Danick Briand
Senior Scientist
danick.briand@epfl.ch +41 21 695 45 64 http://lmts.epfl.ch/EnviroMEMS
EPFL STI IMT LMTS
MC B4 147 (Bâtiment MC)
Rue de la Maladière 71b, CP 526
2002 Neuchâtel 2
Web site: Web site: https://lmts.epfl.ch/
+41 21 695 45 64
EPFL
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STI
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STI-SMT
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SMT-ENS
+41 21 695 45 64
EPFL
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VPO-SE
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OHS
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COSEC-STI
Fields of expertise
MEMS and Microsystems
Flexible and Printed Electronics
Energy Harvesting and PowerMEMS
Smart Sensing Systems
Advanced Gas Sensing Technologies
Microfabrication and Printing technologies
Microsystems Integration and Packaging
Mission
Environmentally-friendly technology is a rapidly growing research area and many micro and nano technologies are being developed to tackle the environmental problems. These technologies must enable the effective use of resources and energy in their realization and their application. Microtechnology is a tool that can contribute at mitigating environmental issues. The development of the next generation of Microsystems should lead to sustainable, reusable, recyclable and environmental friendly devices and systems. The research program of the MEMS and Printed Microsystem group at EPFL-LMTS is towards microtechnologies for sustainable development, envisioning environmental friendly processes for MEMS production and their use in applications that could bring benefits to the environment. Research areas and themes include: Environmental sensors and technologies based on MST Green microtechnologies and micromanufacturing Ultra low energy MEMS technologies: production and operation Energy saving and harvesting technologies: green and environmental applicationsEducation
Dr. ès Sciences
Microtechnology
Université de Neuchâtel
2001
Master in Applied Sciences
Engineering Physics
Ecole Polytechnique de Montréal
1997
Publications
Infoscience publications
2024
3D Printing of Customizable Transient Bioelectronics and Sensors
Advanced Electronic Materials. 2024. DOI : 10.1002/aelm.202400058.Degradable and Printed Microstrip Line for Chipless Temperature and Humidity Sensing
Advanced Electronic Materials. 2024. DOI : 10.1002/aelm.202400229.2023
Printed ecoresorbable temperature sensors for environmental monitoring
Micro and Nano Engineering. 2023-05-26. DOI : 10.1016/j.mne.2023.100218.Biodegradable materials as sensitive coatings for humidity sensing in S-band microwave frequencies
Micro and Nano Engineering. 2023-04-05. DOI : 10.1016/j.mne.2023.100185.Zinc hybrid sintering for printed transient sensors and wireless electronics
npj Flexible Electronics. 2023-03-14. DOI : 10.1038/s41528-023-00249-0.Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates
Microsystems & Nanoengineering. 2023-02-23. DOI : 10.1038/s41378-023-00489-0.Digital manufacturing of personalised footwear with embedded sensors
Scientific Reports. 2023-02-03. DOI : 10.1038/s41598-023-29261-0.Additively Manufactured Degradable Piezoelectric Microsystems for Sensing and Actuating
Advanced Materials Technologies. 2023. DOI : 10.1002/admt.202300745.Organic electrochemical transistors printed from degradable materials as disposable biochemical sensors
Scientific Reports. 2023. DOI : 10.1038/s41598-023-38308-1.Multisensing wearables for real-time monitoring of sweat electrolyte biomarkers during exercise and analysis on their correlation with core body temperature
IEEE Transactions on Biomedical Circuits and Systems. 2023. DOI : 10.1109/TBCAS.2023.3286528.2022
Printed Humidity Sensors from Renewable and Biodegradable Materials
Advanced Materials Technologies. 2022-11-14. DOI : 10.1002/admt.202201302.Antibody-Coated Wearable Organic Electrochemical Transistors for Cortisol Detection in Human Sweat
Acs Sensors. 2022-09-02. DOI : 10.1021/acssensors.2c01250.80 K cryogenic stage for ice lithography
Micro And Nano Engineering. 2022-04-01. DOI : 10.1016/j.mne.2021.100101.Design and printing of a coplanar capacitive proximity sensor to detect the gap between dielectric foils edges
Sensors and Actuators A: Physical. 2022-02-08. DOI : 10.1016/j.sna.2022.113424.All-Inkjet-Printed Graphene-Gated Organic Electrochemical Transistors on Polymeric Foil as Highly Sensitive Enzymatic Biosensors
ACS Applied Nano Materials. 2022-01-10. DOI : 10.1021/acsanm.1c04434.2021
In-situ laser sintering for the fabrication of fully 3D printed electronics composed of elastomeric materials
Flexible and Printed Electronics. 2021-10-20. DOI : 10.1088/2058-8585/ac20c0.Thin film organic electrochemical transistors based on hybrid PANI/PEDOT:PSS active layers for enhanced pH sensing
Biosensors and Bioelectronics: X. 2021-03-25. DOI : 10.1016/j.biosx.2021.100065.Printed Iontophoretic‐Integrated Wearable Microfluidic Sweat‐Sensing Patch for On‐Demand Point‐Of‐Care Sweat Analysis
Advanced Materials Technologies. 2021-03-05. DOI : 10.1002/admt.202000910.2020
Deep-UV-Enhanced Approach for Low-Temperature Solution Processing of IZO Transistors with High-k AlOx/YAlOx Dielectric
Acs Applied Electronic Materials. 2020-10-27. DOI : 10.1021/acsaelm.0c00444.Synaptic transistors with aluminum oxide dielectrics enabling full audio frequency range signal processing
Scientific Reports. 2020-10-07. DOI : 10.1038/s41598-020-73705-w.Real-Time Multi-Ion Detection in the Sweat Concentration Range Enabled by Flexible, Printed, and Microfluidics-Integrated Organic Transistor Arrays
Advanced Materials Technologies. 2020-08-16. DOI : 10.1002/admt.202000328.Fryns type mesomelic dysplasia of the upper limbs caused by inverted duplications of the HOXD gene cluster
