Guillermo Villanueva
Associate Professor
guillermo.villanueva@epfl.ch +41 21 693 11 87 http://nems.epfl.ch
Citizenship: Spanish
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
Office:
MED 3 1024
EPFL
>
STI
>
IGM
>
NEMS
Web site: Web site: https://nems.epfl.ch/
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
STI
>
STI-SMT
>
SMT-ENS
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
STI
>
STI-SGM
>
SGM-ENS
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
VPA-AVP-E
>
AVP-E
>
AVP-E-CDS
Web site: Web site: https://dms.epfl.ch/DOCS/E/CDS
EPFL STI SGM-GE
ME B2 374 (Bâtiment ME)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
Office:
ME B2 374
EPFL
>
STI
>
STI-SGM
>
SGM-GE
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
VPA-AVP-CP
>
EPIX
>
EPIX-GE
EPFL STI IGM NEMS
MED 3 1226 (Bâtiment MED)
Station 9
1015 Lausanne
+41 21 693 11 87
Office:
MED 3 1226
EPFL
>
VPA-AVP-CP
>
EPIX
>
EPIX-CD
Fields of expertise
MEMS/NEMS - design, analysis, fabrication and characterization Sensors, Oscillators, nonlinear and coupled dynamics, fundamental noise processes
Biography
Guillermo Villanueva is an Associate Professor at the Ecole Polytechnique Federale de Lausane (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US); and before a post-doc at EPFL-LMIS1. He received his M.Sc. in Physics in Zaragoza (Spain) and his PhD from the UAB in Barcelona (Spain).Since the start of his PhD (2002), Prof. Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertise from the design and fabrication to the characterization and applicability. He has co-authored more than 100 papers in peer-reviewed journals and more than 130 contributions to international conferences. He is serving, or has served, on the program committees of IEEE-NEMS, IEEE-Sensors, MNE, IEEE-FCS, Transducers and IEEE-MEMS. He is editor in chief of the Physical Sensors section of MDPI Sensors. He has co-organized MNE2014, SNC2015, the short courses at Transducers 2019 and the 16th International Workshop on Nanomechanical Sensors (NMC2019).
Education
PhD
Microelectronic engineering
CNM-IMB-CSIC/UAB
2002-2006
Ms.Sc.
Finite Element Modelling
UNED
2005
Ms.Sc.
Microelectronic Engineering
UAB
2002-2004
Ms.Sc.
Physics
Zaragoza
1998-2002
Publications
Infoscience publications
Journal Papers
2024
[105] Effect of annealing on flexoelectricity in hafnium oxide (HfO2)
APPLIED PHYSICS LETTERS. 2024. DOI : 10.1063/5.0236565.[104] Photostrictive Actuators Based on Freestanding Ferroelectric Membranes
Advanced Materials. 2024. DOI : 10.1002/adma.202310198.[103] Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness
Microelectronic Engineering. 2024. DOI : 10.1016/j.mee.2024.112154.[102] In-Sensor Passive Speech Classification with Phononic Metamaterials
Advanced Functional Materials. 2024. DOI : 10.1002/adfm.202311877.[101] Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes
Journal of Vacuum Science & Technology. 2024. DOI : 10.1116/6.0003497.2023
[100] Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
Acs Applied Nano Materials. 2023. DOI : 10.1021/acsanm.3c03642.[99] Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression
Journal Of Microelectromechanical Systems. 2023. DOI : 10.1109/JMEMS.2023.3282024.[98] Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum
Acs Photonics. 2023. DOI : 10.1021/acsphotonics.3c00276.[97] Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate
Journal Of Microelectromechanical Systems. 2023. DOI : 10.1109/JMEMS.2023.3262021.[96] Simulating supercontinua from mixed and cascaded nonlinearities
Apl Photonics. 2023. DOI : 10.1063/5.0135252.2022
[95] A parametric study on pool boiling heat transfer and critical heat flux on structured surfaces with artificial cavities
Applied Thermal Engineering. 2022. DOI : 10.1016/j.applthermaleng.2022.119841.[94] Determination of a clinically effective evobrutinib dose: Exposure-response analyses of a phase II relapsing multiple sclerosis study
Cts-Clinical And Translational Science. 2022. DOI : 10.1111/cts.13407.[93] Micro 3D printing of a functional MEMS accelerometer
Microsystems & Nanoengineering. 2022. DOI : 10.1038/s41378-022-00440-9.[92] A Resonant Graphene NEMS Vibrometer
Small. 2022. DOI : 10.1002/smll.202201816.[91] Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators
Journal Of Microelectromechanical Systems. 2022. DOI : 10.1109/JMEMS.2022.3143354.2021
[90] Balancing of Coupled Piezoelectric NEMS Resonators
Frontiers In Mechanical Engineering-Switzerland. 2021. DOI : 10.3389/fmech.2021.722538.[89] A formula for the admittance of laterally excited bulk wave resonators (XBARs)
