Guillermo Villanueva
Associate Professor
guillermo.villanueva@epfl.ch +41 21 693 11 87 http://nems.epfl.ch
Citizenship: Spanish
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
Office:
MED 3 1024
EPFL
>
STI
>
IGM
>
NEMS
Web site: Web site: https://nems.epfl.ch/
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
STI
>
STI-SMT
>
SMT-ENS
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
STI
>
STI-SGM
>
SGM-ENS
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
VPA-AVP-CP
>
CMI
>
CMI-CD
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
VPA-AVP-E
>
AVP-E
>
AVP-E-CDS
Web site: Web site: https://dms.epfl.ch/DOCS/E/CDS
EPFL STI SGM-GE
ME B2 374 (Bâtiment ME)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
Office:
ME B2 374
EPFL
>
STI
>
STI-SGM
>
SGM-GE
Fields of expertise
Biography
Guillermo Villanueva is an Associate Professor at the Ecole Polytechnique Federale de Lausane (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US); and before a post-doc at EPFL-LMIS1. He received his M.Sc. in Physics in Zaragoza (Spain) and his PhD from the UAB in Barcelona (Spain).Since the start of his PhD (2002), Prof. Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertise from the design and fabrication to the characterization and applicability. He has co-authored more than 100 papers in peer-reviewed journals and more than 130 contributions to international conferences. He is serving, or has served, on the program committees of IEEE-NEMS, IEEE-Sensors, MNE, IEEE-FCS, Transducers and IEEE-MEMS. He is editor in chief of the Physical Sensors section of MDPI Sensors. He has co-organized MNE2014, SNC2015, the short courses at Transducers 2019 and the 16th International Workshop on Nanomechanical Sensors (NMC2019).
Education
PhD
Microelectronic engineering
CNM-IMB-CSIC/UAB
2002-2006
Ms.Sc.
Finite Element Modelling
UNED
2005
Ms.Sc.
Microelectronic Engineering
UAB
2002-2004
Ms.Sc.
Physics
Zaragoza
1998-2002
Publications
Infoscience publications
Journal Papers
2024
[100] Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness
Microelectronic Engineering. 2024-02-08. DOI : 10.1016/j.mee.2024.112154.[99] In-Sensor Passive Speech Classification with Phononic Metamaterials
Advanced Functional Materials. 2024-01-09. DOI : 10.1002/adfm.202311877.2023
[98] Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
Acs Applied Nano Materials. 2023-12-01. DOI : 10.1021/acsanm.3c03642.[97] Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression
Journal Of Microelectromechanical Systems. 2023-06-15. DOI : 10.1109/JMEMS.2023.3282024.[96] Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum
Acs Photonics. 2023-05-31. DOI : 10.1021/acsphotonics.3c00276.[95] Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate
Journal Of Microelectromechanical Systems. 2023-03-30. DOI : 10.1109/JMEMS.2023.3262021.[94] Simulating supercontinua from mixed and cascaded nonlinearities
Apl Photonics. 2023-03-01. DOI : 10.1063/5.0135252.2022
[93] A parametric study on pool boiling heat transfer and critical heat flux on structured surfaces with artificial cavities
Applied Thermal Engineering. 2022-12-20. DOI : 10.1016/j.applthermaleng.2022.119841.[92] Determination of a clinically effective evobrutinib dose: Exposure-response analyses of a phase II relapsing multiple sclerosis study
Cts-Clinical And Translational Science. 2022-09-30. DOI : 10.1111/cts.13407.[91] Micro 3D printing of a functional MEMS accelerometer
Microsystems & Nanoengineering. 2022-09-19. DOI : 10.1038/s41378-022-00440-9.[90] A Resonant Graphene NEMS Vibrometer
Small. 2022-05-30. DOI : 10.1002/smll.202201816.[89] Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators
Journal Of Microelectromechanical Systems. 2022-01-24. DOI : 10.1109/JMEMS.2022.3143354.2021
[88] Balancing of Coupled Piezoelectric NEMS Resonators