European Journal Of Human Genetics. 2020-03-01. DOI : 10.1038/s41431-019-0522-2.Fully 3D Printed Mechanical Pressure Sensors: A Comparison of Sensing Mechanisms
2020-01-01. IEEE Sensors Conference, ELECTR NETWORK, Oct 25-28, 2020. DOI : 10.1109/SENSORS47125.2020.9278862.2019
Triboelectric‐TFT Flip‐Flop for Bistable Latching of Dielectric Elastomer Actuators
Advanced Electronic Materials. 2019-07-30. DOI : 10.1002/aelm.201900205.All-printed low-power metal oxide gas sensors on polymeric substrates
Flexible And Printed Electronics. 2019-03-01. DOI : 10.1088/2058-8585/aaf848.Nonlinear piezoelectric vibration energy harvester with frequency-tuned impacting resonators for improving broadband performance at low frequencies
Smart Materials And Structures. 2019-02-01. DOI : 10.1088/1361-665X/aaf358.Triboelectric effect to harness fluid flow energy
2019-01-01. 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Daytona Beach, FL, Dec 04-07, 2018. p. 012084. DOI : 10.1088/1742-6596/1407/1/012084.3D-Integration Of Printed Electrochemical Sensors In Pet Microfluidics For Biochemical Sensing
2019-01-01. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 2464-2467. DOI : 10.1109/TRANSDUCERS.2019.8808497.Fully Fdm 3D Printed Flexible Capacitive And Resistive Transducers
2019-01-01. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 2440-2443. DOI : 10.1109/TRANSDUCERS.2019.8808268.Design and Optimization of a Low Power and Fast Response Viscometer Used for Determination of the Natural Gas Wobbe Index
IEEE Sensors Journal. 2019-07-12. DOI : 10.1109/JSEN.2019.2928479.Triboelectric freestanding flapping film generator for energy harvesting from gas flow in pipes
Smart Materials and Structures. 2019-06-21. DOI : 10.1088/1361-665X/ab0840.Calibration Tools for Scanning Thermal Microscopy Probes Used in Temperature Measurement Mode
Journal of Heat Transfer. 2019-05-14. DOI : 10.1115/1.4043381.Large area scanning thermal microscopy and infrared imaging system
Measurement Science and Technology. 2019-02-14. DOI : 10.1088/1361-6501/aafa96.2018
Microfabricated high temperature sensing platform dedicated to scanning thermal microscopy (SThM)
Sensors and Actuators A. 2018-06-01. DOI : 10.1016/j.sna.2018.04.011.Architecture for the efficient manufacturing by printing of heated, planar, resistive transducers on polymeric foil for gas sensing
Sensors and Actuators B. 2018-04-01. DOI : 10.1016/j.snb.2017.11.108.Low-power printed micro-hotplates through aerosol jetting of gold on thin polyimide membranes
Microelectronic Engineering. 2018-03-17. DOI : 10.1016/j.mee.2018.03.013.Soft triboelectric generators by the use of cost-effective elastomers and simple casting process
Sensors and Actuators A. 2018-03-01. DOI : 10.1016/j.sna.2017.12.018.Highly transparent humidity sensor with thin cellulose acetate butyrate and hydrophobic AF1600X vapor permeating layers fabricated by screen printing
Sensors and Actuators B: Chemical. 2018-10-12. DOI : 10.1016/j.snb.2018.10.061.Self-powered triboelectric touch sensor made of 3D printed materials
Nano Energy. 2018. DOI : 10.1016/j.nanoen.2018.07.038.Yttrium zinc tin oxide high voltage thin film transistors
Applied Physics Letters. 2018. DOI : 10.1063/1.5048992.2017
Nanoscale thermal imaging of active devices by fluorescent SThM
2017-12-25. 23rd International Workshop Thermal Investigations of ICs and Systems (Therminics), Amsterdam, The Netherlands, September 26-29, 2017. DOI : 10.1109/THERMINIC.2017.8233839.Additive manufacturing on 3D surfaces
2017-09-06. Additive Manufacturing in Products and Applications, Zurich, Switzerland. p. 137-144. DOI : 10.1007/978-3-319-66866-6_13.Low-power heating platform for the characterization and calibration of scanning thermal probes
2017-08-25. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 334. DOI : 10.3390/proceedings1040334.Design, fabrication and optimization of a silicon MEMS natural gas sensor
2017-08-17. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 470. DOI : 10.3390/proceedings1040470.Aerosol jet printing of miniaturized, low power flexible micro-hotplates
2017-08-17. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 316. DOI : 10.3390/proceedings1040316.3D printed materials based triboelectric device for energy harvesting and sensing
2017-08-16. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 580. DOI : 10.3390/proceedings1040580.Soft triboelectric band for sensing of and energy scavenging from body motion
2017-08-09. Eurosensors XXXI, Paris, France, September 3-6, 2017. p. 387. DOI : 10.3390/proceedings1040387.Fully casted stretchable triboelectric device for energy harvesting and sensing made of elastomeric materials
2017-07-27. Transducers 2017, Kaohsiung, Taïwan, June 18-22, 2017. p. 1813-1816. DOI : 10.1109/TRANSDUCERS.2017.7994422.Full integration of a dielectric elastomer actuator with a flexible 1 kV thin-film transistor
2017-07-27. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taïwan, June 18-22, 2017. p. 2063-2066. DOI : 10.1109/TRANSDUCERS.2017.7994479.Lightweight, Room-Temperature CO2 Gas Sensor Based on Rare-Earth Metal-Free Composites- An Impedance Study
Acs Applied Materials & Interfaces. 2017. DOI : 10.1021/acsami.7607379.Flexible Zinc-Tin Oxide Thin Film Transistors Operating at 1 kV for Integrated Switching of Dielectric Elastomer Actuators Arrays
Advanced Materials. 2017. DOI : 10.1002/adma.201700880.Recent improvements on micro-thermocouple based SThM
2017. 5th Nanoscale and Microscale Heat Transfer (NMHT) Conference, GREECE, SEP 26-30, 2016. p. 012005. DOI : 10.1088/1742-6596/785/1/012005.2016
High resolution SThM microscopy with fluorescent nanoprobes
2016-09-30. Nanoscale and Microscale Heat Transfer V, Santorini, Greece, September 26-30, 2016.Electrically conductive fabric based stretchable triboelectric energy harvester
