MODELING AND FABRICATION IMPROVEMENTS2012. PowerMEMS 2012, Atlanta, GA, USA, December 2-5, 2012. p. 42-45.
Silicon micromachined ultrasonic transducer for cutting applications with improved power transfer2012. IEEE International Ultrasonics Symposium IUS, Dresden, Germany, Oct 7-10, 2012. p. 1169-1172.
Vibration Energy Harvesters On Plastic Foil By Lamination Of Pzt Thick Sheets2012. 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 2, 2012.
Realization of an autonomous UWB sensor node powered by a piezoelectric harvester2012. MEMS 2012, Altanta, USA, December 2-5, 2012. p. tba.
Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1041-1044. DOI : 10.1016/j.proeng.2012.09.328.
Inkjet Printing of Interdigitated Capacitive Chemical Sensors with Reduced Size by the Introduction of a Dielectric Interlayer2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1173-1176. DOI : 10.1016/j.proeng.2012.09.360.
Zinc Oxide Nanowires Deposited on Polymeric Hotplates for Low-power Gas Sensors2012. p. 1137-1140. DOI : 10.1016/j.proeng.2012.09.352.
Fully Inkjet-Printed Parallel-Plate Capacitive Gas Sensors on Flexible Substrate2012. IEEE Sensors 2012, Taipei, Taiwan, October 28-31, 2012. p. iii-lxxiii. DOI : 10.1109/ICSENS.2012.6411148.
A Sub 100 µW UWB Sensor-Node Powered by a Piezoelectric Vibration Harvester2012. The 2012 IEEE International Conference on Wireless Information Technology and Systems, Maui, Hawaï, USA, November 11-16, 2012. DOI : 10.1109/ICWITS.2012.6417828.
Feasibility of Printing Woven Humidity and Temperature Sensors for the Integration into Electronic Textiles2012. 4th International Conference on Smart Materials Structures Systems CIMTEC 2012, SYMPOSIUM D: Smart & Interactive Textiles, Montecatini, Italy, June 10-14, 2012. p. 77-82. DOI : 10.4028/www.scientific.net/AST.80.77.
Micro-fabricated alkali vapor cells sealed at low temperatures with thin-film metallic bonding2012. 2012 IEEE International Frequency Control Symposium (FCS), Baltimore, USA, May 21-24, 2012. p. 1-4. DOI : 10.1109/FCS.2012.6243661.
Printed sensors on smart RFID labels for logistics2012. 10th IEEE International NEWCAS Conference, Montreal, Canada, June 17-20, 2012. p. 449-452. DOI : 10.1109/NEWCAS.2012.6329053.
Vibration energy harvester on plastic foil based on transferring PZT thick sheets with dry film photoresist2012. MEMS 2012, Paris, France, January 30-February 2, 2012. p. 1289-1292.
Micro systems based technologies for air-pollutant and gas detection2012. IMCS 2012-The 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 395-398. DOI : 10.5162/IMCS2012/4.4.6.
Inkjet printed capacitive transducers on flexible plastic substrates with increase stability2012. IMCS 2012- the 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 527-531. DOI : 10.5162/IMCS2012/6.2.1.
All-additive Inkjet Printed Humidity and Temperature Sensors Fabricated and Encapsulated at Foil Level2012. p. 1122-1125. DOI : 10.5162/IMCS2012/P1.8.6.
Foil-to-foil Electrical Interconnection of Printed Capacitive Sensors Using Through Foil Vias and Anisotropic Conductive Adhesive Technologies2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 275-278.
Printed temperature and humidity sensors on paper2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 13-16.
Low-temperature indium hermetic sealing of alkali vapor-cells for chip-scale atomic clocks2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 361-364. DOI : 10.1109/MEMSYS.2012.6170209.
Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 64-67. DOI : 10.1109/MEMSYS.2012.6170094.
Environmental monitoring with a multisensor platform on polyimide foilSensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.095.
Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistorsJournal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/8/085034.
Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser DepositionFuel Cells. 2012. DOI : 10.1002/fuce.201200028.
La récolte d’énergie pour les micro et nanosystèmes autonomesJournal ElectroSuisse. 2012.
Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting DevicesSmart Materials Research. 2012. DOI : 10.1155/2012/426048.
All additive inkjet printed humidity sensors on plastic substrateSensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.042.
Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applicationsJournal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/2/025013.
Why Going Towards Plastic and Flexible Sensors?2011. 25th Eurosensors Conference, Athens, Greece, Sep 04-07, 2011. p. 8-15. DOI : 10.1016/j.proeng.2011.12.004.
Humidity and Temperature Sensors on Plastic Foil for Textile Integration2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 136-139. DOI : 10.1016/j.proeng.2011.12.034.
A colorimetric CO sensor for fire detection2011. Proceeding of Eursensors XXV, Athens, Greece, September 4-7, 2011. p. 1329-1332. DOI : 10.1016/j.proeng.2011.12.328.
PZT thick sheet on flexible plastic substrate for vibration energy harvesting2011. Power MEMS 2011, Séoul, Korea, November 15-18, 2011. p. 151-154.
A Sub-Threshold Passive Step-Up Rectifier for Vibration Energy Scavengers2011. PowerMEMS 2011, Seoul, Republic of Korea, November 15-18, 2011. p. 38-41.
A shadow-mask evaporated pyroMEMS igniter2011. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. p. 104013. DOI : 10.1088/0960-1317/21/10/104013.
Piezoresistive n-Type 4H-SiC Pressure Sensor with Membrane Formed by Mechanical Milling2011. IEEE Sensors 2011, Limerik, Ireland, October 28-31, 2011. p. 222-225.
Development of High Temperature Platinum TSVs2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1513-1516. DOI : 10.1016/j.proeng.2011.12.374.
Evaluation of Thin Film Indium Bonding at Wafer Level2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1493-1496. DOI : 10.1016/j.proeng.2011.12.369.
Energy harvesting from a rotating gear using an impact type piezoelectric MEMS scavenger2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 735-738.
Reliability of micro-hotplates on polyimide foil2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 338-341.
Inkjet printing on paper for the realization of humidity and temperature sensors2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 1356-1359.
Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applicationsSensors and Actuators, B: Chemical. 2011. DOI : 10.1016/j.snb.2011.11.050.
A micro gas preconcentrator with improved performance for pollution monitoring and explosives detectionAnalytica Chimica Acta. 2011. DOI : 10.1016/j.aca.2010.12.039.
Special Issue EUROSENSORS XXIII The 23rd International International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems Lausanne, Switzerland, 6-9 September 2009 PrefaceSensors And Actuators B-Chemical. 2011. DOI : 10.1016/j.snb.2011.04.030.
Ignition and Combustion Behavior in Solid Propellant Microsystems Using Joule-Effect IgnitersJournal of Microelectromechanical Systems. 2011. DOI : 10.1109/JMEMS.2011.2167667.
Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensingSensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.09.001.
Making environmental sensors on plastic foilMaterials Today. 2011.
The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin filmSmart Materials and Structures. 2011. DOI : 10.1088/0964-1726/20/2/025015.
Ink-jet printed colorimetric gas sensors on plastic foil2010. Conference on Organic Semiconductors in Sensors and Bioelectronics III, San Diego, CA, Aug 04-05, 2010. p. 77790A. DOI : 10.1117/12.861142.
Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization2010. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. p. 203-206.
Micro-solid oxide fuel cells as power supply for small portable electronic equipment2010. PowerMEMS 2010, 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Leuven, Belgium, 31.11-3.12.2010.
Reversed processing of dry photoresist: application to the encapsulation of chemical sensors2010. Eurosensors XXIV, Linz, Austria, September 5-8, 2010. p. 335-338. DOI : 10.1016/j.proeng.2010.09.116.
Smart sensing systems integration: from silicon to plastics2010. Smart Systems Integration 2010, Como, Italy, March 23-24, 2010. p. 19.
Mechanical and electrical characterization of Platinum lines used in sensing devices on polyimide foil2010. LOPE-C 2010, Francfort, Germany, May 31-June 02, 2010. p. 67-70.
Inkjet printed colorimetric ammonia sensor on plastic foil for low-cost and low-power devices2010. MEMS 2010, Hong Kong, January 24-28, 2010. p. 883-886.