Electronics Letters. 2021. DOI : 10.1049/ell2.12261.[88] Design and fabrication of a vigorous "cavitation-on-a-chip" device with a multiple microchannel configuration
Microsystems & Nanoengineering. 2021. DOI : 10.1038/s41378-021-00270-1.[87] Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity
Microsystems & Nanoengineering. 2021. DOI : 10.1038/s41378-021-00254-1.[86] On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surface
Physics Of Fluids. 2021. DOI : 10.1063/5.0037736.2020
[85] Frequency fluctuations in nanomechanical silicon nitride string resonators
Physical Review B. 2020. DOI : 10.1103/PhysRevB.102.214106.[84] Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices
Polymers. 2020. DOI : 10.3390/polym12102432.[83] On the effect of linear feedback and parametric pumping on a resonator's frequency stability
New Journal Of Physics. 2020. DOI : 10.1088/1367-2630/abb1dd.[82] Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel
Microelectronic Engineering. 2020. DOI : 10.1016/j.mee.2020.111395.[81] Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators
Journal Of Microelectromechanical Systems. 2020. DOI : 10.1109/JMEMS.2020.2988354.[80] Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
Microsystems & Nanoengineering. 2020. DOI : 10.1038/s41378-019-0128-4.[79] Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 mu m
Scientific Reports. 2020. DOI : 10.1038/s41598-020-63562-y.[78] Suspended micro/nano channel resonators: a review
Journal Of Micromechanics And Microengineering. 2020. DOI : 10.1088/1361-6439/ab6df1.[77] Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators
Journal Of Micromechanics And Microengineering. 2020. DOI : 10.1088/1361-6439/ab5b7b.[76] Engineered Lateral Roughness Element Implementation and Working Fluid Alteration to Intensify Hydrodynamic Cavitating Flows on a Chip for Energy Harvesting
Micromachines. 2020. DOI : 10.3390/mi11010049.2019
[75] Shape memory polymer resonators as highly sensitive uncooled infrared detectors
Nature Communications. 2019. DOI : 10.1038/s41467-019-12550-6.[74] On "Cavitation on Chip" in Microfluidic Devices With Surface and Sidewall Roughness Elements
Journal Of Microelectromechanical Systems. 2019. DOI : 10.1109/JMEMS.2019.2925541.[73] 5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane
Electronics Letters. 2019. DOI : 10.1049/el.2019.1658.[72] Optimum ratio of hydrophobic to hydrophilic areas of biphilic surfaces in thermal fluid systems involving boiling
International Journal Of Heat And Mass Transfer. 2019. DOI : 10.1016/j.ijheatmasstransfer.2019.01.139.[71] Modular interface and experimental setup for in-vacuum operation of microfluidic devices
Review of Scientific Instruments. 2019. DOI : 10.1063/1.5088946.[70] Engineered acoustic mismatch for anchor loss control in contour mode resonators
Applied Physics Letters. 2019. DOI : 10.1063/1.5086156.[69] Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
Journal of Vacuum Science & Technology A. 2019. DOI : 10.1116/1.5082888.[68] 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate
Electronics Letters. 2019. DOI : 10.1049/el.2018.7297.[67] Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%
IEEE Transactions On Ultrasonics Ferroelectrics And Frequency Control. 2019. DOI : 10.1109/TUFFC.2018.2882073.2018
[66] Effective quality factor tuning mechanisms in micromechanical resonators
Applied Physics Reviews. 2018. DOI : 10.1063/1.5027850.[65] Intensifying cavitating flows in microfluidic devices with poly(vinyl alcohol) (PVA) microbubbles
Physics Of Fluids. 2018. DOI : 10.1063/1.5051606.[64] Observation of a phononic quadrupole topological insulator
Nature. 2018. DOI : 10.1038/nature25156.[63] Fabrication of suspended microchannel resonators with integrated piezoelectric transduction
MICROELECTRONIC ENGINEERING. 2018. DOI : 10.1016/j.mee.2018.02.011.[62] Hydrodynamic cavitation in microfluidic devices with roughened surfaces
Journal of Micromechanics and Microengineering. 2018. DOI : 10.1088/1361-6439/aab9d0.2017
[61] Asymmetrically coupled resonators for mass sensing
Applied Physics Letters. 2017. DOI : 10.1063/1.5003023.[60] Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS
IEEE Transactions On Nanotechnology. 2017. DOI : 10.1109/Tnano.2017.2701006.[59] Energy Harvesting in Microscale with Cavitating Flows
ACS Omega. 2017. DOI : 10.1021/acsomega.7b01204.[58] Position and mode dependent optical detection back-action in cantilever beam resonators