2016-12-09. PowerMEMS 2016, Paris, France, December 6-9, 2016. p. 012005. DOI : 10.1088/1742-6596/773/1/012005.Fully casted soft power generating triboelectric shoe insole
2016-12-09. PowerMEMS 2016, Paris, France, December 6-9, 2016. p. 012097. DOI : 10.1088/1742-6596/773/1/012097.Tubular gas preconcentrators based on inkjet printed micro-hotplates on foil
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.121.Fully inkjet printed SnO2 gas sensor on plastic substrate
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.042.Smart RFID Label with a Printed Multisensor Platform for Environmental Monitoring
Flexible and Printed Electronics. 2016. DOI : 10.1088/2058-8585/1/2/025003.Green paper-based piezoelectronics for sensors and actuators
Sensors and Actuators A. 2016. DOI : 10.1016/j.sna.2016.04.024.A low-cost UWB sensor node powered by a piezoelectric harvester or solar cells
Sensors and Actuators A: Physical. 2016. DOI : 10.1016/j.sna.2016.01.011.2015
Micromachined temperature calibration tool for contact Scanning Thermal Microscope probes
2015. 21st International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Paris, France, Sept. 30 - Oct. 2 2015. p. 1-5. DOI : 10.1109/THERMINIC.2015.7389643.Green piezoelectric for autonomous smart textile
2015. 15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), Boston, MA, DEC 01-04, 2015. p. 012082. DOI : 10.1088/1742-6596/660/1/012082.Characterization of Piezoelectric PDMS-Nanoparticle Composites
2015. PowerMEMS 2015, Boston, USA, December 1-4, 2015. p. 012078. DOI : 10.1088/1742-6596/660/1/012078.Farnesoid X receptor inhibits glucagon-like peptide-1 production by enteroendocrine L cells
Nature Communications. 2015. DOI : 10.1038/ncomms8629.Room temperature Si-Ti thermopile THz sensor
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2015. DOI : 10.1007/s00542-014-2252-2.Gas Preconcentrator Made by Rolling up a Printed Hotplate on Foil
2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 265-268. DOI : 10.1016/j.proeng.2015.08.602.Capacitive Strain Sensors Inkjet-printed on PET Fibers for Integration in Industrial Textile
2015. Eurosensors 2015, Freiburg, Germany, September 06-09, 2015. p. 279-282. DOI : 10.1016/j.proeng.2015.08.613.Single Layer Gold Hotplate, Printed on Polyimide, with Heater Used as Sensing Current Drain for Metal-oxide Gas Sensor
2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 707-710. DOI : 10.1016/j.proeng.2015.08.764.Inkjet Printed SnO2 Gas Sensor on Plastic Substrate
2015. Eurosensors 2015, Freiburg, September 06-09, 2015. p. 75-78. DOI : 10.1016/j.proeng.2015.08.569.Micromachined Calibration Chip with Heat Source and Temperature Sensors for Scanning Thermal Metrology (SThM)
2015. Eurosensors, 2015. p. 130-133. DOI : 10.1016/j.proeng.2015.08.583.Green Paper-based Piezoelectric Material for Sensors and Actuators
2015. Eurosensors, 2015. p. 360-363. DOI : 10.1016/j.proeng.2015.08.637.Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissue
Biomedical Microdevices. 2015. DOI : 10.1007/s10544-015-9981-6.Harvesting Energy From a Rotating Gear Using an AFM-Like MEMS Piezoelectric Frequency Up-Converting Energy Harvester
Journal of Microelectromechanical Systems. 2015. DOI : 10.1109/JMEMS.2014.2349794.Preconcentration Modeling for the Optimization of a Micro Gas Preconcentrator Applied to Environmental Monitoring
Analytical Chemistry. 2015. DOI : 10.1021/acs.analchem.5b00400.Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist
Journal of Micromechanics and Microengineering. 2015. DOI : 10.1088/0960-1317/25/4/045013.Polylactic acid as a biodegradable material for all-solution-processed organic electronic devices
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.11.010.Inkjet and microcontact printing of functional materials on foil for the fabrication of pixel-like capacitive vapor microsensors
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.10.041.2014
Spectroscopy in a micro-fabricated Rb cell with anti-relaxation wall-coating
2014. 28th European Frequency and Time Forum EFTF 2014, Neuchâtel, Switzerland, June 23-26, 2014. p. 554-557. DOI : 10.1109/EFTF.2014.7331561.Development of a MEMS Preconcentrator for Micro-gas Chromatography Analyses
Procedia Engineering. 2014. DOI : 10.1016/j.proeng.2014.11.413.Printing And Encapsulation Of Electrical Conductors On Polylactic Acid (Pla) For Sensing Applications
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014. p. 532-535. DOI : 10.1109/MEMSYS.2014.6765695.Large Arrays Of Inkjet-Printed Mems Microbridges On Foil
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, January 26-30, 2014. p. 506-509. DOI : 10.1109/MEMSYS.2014.6765688.On The Optimization And Performances Of A Compact Piezoelectric Impact Mems Energy Harvester
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014. p. 429-432. DOI : 10.1109/MEMSYS.2014.6765668.A Wearable System Of Micromachined Piezoelectric Cantilevers Coupled To A Rotational Oscillating Mass For On-Body Energy Harvesting
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, USA, January 26-30, 2014. p. 370-373. DOI : 10.1109/MEMSYS.2014.6765653.Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates
Microelectronics Reliability. 2014. DOI : 10.1016/j.microrel.2014.06.015.Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
Journal of Microelectromechanical Systems. 2014. DOI : 10.1109/Jmems.2014.2314702.Frequency up-converting Vibration Energy Harvester with Multiple Impacting Beams for Enhanced Wideband Operation at Low Frequencies
2014. p. 1517-1520. DOI : 10.1016/j.proeng.2014.11.587.Gas Sensing Properties of Metal-decorated Tungsten Oxide Nanowires Directly Grown onto Flexible Polymeric Hotplates
2014. p. 700-703. DOI : 10.1016/j.proeng.2014.11.633.MEMS-based Porous Silicon Preconcentrators Filled with Carbopack-B for Explosives Detection
2014. p. 84-87. DOI : 10.1016/j.proeng.2014.11.271.Design and development of sensing RFID Tags on flexible foil compatible with EPC Gen 2
