Danick Briand
EPFL STI IMT LMTS
MC B4 147 (Bâtiment MC)
Rue de la Maladière 71b, CP 526
2002 Neuchâtel 2
Web site: Site web: https://lmts.epfl.ch/
+41 21 695 45 64
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Publications
Publications Infoscience
Fully inkjet printed SnO2 gas sensor on plastic substrate
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.042.Smart RFID Label with a Printed Multisensor Platform for Environmental Monitoring
Flexible and Printed Electronics. 2016. DOI : 10.1088/2058-8585/1/2/025003.Tubular gas preconcentrators based on inkjet printed micro-hotplates on foil
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.121.Recent Advances in Printed Sensors on Foil
Materials Today. 2016. DOI : 10.1016/j.mattod.2015.08.001.Green paper-based piezoelectronics for sensors and actuators
Sensors and Actuators A. 2016. DOI : 10.1016/j.sna.2016.04.024.A low-cost UWB sensor node powered by a piezoelectric harvester or solar cells
Sensors and Actuators A: Physical. 2016. DOI : 10.1016/j.sna.2016.01.011.Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist
Journal of Micromechanics and Microengineering. 2015. DOI : 10.1088/0960-1317/25/4/045013.Micromachined Calibration Chip with Heat Source and Temperature Sensors for Scanning Thermal Metrology (SThM)
2015. Eurosensors, 2015. p. 130 - 133. DOI : 10.1016/j.proeng.2015.08.583.Green Paper-based Piezoelectric Material for Sensors and Actuators
2015. Eurosensors, 2015. p. 360 - 363. DOI : 10.1016/j.proeng.2015.08.637.Gas Preconcentrator Made by Rolling up a Printed Hotplate on Foil
2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 265 - 268. DOI : 10.1016/j.proeng.2015.08.602.Printed smart RFID label with temperature, humidity and gas sensors enabling environmental monitoring
International Conference on Olfaction and Electronic Noses (ISOEN 2015), Dijon, France, June 28-July 1, 2015.Recent advances in printed metal-oxide gas sensors on polymeric foil
GSSMO Workshop: Gas Sensors based on Semiconducting Metal-Oxides, Tuebingen, Germany, June 07-09, 2015.High temperature printed micro-hotplates on polyimide foil for gas sensing and sampling
International Conference on Olfaction and Electronic Noses (ISOEN 2015), Dijon, France, June 28-July 1, 2015.Harvesting Energy From a Rotating Gear Using an AFM-Like MEMS Piezoelectric Frequency Up-Converting Energy Harvester
Journal of Microelectromechanical Systems. 2015. DOI : 10.1109/JMEMS.2014.2349794.Low temperature integration methods using conductive adhesives and dry film photoresist for flexible electronics
Lausanne, EPFL, 2015. DOI : 10.5075/epfl-thesis-6467.Single Layer Gold Hotplate, Printed on Polyimide, with Heater Used as Sensing Current Drain for Metal-oxide Gas Sensor
2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 707 - 710. DOI : 10.1016/j.proeng.2015.08.764.Preconcentration Modeling for the Optimization of a Micro Gas Preconcentrator Applied to Environmental Monitoring
Analytical Chemistry. 2015. DOI : 10.1021/acs.analchem.5b00400.Polylactic acid as a biodegradable material for all-solution-processed organic electronic devices
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.11.010.Inkjet Printed SnO2 Gas Sensor on Plastic Substrate
2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 75 - 78. DOI : 10.1016/j.proeng.2015.08.569.Room temperature Si-Ti thermopile THz sensor
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2015. DOI : 10.1007/s00542-014-2252-2.Capacitive Strain Sensors Inkjet-printed on PET Fibers for Integration in Industrial Textile
2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 279 - 282. DOI : 10.1016/j.proeng.2015.08.613.Inkjet and microcontact printing of functional materials on foil for the fabrication of pixel-like capacitive vapor microsensors
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.10.041.Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissue
Biomedical Microdevices. 2015. DOI : 10.1007/s10544-015-9981-6.Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level
Sensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2014.01.032.Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates
Smart Materials and Structures. 2014. DOI : 10.1088/0964-1726/23/4/045041.Gas Sensing Properties of Metal-decorated Tungsten Oxide Nanowires Directly Grown onto Flexible Polymeric Hotplates
2014. p. 700 - 703. DOI : 10.1016/j.proeng.2014.11.633.Properties and Printability of Inkjet and Screen-Printed Silver Patterns for RFID Antennas
Journal Of Electronic Materials. 2014. DOI : 10.1007/s11664-013-2893-4.DC and AC scanning thermal microscopy using micro-thermoelectric probe
High Temperatures-High Pressures. 2014.A wearable system of micromachined piezoelectric cantilevers coupled to a rotational oscillating mass for on-body energy harvesting
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014.Large Arrays Of Inkjet-Printed Mems Microbridges On Foil
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, January 26-30, 2014. p. 506 - 509. DOI : 10.1109/MEMSYS.2014.6765688.Printing And Encapsulation Of Electrical Conductors On Polylactic Acid (Pla) For Sensing Applications
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014. p. 532 - 535. DOI : 10.1109/MEMSYS.2014.6765695.On the optimization and performances of a compact piezoelectric impact MEMS energy harvester
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014.Frequency up-converting Vibration Energy Harvester with Multiple Impacting Beams for Enhanced Wideband Operation at Low Frequencies
2014. p. 1517 - 1520. DOI : 10.1016/j.proeng.2014.11.587.Development of a New Generation of Ammonia Sensors on Printed Polymeric Hotplates
Analytical Chemistry. 2014. DOI : 10.1021/ac501908c.Smart RFID label printed on PET substrate with CMOS sensors
LOPE C, Munich, Germany, May 26-28, 2014.Bulk piezoelectric MEMS harvesters operating at low frequency for energy autonomous systems
Lausanne, EPFL, 2014. DOI : 10.5075/epfl-thesis-6306.Development of a MEMS Preconcentrator for Micro-gas Chromatography Analyses
Procedia Engineering. 2014. DOI : 10.1016/j.proeng.2014.11.413.Design and development of sensing RFID Tags on flexible foil compatible with EPC Gen 2
IEEE Sensors Journal. 2014. DOI : 10.1109/JSEN.2014.2335417.Microfabricated alkali vapor cell with anti-relaxation wall coating
Applied Physics Letters. 2014. DOI : 10.1063/1.4891248.Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates
Microelectronics Reliability. 2014. DOI : 10.1016/j.microrel.2014.06.015.Printed and encapsulated environmental sensors on biodegradable polylactic acid (PLA)
LOPE C, Munich, Germany, May 26-28, 2014.Smart RFID lable printed on PET substrate with CMOS sensors
LOPE-C 2014, Munich, Germany, May 26-28, 2014.Printed and encapsulated environmental sensors on biodegradable polylactic acid (PLA)
LOPE-2014, Munich, Germany, May 26-28, 2014.Spectroscopy in a micro-fabricated Rb cell with anti-relaxation wall-coating
2014. 28th European Frequency and Time Forum EFTF 2014, Neuchâtel, Switzerland, June 23-26, 2014. p. 554 - 557. DOI : 10.1109/EFTF.2014.7331561.Printed capacitive sensing device
WO2014030129 . 2014.Hydrogen sensing properties of metal-decorated tungsten oxide nanowires grown by aerosol assisted CVD on polymeric microhotplates
E-MRS 2014 Spring Meeting, Symposium B: Advanced functional materials for environmental monitoring and applications, Lille, France, May 26-30, 2014.Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
Journal of Microelectromechanical Systems. 2014. DOI : 10.1109/Jmems.2014.2314702.MEMS-based Porous Silicon Preconcentrators Filled with Carbopack-B for Explosives Detection
2014. p. 84 - 87. DOI : 10.1016/j.proeng.2014.11.271.Inkjet-Printed Multisensor Platform on Flexible Substrates for Environmental Monitoring
Lausanne, EPFL, 2014. DOI : 10.5075/epfl-thesis-6191.Self-standing printed humidity sensor with thermo-calibration and integrated heater
2013. Transducers 2013, Barcelona, Spain, June 16-20, 2013. p. 838 - 841. DOI : 10.1109/Transducers.2013.6626897.Leak rate and reliability of low temperature thin-film indium bonding
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 814 - 817. DOI : 10.1109/Transducers.2013.6626891.Multiphysics finite element model of a frequency-amplifying piezoelectric energy harvester with impact coupling for low-frequency vibrations
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012090.On the experimental determination of the efficiency of piezoelectric impact-type energy harvesters using a rotational flywheel
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012137.Flexible and Robust Multilayer Micro-Vibrational Harvesters for High Acceleration Environments
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012113.High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMS
2013. DOI : 10.1117/12.2006216.Printed micro-hotplates on flexible substrates for gas sensing
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 1059 - 1062. DOI : 10.1109/Transducers.2013.6626953.RF-TSVs compatible with harsh-environment post-processing for “via-first” 3D integration
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 830 - 833. DOI : 10.1109/Transducers.2013.6626895.Applications of dry photoresist film for printed and flexible electronics
LOPE 2013, Munich, Germany, June 11-13, 2013.SYSTEM-IN-PACKAGE CONCEPT FOR A CARBON NANOTUBE RESONATOR
ECS 2012, Honolulu, Hawaï, USA, October 7-12, 2012.Decreasing the size of printed comb electrodes by the introduction of a dielectric interlayer for capacitive gas sensors on polymeric foil: Modeling and fabrication
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.sob.2013.01.008.Recent advances in printed smart sensing RFID labels
Printed Electronics Asia 2013, Tokyo, Japan, July 9-10, 2013.Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)
Sensors and Actuators A: Physical. 2013. DOI : 10.1016/j.sna.2012.11.025.Effect of low-temperature processing on dry film photoresist properties for flexible electronics
Journal of Polymer Science Part B: Polymer Physics. 2013. DOI : 10.1002/polb.23240.Surface micromachined inkjet-printed MEMS micro-bridge on plastic foil
International Conference on Flexible and Printed Electronics ICFPE 2013, Jeju, Korea, September 11-13,2013.An Automatic Test Bench for Complete Characterization of Vibration-Energy Harvesters
IEEE Transactions on Instrumentation and Measurement. 2013. DOI : 10.1109/TIM.2013.2265452.On inkjet-printed flexible capacitive micro gas sensors: towards digital fabrication
