MEMS and Microsystems Flexible and Printed Electronics Energy Harvesting and PowerMEMS Smart Sensing Systems Advanced Gas Sensing Technologies Microfabrication and Printing technologies Microsystems Integration and Packaging

MEMS and Microsystems Flexible and Printed Electronics Energy Harvesting and PowerMEMS Smart Sensing Systems Advanced Gas Sensing Technologies Microfabrication and Printing technologies Microsystems Integration and Packaging

Environmentally-friendly technology is a rapidly growing research area and many micro and nano technologies are being developed to tackle the environmental problems. These technologies must enable the effective use of resources and energy in their realization and their application. Microtechnology is a tool that can contribute at mitigating environmental issues. The development of the next generation of Microsystems should lead to sustainable, reusable, recyclable and environmental friendly devices and systems. The research program of the MEMS and Printed Microsystem group at EPFL-LMTS is towards microtechnologies for sustainable development, envisioning environmental friendly processes for MEMS production and their use in applications that could bring benefits to the environment. Research areas and themes include: • Environmental sensors and technologies based on MST • Green microtechnologies and micromanufacturing • Ultra low energy MEMS technologies: production and operation • Energy saving and harvesting technologies: green and environmental applications