Selected Peer-Reviewed Articles from the Symposium L-"Biological and Chemical Sensors and Transducers: From Materials to Systems"-of the EMRS Spring Meeting 2009Sensor Letters. 2010. DOI : 10.1166/sl.2010.1279.
Special Issue of the Eurosensors XXIII conference PrefaceSensors And Actuators A-Physical. 2010. DOI : 10.1016/S0924-4247(10)00361-4.
Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applicationsSensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.10.009.
Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW rangeJournal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/21/1/015014.
Micro gas preconcentrator in porous silicon filled with a carbon absorbentSensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.05.054.
Evaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detectionJournal of Measurement Science and Technology. 2010. DOI : 10.1088/0957-0233/21/7/075801.
Epitaxial piezoelectric MEMS on siliconJournal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055008.
Miniaturized Fourier transform spectrometer for gas detection in the MIR regionSensors and Actuators B. 2010. DOI : 10.1016/j.snb.2010.03.050.
Foil level packaging of a chemical gas sensorJournal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055026.
Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic CharacteristicsIEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING. 2010. DOI : 10.1002/tee.20507.
PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION2009. The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, December 1-4, 2009. p. 108-111.
A MICRO GAS PRECONCENTRATOR WITH IMPROVED PERFORMANCES FOR ENVIRONMENTAL MONITORING2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 983-986.
Influence of the Adsorbent Material in the Performances of a Micro Gas Preconcentrator2009. 13th International Symposium on Olfaction and Electronic Nose, Brescia, April 15-17, 2009. p. 323-326.
MEMS FOR SPACE2009. Transducers 2009, Denver, June 21-25, 2009. p. 17-24.
Ultra-low power metal oxide gas sensor on plastic foil2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 584-587.
Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguidesSensors and Actuators B. 2009. DOI : 10.1016/j.snb.2009.08.049.
Temperature, humidity and gas sensors integrated on plastic foil for low power applicationsSensors and Actuators B:Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.
Autonomous Sensors on flexible foils powered by RFID and energy scavenging for environmental and goods monitoring2008. PowerMEMS 2008 + microEMS 2008, Sendai, November 9-12, 2008. p. 173-176.
Digital Micro-thrusters with simplified architecture and reliable ignition and combustion2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 157-160.
MEMS for Space2008.
Integrated Temperature, Humidity and Gas Sensors on Plastic Substrates for RFID and Low-Power Applications2008.
Capacitive gas sensor arrays on plastic substrates for low power and mobiles applications2008. p. 1431-1434.
Detection of Surface Stress Induced Deflections in Piezoelectric Cantilever Sensors Using a Charge Integrator2008. ICCAS 2008, Seoul, October 14-17, 2008. p. 937-940.
A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 269-272.
Establishment of a technology platform for epitaxial piezoelectric MEMS2008. Eurosensors XXII, Dresden, Germany , September 7-10, 2008. p. 819-822.
MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon2008.
MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon2008.
Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate2008. p. 74-77.
Hybrid organic / inorganic sensing platforms on flexible plastic substrates2008.
Evaluation of spin-coatable colorimetric films for ammonia detection using optical waveguides2008.
On the thermal simulation and characterisation of microsystems: progress and status2008. p. 133-136.
Transfer of UV Glue patterned by Photolithography for Microsystems assembling and packaging2008. p. 1317-1320.
Large Deformation Balloon Micro-Actuator based on Pyrotechnics on Chip2008. p. 535-538.
Sensor on Flexible Substrates2008.
Microhotplates with TiN heatersSensors and Actuators A. 2008. DOI : 10.1016/j.sna.2008.08.016.
Localized Growth and Integration of Carbon Nanotubes on Micro-HotplatesJournal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.
Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methodsJournal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.
Thermal Contact Calibration between a Thermocouple Probe and a MicrohotplateJournal of Heat Transfer. 2008. DOI : 10.1115/1.2943306.
A Calibration Tool for Passive Contact Temperature Probe2007.
Precise Thermography of Microsystems in the Visible Region using a Standard CCD Camera2007. p. 926-929.
Microsystems for the Space and Transport Industries2007.
Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications2007. p. 158-161.