LOPE 2013, Munich, Germany, June 11-13, 2013.Quantitative thermal microscopy using thermoelectric probe in passive mode
Review of Scientific Instruments. 2013. DOI : 10.1063/1.4824069.Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substrates
Journal Of Applied Physics. 2013. DOI : 10.1063/1.4829023.Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation
Journal of Micromechanics and Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025012.A robust platform for textile integrated gas sensors
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.snb.2012.11.099.Foil-to-foil lamination and electrical interconnection of printed components on flexible substrates
Microelectronic Engineering. 2013. DOI : 10.1016/j.mee.2013.04.040.Organic Field Effect Transistors Functionalised with Odorant Binding Proteins and Fabricated on Flexible Substrates for the Detection of Volatile Organic Compounds
International Conference on Flexible and Printed Electronics, ICFPE 2013, Jeju, Korea, September 11-13, 2013.Facile fabrication of highly sensitive nanoporous polyaniline-based ammonia sensors on flexible substrates by vapour-phase deposition polymerisation
15th International Symposium on olfaction and Electronic Nose ISOEN 2013, Daegu, Korea, July 2-5, 2013.Inkjet-printed organic transistors for the detection of gaseous analytes
LOPE 2013, Munich, Germany, June 11-13, 2013.Printing of Metallic Conductors on Biodegradable Polylactic Acid (PLA) Substrates: Characterization of Electrical and Sensing properties
International Conference on Flexible and Printed Electronics ICFPE 2013, Jeju, Korea, September 11-13, 2013.Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packaging
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/7/075007.Foil-to-foil interconnection of capacitive humidity sensors using electrically conductive adhesives
Micronarc Alpine Meeting (mAm) 2013, Villars-sur-Ollon, Switzerland, January 13-15, 2013.Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks
Journal of Applied Physics. 2013. DOI : 10.1063/1.4789942.Printed chemical sensors for the monitoring of perisable goods
Printed Electronics Asia 2013, Tokyo, Japan, July 9-10, 2013.Recent advances in printed smart sensing RFID labels
Printed Electronics Asia 2013, Tokyo, Japan, July 9-10, 2013.Smart RFID Labels with Printed Environmental Sensors
International Conference on Flexible and Printed Electronics ICFPE 2013, Jeju, Korea, September 11-13, 2013.Micro-fabricated Alkali Vapor Cells for Chip Scale Atomic Clocks Sealed at Low Temperature with Thin-Film Metallic Bonding
Micronarc Alpine Meeting (mAm) 2013, Villars-sur-Ollon, Switzerland, January 13-15, 2013.Capillary Self-alignment Dynamics for R2R Manufacturing of Mesoscopic System-in-foil Devices
LOPE-C Large-area Organic & Printed Electronics Convention, Münich, Germany, June 11-13, 2013.Printed micro-hotplate based gas sensors on flexible foil
15th International Symposium on olfaction and Electronic Nose ISOEN 2013, Daegu, Korea, July 2-5, 2013.Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stability
Sensors and Actuators B: Chemical. 2013. DOI : 10.1016/j.snb.2012.11.025.3D-Integration of a Carbon Nanotube based RF-NEMS
Lausanne, EPFL, 2013. DOI : 10.5075/epfl-thesis-5899.Low Temperature Hermetic Wafer Bonding and Microfabrication of Wall-Coated Alkali Vapor Cells for Chip-Scale Atomic Clocks
Lausanne, EPFL, 2013. DOI : 10.5075/epfl-thesis-5818.Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile Applications
IEEE Sensors Journal. 2013. DOI : 10.1109/JSEN.2013.2257167.Functionalisation of inkjet-printed Organic Field Effect Transistors with odorant binding proteins for the detection of gaseous analytes
ICOE 2013 9th International Conference on Organic Electronics, Grenoble, France, June 17-20, 2013.A Sub 100 µW UWB Sensor-Node Powered by a Piezoelectric Vibration Harvester
2012. The 2012 IEEE International Conference on Wireless Information Technology and Systems, Maui, Hawaï, USA, November 11-16, 2012. DOI : 10.1109/ICWITS.2012.6417828.All additive inkjet printed humidity sensors on plastic substrate
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.042.Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets
2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1041 - 1044. DOI : 10.1016/j.proeng.2012.09.328.Low-temperature indium hermetic sealing of alkali vapor-cells for chip-scale atomic clocks
2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 361 - 364. DOI : 10.1109/MEMSYS.2012.6170209.The Potential and Challenges of Printing Sensors and MEMS on Flexible Foil
4th International Conference on Smart Materials Structures Systems CIMTEC 2012, Symposium E: Next Generation Micro/Nano Systems, Montecatini, Italy, June 10-14, 2012.Energy scavenging from a rotating gear using an impact type piezoelectric mems scavenger
WO2012164545 . 2012.Feasibility of Printing Woven Humidity and Temperature Sensors for the Integration into Electronic Textiles
2012. 4th International Conference on Smart Materials Structures Systems CIMTEC 2012, SYMPOSIUM D: Smart & Interactive Textiles, Montecatini, Italy, June 10-14, 2012. p. 77 - 82. DOI : 10.4028/www.scientific.net/AST.80.77.Passive Thermal Contact Calibration of Thermoelectric Micro-sensors
Phonons & Fluctuations3 workshop, Sant Feliu de Guixols, Spain, May 21-24, 2012.All-additive Inkjet Printed Humidity and Temperature Sensors Fabricated and Encapsulated at Foil Level
2012. p. 1122 - 1125. DOI : 10.5162/IMCS2012/P1.8.6.Epitaxial Pb(Zr,Ti)O3 on Silicon for Energy Harvesting Devices
4th International Conference on Smart Materials Structures Systems (CIMTEC 2012), Symposium A, Montecatini, Italy, June 10-14, 2012.PZT-BASED ENERGY HARVESTERS ON PLASTIC FOIL OPTIMIZED THROUGH THEORETICAL MODELING AND FABRICATION IMPROVEMENTS
2012. PowerMEMS 2012, Atlanta, GA, USA, December 2-5, 2012. p. 42 - 45.Residual stress and buckling patterns of yttria-stabilised zirconia thin films for micro-solid oxide fuel cell membranes
ECS 221st meeting, Symposium, Seattle, USA, May 6-11, 2012.Printed Sensors on Smart RFID Labels for Logistics
NEWCAS 2012 10th IEEE International Newcas Conference, Montréal, Canada, June 17-20, 2012.Inkjet Printing of Interdigitated Capacitive Chemical Sensors with Reduced Size by the Introduction of a Dielectric Interlayer
2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1173 - 1176. DOI : 10.1016/j.proeng.2012.09.360.Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices
Smart Materials Research. 2012. DOI : 10.1155/2012/426048.Environmental monitoring with a multisensor platform on polyimide foil
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.095.Metal Oxide Gas Sensors on Polymeric Foil : Status and Perspectives
VIII International Worshop on Semiconductor Gas Sensors, Cracow, Poland, September 11-15, 2012.Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser Deposition
Fuel Cells. 2012. DOI : 10.1002/fuce.201200028.Fully Inkjet-Printed Parallel-Plate Capacitive Gas Sensors on Flexible Substrate
2012. IEEE Sensors 2012, Taipei, Taiwan, October 28-31, 2012. p. iii - lxxiii. DOI : 10.1109/ICSENS.2012.6411148.All additive inkjet printed capacitive chemical gas sensors on flexible foil
ICT OPEN 2012, Rotterdam, the Netherlands, October 22-23, 2012.Recent advances in MEMS based vibrations energy harvesting towards autonomous systems
IEEE International Ultrasonics Symposium V, IUS 2012, Dresden,Germany, October 7-10, 2012.Foil-to-foil Electrical Interconnection of Printed Capacitive Sensors Using Through Foil Vias and Anisotropic Conductive Adhesive Technologies
2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 275 - 278.Vibration energy harvester on plastic foil based on transferring PZT thick sheets
2012. MEMS 2012, Paris, France, January 30-February 2, 2012. p. 1289 - 1292. DOI : 10.1109/MEMSYS.2012.6170393.Silicon micromachined ultrasonic transducer for cutting applications with improved power transfer
2012. IEEE International Ultrasonics Symposium IUS, Dresden, Germany, Oct 7-10, 2012. p. 1169 - 1172.Micro-fabricated alkali vapor cells sealed at low temperatures with thin-film metallic bonding
2012. 2012 IEEE International Frequency Control Symposium (FCS), Baltimore, USA, May 21-24, 2012. p. 1 - 4. DOI : 10.1109/FCS.2012.6243661.Physical and electrical properties of ink-jet and screen printed patterns for RFID HF antennas
2012. 2012 IEEE International Conference on RFID-Technologies and Applications (RFID-TA), Nice, France, November 5-7, 2012. p. 188 - 192. DOI : 10.1109/RFID-TA.2012.6404508.Printed chemical gas sensors on flexible substrates
FlexSmell mid-term meeting, Bari, Italy, January 16-17, 2012.Passivation of printed capacitive transducers on flexible plastic substrates for improved stability
1st Workshop on Materials Science and Technology, Bari, Italy, January 18, 2012.Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/8/085034.Inkjet printed capacitive transducers on flexible plastic substrates with increase stability
2012. IMCS 2012- the 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 527 - 531. DOI : 10.5162/IMCS2012/6.2.1.Realization of an autonomous UWB sensor node powered by a piezoelectric harvester
2012. MEMS 2012, Altanta, USA, December 2-5, 2012.Micro systems based technologies for air-pollutant and gas detection
2012. IMCS 2012-The 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 395 - 398. DOI : 10.5162/IMCS2012/4.4.6.Platinum TSVs for High-Temperature Processing and Operation of Microsystems
Smart Systems Integration 2012, Zurich, Switzerland, March 21-22, 2012.Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators
2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 64 - 67. DOI : 10.1109/MEMSYS.2012.6170094.PyroMEMS: Improved Fabrication Methods and Ignition Reliability
Lausanne, EPFL, 2012. DOI : 10.5075/epfl-thesis-5421.Capillary self-alignment dynamics for R2R manufacturing of mesoscopic system-in-foil devices
2012. 4rd Electronics System Integration Technology Conference ESTC 2012, Amsterdam, Netherlands, September 17, 2012.Impact type piezoelectric MEMS harvester coupled with a gear for an autonomous power source
2ème Journées Nationales sur la Récupération et le Stockage d’Energie pour l’Alimentation des Microsystèmes Autonomes, Grenoble, France, March 26-27, 2012.Mechanical and adhesion characterization of dry photoresist and porous films used for foil-level encapsulation of chemical sensors