Journal Of Micromechanics And Microengineering. 2017. DOI : 10.1088/1361-6439/aa591e.2016
[57] Frequency fluctuations in silicon nanoresonators
Nature Nanotechnology. 2016. DOI : 10.1038/Nnano.2016.19.2015
[56] Resistless nanofabrication by stencil lithography: A review
Microelectronic Engineering. 2015. DOI : 10.1016/j.mee.2014.08.003.[55] Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures
Sensors. 2015. DOI : 10.3390/s151128543.2014
[54] Phase Synchronization of Two Anharmonic Nanomechanical Oscillators
Physical Review Letters. 2014. DOI : 10.1103/PhysRevLett.112.014101.[53] Optical detection of radio waves through a nanomechanical transducer
Nature. 2014. DOI : 10.1038/nature13029.[52] Single-layer graphene on silicon nitride micromembrane resonators
Journal of Applied Physics. 2014. DOI : 10.1063/1.4862296.[51] Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics
Optics Express. 2014. DOI : 10.1364/OE.22.006810.[50] Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators
Physical Review Letters. 2014. DOI : 10.1103/PhysRevLett.113.227201.2013
[49] Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography
Micromachines. 2013. DOI : 10.3390/mi4040370.[48] Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release
Soft Matter. 2013. DOI : 10.1039/c3sm51923f.[47] Nonlinearity in nanomechanical cantilevers
Physical Review B. 2013. DOI : 10.1103/Physrevb.87.024304.[46] Surpassing Fundamental Limits of Oscillators Using Nonlinear Resonators
Physical Review Letters. 2013. DOI : 10.1103/Physrevlett.110.177208.[45] Nonlinear Mode-Coupling in Nanomechanical Systems
Nano Letters. 2013. DOI : 10.1021/Nl400070e.[44] Photothermal Analysis of Individual Nanoparticulate Samples Using Micromechanical Resonators
ACS Nano. 2013. DOI : 10.1021/nn402057f.2012
[43] Passive Phase Noise Cancellation Scheme
Physical Review Letters. 2012. DOI : 10.1103/Physrevlett.108.264102.[42] Compliant membranes improve resolution in full-wafer micro/nanostencil lithography
Nanoscale. 2012. DOI : 10.1039/c2nr11609j.[41] Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning
Advanced Functional Materials. 2012. DOI : 10.1002/adfm.201102789.[40] Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator
Nanoscale. 2012. DOI : 10.1039/C2NR30639E.[39] Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing
Nanoscale. 2012. DOI : 10.1039/C2NR11983H.[38] High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks
ACS Nano. 2012. DOI : 10.1021/nn301358n.[37] Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams
Physical Review Letters. 2012. DOI : 10.1103/Physrevlett.108.236101.[36] Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors
Review of Scientific Instruments. 2012. DOI : 10.1063/1.3673603.[35] Optimal operating points of oscillators using nonlinear resonators
Physical Review E. 2012. DOI : 10.1103/Physreve.86.056207.[34] All-stencil transistor fabrication on 3D silicon substrates
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/9/095022.2011
[33] 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection
Journal of Micromechanics and Microengineering. 2011. DOI : 10.1088/0960-1317/21/8/085023.[32] Localized Ion Implantation Through Micro/Nanostencil Masks
IEEE Transactions on Nanotechnology. 2011. DOI : 10.1109/TNANO.2010.2090171.[31] Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections
IEEE Transactions on Nanotechnology. 2011. DOI : 10.1109/TNANO.2010.2042724.[30] A Nanoscale Parametric Feedback Oscillator
Nano Letters. 2011. DOI : 10.1021/Nl2031162.[29] Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications
ACS Nano. 2011. DOI : 10.1021/nn1019253.2010
[28] Mechanically tuneable microoptical structure based on PDMS
Sensors and Actuators a-Physical. 2010. DOI : 10.1016/j.sna.2010.02.025.[27] The transition in hydrogen sensing behavior in non-continuous palladium films
Applied Physics Letters. 2010. DOI : 10.1063/1.3491263.[26] Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/10/105019.[25] Stenciled conducting bismuth nanowires
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. DOI : 10.1116/1.3292630.[24] Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale
Nanotechnology. 2010. DOI : 10.1088/0957-4484/21/50/505501.[23] Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques
Journal of Nanoscience and Nanotechnology. 2010. DOI : 10.1166/jnn.2010.1737.2009
[22] Analysis of the blurring in stencil lithography
Nanotechnology. 2009. DOI : 10.1088/0957-4484/20/41/415303.[21] Conduction in rectangular quasi-one-dimensional and two-dimensional random resistor networks away from the percolation threshold