SH-SAW dual delay line based e-tongue system with improved discrimination capabilities2007.
Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration2007. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, 10-14 06 2007. p. 249-252. DOI : 10.1109/SENSOR.2007.4300116.
Application of Carbon “Nano”Powders and Porous Silicon for Gas Pre-Concentration2007.
Gas Detection using a Micromachined FTIR Spectrometer2007. p. 1364-1367.
Highly integrated wafer level packaged Mox gas sensors2007. p. 2401-2404.
Micro Gas Sensing Components on Flexible Substrates2007.
Micromachined Platforms on Silicon for Micro-SOFC2007. p. 157-160.
Future of Materials in MEMS and NEMS2007.
Micro-Hotplate Devices for Micro-SOFC2007. p. 421-427.
Direct integration of carbon nanotubes on micromachined hotplatesNanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.
Application of carbon nano-powders for a gas micro-preconcentratorSensors and Actuators B. 2007. DOI : 10.1016/j.snb.2007.07.029.
Reliability improvement of suspended platinum-based micro-heating elementsSensors and Actuators A. 2007. DOI : 10.1016/j.sna.2007.04.006.
Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrustersSensors and Actuators A. 2007. DOI : 10.1016/j.sna.2006.07.023.
Integration of MOX gas sensors on polyimide hotplatesSensors and Actuators A. 2007. DOI : 10.1016/j.snb.2007.09.013.
Micro-hotplates-A platform for micro-solid oxide fuel cellsJournal of Power Sources. 2007. DOI : 10.1016/j.jpowsour.2006.12.072.
Space applications of micro hot plate chemical sensors2006.
CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs2006.
Study on integration of carbon nanotube on micro-hotplates2006. p. 155-157.
Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress2006. p. 82-83.
Mems and Nanotechnologies for Space2006.
"Application of carbon ""Nano""powders and porous silicon for gas preconcentration"2006. p. W1A-P11.
Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering2006. p. 91.
Direct Integration of Carbon Nanotubes on Micro Gas Sensing Platforms2006. p. 671-674.
Optimization of the material composition of platinum micro-heating elements2006. p. W1B-P1.
Highly integrated solid propellant micro-thrusters using SOI wafers2006. p. 11013-6p..
Metal oxide gas sensors on polyimide micro-hotplates2006.
Micro Analytical Instrumentation for Gas Analysis2006.
Electrical Conductivity of LSCF Thin Films for SOFC on Micro Hotplates2006.
Paraffin-PDMS composite thermo microactuator with large vertical displacement capability2006. p. 215-218.
Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell developmentSensors and Actuators B. 2006. DOI : 10.1016/j.snb.2006.04.031.
Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication and TestingJournal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.880232.
Matrix of 10 x 10 addressed solid propellant microthrusters: Review of the technologiesSensors and Actuators A. 2006. DOI : 10.1016/j.sna.2005.08.024.
Wafer Level Packaging of Micromachined Gas SensorsIEEE Sensors. 2006. DOI : 10.1109/ICSENS.2004.1426275.
Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputteringThin Solid Films. 2006. DOI : 10.1016/j.tsf.2006.07.054.
Micro-hotplates on polyimide for sensors et actuatorsSensors and Actuators A. 2006. DOI : 10.1016/j.sna.2006.06.003.
Topography Mediated Patterning of Inorganic Materials by Spray PyrolysisAdvanced Materials. 2006. DOI : 10.1002/adma.200600718.
Compatibility of Screen-Printing Technology with Micro Hotplate for Gas Sensor and Solid Oxide Micro Fuel Cell Development2005. p. WA8.
Wafer Level Packaging of Micro-Machined Gas Sensors2005.
Thermal Laser Stimulation For MEMS characterisation and failure analysis from principles to case studies2005. p. 134-153.
MEMS Hotplates with TiN as a Heater Material2005. p. 330-333.
Ta2O5 and HfO2 as ion-sensitive materials in ISFETs2005. p. 183-188.
Miniaturisation Of Solid Propellant Thrusters For Space Application2005. p. 736-741.
Micro-Heat Generation for Chemical Reactions2005.
Polymeric Hotplates for Sensors and Actuators2005. p. TB15.