MRS 2012 Spring Meeting, San Francisco, USA, April 9-12, 2012.Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/2/025013.Printed sensors on smart RFID labels for logistics
2012. 10th IEEE International NEWCAS Conference, Montreal, Canada, June 17-20, 2012. p. 449 - 452. DOI : 10.1109/NEWCAS.2012.6329053.Zinc Oxide Nanowires Deposited on Polymeric Hotplates for Low-power Gas Sensors
2012. p. 1137 - 1140. DOI : 10.1016/j.proeng.2012.09.352.Printed temperature and humidity sensors on paper
2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 13 - 16.Feasibility of printing woven humidity and temperature sensors for the integration into electronic textiles
4th International Conferences Smart Materials, Structures and Systems, Montecatini, Italy, June 10-14, 2012.La récolte d’énergie pour les micro et nanosystèmes autonomes
Journal ElectroSuisse. 2012.Printing and integration Sensors into Smart Objects
ISPO Innovative Printed Smart Object Conference, Gardanne, France, October 16-17, 2012.A Sub-Threshold Passive Step-Up Rectifier for Vibration Energy Scavengers
Power MEMS 2011, Seoul, Korea, November 15-18, 2011.Making environmental sensors on plastic foil
Materials Today. 2011. DOI : 10.1016/S1369-7021(11)70186-9.Inkjet Printed Conductive Polymer Electrodes for AC Electroosmosis
Swiss e-print, Pratteln-Basel, Switzerland, December 1-2-, 2011.Development of High Temperature Platinum TSVs
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1513 - 1516. DOI : 10.1016/j.proeng.2011.12.374.Humidity and Temperature Sensors on Plastic Foil for Textile Integration
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 136 - 139. DOI : 10.1016/j.proeng.2011.12.034.MEMS Based Piezoelectric Harvesters: From Thick Sheet to Thin Film Epitaxial Piezoelectric Materials
2nd International Workshop on Piezoelectric MEMS, Lausanne, Switzerland, September 6-7,2011.Epitaxial Piezoelectric MEMS on Silicon
Lausanne, EPFL, 2011. DOI : 10.5075/epfl-thesis-4939.Microfabrication of free-standing micro-solid oxide fuel cells on Foturan® and silicon substrates
Solid State Ionics (SSI-18), July 3-8, 2011, Warszawa, Poland.Textile with Integrated Gas Sensors on Flexible Plastic Substrates
1st Swiss E-Print conference, Basel, Switzerland, December 1-2, 2011.Inkjet printing on paper for the realization of humidity and temperature sensors
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 1356 - 1359. DOI : 10.1109/TRANSDUCERS.2011.5969506.Reliability of micro-hotplates on polyimide foil
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 338 - 341. DOI : 10.1109/TRANSDUCERS.2011.5969465.A micro gas preconcentrator with improved performance for pollution monitoring and explosives detection
Analytica Chimica Acta. 2011. DOI : 10.1016/j.aca.2010.12.039.Energy harvesting from a rotating gear using an impact type piezoelectric MEMS scavenger
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 735 - 738. DOI : 10.1109/TRANSDUCERS.2011.5969852.Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applications
Sensors and Actuators, B: Chemical. 2011. DOI : 10.1016/j.snb.2011.11.050.The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Smart Materials and Structures. 2011. DOI : 10.1088/0964-1726/20/2/025015.Optimization of printed capacitive transducers on flexible plastic substrates through passivation procedures
1st Swiss E-Print conference, Basel, Switzerland, December 1-2, 2011.Foil-level fabrication and encapsulation of ink-jet printed capacitive humidity sensors on flexible polymeric substrates
1st Swiss E-Print conference, Basel, Switzerland, December 1-2, 2011.Piezoresistive n-Type 4H-SiC Pressure Sensor with Membrane Formed by Mechanical Milling
2011. IEEE Sensors 2011, Limerik, Ireland, October 28-31, 2011. p. 222 - 225. DOI : 10.1109/ICSENS.2011.6126936.A shadow-mask evaporated pyroMEMS igniter
2011. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. DOI : 10.1088/0960-1317/21/10/104013.Printing Gas Sensors on Flexible Substrates
Plastic Electronics 2011, Dresden, Germany, October 11-13, 2011.Evaluation of Thin Film Indium Bonding at Wafer Level
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1493 - 1496. DOI : 10.1016/j.proeng.2011.12.369.Characterization of the mechanical properties of dry photoresist at foil-level lamination
4th International Symposium on Flexible Organic Electronics ISFOE11, Thessaloniki, Greece, July 10-13, 2011.Ignition and Combustion Behavior in Solid Propellant Microsystems Using Joule-Effect Igniters
Journal of Microelectromechanical Systems. 2011. DOI : 10.1109/JMEMS.2011.2167667.Why Going Towards Plastic and Flexible Sensors?
2011. 25th Eurosensors Conference, Athens, Greece, Sep 04-07, 2011. p. 8 - 15. DOI : 10.1016/j.proeng.2011.12.004.Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensing
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.09.001.Special Issue EUROSENSORS XXIII The 23rd International International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems Lausanne, Switzerland, 6-9 September 2009 Preface
Sensors And Actuators B-Chemical. 2011. DOI : 10.1016/j.snb.2011.04.030.A colorimetric CO sensor for fire detection
2011. Proceeding of Eursensors XXV, Athens, Greece, September 4-7, 2011. p. 1329 - 1332. DOI : 10.1016/j.proeng.2011.12.328.A Sub-Threshold Passive Step-Up Rectifier for Vibration Energy Scavengers
2011. PowerMEMS 2011, Seoul, Republic of Korea, November 15-18, 2011. p. 38 - 41.Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications
Power MEMS 2011, Seoul, Korea, November 15-18, 2011.PZT thick sheet on flexible plastic substrate for vibration energy harvesting
2011. Power MEMS 2011, Séoul, Korea, November 15-18, 2011. p. 151 - 154.Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/21/1/015014.Micro-Hotplate based Metal-Oxide Semiconductor Gas Sensors: Past, Present and Future
SGS 2010 VII International Workshop on Semiconductor Gas Sensors, Krakow, Poland, September 12-16, 2010.Towards Smart Objects and the Internet of Things: A System in Foil Approach
Journées nationales sur la récupération et le stockage d'énergie pour l'alimentation des microsystèmes autonomes, Paris, France, October 14-15, 2010.Micro-solid oxide fuel cells as power supply for small portable electronic equipment
2010. PowerMEMS 2010, 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Leuven, Belgium, 31.11-3.12.2010.Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.10.009.Miniaturized Fourier transform spectrometer for gas detection in the MIR region
Sensors and Actuators B. 2010. DOI : 10.1016/j.snb.2010.03.050.Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization
2010. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. p. 203 - 206.Micro gas preconcentrator in porous silicon filled with a carbon absorbent
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.05.054.Evaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detection
Journal of Measurement Science and Technology. 2010. DOI : 10.1088/0957-0233/21/7/075801.Foil level packaging of a chemical gas sensor
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055026.Investigations of room temperature bolometers for THz applications
IRMMW-THz 2010, Rome, Italy, September 5-10, 2010.Selected Peer-Reviewed Articles from the Symposium L-"Biological and Chemical Sensors and Transducers: From Materials to Systems"-of the EMRS Spring Meeting 2009
Sensor Letters. 2010. DOI : 10.1166/sl.2010.1279.Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING. 2010. DOI : 10.1002/tee.20507.Reversed processing of dry photoresist: application to the encapsulation of chemical sensors
2010. Eurosensors XXIV, Linz, Austria, September 5-8, 2010. p. 335 - 338. DOI : 10.1016/j.proeng.2010.09.116.Mechanical and electrical characterization of Platinum lines used in sensing devices on polyimide foil
2010. LOPE-C 2010, Francfort, Germany, May 31-June 02, 2010. p. 67 - 70.Gas Sensors on Plastic Foil with Reduced Power Consumption for Wireless Applications
Lausanne, EPFL, 2010. DOI : 10.5075/epfl-thesis-4710.Ink-jet printed colorimetric gas sensors on plastic foil
2010. Conference on Organic Semiconductors in Sensors and Bioelectronics III, San Diego, CA, Aug 04-05, 2010. DOI : 10.1117/12.861142.Smart sensing systems integration: from silicon to plastics
2010. Smart Systems Integration 2010, Como, Italy, March 23-24, 2010.Epitaxial piezoelectric MEMS on silicon
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055008.Inkjet printed colorimetric ammonia sensor on plastic foil for low-cost and low-power devices
2010. MEMS 2010, Hong Kong, January 24-28, 2010. p. 883 - 886. DOI : 10.1109/MEMSYS.2010.5442348.Towards gas sensors on plastic foil
IMCS The 13th International Meeting on Chemical Sensors, Perth, Australia, July 11-14, 2010.Ultra-low power metal oxide gas sensor on plastic foil
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 584 - 587. DOI : 10.1109/SENSOR.2009.5285392.Multi sensor platform on plastic foil for environmental monitoring
2009. Eurosensors XXIII, Lausanne, September 06-09, 2009. p. 597 - 600. DOI : 10.1016/j.proche.2009.07.149.Micro-bolomètres pour des applications terahertz à température ambiante à l'échelle locale
Microscopie à sonde locale, Neufchâtel-Hardelot, March 16-20, 2009.A micro gas preconcentrator with improved performances for environmental monitoring
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 983 - 986. DOI : 10.1109/SENSOR.2009.5285982.Influence of the Adsorbent Material in the Performances of a Micro Gas Preconcentrator
2009. 13th International Symposium on Olfaction and Electronic Nose, Brescia, April 15-17, 2009. p. 323 - 326.Colorimetric gas sensors based on optical waveguides made on plastic foil
2009. Eurosensors XXIII, Lausanne, September 6-9, 2009. p. 576 - 579. DOI : 10.1016/j.proche.2009.07.144.Thermal Characterization of Polycrystalline CVD Diamond Thin Films
2009. Eurosensors 2009, Lausanne, September 6-9, 2009. DOI : 10.1016/j.proche.2009.07.152.PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION
2009. The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, December 1-4, 2009. p. 108 - 111.Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B:Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.Epitaxial Thin Films on Silicon for MEMS devices
1st National Congress on Functional Oxide for Electronics - FOxE, Sorrento, March 25-27, 2009.Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguides
Sensors and Actuators B. 2009. DOI : 10.1016/j.snb.2009.08.049.MEMS for space
2009. Transducers 2009, Denver, June 21-25, 2009. p. 17 - 24. DOI : 10.1109/SENSOR.2009.5285575.Large Deformation Balloon Micro-Actuator Based on Pyrotechnics on Chip
2008. 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, 13-17 Jan. 2008. p. 535 - 538. DOI : 10.1109/MEMSYS.2008.4443711.Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates
Journal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
International Display Workshop IWD'08, Niigata, Japan, December 3-5, 2008.On the thermal simulation and characterisation of microsystems: progress and status
2008. p. 133 - 136.Thermal Contact Calibration between a Thermocouple Probe and a Microhotplate
Journal of Heat Transfer. 2008. DOI : 10.1115/1.2943306.Detection of Surface Stress Induced Deflections in Piezoelectric Cantilever Sensors Using a Charge Integrator
2008. ICCAS 2008, Seoul, October 14-17, 2008. p. 937 - 940. DOI : 10.1109/ICCAS.2008.4694629.Digital Micro-thrusters with simplified architecture and reliable ignition and combustion
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 157 - 160.Autonomous Sensors on flexible foils powered by RFID and energy scavenging for environmental and goods monitoring
2008. PowerMEMS 2008 + microEMS 2008, Sendai, November 9-12, 2008. p. 173 - 176.MEMS for Space
2008.Integrated Temperature, Humidity and Gas Sensors on Plastic Substrates for RFID and Low-Power Applications
2008.Hybrid organic / inorganic sensing platforms on flexible plastic substrates
2008.Sensor on Flexible Substrates
2008.Establishment of a technology platform for epitaxial piezoelectric MEMS
2008. Eurosensors XXII, Dresden, Germany, September 7-10, 2008. p. 819 - 822.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 269 - 272.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.Transfer of UV Glue patterned by Photolithography for Microsystems assembling and packaging
2008. p. 1317 - 1320.Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods
Journal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.Evaluation of spin-coatable colorimetric films for ammonia detection using optical waveguides
2008.Capacitive gas sensor arrays on plastic substrates for low power and mobiles applications
2008. p. 1431 - 1434.Microhotplates with TiN heaters
Sensors and Actuators A. 2008. DOI : 10.1016/j.sna.2008.08.016.Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate
2008. p. 74 - 77. DOI : 10.1109/ICSENS.2008.4716386.Micro-Hotplate Devices for Micro-SOFC
2007. p. 421 - 427.Highly integrated wafer level packaged Mox gas sensors
2007. p. 2401 - 2404. DOI : 10.1109/SENSOR.2007.4300654.Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters
Sensors and Actuators A. 2007. DOI : 10.1016/j.sna.2006.07.023.Application of Carbon “Nano”Powders and Porous Silicon for Gas Pre-Concentration
2007.Gas Detection using a Micromachined FTIR Spectrometer
2007. p. 1364 - 1367. DOI : 10.1109/ICSENS.2007.4388665.Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications
2007. p. 158 - 161. DOI : 10.1109/ICSENS.2007.4388360.Direct integration of carbon nanotubes on micromachined hotplates
Nanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.SH-SAW dual delay line based e-tongue system with improved discrimination capabilities
2007.Integration of MOX gas sensors on polyimide hotplates
Sensors and Actuators A. 2007. DOI : 10.1016/j.snb.2007.09.013.Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration
2007. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, 10-14 06 2007. p. 249 - 252. DOI : 10.1109/SENSOR.2007.4300116.Microsystems for the Space and Transport Industries
2007.Future of Materials in MEMS and NEMS
2007.Micro-hotplates-A platform for micro-solid oxide fuel cells
Journal of Power Sources. 2007. DOI : 10.1016/j.jpowsour.2006.12.072.Reliability improvement of suspended platinum-based micro-heating elements
Sensors and Actuators A. 2007. DOI : 10.1016/j.sna.2007.04.006.A Calibration Tool for Passive Contact Temperature Probe
2007.Application of carbon nano-powders for a gas micro-preconcentrator
Sensors and Actuators B. 2007. DOI : 10.1016/j.snb.2007.07.029.Micro Gas Sensing Components on Flexible Substrates
2007.Micromachined Platforms on Silicon for Micro-SOFC
2007. p. 157 - 160.Precise Thermography of Microsystems in the Visible Region using a Standard CCD Camera
2007. p. 926 - 929. DOI : 10.1109/ICSENS.2007.4388554.Electrical Conductivity of LSCF Thin Films for SOFC on Micro Hotplates
2006.Optimization of the material composition of platinum micro-heating elements
2006. p. W1B - P1.Direct Integration of Carbon Nanotubes on Micro Gas Sensing Platforms
2006. p. 671 - 674. DOI : 10.1109/ICSENS.2007.355557.Space applications of micro hot plate chemical sensors
2006.Micro Analytical Instrumentation for Gas Analysis
2006.Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell development
Sensors and Actuators B. 2006. DOI : 10.1016/j.snb.2006.04.031.Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication and Testing
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.880232.Matrix of 10 x 10 addressed solid propellant microthrusters: Review of the technologies
Sensors and Actuators A. 2006. DOI : 10.1016/j.sna.2005.08.024.Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
Thin Solid Films. 2006. DOI : 10.1016/j.tsf.2006.07.054.CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs
2006.Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
2006.Wafer Level Packaging of Micromachined Gas Sensors
IEEE Sensors. 2006. DOI : 10.1109/JSEN.2006.881355.Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
2006. p. 82 - 83. DOI : 10.1109/OMEMS.2006.1708275.Application of carbon "Nano" powders and porous silicon for gas preconcentration
2006. p. W1A - P11.Metal oxide gas sensors on polyimide micro-hotplates
2006.Highly integrated solid propellant micro-thrusters using SOI wafers
2006. p. 11013 - 6p..Study on integration of carbon nanotube on micro-hotplates
2006. p. 155 - 157.Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
Advanced Materials. 2006. DOI : 10.1002/adma.200600718.Mems and Nanotechnologies for Space
2006.Micro-hotplates on polyimide for sensors et actuators
Sensors and Actuators A. 2006. DOI : 10.1016/j.sna.2006.06.003.Paraffin-PDMS composite thermo microactuator with large vertical displacement capability
2006. p. 215 - 218.The influence of the insulator surface properties on the hydrogen response of field-effect gas sensors
Journal of applied Physics. 2005. DOI : 10.1063/1.1994941.Compatibility of Screen-Printing Technology with Micro Hotplate for Gas Sensor and Solid Oxide Micro Fuel Cell Development
2005.MEMS Hotplates with TiN as a Heater Material
2005. p. 330 - 333. DOI : 10.1109/ICSENS.2005.1597703.Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystems
Thin Solid Films. 2005. DOI : 10.1016/j.tsf.2005.03.021.Miniaturisation Of Solid Propellant Thrusters For Space Application
2005. p. 736 - 741.Ta2O5 and HfO2 as ion-sensitive materials in ISFETs
2005. p. 183 - 188.Failure Analysis of Micro-Heating Elements Suspended on Thin Membranes
2005. 16th European Symposium Realibility of Electron Devices, Failure Physics and Analysis. p. 1786 - 1789. DOI : 10.1016/j.microrel.2005.07.106.Polymeric Hotplates for Sensors and Actuators
2005.Integration of robust fluidic interconnects using metal to glass anodic bonding
Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/9/007.Micro-Heat Generation for Chemical Reactions
2005.Wafer Level Packaging of Micro-Machined Gas Sensors
2005.Thermal Laser Stimulation For MEMS characterisation and failure analysis from principles to case studies
2005. p. 134 - 153.Development of MicroHeaters on SOI for MicroIgnition Application
2004. p. 309 - 312.Wafer Level Packaging of Micro-Machined Gas Sensors
2004. p. 746 - 748. DOI : 10.1109/ICSENS.2004.1426275.Microfabrication process for the realization of a matrix of solid-propellant microthrusters
2004. p. 260 - 277.High-k Dielectrics for Use as ISFET Gate Oxides
2004. p. 677 - 680. DOI : 10.1109/ICSENS.2004.1426257.Bonding properties of metals anodically bonded to glass
Sensors and Actuators A. 2004. DOI : 10.1016/j.sna.2003.10.070.Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding
2004. p. 649 - 652.Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator
Selected Topics in quantum electronics. 2004. DOI : 10.1109/JSTQE.2004.830616.Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
2004. p. 23 - 28.Metal to Glass Anodic Bonding for Microsystems Packaging
2003. p. 1824 - 1827. DOI : 10.1109/SENSOR.2003.1217142.Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
2003. p. 696 - 697.Modulated operating temperature for MOSFET gas sensors: hydrogen recovery time reduction and gas discrimination
Sensors and Actuators B. 2003. DOI : 10.1016/S0925-4005(03)00230-2.Solid Propellant Thrusters for Space Application
2003. p. 80 - 81.Accelareted Ageing of Micro-Hotplates for Gas Sensing Applications
2003. p. 1314 - 1317. DOI : 10.1109/ICSENS.2003.1279159.Pyrotechnical Microthrusters for Space Application
2003. p. 57 - 60.Microstructures Study of Pt Thin Film Used in MEMS Fabrication
2003.MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication
2003. p. 790 - 797.Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters
2003. p. 408 - 409.Downscaling of Solid Propellant Pyrotechnical Microsystems
2003. p. 1423 - 1426. DOI : 10.1109/SENSOR.2003.1217042.On the Reliability of a Platinum Heater for Mirco-Hotplates
2002.Recovery Time Reduction and Gas Discrimination for Mosfet Gas Sensors
2002.Thermal optimization of micro-hotplates that have a silicon island
Journal of Micromechanics and Microengineering. 2002. DOI : 10.1088/0960-1317/12/6/330.Metallic Packaging of a Piezoresistive Pressure Sensor
2002.Processing influence on the reliability of platinum thin films for MEMS applications
2002.Solid Propellant Micro-Rockets - Towards a New Type of Power MEMS
2002.Influence of temperature on metal to glass anodic bonding
2002.Application of the ESEM Heating Stage of Microstructural Transformation studies
2002.Thermally isolated MOSFET for gas sensing application
IEEE Electron Device Letters. 2001. DOI : 10.1109/55.892428.Silicon planar microcalorimeter employing nanostructured films
2001. p. 820 - 823. DOI : 10.1007/978-3-642-59497-7_194.Thermally Isolated Microelectronic Devices for Gas Sensing Applications.