IEEE Sensors Journal. 2014. DOI : 10.1109/JSEN.2014.2335417.Development of a New Generation of Ammonia Sensors on Printed Polymeric Hotplates
Analytical Chemistry. 2014. DOI : 10.1021/ac501908c.Microfabricated alkali vapor cell with anti-relaxation wall coating
Applied Physics Letters. 2014. DOI : 10.1063/1.4891248.DC and AC scanning thermal microscopy using micro-thermoelectric probe
High Temperatures-High Pressures. 2014.Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level
Sensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2014.01.032.Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates
Smart Materials and Structures. 2014. DOI : 10.1088/0964-1726/23/4/045041.Properties and Printability of Inkjet and Screen-Printed Silver Patterns for RFID Antennas
Journal Of Electronic Materials. 2014. DOI : 10.1007/s11664-013-2893-4.2013
RF-TSVs compatible with harsh-environment post-processing for “via-first” 3D integration
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 830-833. DOI : 10.1109/Transducers.2013.6626895.Printed micro-hotplates on flexible substrates for gas sensing
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 1059-1062. DOI : 10.1109/Transducers.2013.6626953.Leak rate and reliability of low temperature thin-film indium bonding
2013. Transducers 2013, Barcelona, Spain, June 17-20, 2013. p. 814-817. DOI : 10.1109/Transducers.2013.6626891.Self-standing printed humidity sensor with thermo-calibration and integrated heater
2013. Transducers 2013, Barcelona, Spain, June 16-20, 2013. p. 838-841. DOI : 10.1109/Transducers.2013.6626897.Flexible and Robust Multilayer Micro-Vibrational Harvesters for High Acceleration Environments
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012113.On the experimental determination of the efficiency of piezoelectric impact-type energy harvesters using a rotational flywheel
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012137.Multiphysics finite element model of a frequency-amplifying piezoelectric energy harvester with impact coupling for low-frequency vibrations
2013. The 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)', u'13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS)']. DOI : 10.1088/1742-6596/476/1/012090.High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMS
2013. p. 86140H. DOI : 10.1117/12.2006216.Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substrates
Journal Of Applied Physics. 2013. DOI : 10.1063/1.4829023.Decreasing the size of printed comb electrodes by the introduction of a dielectric interlayer for capacitive gas sensors on polymeric foil: Modeling and fabrication
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.sob.2013.01.008.Quantitative thermal microscopy using thermoelectric probe in passive mode
Review of Scientific Instruments. 2013. DOI : 10.1063/1.4824069.Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile Applications
IEEE Sensors Journal. 2013. DOI : 10.1109/JSEN.2013.2257167.Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stability
Sensors and Actuators B: Chemical. 2013. DOI : 10.1016/j.snb.2012.11.025.Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packaging
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/7/075007.An Automatic Test Bench for Complete Characterization of Vibration-Energy Harvesters
IEEE Transactions on Instrumentation and Measurement. 2013. DOI : 10.1109/TIM.2013.2265452.Foil-to-foil lamination and electrical interconnection of printed components on flexible substrates
Microelectronic Engineering. 2013. DOI : 10.1016/j.mee.2013.04.040.A robust platform for textile integrated gas sensors
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.snb.2012.11.099.Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks
Journal of Applied Physics. 2013. DOI : 10.1063/1.4789942.Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation
Journal of Micromechanics and Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025012.Effect of low-temperature processing on dry film photoresist properties for flexible electronics
Journal of Polymer Science Part B: Polymer Physics. 2013. DOI : 10.1002/polb.23240.Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)
Sensors and Actuators A: Physical. 2013. DOI : 10.1016/j.sna.2012.11.025.2012
Physical and electrical properties of ink-jet and screen printed patterns for RFID HF antennas
2012. 2012 IEEE International Conference on RFID-Technologies and Applications (RFID-TA), Nice, France, November 5-7, 2012. p. 188-192. DOI : 10.1109/RFID-TA.2012.6404508.Capillary self-alignment dynamics for R2R manufacturing of mesoscopic system-in-foil devices
2012. 4rd Electronics System Integration Technology Conference ESTC 2012, Amsterdam, Netherlands, September 17, 2012. p. 6.PZT-BASED ENERGY HARVESTERS ON PLASTIC FOIL OPTIMIZED THROUGH THEORETICAL MODELING AND FABRICATION IMPROVEMENTS
2012. PowerMEMS 2012, Atlanta, GA, USA, December 2-5, 2012. p. 42-45.Silicon micromachined ultrasonic transducer for cutting applications with improved power transfer
2012. IEEE International Ultrasonics Symposium IUS, Dresden, Germany, Oct 7-10, 2012. p. 1169-1172.Realization of an autonomous UWB sensor node powered by a piezoelectric harvester
2012. MEMS 2012, Altanta, USA, December 2-5, 2012. p. tba.Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets
2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1041-1044. DOI : 10.1016/j.proeng.2012.09.328.Inkjet Printing of Interdigitated Capacitive Chemical Sensors with Reduced Size by the Introduction of a Dielectric Interlayer
2012. 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, POLAND, SEP 09-12, 2012. p. 1173-1176. DOI : 10.1016/j.proeng.2012.09.360.Zinc Oxide Nanowires Deposited on Polymeric Hotplates for Low-power Gas Sensors