Physical Review E. 2009. DOI : 10.1103/Physreve.80.021104.[20] Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays
Radiation Research. 2009. DOI : 10.1667/RR1483.1.[19] Stress and aging minimization in photoplastic AFM probes
Microelectronic Engineering. 2009. DOI : 10.1016/j.mee.2008.12.033.2008
[18] 3-D modulable PDMS-based microlens system
Optics Express. 2008. DOI : 10.1364/OE.16.004918.[17] Novel methods to pattern polymers for microfluidics
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2008.01.052.[16] A single nanotrench in a palladium microwire for hydrogen detection
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/12/125502.[15] Etching of sub-micrometer structures through Stencil
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2007.12.068.[14] Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2007.12.083.[13] Metallic Nanowires by Full Wafer Stencil Lithography
Nano Letters. 2008. DOI : 10.1021/nl801778t.[12] Nanobiosensors based on individual olfactory receptors
Analog Integrated Circuits and Signal Processing. 2008. DOI : 10.1007/s10470-007-9114-0.[11] Focused ion beam production of nanoelectrode arrays
Materials Science & Engineering C-Biomimetic and Supramolecular Systems. 2008. DOI : 10.1016/j.msec.2007.10.077.[10] Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators
Sensors and Actuators A-Physical. 2008. DOI : 10.1016/j.sna.2007.11.007.[9] Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
Microelectronic Engineering. 2008. DOI : 10.1016/j.mee.2008.01.082.[8] Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/03/035503.2006
[7] T-shaped microcantilever sensor with reduced deflection offset
Applied Physics Letters. 2006. DOI : 10.1063/1.2345234.[6] Deep reactive ion etching and focused ion beam combination for nanotip fabrication
Materials Science & Engineering C-Biomimetic and Supramolecular Systems. 2006. DOI : 10.1016/j.msec.2006.01.002.[5] Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy
Applied Physics Letters. 2006. DOI : 10.1063/1.2226993.[4] Modified atomic force microscopy cantilever design to facilitate access of higher modes of oscillation
Review of Scientific Instruments. 2006. DOI : 10.1063/1.2219738.[3] Advances in the production, immobilization, and electrical characterization of olfactory receptors for olfactory nanobiosensor development
Sensors and Actuators B-Chemical. 2006. DOI : 10.1016/j.snb.2005.11.083.[2] Polymeric MOEMS variable optical attenuator
IEEE Photonics Technology Letters. 2006. DOI : 10.1109/Lpt.2006.886134.2005
[1] Production of structures for microfluidics using polymer imprint techniques
Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.087.Conference Contributions
2023
[123] A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films
2023. 2nd IEEE-MTT-S International Microwave Filter Workshop (IMFW), Cocoa Beach, FL, FEB 21-23, 2024. p. 78 - 80. DOI : 10.1109/IMFW59690.2024.10477114.[122] A 3D-Printed Functional Mems Accelerometer
2023. 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Munich, GERMANY, Jan 15-19, 2023. p. 594 - 597. DOI : 10.1109/MEMS49605.2023.10052385.2022
[121] Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics
2022. European Conference on Optical Communication (ECOC), ELECTR NETWORK, Sep 18-22, 2022.[120] Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators
2022. IEEE International Ultrasonics Symposium (IUS), Venice, ITALY, Oct 10-13, 2022. DOI : 10.1109/IUS54386.2022.9957511.2021
[119] Resonance Frequency Dependence Of A1 Lamb Mode On The Pitch Of The Electrode Structure
2021. Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021. DOI : 10.1109/EFTF/IFCS52194.2021.9604331.[118] Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit
2021. Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021. DOI : 10.1109/EFTF/IFCS52194.2021.9604342.[117] Towards a N77 Electroacoustic Filter Using Thin Films of Crystalline Y-cut Lithium Niobate
2021. IEEE MTT-S International Microwave Filter Workshop (IMFW), Perugia, ITALY, Nov 17-19, 2021. p. 112 - 114. DOI : 10.1109/IMFW49589.2021.9642292.[116] 16-Core Recirculating Programmable Si Photonic MEMS
2021. Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021. DOI : 10.1364/CLEO_SI.2021.STh1Q.6.[115] Fully Reconfigurable Coupled-Resonator Optical Waveguides (CROWs) with 10 nW Static Power MEMS
2021. Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021. DOI : 10.1364/CLEO_SI.2021.STh1Q.5.[114] Thin Film Devices For 5G Communications