Frontiers In Mechanical Engineering-Switzerland. 2021-12-21. DOI : 10.3389/fmech.2021.722538.[87] A formula for the admittance of laterally excited bulk wave resonators (XBARs)
Electronics Letters. 2021-07-26. DOI : 10.1049/ell2.12261.[86] Design and fabrication of a vigorous "cavitation-on-a-chip" device with a multiple microchannel configuration
Microsystems & Nanoengineering. 2021-06-02. DOI : 10.1038/s41378-021-00270-1.[85] Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity
Microsystems & Nanoengineering. 2021-04-29. DOI : 10.1038/s41378-021-00254-1.[84] On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surface
Physics Of Fluids. 2021-03-01. DOI : 10.1063/5.0037736.2020
[83] Frequency fluctuations in nanomechanical silicon nitride string resonators
Physical Review B. 2020-12-07. DOI : 10.1103/PhysRevB.102.214106.[82] Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices
Polymers. 2020-10-01. DOI : 10.3390/polym12102432.[81] On the effect of linear feedback and parametric pumping on a resonator's frequency stability
New Journal Of Physics. 2020-09-01. DOI : 10.1088/1367-2630/abb1dd.[80] Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel
Microelectronic Engineering. 2020-07-15. DOI : 10.1016/j.mee.2020.111395.[79] Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators
Journal Of Microelectromechanical Systems. 2020-06-01. DOI : 10.1109/JMEMS.2020.2988354.[78] Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
Microsystems & Nanoengineering. 2020-04-20. DOI : 10.1038/s41378-019-0128-4.[77] Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 mu m
Scientific Reports. 2020-04-14. DOI : 10.1038/s41598-020-63562-y.[76] Suspended micro/nano channel resonators: a review
Journal Of Micromechanics And Microengineering. 2020-04-01. DOI : 10.1088/1361-6439/ab6df1.[75] Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators
Journal Of Micromechanics And Microengineering. 2020-01-01. DOI : 10.1088/1361-6439/ab5b7b.2019
[74] Engineered Lateral Roughness Element Implementation and Working Fluid Alteration to Intensify Hydrodynamic Cavitating Flows on a Chip for Energy Harvesting
Micromachines. 2019-12-30. DOI : 10.3390/mi11010049.[73] Shape memory polymer resonators as highly sensitive uncooled infrared detectors
Nature Communications. 2019-10-04. DOI : 10.1038/s41467-019-12550-6.[72] On "Cavitation on Chip" in Microfluidic Devices With Surface and Sidewall Roughness Elements
Journal Of Microelectromechanical Systems. 2019-10-01. DOI : 10.1109/JMEMS.2019.2925541.[71] 5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane
Electronics Letters. 2019-08-22. DOI : 10.1049/el.2019.1658.[70] Optimum ratio of hydrophobic to hydrophilic areas of biphilic surfaces in thermal fluid systems involving boiling
International Journal Of Heat And Mass Transfer. 2019-06-01. DOI : 10.1016/j.ijheatmasstransfer.2019.01.139.[69] Modular interface and experimental setup for in-vacuum operation of microfluidic devices
Review of Scientific Instruments. 2019-04-01. DOI : 10.1063/1.5088946.[68] Engineered acoustic mismatch for anchor loss control in contour mode resonators
Applied Physics Letters. 2019-03-11. DOI : 10.1063/1.5086156.[67] Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
Journal of Vacuum Science & Technology A. 2019-03-01. DOI : 10.1116/1.5082888.[66] 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate
Electronics Letters. 2019-01-24. DOI : 10.1049/el.2018.7297.[65] Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%
IEEE Transactions On Ultrasonics Ferroelectrics And Frequency Control. 2019-01-01. DOI : 10.1109/TUFFC.2018.2882073.2018
[64] Effective quality factor tuning mechanisms in micromechanical resonators
Applied Physics Reviews. 2018-12-01. DOI : 10.1063/1.5027850.[63] Intensifying cavitating flows in microfluidic devices with poly(vinyl alcohol) (PVA) microbubbles
Physics Of Fluids. 2018-10-01. DOI : 10.1063/1.5051606.[62] Observation of a phononic quadrupole topological insulator