2012. p. 1137-1140. DOI : 10.1016/j.proeng.2012.09.352.Fully Inkjet-Printed Parallel-Plate Capacitive Gas Sensors on Flexible Substrate
2012. IEEE Sensors 2012, Taipei, Taiwan, October 28-31, 2012. p. iii-lxxiii. DOI : 10.1109/ICSENS.2012.6411148.A Sub 100 µW UWB Sensor-Node Powered by a Piezoelectric Vibration Harvester
2012. The 2012 IEEE International Conference on Wireless Information Technology and Systems, Maui, Hawaï, USA, November 11-16, 2012. DOI : 10.1109/ICWITS.2012.6417828.Feasibility of Printing Woven Humidity and Temperature Sensors for the Integration into Electronic Textiles
2012. 4th International Conference on Smart Materials Structures Systems CIMTEC 2012, SYMPOSIUM D: Smart & Interactive Textiles, Montecatini, Italy, June 10-14, 2012. p. 77-82. DOI : 10.4028/www.scientific.net/AST.80.77.Micro-fabricated alkali vapor cells sealed at low temperatures with thin-film metallic bonding
2012. 2012 IEEE International Frequency Control Symposium (FCS), Baltimore, USA, May 21-24, 2012. p. 1-4. DOI : 10.1109/FCS.2012.6243661.Printed sensors on smart RFID labels for logistics
2012. 10th IEEE International NEWCAS Conference, Montreal, Canada, June 17-20, 2012. p. 449-452. DOI : 10.1109/NEWCAS.2012.6329053.Vibration energy harvester on plastic foil based on transferring PZT thick sheets
2012. MEMS 2012, Paris, France, January 30-February 2, 2012. p. 1289-1292. DOI : 10.1109/MEMSYS.2012.6170393.Micro systems based technologies for air-pollutant and gas detection
2012. IMCS 2012-The 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 395-398. DOI : 10.5162/IMCS2012/4.4.6.Inkjet printed capacitive transducers on flexible plastic substrates with increase stability
2012. IMCS 2012- the 14th International Meeting on Chemical Sensors, Nuremberg, Germany, May 20-23, 2012. p. 527-531. DOI : 10.5162/IMCS2012/6.2.1.All-additive Inkjet Printed Humidity and Temperature Sensors Fabricated and Encapsulated at Foil Level
2012. p. 1122-1125. DOI : 10.5162/IMCS2012/P1.8.6.Foil-to-foil Electrical Interconnection of Printed Capacitive Sensors Using Through Foil Vias and Anisotropic Conductive Adhesive Technologies
2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 275-278.Printed temperature and humidity sensors on paper
2012. LOPE-C Large-Area Organic & Printed Electronics Convention, Munich, Germany, June 11-13, 2012. p. 13-16.Environmental monitoring with a multisensor platform on polyimide foil
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.095.Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/8/085034.Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser Deposition
Fuel Cells. 2012. DOI : 10.1002/fuce.201200028.Low-temperature indium hermetic sealing of alkali vapor-cells for chip-scale atomic clocks
2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 361-364. DOI : 10.1109/MEMSYS.2012.6170209.La récolte d’énergie pour les micro et nanosystèmes autonomes
Journal ElectroSuisse. 2012.Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices
Smart Materials Research. 2012. DOI : 10.1155/2012/426048.All additive inkjet printed humidity sensors on plastic substrate
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.042.Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators
2012. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012. p. 64-67. DOI : 10.1109/MEMSYS.2012.6170094.Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/2/025013.2011
Why Going Towards Plastic and Flexible Sensors?
2011. 25th Eurosensors Conference, Athens, Greece, Sep 04-07, 2011. p. 8-15. DOI : 10.1016/j.proeng.2011.12.004.Humidity and Temperature Sensors on Plastic Foil for Textile Integration
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 136-139. DOI : 10.1016/j.proeng.2011.12.034.A colorimetric CO sensor for fire detection
2011. Proceeding of Eursensors XXV, Athens, Greece, September 4-7, 2011. p. 1329-1332. DOI : 10.1016/j.proeng.2011.12.328.Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applications
Sensors and Actuators, B: Chemical. 2011. DOI : 10.1016/j.snb.2011.11.050.PZT thick sheet on flexible plastic substrate for vibration energy harvesting
2011. Power MEMS 2011, Séoul, Korea, November 15-18, 2011. p. 151-154.A Sub-Threshold Passive Step-Up Rectifier for Vibration Energy Scavengers
2011. PowerMEMS 2011, Seoul, Republic of Korea, November 15-18, 2011. p. 38-41.A micro gas preconcentrator with improved performance for pollution monitoring and explosives detection
Analytica Chimica Acta. 2011. DOI : 10.1016/j.aca.2010.12.039.Special Issue EUROSENSORS XXIII The 23rd International International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems Lausanne, Switzerland, 6-9 September 2009 Preface
Sensors And Actuators B-Chemical. 2011. DOI : 10.1016/j.snb.2011.04.030.A shadow-mask evaporated pyroMEMS igniter
2011. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. p. 104013. DOI : 10.1088/0960-1317/21/10/104013.Ignition and Combustion Behavior in Solid Propellant Microsystems Using Joule-Effect Igniters
Journal of Microelectromechanical Systems. 2011. DOI : 10.1109/JMEMS.2011.2167667.Piezoresistive n-Type 4H-SiC Pressure Sensor with Membrane Formed by Mechanical Milling
2011. IEEE Sensors 2011, Limerik, Ireland, October 28-31, 2011. p. 222-225. DOI : 10.1109/ICSENS.2011.6126936.Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensing
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.09.001.Development of High Temperature Platinum TSVs
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1513-1516. DOI : 10.1016/j.proeng.2011.12.374.Evaluation of Thin Film Indium Bonding at Wafer Level
2011. Eurosensors XXV, Athens, Greece, September 4-7, 2011. p. 1493-1496. DOI : 10.1016/j.proeng.2011.12.369.Making environmental sensors on plastic foil
Materials Today. 2011. DOI : 10.1016/S1369-7021(11)70186-9.Energy harvesting from a rotating gear using an impact type piezoelectric MEMS scavenger