2021. 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021. p. 450 - 453. DOI : 10.1109/MEMS51782.2021.9375400.[113] Proof Of Concept Of A Graphene-Based Resonant Accelerometer
2021. 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021. p. 838 - 840. DOI : 10.1109/MEMS51782.2021.9375187.[112] FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS
2021. 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021. p. 967 - 969. DOI : 10.1109/MEMS51782.2021.9375401.2020
[111] Attenuation of Lamb Modes and SH Waves near cut-off Frequencies
2020. Joint Conference of the IEEE International Frequency Control Symposium (IEEE IFCS) and IEEE International Symposium on Applications of Ferroelectrics (IEEE IFAS), ELECTR NETWORK, Jul 19-23, 2020. DOI : 10.1109/IFCS-ISAF41089.2020.9234848.[110] Comb Transducer for Generation of SH0 Mode in Crystalline Piezoelectric Membrane
2020. IEEE International Ultrasonics Symposium (IEEE IUS), Las Vegas, NV, Sep 07-11, 2020. DOI : 10.1109/IUS46767.2020.9251395.2019
[109] Temperature fluctuations in M/NEMS
2nd Frontiers in Nanoelectromechanical Systems (FNS), Palm Springs, February 2019.[108] Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems
2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 2380 - 2383. DOI : 10.1109/TRANSDUCERS.2019.8808246.[107] Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters
2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 1752 - 1755. DOI : 10.1109/TRANSDUCERS.2019.8808179.[106] Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators
2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 909 - 912. DOI : 10.1109/TRANSDUCERS.2019.8808738.[105] Analysis of XBAR resonance and higher order spurious modes
2019. IEEE International Ultrasonics Symposium (IUS), Glasgow, ENGLAND, Oct 06-09, 2019. p. 185 - 188. DOI : 10.1109/ULTSYM.2019.8925993.[104] Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
2019. IEEE-MTT-S International Microwave Symposium (IMS), Boston, MA, Jun 02-07, 2019. p. 512 - 515. DOI : 10.1109/MWSYM.2019.8700876.2018
[103] Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators With On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation
The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, Ireland, 21-25 January, 2018.[102] Piezoelectric Suspended Microchannel Resonators (SMRs)
15th International Workshop on Nanomechanical Cantilever Sensors (NMC), Seoul, June 2018.2017
[101] Frequency stability of PZE actuated suspended micro-channel resonators
NanoFluidics and NanoMechanics Workshop, Turin, September 14-15, 2017.[100] Fabrication of 2D Material Based NEMS Resonators
[99] Nonlinearities in NEMS
2017 IEEE International Ultrasonics Symposium (IUS), Washington DC, September 2017.[98] Piezoelectric Nanoelectromechanical Systems
2017. Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017. DOI : 10.1109/TRANSDUCERS.2017.7994010.[97] Nonlinearities and Frequency Stability in NEMS
14th International Workshop on NanoMechanical Sensors, Kona, Hawaii, April 2017.[96] Graphene Based Membrane Resonators
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.[95] Assembly of Silicon Nitride Channels
Micro and Nano Engineering (MNE) 2017, Braga, Portugal, 18 - 22 September, 2018.[94] Release area confinement in Contour Mode Resonators
2017. IEEE International Ultrasonics Symposium (IUS), Washington, DC, SEP 06-09, 2017. DOI : 10.1109/ULTSYM.2017.8092127.[93] Dielectric Transduction of NEMS
2017 NAMIS International Workshop, Freiburg, September 2017.[92] Energy dissipation in Suspended Microchannel Resonators as function of channel off-axis placement
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.[91] FEM modeling of energy dissipation in SMRs
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.[90] Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 - 15 September, 2017.2016
[89] Anchor Losses Dependence on Electrode Material in Contour Mode Resonators
2016. 2016 IEEE International Frequency Control Symposium, New Orleans, Luisiana, USA, May 9-12, 2016. p. 100 - 103. DOI : 10.1109/FCS.2016.7546736.[88] 3D FEM dissipation model of suspended micro channel resonators
5th Micro and Nano Flows Conference (MNF 2016), Milan, Italy, September 11-14, 2016.[87] 50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.[86] Parylene-Based Hollow Nanomechanical Resonators For Bioapplications
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.[85] Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.2015
[84] Fabrication of suspended micro-resonator integrated with PZE electrodes