Université de Neuchâtel, 2001.A polymer gate FET sensor array for detecting organic vapours
Sensors and Actuators B. 2001. DOI : 10.1016/S0925-4005(01)00687-6.Thermal management of micro-hotplates using MEMCAD as simulation tool
2000. p. 640 - 643.New response patterns for MOSFET gas sensors using low-power devices
2000. p. 737 - 740.Characterisation of an electrodeposited conducting polymer FET array for vapour and odour sensing
2000. p. 35 - 42.A low-power micromachined MOSFET gas sensor
Journal of Microelectromechanical Systems. 2000. DOI : 10.1109/84.870055.Micro-hotplate, a useful concept for gas sensing, fluidics and space applications
2000. p. 151 - 157.Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors
Sensors and Actuators B. 2000. DOI : 10.1016/S0925-4005(00)00433-0.Microsystems for diverse applications using recently developed microfabrication techniques
2000. p. 16 - 27.High temperature micro-hotplates for drop coated gas sensors
1999. p. 703 - 704.Novel low-power consumption MOSFET array gas sensor
1999. p. 338 - 341.Thermal aspects in thermal and resistive type gas sensors
1998. p. 34 - 40.Infoscience
Fully inkjet printed SnO2 gas sensor on plastic substrate
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.042.Smart RFID Label with a Printed Multisensor Platform for Environmental Monitoring
Flexible and Printed Electronics. 2016. DOI : 10.1088/2058-8585/1/2/025003.Tubular gas preconcentrators based on inkjet printed micro-hotplates on foil
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.121.Recent Advances in Printed Sensors on Foil
Materials Today. 2016. DOI : 10.1016/j.mattod.2015.08.001.Green paper-based piezoelectronics for sensors and actuators
Sensors and Actuators A. 2016. DOI : 10.1016/j.sna.2016.04.024.A low-cost UWB sensor node powered by a piezoelectric harvester or solar cells
Sensors and Actuators A: Physical. 2016. DOI : 10.1016/j.sna.2016.01.011.Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist
Journal of Micromechanics and Microengineering. 2015. DOI : 10.1088/0960-1317/25/4/045013.Micromachined Calibration Chip with Heat Source and Temperature Sensors for Scanning Thermal Metrology (SThM)
2015. Eurosensors, 2015. p. 130 - 133. DOI : 10.1016/j.proeng.2015.08.583.Green Paper-based Piezoelectric Material for Sensors and Actuators
2015. Eurosensors, 2015. p. 360 - 363. DOI : 10.1016/j.proeng.2015.08.637.Gas Preconcentrator Made by Rolling up a Printed Hotplate on Foil
2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 265 - 268. DOI : 10.1016/j.proeng.2015.08.602.Printed smart RFID label with temperature, humidity and gas sensors enabling environmental monitoring
International Conference on Olfaction and Electronic Noses (ISOEN 2015), Dijon, France, June 28-July 1, 2015.Recent advances in printed metal-oxide gas sensors on polymeric foil
GSSMO Workshop: Gas Sensors based on Semiconducting Metal-Oxides, Tuebingen, Germany, June 07-09, 2015.High temperature printed micro-hotplates on polyimide foil for gas sensing and sampling
International Conference on Olfaction and Electronic Noses (ISOEN 2015), Dijon, France, June 28-July 1, 2015.Harvesting Energy From a Rotating Gear Using an AFM-Like MEMS Piezoelectric Frequency Up-Converting Energy Harvester
Journal of Microelectromechanical Systems. 2015. DOI : 10.1109/JMEMS.2014.2349794.Low temperature integration methods using conductive adhesives and dry film photoresist for flexible electronics
Lausanne, EPFL, 2015. DOI : 10.5075/epfl-thesis-6467.Single Layer Gold Hotplate, Printed on Polyimide, with Heater Used as Sensing Current Drain for Metal-oxide Gas Sensor
2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 707 - 710. DOI : 10.1016/j.proeng.2015.08.764.Preconcentration Modeling for the Optimization of a Micro Gas Preconcentrator Applied to Environmental Monitoring
Analytical Chemistry. 2015. DOI : 10.1021/acs.analchem.5b00400.Polylactic acid as a biodegradable material for all-solution-processed organic electronic devices
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.11.010.Inkjet Printed SnO2 Gas Sensor on Plastic Substrate
2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 75 - 78. DOI : 10.1016/j.proeng.2015.08.569.Room temperature Si-Ti thermopile THz sensor
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2015. DOI : 10.1007/s00542-014-2252-2.Capacitive Strain Sensors Inkjet-printed on PET Fibers for Integration in Industrial Textile
2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 279 - 282. DOI : 10.1016/j.proeng.2015.08.613.Inkjet and microcontact printing of functional materials on foil for the fabrication of pixel-like capacitive vapor microsensors
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.10.041.Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissue
Biomedical Microdevices. 2015. DOI : 10.1007/s10544-015-9981-6.Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level
Sensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2014.01.032.Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates
Smart Materials and Structures. 2014. DOI : 10.1088/0964-1726/23/4/045041.Gas Sensing Properties of Metal-decorated Tungsten Oxide Nanowires Directly Grown onto Flexible Polymeric Hotplates
2014. p. 700 - 703. DOI : 10.1016/j.proeng.2014.11.633.Properties and Printability of Inkjet and Screen-Printed Silver Patterns for RFID Antennas
Journal Of Electronic Materials. 2014. DOI : 10.1007/s11664-013-2893-4.DC and AC scanning thermal microscopy using micro-thermoelectric probe
High Temperatures-High Pressures. 2014.A wearable system of micromachined piezoelectric cantilevers coupled to a rotational oscillating mass for on-body energy harvesting
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014.Large Arrays Of Inkjet-Printed Mems Microbridges On Foil
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, January 26-30, 2014. p. 506 - 509. DOI : 10.1109/MEMSYS.2014.6765688.Printing And Encapsulation Of Electrical Conductors On Polylactic Acid (Pla) For Sensing Applications
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014. p. 532 - 535. DOI : 10.1109/MEMSYS.2014.6765695.On the optimization and performances of a compact piezoelectric impact MEMS energy harvester
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014.Frequency up-converting Vibration Energy Harvester with Multiple Impacting Beams for Enhanced Wideband Operation at Low Frequencies
2014. p. 1517 - 1520. DOI : 10.1016/j.proeng.2014.11.587.Development of a New Generation of Ammonia Sensors on Printed Polymeric Hotplates
Analytical Chemistry. 2014. DOI : 10.1021/ac501908c.Smart RFID label printed on PET substrate with CMOS sensors
LOPE C, Munich, Germany, May 26-28, 2014.Bulk piezoelectric MEMS harvesters operating at low frequency for energy autonomous systems
Lausanne, EPFL, 2014. DOI : 10.5075/epfl-thesis-6306.Development of a MEMS Preconcentrator for Micro-gas Chromatography Analyses
Procedia Engineering. 2014. DOI : 10.1016/j.proeng.2014.11.413.Design and development of sensing RFID Tags on flexible foil compatible with EPC Gen 2
IEEE Sensors Journal. 2014. DOI : 10.1109/JSEN.2014.2335417.Microfabricated alkali vapor cell with anti-relaxation wall coating
Applied Physics Letters. 2014. DOI : 10.1063/1.4891248.Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates
Microelectronics Reliability. 2014. DOI : 10.1016/j.microrel.2014.06.015.Printed and encapsulated environmental sensors on biodegradable polylactic acid (PLA)
LOPE C, Munich, Germany, May 26-28, 2014.Smart RFID lable printed on PET substrate with CMOS sensors
LOPE-C 2014, Munich, Germany, May 26-28, 2014.Printed and encapsulated environmental sensors on biodegradable polylactic acid (PLA)
LOPE-2014, Munich, Germany, May 26-28, 2014.Spectroscopy in a micro-fabricated Rb cell with anti-relaxation wall-coating
2014. 28th European Frequency and Time Forum EFTF 2014, Neuchâtel, Switzerland, June 23-26, 2014. p. 554 - 557. DOI : 10.1109/EFTF.2014.7331561.Printed capacitive sensing device
WO2014030129 . 2014.Hydrogen sensing properties of metal-decorated tungsten oxide nanowires grown by aerosol assisted CVD on polymeric microhotplates
E-MRS 2014 Spring Meeting, Symposium B: Advanced functional materials for environmental monitoring and applications, Lille, France, May 26-30, 2014.Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
Journal of Microelectromechanical Systems. 2014. DOI : 10.1109/Jmems.2014.2314702.MEMS-based Porous Silicon Preconcentrators Filled with Carbopack-B for Explosives Detection
2014. p. 84 - 87. DOI : 10.1016/j.proeng.2014.11.271.Inkjet-Printed Multisensor Platform on Flexible Substrates for Environmental Monitoring
Lausanne, EPFL, 2014. DOI : 10.5075/epfl-thesis-6191.Self-standing printed humidity sensor with thermo-calibration and integrated heater
2013. Transducers 2013, Barcelona, Spain, June 16-20, 2013. p. 838 - 841. DOI : 10.1109/Transducers.2013.6626897.Leak rate and reliability of low temperature thin-film indium bonding
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 814 - 817. DOI : 10.1109/Transducers.2013.6626891.Multiphysics finite element model of a frequency-amplifying piezoelectric energy harvester with impact coupling for low-frequency vibrations
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012090.On the experimental determination of the efficiency of piezoelectric impact-type energy harvesters using a rotational flywheel
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012137.Flexible and Robust Multilayer Micro-Vibrational Harvesters for High Acceleration Environments
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012113.High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMS
2013. DOI : 10.1117/12.2006216.Printed micro-hotplates on flexible substrates for gas sensing
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 1059 - 1062. DOI : 10.1109/Transducers.2013.6626953.RF-TSVs compatible with harsh-environment post-processing for “via-first” 3D integration
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 830 - 833. DOI : 10.1109/Transducers.2013.6626895.Applications of dry photoresist film for printed and flexible electronics
LOPE 2013, Munich, Germany, June 11-13, 2013.SYSTEM-IN-PACKAGE CONCEPT FOR A CARBON NANOTUBE RESONATOR
ECS 2012, Honolulu, Hawaï, USA, October 7-12, 2012.Decreasing the size of printed comb electrodes by the introduction of a dielectric interlayer for capacitive gas sensors on polymeric foil: Modeling and fabrication
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.sob.2013.01.008.Recent advances in printed smart sensing RFID labels
Printed Electronics Asia 2013, Tokyo, Japan, July 9-10, 2013.Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)
Sensors and Actuators A: Physical. 2013. DOI : 10.1016/j.sna.2012.11.025.Effect of low-temperature processing on dry film photoresist properties for flexible electronics
Journal of Polymer Science Part B: Polymer Physics. 2013. DOI : 10.1002/polb.23240.Surface micromachined inkjet-printed MEMS micro-bridge on plastic foil
International Conference on Flexible and Printed Electronics ICFPE 2013, Jeju, Korea, September 11-13,2013.An Automatic Test Bench for Complete Characterization of Vibration-Energy Harvesters
IEEE Transactions on Instrumentation and Measurement. 2013. DOI : 10.1109/TIM.2013.2265452.On inkjet-printed flexible capacitive micro gas sensors: towards digital fabrication
LOPE 2013, Munich, Germany, June 11-13, 2013.Quantitative thermal microscopy using thermoelectric probe in passive mode
Review of Scientific Instruments. 2013. DOI : 10.1063/1.4824069.Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substrates
Journal Of Applied Physics. 2013. DOI : 10.1063/1.4829023.Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation
Journal of Micromechanics and Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025012.A robust platform for textile integrated gas sensors
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.snb.2012.11.099.Foil-to-foil lamination and electrical interconnection of printed components on flexible substrates
Microelectronic Engineering. 2013. DOI : 10.1016/j.mee.2013.04.040.Organic Field Effect Transistors Functionalised with Odorant Binding Proteins and Fabricated on Flexible Substrates for the Detection of Volatile Organic Compounds
International Conference on Flexible and Printed Electronics, ICFPE 2013, Jeju, Korea, September 11-13, 2013.Facile fabrication of highly sensitive nanoporous polyaniline-based ammonia sensors on flexible substrates by vapour-phase deposition polymerisation
15th International Symposium on olfaction and Electronic Nose ISOEN 2013, Daegu, Korea, July 2-5, 2013.Inkjet-printed organic transistors for the detection of gaseous analytes
LOPE 2013, Munich, Germany, June 11-13, 2013.Printing of Metallic Conductors on Biodegradable Polylactic Acid (PLA) Substrates: Characterization of Electrical and Sensing properties
International Conference on Flexible and Printed Electronics ICFPE 2013, Jeju, Korea, September 11-13, 2013.Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packaging
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/7/075007.Foil-to-foil interconnection of capacitive humidity sensors using electrically conductive adhesives