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 735-738. DOI : 10.1109/TRANSDUCERS.2011.5969852.Reliability of micro-hotplates on polyimide foil
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 338-341. DOI : 10.1109/TRANSDUCERS.2011.5969465.Inkjet printing on paper for the realization of humidity and temperature sensors
2011. Transducers’11, Beijing, China, June 5-9, 2011. p. 1356-1359. DOI : 10.1109/TRANSDUCERS.2011.5969506.The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Smart Materials and Structures. 2011. DOI : 10.1088/0964-1726/20/2/025015.2010
Ink-jet printed colorimetric gas sensors on plastic foil
2010. Conference on Organic Semiconductors in Sensors and Bioelectronics III, San Diego, CA, Aug 04-05, 2010. p. 77790A. DOI : 10.1117/12.861142.Selected Peer-Reviewed Articles from the Symposium L-"Biological and Chemical Sensors and Transducers: From Materials to Systems"-of the EMRS Spring Meeting 2009
Sensor Letters. 2010. DOI : 10.1166/sl.2010.1279.Special Issue of the Eurosensors XXIII conference Preface
Sensors And Actuators A-Physical. 2010. DOI : 10.1016/S0924-4247(10)00361-4.Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization
2010. PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010. p. 203-206.Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.10.009.Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/21/1/015014.Micro-solid oxide fuel cells as power supply for small portable electronic equipment
2010. PowerMEMS 2010, 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Leuven, Belgium, 31.11-3.12.2010.Reversed processing of dry photoresist: application to the encapsulation of chemical sensors
2010. Eurosensors XXIV, Linz, Austria, September 5-8, 2010. p. 335-338. DOI : 10.1016/j.proeng.2010.09.116.Micro gas preconcentrator in porous silicon filled with a carbon absorbent
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.05.054.Smart sensing systems integration: from silicon to plastics
2010. Smart Systems Integration 2010, Como, Italy, March 23-24, 2010. p. 19.Mechanical and electrical characterization of Platinum lines used in sensing devices on polyimide foil
2010. LOPE-C 2010, Francfort, Germany, May 31-June 02, 2010. p. 67-70.Evaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detection
Journal of Measurement Science and Technology. 2010. DOI : 10.1088/0957-0233/21/7/075801.Epitaxial piezoelectric MEMS on silicon
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055008.Miniaturized Fourier transform spectrometer for gas detection in the MIR region
Sensors and Actuators B. 2010. DOI : 10.1016/j.snb.2010.03.050.Foil level packaging of a chemical gas sensor
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055026.Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING. 2010. DOI : 10.1002/tee.20507.Inkjet printed colorimetric ammonia sensor on plastic foil for low-cost and low-power devices
2010. MEMS 2010, Hong Kong, January 24-28, 2010. p. 883-886. DOI : 10.1109/MEMSYS.2010.5442348.2009
Gas Detection with a Micro FTIR Spectrometer in the MIR Region
2009. Eurosensors XXIII Conference, Lausanne, Switzerland, September 6 - 9, 2009. p. 1379-1382. DOI : 10.1016/j.proche.2009.07.344.Thermal Characterization of Polycrystalline CVD Diamond Thin Films
2009. Eurosensors 2009, Lausanne, September 6-9, 2009. p. 108. DOI : 10.1016/j.proche.2009.07.152.PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION
2009. The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, December 1-4, 2009. p. 108-111.A micro gas preconcentrator with improved performances for environmental monitoring
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 983-986. DOI : 10.1109/SENSOR.2009.5285982.Influence of the Adsorbent Material in the Performances of a Micro Gas Preconcentrator
2009. 13th International Symposium on Olfaction and Electronic Nose, Brescia, April 15-17, 2009. p. 323-326.MEMS for space
2009. Transducers 2009, Denver, June 21-25, 2009. p. 17-24. DOI : 10.1109/SENSOR.2009.5285575.Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguides
Sensors and Actuators B. 2009. DOI : 10.1016/j.snb.2009.08.049.Ultra-low power metal oxide gas sensor on plastic foil
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 584-587. DOI : 10.1109/SENSOR.2009.5285392.Multi sensor platform on plastic foil for environmental monitoring
2009. Eurosensors XXIII, Lausanne, September 06-09, 2009. p. 597-600. DOI : 10.1016/j.proche.2009.07.149.Colorimetric gas sensors based on optical waveguides made on plastic foil
2009. Eurosensors XXIII, Lausanne, September 6-9, 2009. p. 576-579. DOI : 10.1016/j.proche.2009.07.144.Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B:Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.2008
Autonomous Sensors on flexible foils powered by RFID and energy scavenging for environmental and goods monitoring
2008. PowerMEMS 2008 + microEMS 2008, Sendai, November 9-12, 2008. p. 173-176.Digital Micro-thrusters with simplified architecture and reliable ignition and combustion
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 157-160.Microhotplates with TiN heaters
Sensors and Actuators A. 2008. DOI : 10.1016/j.sna.2008.08.016.Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates
Journal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods
Journal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.Thermal Contact Calibration between a Thermocouple Probe and a Microhotplate
Journal of Heat Transfer. 2008. DOI : 10.1115/1.2943306.MEMS for Space
2008.Integrated Temperature, Humidity and Gas Sensors on Plastic Substrates for RFID and Low-Power Applications
2008.Capacitive gas sensor arrays on plastic substrates for low power and mobiles applications
2008. p. 1431-1434.Detection of Surface Stress Induced Deflections in Piezoelectric Cantilever Sensors Using a Charge Integrator