NanoBioTech-Montreux, Montreux, Switzerland, November 16-18, 2015.[83] NEMS Oscillators - Future Challenges and Workarounds
15th IEEE Conference on Nanotechnology (IEEENano), Rome, July 2015.[82] Fabrication of suspended hollow micro-resonators integrated with PZE electrodes
18th Conference in NanoBioTech, Montreux, November 2015.2014
[81] Interface Losses In Multimaterial Resonators
2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, 26-30 Jan. 2014. p. 632 - 635. DOI : 10.1109/MEMSYS.2014.6765720.[80] Optical detection of radio waves through a nanomechanical transducer
Frontiers in Optics Laser Science (FiO/LS 2014), 2014, Tucson, 2014.[79] Position Dependent Optical Back-Action in Cantilever Resonators
11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.[78] Laser Detection Back-Action in Cantilevers
40th International Conference on Micro- and Nano- Engineering (MNE), 2014, Lausanne, September, 2014.[77] Metal-Insulator Interface Losses in Multimaterial Resonators
11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.2013
[76] Optical Readout of Coupling Between a Nanomembrane and an LC Circuit at Room Temperature
2013. CLEO Europe - IQEC, Munich, Germany, 2013. DOI : 10.1109/CLEOE-IQEC.2013.6801215.[75] Resonant Photothermal Spectroscopy Of Nanoparticulate Matter
10th International Workshop on Nanomechanical Cantilever Sensors (NMC), Stanford, 2013.[74] Pyrolysed carbon resonators – Fabrication and characterization
39th International Conference on Micro- and Nano- Engineering (MNE), 2013, London, September, 2013.[73] Optical Detection of Radio-Frequency Signals via a Strongly Coupled Nano-Electromechanical System
CLEO, San Diego, USA, 2013.2012
[72] Novel Oscillator Topologies
NEMS Workshop, Barcelona, Spain, 2012.[71] A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers
2012. 26th IEEE International Conference on Microelectronic Test Structures (ICMTS), San Diego, USA, 2012. p. 55 - 60. DOI : 10.1109/ICMTS.2012.6190613.2011
[70] Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions
2011. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011. p. 787 - 790. DOI : 10.1109/TRANSDUCERS.2011.5969266.[69] Self sensing cantilevers for the measurement of (biomolecular) forces
2011. 8th Spanish Conference on Electron Devices (CDE), Palma de Mallorca, Spain, 2011. p. 1 - 4. DOI : 10.1109/SCED.2011.5744171.[68] Nonlinear dynamics in NEMS
2nd international workshop in NEMS, Toulouse, France, 2011.[67] Control of Nonlinearity in a Doubly-Clamped Nanomechanical Beams
IEEE International Frequency Control Symposium (IFCS), San Francisco, USA, 2011.[66] Opto-thermal actuation in double layer polymer microcantilevers
2011. Nano-Opto-Mechanical Systems (NOMS), San Diego, USA, 2011. DOI : 10.1117/12.897353.2010
[65] Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010.[64] Pd-functionalized MEMS resonator for hydrogen gas sensing
Nano-Tera Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.[63] Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure
7th International Workshop on Nanomechanical Cantilever Sensors, Banff, Canada., May 26-28, 2010.[62] Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing
2010. 23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS'2010, Hong Kong, 24-28 January, 2010. DOI : 10.1109/MEMSYS.2010.5442547.[61] Flexible Membranes Improve Resolution in Stencil Lithography
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1- 4, 2010.[60] Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing
Functionalized Plasmonic Nanostructures for Biosensing, Ascona, Switzerland, April 18-23, 2010.[59] Piezoelectric Nanomechanical Devices
IEEE International Frequency Control Symposium (IFCS), Newport Beach, USA, 2010.2009
[58] Silicon microcantilevers with piezoresistive and MOSFET detection
2009. 7th Spanish Conference on Electron Devices (CDE), Santiago de Compostela, Spain, 2009. p. 428 - 31. DOI : 10.1109/SCED.2009.4800525.[57] Analysis and Applications of Nanostructures Created by Stencil Lithography
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009.[56] All through stencil MOSFET fabrication
Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009.[55] Mechanically tuneable microoptical structure based on PDMS
2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. p. 560 - 563. DOI : 10.1016/j.proche.2009.07.140.[54] Stencilled Conducting Bismuth Nanowires
2009. 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009. DOI : 10.1116/1.3292630.[53] Minimized Blurring in Stencil Lithography using a Compliant Membrane