Nature. 2018. DOI : 10.1038/nature25156.[61] Hydrodynamic cavitation in microfluidic devices with roughened surfaces
Journal of Micromechanics and Microengineering. 2018. DOI : 10.1088/1361-6439/aab9d0.[60] Fabrication of suspended microchannel resonators with integrated piezoelectric transduction
MICROELECTRONIC ENGINEERING. 2018. DOI : 10.1016/j.mee.2018.02.011.2017
[59] Energy Harvesting in Microscale with Cavitating Flows
ACS Omega. 2017. DOI : 10.1021/acsomega.7b01204.[58] Asymmetrically coupled resonators for mass sensing
Applied Physics Letters. 2017. DOI : 10.1063/1.5003023.[57] Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS
IEEE Transactions On Nanotechnology. 2017. DOI : 10.1109/Tnano.2017.2701006.[56] Position and mode dependent optical detection back-action in cantilever beam resonators
Journal Of Micromechanics And Microengineering. 2017. DOI : 10.1088/1361-6439/aa591e.2016
[55] Frequency fluctuations in silicon nanoresonators
Nature Nanotechnology. 2016. DOI : 10.1038/Nnano.2016.19.2015
[54] Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures
Sensors. 2015. DOI : 10.3390/s151128543.[53] Resistless nanofabrication by stencil lithography: A review
Microelectronic Engineering. 2015. DOI : 10.1016/j.mee.2014.08.003.2014
[52] Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators
Physical Review Letters. 2014. DOI : 10.1103/PhysRevLett.113.227201.[51] Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics
Optics Express. 2014. DOI : 10.1364/OE.22.006810.[50] Single-layer graphene on silicon nitride micromembrane resonators
Journal of Applied Physics. 2014. DOI : 10.1063/1.4862296.[49] Phase Synchronization of Two Anharmonic Nanomechanical Oscillators
Physical Review Letters. 2014. DOI : 10.1103/PhysRevLett.112.014101.[48] Optical detection of radio waves through a nanomechanical transducer
Nature. 2014. DOI : 10.1038/nature13029.2013
[47] Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography
Micromachines. 2013. DOI : 10.3390/mi4040370.[46] Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release
Soft Matter. 2013. DOI : 10.1039/c3sm51923f.[45] Photothermal Analysis of Individual Nanoparticulate Samples Using Micromechanical Resonators
ACS Nano. 2013. DOI : 10.1021/nn402057f.[44] Surpassing Fundamental Limits of Oscillators Using Nonlinear Resonators
Physical Review Letters. 2013. DOI : 10.1103/Physrevlett.110.177208.[43] Nonlinearity in nanomechanical cantilevers
Physical Review B. 2013. DOI : 10.1103/Physrevb.87.024304.[42] Nonlinear Mode-Coupling in Nanomechanical Systems
Nano Letters. 2013. DOI : 10.1021/Nl400070e.2012
[41] Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors
Review of Scientific Instruments. 2012. DOI : 10.1063/1.3673603.[40] Optimal operating points of oscillators using nonlinear resonators
Physical Review E. 2012. DOI : 10.1103/Physreve.86.056207.[39] Passive Phase Noise Cancellation Scheme
Physical Review Letters. 2012. DOI : 10.1103/Physrevlett.108.264102.[38] Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams
Physical Review Letters. 2012. DOI : 10.1103/Physrevlett.108.236101.[37] All-stencil transistor fabrication on 3D silicon substrates
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/9/095022.[36] Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator
Nanoscale. 2012. DOI : 10.1039/C2NR30639E.[35] High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks
ACS Nano. 2012. DOI : 10.1021/nn301358n.[34] Compliant membranes improve resolution in full-wafer micro/nanostencil lithography
Nanoscale. 2012. DOI : 10.1039/c2nr11609j.[33] Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing
Nanoscale. 2012. DOI : 10.1039/C2NR11983H.[32] Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning
Advanced Functional Materials. 2012. DOI : 10.1002/adfm.201102789.2011
[31] A Nanoscale Parametric Feedback Oscillator