Micronarc Alpine Meeting (mAm) 2013, Villars-sur-Ollon, Switzerland, January 13-15, 2013.Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks
Journal of Applied Physics. 2013. DOI : 10.1063/1.4789942.Printed chemical sensors for the monitoring of perisable goods
Printed Electronics Asia 2013, Tokyo, Japan, July 9-10, 2013.Recent advances in printed smart sensing RFID labels
Printed Electronics Asia 2013, Tokyo, Japan, July 9-10, 2013.Smart RFID Labels with Printed Environmental Sensors
International Conference on Flexible and Printed Electronics ICFPE 2013, Jeju, Korea, September 11-13, 2013.Micro-fabricated Alkali Vapor Cells for Chip Scale Atomic Clocks Sealed at Low Temperature with Thin-Film Metallic Bonding
Micronarc Alpine Meeting (mAm) 2013, Villars-sur-Ollon, Switzerland, January 13-15, 2013.Capillary Self-alignment Dynamics for R2R Manufacturing of Mesoscopic System-in-foil Devices
LOPE-C Large-area Organic & Printed Electronics Convention, Münich, Germany, June 11-13, 2013.Printed micro-hotplate based gas sensors on flexible foil
15th International Symposium on olfaction and Electronic Nose ISOEN 2013, Daegu, Korea, July 2-5, 2013.Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stability
Sensors and Actuators B: Chemical. 2013. DOI : 10.1016/j.snb.2012.11.025.3D-Integration of a Carbon Nanotube based RF-NEMS
Lausanne, EPFL, 2013. DOI : 10.5075/epfl-thesis-5899.Low Temperature Hermetic Wafer Bonding and Microfabrication of Wall-Coated Alkali Vapor Cells for Chip-Scale Atomic Clocks
Lausanne, EPFL, 2013. DOI : 10.5075/epfl-thesis-5818.Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile Applications
IEEE Sensors Journal. 2013. DOI : 10.1109/JSEN.2013.2257167.Functionalisation of inkjet-printed Organic Field Effect Transistors with odorant binding proteins for the detection of gaseous analytes
ICOE 2013 9th International Conference on Organic Electronics, Grenoble, France, June 17-20, 2013.A Sub 100 µW UWB Sensor-Node Powered by a Piezoelectric Vibration Harvester
2012. The 2012 IEEE International Conference on Wireless Information Technology and Systems, Maui, Hawaï, USA, November 11-16, 2012. DOI : 10.1109/ICWITS.2012.6417828.All additive inkjet printed humidity sensors on plastic substrate
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.042.Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets
2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1041 - 1044. DOI : 10.1016/j.proeng.2012.09.328.Low-temperature indium hermetic sealing of alkali vapor-cells for chip-scale atomic clocks
2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 361 - 364. DOI : 10.1109/MEMSYS.2012.6170209.The Potential and Challenges of Printing Sensors and MEMS on Flexible Foil
4th International Conference on Smart Materials Structures Systems CIMTEC 2012, Symposium E: Next Generation Micro/Nano Systems, Montecatini, Italy, June 10-14, 2012.Energy scavenging from a rotating gear using an impact type piezoelectric mems scavenger
WO2012164545 . 2012.Feasibility of Printing Woven Humidity and Temperature Sensors for the Integration into Electronic Textiles
2012. 4th International Conference on Smart Materials Structures Systems CIMTEC 2012, SYMPOSIUM D: Smart & Interactive Textiles, Montecatini, Italy, June 10-14, 2012. p. 77 - 82. DOI : 10.4028/www.scientific.net/AST.80.77.Passive Thermal Contact Calibration of Thermoelectric Micro-sensors
Phonons & Fluctuations3 workshop, Sant Feliu de Guixols, Spain, May 21-24, 2012.All-additive Inkjet Printed Humidity and Temperature Sensors Fabricated and Encapsulated at Foil Level
2012. p. 1122 - 1125. DOI : 10.5162/IMCS2012/P1.8.6.Epitaxial Pb(Zr,Ti)O3 on Silicon for Energy Harvesting Devices
4th International Conference on Smart Materials Structures Systems (CIMTEC 2012), Symposium A, Montecatini, Italy, June 10-14, 2012.PZT-BASED ENERGY HARVESTERS ON PLASTIC FOIL OPTIMIZED THROUGH THEORETICAL MODELING AND FABRICATION IMPROVEMENTS
2012. PowerMEMS 2012, Atlanta, GA, USA, December 2-5, 2012. p. 42 - 45.Residual stress and buckling patterns of yttria-stabilised zirconia thin films for micro-solid oxide fuel cell membranes
ECS 221st meeting, Symposium, Seattle, USA, May 6-11, 2012.Printed Sensors on Smart RFID Labels for Logistics
NEWCAS 2012 10th IEEE International Newcas Conference, Montréal, Canada, June 17-20, 2012.Inkjet Printing of Interdigitated Capacitive Chemical Sensors with Reduced Size by the Introduction of a Dielectric Interlayer
2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1173 - 1176. DOI : 10.1016/j.proeng.2012.09.360.Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices
Smart Materials Research. 2012. DOI : 10.1155/2012/426048.Environmental monitoring with a multisensor platform on polyimide foil
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.095.Metal Oxide Gas Sensors on Polymeric Foil : Status and Perspectives
VIII International Worshop on Semiconductor Gas Sensors, Cracow, Poland, September 11-15, 2012.Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser Deposition
Fuel Cells. 2012. DOI : 10.1002/fuce.201200028.Fully Inkjet-Printed Parallel-Plate Capacitive Gas Sensors on Flexible Substrate
2012. IEEE Sensors 2012, Taipei, Taiwan, October 28-31, 2012. p. iii - lxxiii. DOI : 10.1109/ICSENS.2012.6411148.All additive inkjet printed capacitive chemical gas sensors on flexible foil
ICT OPEN 2012, Rotterdam, the Netherlands, October 22-23, 2012.Recent advances in MEMS based vibrations energy harvesting towards autonomous systems
IEEE International Ultrasonics Symposium V, IUS 2012, Dresden,Germany, October 7-10, 2012.Foil-to-foil Electrical Interconnection of Printed Capacitive Sensors Using Through Foil Vias and Anisotropic Conductive Adhesive Technologies
2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 275 - 278.Vibration energy harvester on plastic foil based on transferring PZT thick sheets
2012. MEMS 2012, Paris, France, January 30-February 2, 2012. p. 1289 - 1292. DOI : 10.1109/MEMSYS.2012.6170393.Silicon micromachined ultrasonic transducer for cutting applications with improved power transfer
2012. IEEE International Ultrasonics Symposium IUS, Dresden, Germany, Oct 7-10, 2012. p. 1169 - 1172.Micro-fabricated alkali vapor cells sealed at low temperatures with thin-film metallic bonding
2012. 2012 IEEE International Frequency Control Symposium (FCS), Baltimore, USA, May 21-24, 2012. p. 1 - 4. DOI : 10.1109/FCS.2012.6243661.Physical and electrical properties of ink-jet and screen printed patterns for RFID HF antennas
2012. 2012 IEEE International Conference on RFID-Technologies and Applications (RFID-TA), Nice, France, November 5-7, 2012. p. 188 - 192. DOI : 10.1109/RFID-TA.2012.6404508.Printed chemical gas sensors on flexible substrates
FlexSmell mid-term meeting, Bari, Italy, January 16-17, 2012.Passivation of printed capacitive transducers on flexible plastic substrates for improved stability
1st Workshop on Materials Science and Technology, Bari, Italy, January 18, 2012.Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/8/085034.Inkjet printed capacitive transducers on flexible plastic substrates with increase stability
2012. IMCS 2012- the 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 527 - 531. DOI : 10.5162/IMCS2012/6.2.1.Realization of an autonomous UWB sensor node powered by a piezoelectric harvester
2012. MEMS 2012, Altanta, USA, December 2-5, 2012.Micro systems based technologies for air-pollutant and gas detection
2012. IMCS 2012-The 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 395 - 398. DOI : 10.5162/IMCS2012/4.4.6.Platinum TSVs for High-Temperature Processing and Operation of Microsystems
Smart Systems Integration 2012, Zurich, Switzerland, March 21-22, 2012.Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators
2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 64 - 67. DOI : 10.1109/MEMSYS.2012.6170094.PyroMEMS: Improved Fabrication Methods and Ignition Reliability
Lausanne, EPFL, 2012. DOI : 10.5075/epfl-thesis-5421.Capillary self-alignment dynamics for R2R manufacturing of mesoscopic system-in-foil devices
2012. 4rd Electronics System Integration Technology Conference ESTC 2012, Amsterdam, Netherlands, September 17, 2012.Impact type piezoelectric MEMS harvester coupled with a gear for an autonomous power source
2ème Journées Nationales sur la Récupération et le Stockage d’Energie pour l’Alimentation des Microsystèmes Autonomes, Grenoble, France, March 26-27, 2012.Mechanical and adhesion characterization of dry photoresist and porous films used for foil-level encapsulation of chemical sensors
MRS 2012 Spring Meeting, San Francisco, USA, April 9-12, 2012.Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/2/025013.Printed sensors on smart RFID labels for logistics
2012. 10th IEEE International NEWCAS Conference, Montreal, Canada, June 17-20, 2012. p. 449 - 452. DOI : 10.1109/NEWCAS.2012.6329053.Zinc Oxide Nanowires Deposited on Polymeric Hotplates for Low-power Gas Sensors
2012. p. 1137 - 1140. DOI : 10.1016/j.proeng.2012.09.352.Printed temperature and humidity sensors on paper
2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 13 - 16.Feasibility of printing woven humidity and temperature sensors for the integration into electronic textiles
4th International Conferences Smart Materials, Structures and Systems, Montecatini, Italy, June 10-14, 2012.La récolte d’énergie pour les micro et nanosystèmes autonomes
Journal ElectroSuisse. 2012.Printing and integration Sensors into Smart Objects
ISPO Innovative Printed Smart Object Conference, Gardanne, France, October 16-17, 2012.A Sub-Threshold Passive Step-Up Rectifier for Vibration Energy Scavengers
Power MEMS 2011, Seoul, Korea, November 15-18, 2011.Making environmental sensors on plastic foil
Materials Today. 2011. DOI : 10.1016/S1369-7021(11)70186-9.Inkjet Printed Conductive Polymer Electrodes for AC Electroosmosis
Swiss e-print, Pratteln-Basel, Switzerland, December 1-2-, 2011.Development of High Temperature Platinum TSVs
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1513 - 1516. DOI : 10.1016/j.proeng.2011.12.374.Humidity and Temperature Sensors on Plastic Foil for Textile Integration
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 136 - 139. DOI : 10.1016/j.proeng.2011.12.034.MEMS Based Piezoelectric Harvesters: From Thick Sheet to Thin Film Epitaxial Piezoelectric Materials
2nd International Workshop on Piezoelectric MEMS, Lausanne, Switzerland, September 6-7,2011.Epitaxial Piezoelectric MEMS on Silicon
Lausanne, EPFL, 2011. DOI : 10.5075/epfl-thesis-4939.Microfabrication of free-standing micro-solid oxide fuel cells on Foturan® and silicon substrates
Solid State Ionics (SSI-18), July 3-8, 2011, Warszawa, Poland.Textile with Integrated Gas Sensors on Flexible Plastic Substrates
1st Swiss E-Print conference, Basel, Switzerland, December 1-2, 2011.Inkjet printing on paper for the realization of humidity and temperature sensors
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 1356 - 1359. DOI : 10.1109/TRANSDUCERS.2011.5969506.Reliability of micro-hotplates on polyimide foil
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 338 - 341. DOI : 10.1109/TRANSDUCERS.2011.5969465.A micro gas preconcentrator with improved performance for pollution monitoring and explosives detection
Analytica Chimica Acta. 2011. DOI : 10.1016/j.aca.2010.12.039.Energy harvesting from a rotating gear using an impact type piezoelectric MEMS scavenger
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 735 - 738. DOI : 10.1109/TRANSDUCERS.2011.5969852.Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applications
Sensors and Actuators, B: Chemical. 2011. DOI : 10.1016/j.snb.2011.11.050.The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Smart Materials and Structures. 2011. DOI : 10.1088/0964-1726/20/2/025015.Optimization of printed capacitive transducers on flexible plastic substrates through passivation procedures
1st Swiss E-Print conference, Basel, Switzerland, December 1-2, 2011.Foil-level fabrication and encapsulation of ink-jet printed capacitive humidity sensors on flexible polymeric substrates
1st Swiss E-Print conference, Basel, Switzerland, December 1-2, 2011.Piezoresistive n-Type 4H-SiC Pressure Sensor with Membrane Formed by Mechanical Milling
2011. IEEE Sensors 2011, Limerik, Ireland, October 28-31, 2011. p. 222 - 225. DOI : 10.1109/ICSENS.2011.6126936.A shadow-mask evaporated pyroMEMS igniter
2011. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. DOI : 10.1088/0960-1317/21/10/104013.Printing Gas Sensors on Flexible Substrates
Plastic Electronics 2011, Dresden, Germany, October 11-13, 2011.Evaluation of Thin Film Indium Bonding at Wafer Level
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1493 - 1496. DOI : 10.1016/j.proeng.2011.12.369.Characterization of the mechanical properties of dry photoresist at foil-level lamination
4th International Symposium on Flexible Organic Electronics ISFOE11, Thessaloniki, Greece, July 10-13, 2011.Ignition and Combustion Behavior in Solid Propellant Microsystems Using Joule-Effect Igniters
Journal of Microelectromechanical Systems. 2011. DOI : 10.1109/JMEMS.2011.2167667.Why Going Towards Plastic and Flexible Sensors?
