Guillermo Villanueva

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Associate Professor

guillermo.villanueva@epfl.ch +41 21 693 11 87 http://nems.epfl.ch

Citizenship: Spanish

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EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne

+41 21 693 11 87
Office: MED 3 1226
Office: MED 3 1024
EPFL > STI > IGM > NEMS

Web site: Web site: https://nems.epfl.ch/

EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne

+41 21 693 11 87
Office: MED 3 1226
EPFL > STI > STI-SMT > SMT-ENS

EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne

+41 21 693 11 87
Office: MED 3 1226
EPFL > STI > STI-SGM > SGM-ENS

EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne

+41 21 693 11 87
Office: MED 3 1226
EPFL > VPA-AVP-CP > CMI > CMI-CD

EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne

+41 21 693 11 87
Office: MED 3 1226
EPFL > VPA-AVP-E > AVP-E > AVP-E-CDS

Web site: Web site: https://dms.epfl.ch/DOCS/E/CDS

EPFL STI SGM-GE
ME B2 374 (Bâtiment ME)
Station 9
1015 Lausanne

+41 21 693 11 87
Office: MED 3 1226
Office: ME B2 374
EPFL > STI > STI-SGM > SGM-GE

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Administrative data

Fields of expertise

MEMS/NEMS - design, analysis, fabrication and characterization Sensors, Oscillators, nonlinear and coupled dynamics, fundamental noise processes

Biography

Guillermo Villanueva is an Associate Professor at the Ecole Polytechnique Federale de Lausane (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US); and before a post-doc at EPFL-LMIS1. He received his M.Sc. in Physics in Zaragoza (Spain) and his PhD from the UAB in Barcelona (Spain).
Since the start of his PhD (2002), Prof. Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertise from the design and fabrication to the characterization and applicability. He has co-authored more than 100 papers in peer-reviewed journals and more than 130 contributions to international conferences. He is serving, or has served, on the program committees of IEEE-NEMS, IEEE-Sensors, MNE, IEEE-FCS, Transducers and IEEE-MEMS. He is editor in chief of the Physical Sensors section of MDPI Sensors. He has co-organized MNE2014, SNC2015, the short courses at Transducers 2019 and the 16th International Workshop on Nanomechanical Sensors (NMC2019).

Education

PhD

Microelectronic engineering

CNM-IMB-CSIC/UAB

2002-2006

Ms.Sc.

Finite Element Modelling

UNED

2005

Ms.Sc.

Microelectronic Engineering

UAB

2002-2004

Ms.Sc.

Physics

Zaragoza

1998-2002

Publications

Infoscience publications

Journal Papers

2024

[100] Photostrictive Actuators Based on Freestanding Ferroelectric Membranes

S. Ganguly; D. Pesquera; D. M. Garcia; U. Saeed; N. Mirzamohammadi et al.

Advanced Materials. 2024-04-25. DOI : 10.1002/adma.202310198.

Guillermo Villanueva

Associate Professor

Fields of expertise

Biography

Education

Publications

Infoscience publications

Journal Papers

2024

[100] Photostrictive Actuators Based on Freestanding Ferroelectric Membranes

[99] Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

[98] In-Sensor Passive Speech Classification with Phononic Metamaterials

[97] Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

2023

[96] Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

[95] Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

[94] Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

[93] Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate

[92] Simulating supercontinua from mixed and cascaded nonlinearities

2022

[91] A parametric study on pool boiling heat transfer and critical heat flux on structured surfaces with artificial cavities

[90] Micro 3D printing of a functional MEMS accelerometer

[89] A Resonant Graphene NEMS Vibrometer

[88] Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators

[87] Determination of a clinically effective evobrutinib dose: Exposure-response analyses of a phase II relapsing multiple sclerosis study

2021

[86] Balancing of Coupled Piezoelectric NEMS Resonators

[85] A formula for the admittance of laterally excited bulk wave resonators (XBARs)

[84] Design and fabrication of a vigorous "cavitation-on-a-chip" device with a multiple microchannel configuration

[83] Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

[82] On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surface

2020

[81] Frequency fluctuations in nanomechanical silicon nitride string resonators

[80] Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices

[79] On the effect of linear feedback and parametric pumping on a resonator's frequency stability

[78] Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

[77] Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators

[76] Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

[75] Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 mu m

[74] Suspended micro/nano channel resonators: a review

[73] Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

2019

[72] Engineered Lateral Roughness Element Implementation and Working Fluid Alteration to Intensify Hydrodynamic Cavitating Flows on a Chip for Energy Harvesting

[71] Shape memory polymer resonators as highly sensitive uncooled infrared detectors

[70] On "Cavitation on Chip" in Microfluidic Devices With Surface and Sidewall Roughness Elements

[69] 5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

[68] Optimum ratio of hydrophobic to hydrophilic areas of biphilic surfaces in thermal fluid systems involving boiling

[67] Engineered acoustic mismatch for anchor loss control in contour mode resonators

[66] Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

[65] 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

[64] Modular interface and experimental setup for in-vacuum operation of microfluidic devices

[63] Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

2018

[62] Effective quality factor tuning mechanisms in micromechanical resonators

[61] Intensifying cavitating flows in microfluidic devices with poly(vinyl alcohol) (PVA) microbubbles

[60] Observation of a phononic quadrupole topological insulator

[59] Hydrodynamic cavitation in microfluidic devices with roughened surfaces

[58] Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

2017

[57] Energy Harvesting in Microscale with Cavitating Flows

[56] Asymmetrically coupled resonators for mass sensing

[55] Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS

[54] Position and mode dependent optical detection back-action in cantilever beam resonators

2016

[53] Frequency fluctuations in silicon nanoresonators

2015

[52] Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures

[51] Resistless nanofabrication by stencil lithography: A review

2014

[50] Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators

[49] Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics

[48] Single-layer graphene on silicon nitride micromembrane resonators

[47] Phase Synchronization of Two Anharmonic Nanomechanical Oscillators

[46] Optical detection of radio waves through a nanomechanical transducer

2013

[45] Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

[44] Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

[43] Photothermal Analysis of Individual Nanoparticulate Samples Using Micromechanical Resonators

[42] Surpassing Fundamental Limits of Oscillators Using Nonlinear Resonators

[41] Nonlinearity in nanomechanical cantilevers