Nano Letters. 2011. DOI : 10.1021/Nl2031162.[30] 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection
Journal of Micromechanics and Microengineering. 2011. DOI : 10.1088/0960-1317/21/8/085023.[29] Localized Ion Implantation Through Micro/Nanostencil Masks
IEEE Transactions on Nanotechnology. 2011. DOI : 10.1109/TNANO.2010.2090171.[28] Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications
ACS Nano. 2011. DOI : 10.1021/nn1019253.[27] Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections
IEEE Transactions on Nanotechnology. 2011. DOI : 10.1109/TNANO.2010.2042724.2010
[26] Mechanically tuneable microoptical structure based on PDMS
Sensors and Actuators a-Physical. 2010. DOI : 10.1016/j.sna.2010.02.025.[25] Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques
Journal of Nanoscience and Nanotechnology. 2010. DOI : 10.1166/jnn.2010.1737.[24] Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale
Nanotechnology. 2010. DOI : 10.1088/0957-4484/21/50/505501.[23] The transition in hydrogen sensing behavior in non-continuous palladium films
Applied Physics Letters. 2010. DOI : 10.1063/1.3491263.[22] Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/10/105019.[21] Stenciled conducting bismuth nanowires
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. DOI : 10.1116/1.3292630.2009
[20] Conduction in rectangular quasi-one-dimensional and two-dimensional random resistor networks away from the percolation threshold
Physical Review E. 2009. DOI : 10.1103/Physreve.80.021104.[19] Analysis of the blurring in stencil lithography
Nanotechnology. 2009. DOI : 10.1088/0957-4484/20/41/415303.[18] Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays
Radiation Research. 2009. DOI : 10.1667/RR1483.1.[17] Stress and aging minimization in photoplastic AFM probes
Microelectronic Engineering. 2009. DOI : 10.1016/j.mee.2008.12.033.2008
[16] Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2008.01.082.[15] Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/03/035503.[14] Focused ion beam production of nanoelectrode arrays
Materials Science & Engineering C-Biomimetic and Supramolecular Systems. 2008. DOI : 10.1016/j.msec.2007.10.077.[13] Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators
Sensors and Actuators A-Physical. 2008. DOI : 10.1016/j.sna.2007.11.007.[12] 3-D modulable PDMS-based microlens system
Optics Express. 2008. DOI : 10.1364/OE.16.004918.[11] Nanobiosensors based on individual olfactory receptors
Analog Integrated Circuits and Signal Processing. 2008. DOI : 10.1007/s10470-007-9114-0.[10] Metallic Nanowires by Full Wafer Stencil Lithography
Nano Letters. 2008. DOI : 10.1021/nl801778t.[9] Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2007.12.083.[8] Novel methods to pattern polymers for microfluidics
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2008.01.052.[7] Etching of sub-micrometer structures through Stencil
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2007.12.068.[6] A single nanotrench in a palladium microwire for hydrogen detection
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/12/125502.2006
[5] Deep reactive ion etching and focused ion beam combination for nanotip fabrication
Materials Science & Engineering C-Biomimetic and Supramolecular Systems. 2006. DOI : 10.1016/j.msec.2006.01.002.[4] Modified atomic force microscopy cantilever design to facilitate access of higher modes of oscillation
Review of Scientific Instruments. 2006. DOI : 10.1063/1.2219738.[3] Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy
Applied Physics Letters. 2006. DOI : 10.1063/1.2226993.[2] T-shaped microcantilever sensor with reduced deflection offset
Applied Physics Letters. 2006. DOI : 10.1063/1.2345234.[1] Polymeric MOEMS variable optical attenuator
IEEE Photonics Technology Letters. 2006. DOI : 10.1109/Lpt.2006.886134.Conference Contributions
No notices loaded.
Teaching & PhD
Teaching
Mechanical Engineering
Microengineering