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25 2009.[52] Direct Etching of High Aspect structures through a Stencil
2009. MEMS 2009, Sorrento, Italy, January 25-29, 2009. DOI : 10.1109/MEMSYS.2009.4805339.[51] Analysis and Applications of Nanostructures Created by Stencil Lithography
2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009. DOI : 10.1109/SENSOR.2009.5285463.[50] Minimized Blurring in Stencil Lithography using a Compliant Membrane
2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.. DOI : 10.1109/SENSOR.2009.5285768.[49] Silicon microcantilevers with MOSFET detection
Trends in Nanotechnology (TNT), Oviedo, Spain, September 07-11, 2009.[48] Silicon microcantilevers with MOSFET detection
2009. 35th International Conference on Micro- and Nano- Engineering (MNE), Gent, Belgium, 2009. p. 1245 - 1247. DOI : 10.1016/j.mee.2009.11.125.2008
[47] Discontinuous Palladium Nanostructures for H2 Sensing
Pacific Rim Meeting on Electrochemical and Solid-State Science (PRIME2008), Honolulu, Hawaii, October 12-17 2008.[46] Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks
2008. 20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008. p. 539 - 541. DOI : 10.1063/1.3120093.[45] Novel methods to pattern polymers for microfluidics
2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 972 - 975. DOI : 10.1016/j.mee.2008.01.052.[44] Stress and aging minimization in photoplastic AFM probes
2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008. DOI : 10.1016/j.mee.2008.12.033.[43] Stress and aging minimization in photoplastic AFM probes
34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.[42] Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates
2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 1108 - 1111. DOI : 10.1016/j.mee.2007.12.069.[41] Etching of sub-micrometer structures through Stencil
2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007. p. 1010 - 1014. DOI : 10.1016/j.mee.2007.12.068.[40] Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization
2008. 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008.. p. 807 - 811. DOI : 10.1109/NEMS.2008.4484447.[39] Research activities at LMIS1-EPFL
5th NAMIS International workshop, Freiburg, Germany, April 4th-5th, 2008.[38] Fabrication of Highly Ordered Vertical Nanogap Arrays and Networks on a Large Scale
34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.[37] Direct fabrication of NEMS by etching through Stencil
Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008.[36] Resistless ion implantation of sub-micron scale features through nano-stencil
34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.[35] Design and optimization of nanogap array sensors
Eurosensors XXII, Dresden, Germany, September 7-10, 2008.[34] Discontinuous Palladium Nanostructures for H2 Sensing
2008. ECS Transactions, Hawaii, 2008. p. 457 - 463. DOI : 10.1149/1.2981151.[33] Direct fabrication of NIL stamps using Stencil Lithography
Eurosensors XXII, Dresden, Germany, September 7-10, 2008.[32] Hydrogen Sensors based on Nanoscaled Discontinuities in Palladium
NAMIS International autumn school, Tokyo, Japan, September 2008.[31] Stencil Lithography: Quick and Clean
Smart Systems Integration (SSI), Barcelona, Spain, 2008.[30] Quad beam polymeric optomechanical systems
2008. International Symposium on Optomechatronic Technologies, San Diego, USA, 2008. DOI : 10.1117/12.807287.2007
[29] Focused Ion Beam Engineered Nanogap in a Palladium Microwire as a Mechanical Switch for Hydrogen Detection
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.[28] Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.[27] Etching of sub-micrometer structures through Stencil
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.[26] Novel cantilever design with high control of the mechanical performance
2007. 32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006. p. 1292 - 1295. DOI : 10.1016/j.mee.2007.01.111.[25] Piezoresistive micro cantilevers for Biomolecular force detection
2007. 6th Spanish Conference on Electron Devices (CDE), Sevilla, Spain, 2007. p. 212 - 215. DOI : 10.1109/SCED.2007.384029.[24] DRIE based novel technique for AFM probes fabrication
2007. 32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006. p. 1132 - 1135. DOI : 10.1016/j.mee.2007.01.078.[23] Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers
2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Lyon, France, 2007. p. U544 - U545. DOI : 10.1109/SENSOR.2007.4300321.[22] Piezoresistive cantilevers for biomolecular detection