2008. ICCAS 2008, Seoul, October 14-17, 2008. p. 937-940. DOI : 10.1109/ICCAS.2008.4694629.A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 269-272.Establishment of a technology platform for epitaxial piezoelectric MEMS
2008. Eurosensors XXII, Dresden, Germany, September 7-10, 2008. p. 819-822.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate
2008. p. 74-77. DOI : 10.1109/ICSENS.2008.4716386.Hybrid organic / inorganic sensing platforms on flexible plastic substrates
2008.Evaluation of spin-coatable colorimetric films for ammonia detection using optical waveguides
2008.On the thermal simulation and characterisation of microsystems: progress and status
2008. p. 133-136.Transfer of UV Glue patterned by Photolithography for Microsystems assembling and packaging
2008. p. 1317-1320.Sensor on Flexible Substrates
2008.Large Deformation Balloon Micro-Actuator Based on Pyrotechnics on Chip
2008. 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, 13-17 Jan. 2008. p. 535-538. DOI : 10.1109/MEMSYS.2008.4443711.2007
Direct integration of carbon nanotubes on micromachined hotplates
Nanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.A Calibration Tool for Passive Contact Temperature Probe
2007.Precise Thermography of Microsystems in the Visible Region using a Standard CCD Camera
2007. p. 926-929. DOI : 10.1109/ICSENS.2007.4388554.Microsystems for the Space and Transport Industries
2007.Application of carbon nano-powders for a gas micro-preconcentrator
Sensors and Actuators B. 2007. DOI : 10.1016/j.snb.2007.07.029.Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications
2007. p. 158-161. DOI : 10.1109/ICSENS.2007.4388360.Reliability improvement of suspended platinum-based micro-heating elements
Sensors and Actuators A. 2007. DOI : 10.1016/j.sna.2007.04.006.SH-SAW dual delay line based e-tongue system with improved discrimination capabilities
2007.Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration
2007. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, 10-14 06 2007. p. 249-252. DOI : 10.1109/SENSOR.2007.4300116.Application of Carbon “Nano”Powders and Porous Silicon for Gas Pre-Concentration
2007.Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters
Sensors and Actuators A. 2007. DOI : 10.1016/j.sna.2006.07.023.Gas Detection using a Micromachined FTIR Spectrometer
2007. p. 1364-1367. DOI : 10.1109/ICSENS.2007.4388665.Highly integrated wafer level packaged Mox gas sensors
2007. p. 2401-2404. DOI : 10.1109/SENSOR.2007.4300654.Micro Gas Sensing Components on Flexible Substrates
2007.Integration of MOX gas sensors on polyimide hotplates
Sensors and Actuators A. 2007. DOI : 10.1016/j.snb.2007.09.013.Micromachined Platforms on Silicon for Micro-SOFC
2007. p. 157-160.Future of Materials in MEMS and NEMS
2007.Micro-Hotplate Devices for Micro-SOFC
2007. p. 421-427.Micro-hotplates-A platform for micro-solid oxide fuel cells
Journal of Power Sources. 2007. DOI : 10.1016/j.jpowsour.2006.12.072.2006
Space applications of micro hot plate chemical sensors
2006.CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs
2006.Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell development
Sensors and Actuators B. 2006. DOI : 10.1016/j.snb.2006.04.031.Study on integration of carbon nanotube on micro-hotplates
2006. p. 155-157.Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
2006. p. 82-83. DOI : 10.1109/OMEMS.2006.1708275.Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication and Testing
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.880232.Matrix of 10 x 10 addressed solid propellant microthrusters: Review of the technologies
Sensors and Actuators A. 2006. DOI : 10.1016/j.sna.2005.08.024.Mems and Nanotechnologies for Space
2006.Wafer Level Packaging of Micromachined Gas Sensors
IEEE Sensors. 2006. DOI : 10.1109/JSEN.2006.881355.Application of carbon "Nano" powders and porous silicon for gas preconcentration
2006. p. W1A-P11.Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
2006. p. 91.Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
Thin Solid Films. 2006. DOI : 10.1016/j.tsf.2006.07.054.Direct Integration of Carbon Nanotubes on Micro Gas Sensing Platforms
2006. p. 671-674. DOI : 10.1109/ICSENS.2007.355557.Optimization of the material composition of platinum micro-heating elements
2006. p. W1B-P1.Highly integrated solid propellant micro-thrusters using SOI wafers
2006. p. 11013-6p..Micro-hotplates on polyimide for sensors et actuators
Sensors and Actuators A. 2006. DOI : 10.1016/j.sna.2006.06.003.Metal oxide gas sensors on polyimide micro-hotplates
2006.Micro Analytical Instrumentation for Gas Analysis
2006.Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
Advanced Materials. 2006. DOI : 10.1002/adma.200600718.Electrical Conductivity of LSCF Thin Films for SOFC on Micro Hotplates
2006.Paraffin-PDMS composite thermo microactuator with large vertical displacement capability
2006. p. 215-218.2005
Compatibility of Screen-Printing Technology with Micro Hotplate for Gas Sensor and Solid Oxide Micro Fuel Cell Development
2005. p. WA8.Wafer Level Packaging of Micro-Machined Gas Sensors
2005.Thermal Laser Stimulation For MEMS characterisation and failure analysis from principles to case studies
2005. p. 134-153.The influence of the insulator surface properties on the hydrogen response of field-effect gas sensors
Journal of applied Physics. 2005. DOI : 10.1063/1.1994941.MEMS Hotplates with TiN as a Heater Material
2005. p. 330-333. DOI : 10.1109/ICSENS.2005.1597703.Integration of robust fluidic interconnects using metal to glass anodic bonding
Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/9/007.Ta2O5 and HfO2 as ion-sensitive materials in ISFETs
2005. p. 183-188.Miniaturisation Of Solid Propellant Thrusters For Space Application
2005. p. 736-741.Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystems
Thin Solid Films. 2005. DOI : 10.1016/j.tsf.2005.03.021.Micro-Heat Generation for Chemical Reactions
2005.Polymeric Hotplates for Sensors and Actuators
2005. p. TB15.Failure Analysis of Micro-Heating Elements Suspended on Thin Membranes
2005. 16th European Symposium Realibility of Electron Devices, Failure Physics and Analysis. p. 1786-1789. DOI : 10.1016/j.microrel.2005.07.106.Refactoring OCL Annotated UML Class Diagrams
2005. Model Driven Engineering Languages and Systems, 8th International Conference, MoDELS 2005, Montego Bay, Jamaica$dOctober 2-7, 2005. p. 280-294. DOI : 10.1007/11557432_21.2004
High-k Dielectrics for Use as ISFET Gate Oxides
2004. p. 677-680. DOI : 10.1109/ICSENS.2004.1426257.Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
2004. p. 23-28.Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator
Selected Topics in quantum electronics. 2004. DOI : 10.1109/JSTQE.2004.830616.Wafer Level Packaging of Micro-Machined Gas Sensors
2004. p. 746-748. DOI : 10.1109/ICSENS.2004.1426275.Development of MicroHeaters on SOI for MicroIgnition Application
2004. p. 309-312.Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding
2004. p. 649-652.Bonding properties of metals anodically bonded to glass
Sensors and Actuators A. 2004. DOI : 10.1016/j.sna.2003.10.070.Microfabrication process for the realization of a matrix of solid-propellant microthrusters
2004. p. 260-277.2003
Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
2003. p. 696-697.Pyrotechnical Microthrusters for Space Application
2003. p. 57-60.Solid Propellant Thrusters for Space Application
2003. p. 80-81.Downscaling of Solid Propellant Pyrotechnical Microsystems
2003. p. 1423-1426. DOI : 10.1109/SENSOR.2003.1217042.Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters
2003. p. 408-409.Microstructures Study of Pt Thin Film Used in MEMS Fabrication
2003.Modulated operating temperature for MOSFET gas sensors: hydrogen recovery time reduction and gas discrimination
Sensors and Actuators B. 2003. DOI : 10.1016/S0925-4005(03)00230-2.Metal to Glass Anodic Bonding for Microsystems Packaging
2003. p. 1824-1827. DOI : 10.1109/SENSOR.2003.1217142.Accelareted Ageing of Micro-Hotplates for Gas Sensing Applications
2003. p. 1314-1317. DOI : 10.1109/ICSENS.2003.1279159.MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication
2003. p. 790-797.2002
Recovery Time Reduction and Gas Discrimination for Mosfet Gas Sensors
2002.Metallic Packaging of a Piezoresistive Pressure Sensor
2002.Influence of temperature on metal to glass anodic bonding
2002.Solid Propellant Micro-Rockets - Towards a New Type of Power MEMS
2002.Application of the ESEM Heating Stage of Microstructural Transformation studies
2002.Processing influence on the reliability of platinum thin films for MEMS applications
2002.Thermal optimization of micro-hotplates that have a silicon island
Journal of Micromechanics and Microengineering. 2002. DOI : 10.1088/0960-1317/12/6/330.On the Reliability of a Platinum Heater for Mirco-Hotplates
2002.2001
A polymer gate FET sensor array for detecting organic vapours
Sensors and Actuators B. 2001. DOI : 10.1016/S0925-4005(01)00687-6.Silicon planar microcalorimeter employing nanostructured films
2001. p. 820-823. DOI : 10.1007/978-3-642-59497-7_194.Thermally isolated MOSFET for gas sensing application
IEEE Electron Device Letters. 2001. DOI : 10.1109/55.892428.2000
Characterisation of an electrodeposited conducting polymer FET array for vapour and odour sensing
2000. p. 35-42.Microsystems for diverse applications using recently developed microfabrication techniques
2000. p. 16-27.New response patterns for MOSFET gas sensors using low-power devices
2000. p. 737-740.A low-power micromachined MOSFET gas sensor
Journal of Microelectromechanical Systems. 2000. DOI : 10.1109/84.870055.Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors
Sensors and Actuators B. 2000. DOI : 10.1016/S0925-4005(00)00433-0.Micro-hotplate, a useful concept for gas sensing, fluidics and space applications
2000. p. 151-157.Thermal management of micro-hotplates using MEMCAD as simulation tool
2000. p. 640-643.Pneumatic Conveyance Systems for Micro-Parts Transportation
2000.1999
High temperature micro-hotplates for drop coated gas sensors
1999. p. 703-704.Novel low-power consumption MOSFET array gas sensor
1999. p. 338-341.1998
Thermal aspects in thermal and resistive type gas sensors
1998. p. 34-40.Teaching & PhD
Teaching
Microengineering
Past EPFL PhD Students
Bourely James Alec Pierce , Courbat Jérôme , Demuru Silvia , Fumeaux Nicolas Francis , Gueye Rokhaya , Isarakorn Don , Janphuang Pattanaphong , Mancinelli Alessio , Marette Alexis Pierre Henri , Molina Lopez Francisco , Monroe Morgan Mc Kay , Strässle Rahel , Vasquez Quintero Andres Felipe , de Koninck David , van Dommelen Ryan Mitchell ,Courses
Mechanism Design I
This course introduces the basics of structural mechanics: calculation of stresses and strains caused by external forces and calculation of strains. This theoretical training is applied to the design of important elements of precision mechanisms.
Organic and printed electronics
This course addresses the implementation of organic and printed electronics technologies using large area manufacturing techniques. It will provide knowledge on materials, printing techniques, devices, systems, and applications: state of the art and current status on commercialization.
Advanced MEMS & microsystems
In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.
Soft Microsystems Processing and Devices
Amongst others, following topics will be covered during the course:
- Soft Microsystems and Electronics
- Electroactive polymers
- Printed electronics and microsystems
- Inkjet printing of polymers
- Stretchable electronics
- Mechanical reliability
- Stencil lithography
- Scanning Probe Lithography