2011. 25th Eurosensors Conference, Athens, Greece, Sep 04-07, 2011. p. 8 - 15. DOI : 10.1016/j.proeng.2011.12.004.Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensing
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.09.001.Special Issue EUROSENSORS XXIII The 23rd International International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems Lausanne, Switzerland, 6-9 September 2009 Preface
Sensors And Actuators B-Chemical. 2011. DOI : 10.1016/j.snb.2011.04.030.A colorimetric CO sensor for fire detection
2011. Proceeding of Eursensors XXV, Athens, Greece, September 4-7, 2011. p. 1329 - 1332. DOI : 10.1016/j.proeng.2011.12.328.A Sub-Threshold Passive Step-Up Rectifier for Vibration Energy Scavengers
2011. PowerMEMS 2011, Seoul, Republic of Korea, November 15-18, 2011. p. 38 - 41.Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications
Power MEMS 2011, Seoul, Korea, November 15-18, 2011.PZT thick sheet on flexible plastic substrate for vibration energy harvesting
2011. Power MEMS 2011, Séoul, Korea, November 15-18, 2011. p. 151 - 154.Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/21/1/015014.Micro-Hotplate based Metal-Oxide Semiconductor Gas Sensors: Past, Present and Future
SGS 2010 VII International Workshop on Semiconductor Gas Sensors, Krakow, Poland, September 12-16, 2010.Towards Smart Objects and the Internet of Things: A System in Foil Approach
Journées nationales sur la récupération et le stockage d'énergie pour l'alimentation des microsystèmes autonomes, Paris, France, October 14-15, 2010.Micro-solid oxide fuel cells as power supply for small portable electronic equipment
2010. PowerMEMS 2010, 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Leuven, Belgium, 31.11-3.12.2010.Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.10.009.Miniaturized Fourier transform spectrometer for gas detection in the MIR region
Sensors and Actuators B. 2010. DOI : 10.1016/j.snb.2010.03.050.Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization
2010. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. p. 203 - 206.Micro gas preconcentrator in porous silicon filled with a carbon absorbent
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.05.054.Evaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detection
Journal of Measurement Science and Technology. 2010. DOI : 10.1088/0957-0233/21/7/075801.Foil level packaging of a chemical gas sensor
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055026.Investigations of room temperature bolometers for THz applications
IRMMW-THz 2010, Rome, Italy, September 5-10, 2010.Selected Peer-Reviewed Articles from the Symposium L-"Biological and Chemical Sensors and Transducers: From Materials to Systems"-of the EMRS Spring Meeting 2009
Sensor Letters. 2010. DOI : 10.1166/sl.2010.1279.Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING. 2010. DOI : 10.1002/tee.20507.Reversed processing of dry photoresist: application to the encapsulation of chemical sensors
2010. Eurosensors XXIV, Linz, Austria, September 5-8, 2010. p. 335 - 338. DOI : 10.1016/j.proeng.2010.09.116.Mechanical and electrical characterization of Platinum lines used in sensing devices on polyimide foil
2010. LOPE-C 2010, Francfort, Germany, May 31-June 02, 2010. p. 67 - 70.Gas Sensors on Plastic Foil with Reduced Power Consumption for Wireless Applications
Lausanne, EPFL, 2010. DOI : 10.5075/epfl-thesis-4710.Ink-jet printed colorimetric gas sensors on plastic foil
2010. Conference on Organic Semiconductors in Sensors and Bioelectronics III, San Diego, CA, Aug 04-05, 2010. DOI : 10.1117/12.861142.Smart sensing systems integration: from silicon to plastics
2010. Smart Systems Integration 2010, Como, Italy, March 23-24, 2010.Epitaxial piezoelectric MEMS on silicon
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055008.Inkjet printed colorimetric ammonia sensor on plastic foil for low-cost and low-power devices
2010. MEMS 2010, Hong Kong, January 24-28, 2010. p. 883 - 886. DOI : 10.1109/MEMSYS.2010.5442348.Towards gas sensors on plastic foil
IMCS The 13th International Meeting on Chemical Sensors, Perth, Australia, July 11-14, 2010.Ultra-low power metal oxide gas sensor on plastic foil
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 584 - 587. DOI : 10.1109/SENSOR.2009.5285392.Multi sensor platform on plastic foil for environmental monitoring
2009. Eurosensors XXIII, Lausanne, September 06-09, 2009. p. 597 - 600. DOI : 10.1016/j.proche.2009.07.149.Micro-bolomètres pour des applications terahertz à température ambiante à l'échelle locale
Microscopie à sonde locale, Neufchâtel-Hardelot, March 16-20, 2009.A micro gas preconcentrator with improved performances for environmental monitoring
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 983 - 986. DOI : 10.1109/SENSOR.2009.5285982.Influence of the Adsorbent Material in the Performances of a Micro Gas Preconcentrator
2009. 13th International Symposium on Olfaction and Electronic Nose, Brescia, April 15-17, 2009. p. 323 - 326.Colorimetric gas sensors based on optical waveguides made on plastic foil
2009. Eurosensors XXIII, Lausanne, September 6-9, 2009. p. 576 - 579. DOI : 10.1016/j.proche.2009.07.144.Thermal Characterization of Polycrystalline CVD Diamond Thin Films
2009. Eurosensors 2009, Lausanne, September 6-9, 2009. DOI : 10.1016/j.proche.2009.07.152.PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION
2009. The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, December 1-4, 2009. p. 108 - 111.Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B:Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.Epitaxial Thin Films on Silicon for MEMS devices
1st National Congress on Functional Oxide for Electronics - FOxE, Sorrento, March 25-27, 2009.Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguides
Sensors and Actuators B. 2009. DOI : 10.1016/j.snb.2009.08.049.MEMS for space
2009. Transducers 2009, Denver, June 21-25, 2009. p. 17 - 24. DOI : 10.1109/SENSOR.2009.5285575.Large Deformation Balloon Micro-Actuator Based on Pyrotechnics on Chip
2008. 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, 13-17 Jan. 2008. p. 535 - 538. DOI : 10.1109/MEMSYS.2008.4443711.Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates
Journal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
International Display Workshop IWD'08, Niigata, Japan, December 3-5, 2008.On the thermal simulation and characterisation of microsystems: progress and status
2008. p. 133 - 136.Thermal Contact Calibration between a Thermocouple Probe and a Microhotplate
Journal of Heat Transfer. 2008. DOI : 10.1115/1.2943306.Detection of Surface Stress Induced Deflections in Piezoelectric Cantilever Sensors Using a Charge Integrator
2008. ICCAS 2008, Seoul, October 14-17, 2008. p. 937 - 940. DOI : 10.1109/ICCAS.2008.4694629.Digital Micro-thrusters with simplified architecture and reliable ignition and combustion
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 157 - 160.Autonomous Sensors on flexible foils powered by RFID and energy scavenging for environmental and goods monitoring
2008. PowerMEMS 2008 + microEMS 2008, Sendai, November 9-12, 2008. p. 173 - 176.MEMS for Space
2008.Integrated Temperature, Humidity and Gas Sensors on Plastic Substrates for RFID and Low-Power Applications
2008.Hybrid organic / inorganic sensing platforms on flexible plastic substrates
2008.Sensor on Flexible Substrates
2008.Establishment of a technology platform for epitaxial piezoelectric MEMS
2008. Eurosensors XXII, Dresden, Germany, September 7-10, 2008. p. 819 - 822.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 269 - 272.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.Transfer of UV Glue patterned by Photolithography for Microsystems assembling and packaging
2008. p. 1317 - 1320.Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods
Journal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.Evaluation of spin-coatable colorimetric films for ammonia detection using optical waveguides
2008.Capacitive gas sensor arrays on plastic substrates for low power and mobiles applications
2008. p. 1431 - 1434.Microhotplates with TiN heaters
Sensors and Actuators A. 2008. DOI : 10.1016/j.sna.2008.08.016.Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate
2008. p. 74 - 77. DOI : 10.1109/ICSENS.2008.4716386.Micro-Hotplate Devices for Micro-SOFC
2007. p. 421 - 427.Highly integrated wafer level packaged Mox gas sensors
2007. p. 2401 - 2404. DOI : 10.1109/SENSOR.2007.4300654.Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters
Sensors and Actuators A. 2007. DOI : 10.1016/j.sna.2006.07.023.Application of Carbon “Nano”Powders and Porous Silicon for Gas Pre-Concentration
2007.Gas Detection using a Micromachined FTIR Spectrometer
2007. p. 1364 - 1367. DOI : 10.1109/ICSENS.2007.4388665.Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications
2007. p. 158 - 161. DOI : 10.1109/ICSENS.2007.4388360.Direct integration of carbon nanotubes on micromachined hotplates
Nanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.SH-SAW dual delay line based e-tongue system with improved discrimination capabilities
2007.Integration of MOX gas sensors on polyimide hotplates
Sensors and Actuators A. 2007. DOI : 10.1016/j.snb.2007.09.013.Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration
2007. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, 10-14 06 2007. p. 249 - 252. DOI : 10.1109/SENSOR.2007.4300116.Microsystems for the Space and Transport Industries
2007.Future of Materials in MEMS and NEMS
2007.Micro-hotplates-A platform for micro-solid oxide fuel cells
Journal of Power Sources. 2007. DOI : 10.1016/j.jpowsour.2006.12.072.Reliability improvement of suspended platinum-based micro-heating elements
Sensors and Actuators A. 2007. DOI : 10.1016/j.sna.2007.04.006.A Calibration Tool for Passive Contact Temperature Probe
2007.Application of carbon nano-powders for a gas micro-preconcentrator
Sensors and Actuators B. 2007. DOI : 10.1016/j.snb.2007.07.029.Micro Gas Sensing Components on Flexible Substrates
2007.Micromachined Platforms on Silicon for Micro-SOFC
2007. p. 157 - 160.Precise Thermography of Microsystems in the Visible Region using a Standard CCD Camera
2007. p. 926 - 929. DOI : 10.1109/ICSENS.2007.4388554.Electrical Conductivity of LSCF Thin Films for SOFC on Micro Hotplates
2006.Optimization of the material composition of platinum micro-heating elements
2006. p. W1B - P1.Direct Integration of Carbon Nanotubes on Micro Gas Sensing Platforms
2006. p. 671 - 674. DOI : 10.1109/ICSENS.2007.355557.Space applications of micro hot plate chemical sensors
2006.Micro Analytical Instrumentation for Gas Analysis
2006.Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell development
Sensors and Actuators B. 2006. DOI : 10.1016/j.snb.2006.04.031.Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication and Testing
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.880232.Matrix of 10 x 10 addressed solid propellant microthrusters: Review of the technologies
Sensors and Actuators A. 2006. DOI : 10.1016/j.sna.2005.08.024.Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
Thin Solid Films. 2006. DOI : 10.1016/j.tsf.2006.07.054.CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs
2006.Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
2006.Wafer Level Packaging of Micromachined Gas Sensors
IEEE Sensors. 2006. DOI : 10.1109/JSEN.2006.881355.Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
2006. p. 82 - 83. DOI : 10.1109/OMEMS.2006.1708275.Application of carbon "Nano" powders and porous silicon for gas preconcentration
2006. p. W1A - P11.Metal oxide gas sensors on polyimide micro-hotplates
2006.Highly integrated solid propellant micro-thrusters using SOI wafers
2006. p. 11013 - 6p..Study on integration of carbon nanotube on micro-hotplates
2006. p. 155 - 157.Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
Advanced Materials. 2006. DOI : 10.1002/adma.200600718.Mems and Nanotechnologies for Space
2006.Micro-hotplates on polyimide for sensors et actuators
Sensors and Actuators A. 2006. DOI : 10.1016/j.sna.2006.06.003.Paraffin-PDMS composite thermo microactuator with large vertical displacement capability
2006. p. 215 - 218.The influence of the insulator surface properties on the hydrogen response of field-effect gas sensors
Journal of applied Physics. 2005. DOI : 10.1063/1.1994941.Compatibility of Screen-Printing Technology with Micro Hotplate for Gas Sensor and Solid Oxide Micro Fuel Cell Development
2005.MEMS Hotplates with TiN as a Heater Material
2005. p. 330 - 333. DOI : 10.1109/ICSENS.2005.1597703.Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystems
Thin Solid Films. 2005. DOI : 10.1016/j.tsf.2005.03.021.Miniaturisation Of Solid Propellant Thrusters For Space Application
2005. p. 736 - 741.Ta2O5 and HfO2 as ion-sensitive materials in ISFETs
2005. p. 183 - 188.Failure Analysis of Micro-Heating Elements Suspended on Thin Membranes
2005. 16th European Symposium Realibility of Electron Devices, Failure Physics and Analysis. p. 1786 - 1789. DOI : 10.1016/j.microrel.2005.07.106.Polymeric Hotplates for Sensors and Actuators
2005.Integration of robust fluidic interconnects using metal to glass anodic bonding
Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/9/007.Micro-Heat Generation for Chemical Reactions
2005.Wafer Level Packaging of Micro-Machined Gas Sensors
2005.Thermal Laser Stimulation For MEMS characterisation and failure analysis from principles to case studies
2005. p. 134 - 153.Development of MicroHeaters on SOI for MicroIgnition Application
2004. p. 309 - 312.Wafer Level Packaging of Micro-Machined Gas Sensors
2004. p. 746 - 748. DOI : 10.1109/ICSENS.2004.1426275.Microfabrication process for the realization of a matrix of solid-propellant microthrusters
2004. p. 260 - 277.High-k Dielectrics for Use as ISFET Gate Oxides
2004. p. 677 - 680. DOI : 10.1109/ICSENS.2004.1426257.Bonding properties of metals anodically bonded to glass
Sensors and Actuators A. 2004. DOI : 10.1016/j.sna.2003.10.070.Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding
2004. p. 649 - 652.Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator
Selected Topics in quantum electronics. 2004. DOI : 10.1109/JSTQE.2004.830616.Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
2004. p. 23 - 28.Metal to Glass Anodic Bonding for Microsystems Packaging
2003. p. 1824 - 1827. DOI : 10.1109/SENSOR.2003.1217142.Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
2003. p. 696 - 697.Modulated operating temperature for MOSFET gas sensors: hydrogen recovery time reduction and gas discrimination
Sensors and Actuators B. 2003. DOI : 10.1016/S0925-4005(03)00230-2.Solid Propellant Thrusters for Space Application
2003. p. 80 - 81.Accelareted Ageing of Micro-Hotplates for Gas Sensing Applications
2003. p. 1314 - 1317. DOI : 10.1109/ICSENS.2003.1279159.Pyrotechnical Microthrusters for Space Application
2003. p. 57 - 60.Microstructures Study of Pt Thin Film Used in MEMS Fabrication
2003.MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication
2003. p. 790 - 797.Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters
2003. p. 408 - 409.Downscaling of Solid Propellant Pyrotechnical Microsystems
2003. p. 1423 - 1426. DOI : 10.1109/SENSOR.2003.1217042.On the Reliability of a Platinum Heater for Mirco-Hotplates
2002.Recovery Time Reduction and Gas Discrimination for Mosfet Gas Sensors
2002.Thermal optimization of micro-hotplates that have a silicon island
Journal of Micromechanics and Microengineering. 2002. DOI : 10.1088/0960-1317/12/6/330.Metallic Packaging of a Piezoresistive Pressure Sensor
2002.Processing influence on the reliability of platinum thin films for MEMS applications
2002.Solid Propellant Micro-Rockets - Towards a New Type of Power MEMS
2002.Influence of temperature on metal to glass anodic bonding
2002.Application of the ESEM Heating Stage of Microstructural Transformation studies
2002.Thermally isolated MOSFET for gas sensing application
IEEE Electron Device Letters. 2001. DOI : 10.1109/55.892428.Silicon planar microcalorimeter employing nanostructured films
2001. p. 820 - 823. DOI : 10.1007/978-3-642-59497-7_194.Thermally Isolated Microelectronic Devices for Gas Sensing Applications.
Université de Neuchâtel, 2001.A polymer gate FET sensor array for detecting organic vapours
Sensors and Actuators B. 2001. DOI : 10.1016/S0925-4005(01)00687-6.Thermal management of micro-hotplates using MEMCAD as simulation tool
2000. p. 640 - 643.New response patterns for MOSFET gas sensors using low-power devices
2000. p. 737 - 740.Characterisation of an electrodeposited conducting polymer FET array for vapour and odour sensing
2000. p. 35 - 42.A low-power micromachined MOSFET gas sensor
Journal of Microelectromechanical Systems. 2000. DOI : 10.1109/84.870055.Micro-hotplate, a useful concept for gas sensing, fluidics and space applications
2000. p. 151 - 157.Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors
Sensors and Actuators B. 2000. DOI : 10.1016/S0925-4005(00)00433-0.Microsystems for diverse applications using recently developed microfabrication techniques
2000. p. 16 - 27.High temperature micro-hotplates for drop coated gas sensors
1999. p. 703 - 704.Novel low-power consumption MOSFET array gas sensor
1999. p. 338 - 341.Thermal aspects in thermal and resistive type gas sensors
1998. p. 34 - 40.Enseignement & Phd
Enseignement
Microengineering
A dirigé les thèses EPFL de
Bourely James Alec Pierce , Courbat Jérôme , Demuru Silvia , Fumeaux Nicolas Francis , Gueye Rokhaya , Isarakorn Don , Janphuang Pattanaphong , Mancinelli Alessio , Marette Alexis Pierre Henri , Molina Lopez Francisco , Monroe Morgan Mc Kay , Strässle Rahel , Vasquez Quintero Andres Felipe , de Koninck David , van Dommelen Ryan Mitchell ,Cours
Conception de mécanismes I
Ce cours introduit les bases de la mécanique des structures : calcul des contraintes et déformations provoquées par les forces extérieures et calcul des déformations. Ces enseignements théoriques sont appliqués à la conception des éléments importants des mécanismes de précision.
Organic and printed electronics
Ce cours traite de la mise en œuvre des technologies de l'électronique organique et imprimée: les matériaux, les procédés d'impression sur grande surface, les dispositifs, les systèmes et applications seront adressés, tant du point de vue recherche que commercial.
Advanced MEMS & microsystems
Approfondissement des principes de fonctionnement et technologie des Micro et Nanosystèmes avancés. Familiarisation avec leur implémentation dans des produits et leurs applications.