4th International Workshop on Nanomechanical Sensors (NMC), Montreal, Canada, 2007.2006
[21] Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection
2006. 31st International Conference on Micro- and Nano- Engineering (MNE), Vienna, Austria, 2005. p. 1302 - 1305. DOI : 10.1016/j.mee.2006.01.223.[20] Transfer of small structures by bonding
2006. International Workshop on Wafer Bonding for MEMS (WWB), Halle, 11-12 October 2004. p. 455 - 461. DOI : 10.1007/s00542-005-0041-7.[19] Piezoresistive cantilevers for intermolecular force detection
3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006.[18] Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection
2006. Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Baltimore, USA, 2006. p. 1302 - 1305.[17] Development of a diagnosis tool based on the measurement of molecular interactions using CMOS-integrated piezoresistive microcantilevers
2006. 3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006. p. 212 - 215.2005
[16] Development of an artificial nose integrating NEMS and biological olfactory receptors
2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, SPAIN, 2005. p. 529 - 532. DOI : 10.1109/SCED.2005.1504506.[15] Polysilicon piezoresistive cantilevers for intermolecular force detection
2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005. p. 495 - 498. DOI : 10.1109/SCED.2005.1504494.[14] Development of an artificial nose integrating NEMS and biological olfactory receptors
5th Spanish Conference on Electron Devices (CDE), Tarragona, 2005.[13] Artificial nose integrating biological olfactory receptors and NEMS
2005. International Symposium on Olfaction and Electronic Nose (ISOEN), Barcelona, Spain, 2005. p. 529 - 532.[12] Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE
19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.[11] Focused ion beam production of nanoelectrode arrays
19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.[10] Fabrication and characterization of Co-Ni magnetic cantilevers
2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005. p. 201 - 204. DOI : 10.1109/SCED.2005.1504357.[9] FIB and DRIE combination for nanotip fabrication
2005. 5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005. p. 443 - 446. DOI : 10.1109/SCED.2005.1504477.2004
[8] Fabrication of nanoelectrodes combining standard microfabrication processes and focused ion beam (FIB)
Trends in Nanotechnology (TNT), Segovia, 2004.[7] Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection
2004. 29th International Conference on Micro- and Nano- Engineering (MNE), Cambridge, UK, 22-25 September 2003. p. 480 - 486. DOI : 10.1016/j.mee.2004.03.021.[6] Nanosensors based on biological olfactory receptors
8th European Conference on Micro&Nanoscale Technologies for Biosciences (Nanotech), Montreux, 2004.[5] Co-Ni material for magnetic cantilevers
18th European Conference on Sensors and Actuators (Eurosensors), Rome, 2004.[4] DRIE and FIB combination for nanotip fabrication
30th International Conference on Micro- and Nano- Engineering (MNE), Rotterdam, 2004.[3] Immobilization of streptavidin on aminoterminated functionalised gold using microcontact printing to obtain biosensors
3rd International Conference on Nanoimprint and NanoTechnologies (NNT), Wien, 2004.[2] CMOS-integrated, cantilever-based sensor devices: the Biofinger project
2004. 1st International Workshop on Nanomechanical Sensors (NMC), Madrid, 2004. p. 212 - 215.2003
[1] E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection
4th Spanish Conference on Electron Devices (CDE), Calella, 2003.Teaching & PhD
Teaching
Mechanical Engineering
Microengineering
PhD Students
Abdelaal Yara Tarek Mahmoud Abubakr, Arefi Fatemeh, Ayhan Furkan, Coronese Melania, Gholizadeh Saba, Hartmann Florian Fernand, Moreno Garcia Daniel, Namnabat Mohammadsadegh, Peretti Federico, Spettel Jasmin, Stettler Silvan, Xu Nan, de Sousa Leticia,Past EPFL PhD Students
De Pastina Annalisa , Faizan Muhammad , Herle Dorian Giraud , Howell Kaitlin Marie , Liffredo Marco , Lozzi Andrea , Maillard Damien , Monroe Morgan Mc Kay , Yandrapalli Soumya ,Courses
Mechanical vibrations
In this course we study the modal dynamics of mechanical structures. During the course we will learn key concepts like Normal modes, effective mass and stiffness, and eigenfrequencies.
Micro/Nanomechanical devices
In this course we will see an overview of the
exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects material properties, how these devices are manufactured, designed and later used.