Failure Analysis of Micro-Heating Elements Suspended on Thin Membranes2005.
The influence of the insulator surface properties on the hydrogen response of field-effect gas sensorsJournal of applied Physics. 2005. DOI : 10.1063/1.1994941.
Integration of robust fluidic interconnects using metal to glass anodic bondingMicromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/9/007.
Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystemsThin Solid Films. 2005. DOI : 10.1016/j.tsf.2005.03.021.
Failure Analysis of Micro-Heating Elements Suspended on Thin MembranesMicroelectronics Reliability. 2005. DOI : 10.1016/j.microrel.2005.07.106.
High-k Dielectries for Use as ISFET Gate Oxides2004. p. 677-680.
Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates2004. p. 23-28.
Wafer Level Packaging of Micro-Machined Gas Sensors2004. p. 746-748.
Development of MicroHeaters on SOI for MicroIgnition Application2004. p. 309-312.
Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding2004. p. 649-652.
Microfabrication process for the realization of a matrix of solid-propellant microthrusters2004. p. 260-277.
Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive ActuatorSelected Topics in quantum electronics. 2004. DOI : 10.1109/JSTQE.2004.830616.
Bonding properties of metals anodically bonded to glassSensors and Actuators A. 2004. DOI : 10.1016/j.sna.2003.10.070.
Vertically Buckled Bridges for Three-Dimensional SOI-MEMS2003. p. 696-697.
Pyrotechnical Microthrusters for Space Application2003. p. 57-60.
Solid Propellant Thrusters for Space Application2003. p. 80-81.
Downscaling of Solid Propellant Pyrotechnical Microsystems2003. p. 1423-1426.
Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters2003. p. 408-409.
Microstructures Study of Pt Thin Film Used in MEMS Fabrication2003.
Metal to Glass Anodic Bonding for Microsystems Packaging2003. p. 1824-1827.
Accelareted Ageing of Micro-Hotplates for Gas Sensing Applications2003. p. 1314-1317.
MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication2003. p. 790-797.
Modulated operating temperature for MOSFET gas sensors: hydrogen recovery time reduction and gas discriminationSensors and Actuators B. 2003. DOI : 10.1016/S0925-4005(03)00230-2.
Recovery Time Reduction and Gas Discrimination for Mosfet Gas Sensors2002.
Metallic Packaging of a Piezoresistive Pressure Sensor2002.
Influence of temperature on metal to glass anodic bonding2002.
Solid Propellant Micro-Rockets - Towards a New Type of Power MEMS2002.
Application of the ESEM Heating Stage of Microstructural Transformation studies2002.
Processing influence on the reliability of platinum thin films for MEMS applications2002.
On the Reliability of a Platinum Heater for Mirco-Hotplates2002.
Thermal optimization of micro-hotplates that have a silicon islandJournal of Micromechanics and Microengineering. 2002. DOI : 10.1088/0960-1317/12/6/330.
Silicon planar microcalorimeter employing nanostructured films2001. p. 820-823.
A polymer gate FET sensor array for detecting organic vapoursSensors and Actuators B. 2001.
Thermally isolated MOSFET for gas sensing applicationIEEE Electron Device Letters. 2001. DOI : 10.1109/55.892428.
Characterisation of an electrodeposited conducting polymer FET array for vapour and odour sensing2000. p. 35-42.
Microsystems for diverse applications using recently developed microfabrication techniques2000. p. 16-27.
New response patterns for MOSFET gas sensors using low-power devices2000. p. 737-740.
Micro-hotplate, a useful concept for gas sensing, fluidics and space applications2000. p. 151-157.
Thermal management of micro-hotplates using MEMCAD as simulation tool2000. p. 640-643.
Pneumatic Conveyance Systems for Micro-Parts Transportation2000.
A low-power micromachined MOSFET gas sensorJournal of Microelectromechanical Systems. 2000. DOI : 10.1109/84.870055.
Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensorsSensors and Actuators B. 2000.
High temperature micro-hotplates for drop coated gas sensors1999. p. 703-704.
Novel low-power consumption MOSFET array gas sensor1999. p. 338-341.
Thermal aspects in thermal and resistive type gas sensors1998. p. 34-40.
Teaching & PhD