Fields of expertise
BiographyGuillermo Villanueva is a Tenure Track Assistant Professor at the Ecole Polytechnique Federale de Lausane (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US); and before a post-doc at EPFL-LMIS1. He received his M.Sc. in Physics in Zaragoza (Spain) and his PhD from the UAB in Barcelona (Spain). Since the start of his PhD (2002), Prof. Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertise from the design and fabrication to the characterization and applicability. He has co-authored more than 75 papers in peer-reviewed journals (h-index of 24 WoK, 32 GoS) and more than 100 contributions to international conferences. He is serving, or has served, on the program committees of IEEE-NEMS, IEEE-Sensors, MNE, IEEE-FCS and Transducers. He is editor of Microelectronic Engineering. He has co-organized MNE2014 and SNC2015; and he is currently co-organizing the short courses at Transducers 2019 and the 16th International Workshop on Nanomechanical Sensors (NMC2019).
Publication Record<script src='http://labs.researcherid.com/mashlets?el=badgeCont731924&mashlet=badge&showTitle=false&className=a&rid=C-4904-2009'></script>
Tenure Track Assistant Professor
Advanced NEMS group
January 2017 - Present
SNSF Assistant Professor
Advanced NEMS group
July 2013 - June 2019
Marie Curie Post-Doctoral Scholar
Marie Curie Post-Doctoral Scholar
Finite Element Modelling
 Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic ResonatorsJournal Of Microelectromechanical Systems. 2022-01-24. DOI : 10.1109/JMEMS.2022.3143354.
 A formula for the admittance of laterally excited bulk wave resonators (XBARs)Electronics Letters. 2021-07-26. DOI : 10.1049/ell2.12261.
 On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surfacePhysics Of Fluids. 2021-03-01. DOI : 10.1063/5.0037736.
 Frequency fluctuations in nanomechanical silicon nitride string resonatorsPhysical Review B. 2020-12-07. DOI : 10.1103/PhysRevB.102.214106.
 Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannelMicroelectronic Engineering. 2020-07-15. DOI : 10.1016/j.mee.2020.111395.
 Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonatorsJournal Of Micromechanics And Microengineering. 2020-01-01. DOI : 10.1088/1361-6439/ab5b7b.
 On "Cavitation on Chip" in Microfluidic Devices With Surface and Sidewall Roughness ElementsJournal Of Microelectromechanical Systems. 2019-10-01. DOI : 10.1109/JMEMS.2019.2925541.
 Optimum ratio of hydrophobic to hydrophilic areas of biphilic surfaces in thermal fluid systems involving boilingInternational Journal Of Heat And Mass Transfer. 2019-06-01. DOI : 10.1016/j.ijheatmasstransfer.2019.01.139.
 Effect of AlN seed layer on crystallographic characterization of piezoelectric AlNJournal of Vacuum Science & Technology A. 2019-03-01. DOI : 10.1116/1.5082888.
 Effective quality factor tuning mechanisms in micromechanical resonatorsApplied Physics Reviews. 2018-12-01. DOI : 10.1063/1.5027850.
 Intensifying cavitating flows in microfluidic devices with poly(vinyl alcohol) (PVA) microbubblesPhysics Of Fluids. 2018-10-01. DOI : 10.1063/1.5051606.
 Observation of a phononic quadrupole topological insulatorNATURE. 2018. DOI : 10.1038/nature25156.
 Hydrodynamic cavitation in microfluidic devices with roughened surfacesJournal of Micromechanics and Microengineering. 2018. DOI : 10.1088/1361-6439/aab9d0.
 Fabrication of suspended microchannel resonators with integrated piezoelectric transductionMICROELECTRONIC ENGINEERING. 2018. DOI : 10.1016/j.mee.2018.02.011.
 Asymmetrically coupled resonators for mass sensingApplied Physics Letters. 2017. DOI : 10.1063/1.5003023.
 Photothermal Analysis of Individual Nanoparticulate Samples Using Micromechanical ResonatorsACS Nano. 2013. DOI : 10.1021/nn402057f.
 Nonlinear Mode-Coupling in Nanomechanical SystemsNano Letters. 2013. DOI : 10.1021/Nl400070e.
 Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensorsReview of Scientific Instruments. 2012. DOI : 10.1063/1.3673603.
 Optimal operating points of oscillators using nonlinear resonatorsPhysical Review E. 2012. DOI : 10.1103/Physreve.86.056207.
 A Nanoscale Parametric Feedback OscillatorNano Letters. 2011. DOI : 10.1021/Nl2031162.
 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detectionJournal of Micromechanics and Microengineering. 2011. DOI : 10.1088/0960-1317/21/8/085023.
 Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam TechniquesJournal of Nanoscience and Nanotechnology. 2010. DOI : 10.1166/jnn.2010.1737.
 Crystalline silicon cantilevers for piezoresistive detection of biomolecular forcesMicroelectronic Engineering. 2008. DOI : 10.1016/j.mee.2008.01.082.
 Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limitsNanotechnology. 2008. DOI : 10.1088/0957-4484/19/03/035503.
 Focused ion beam production of nanoelectrode arraysMaterials Science & Engineering C-Biomimetic and Supramolecular Systems. 2008. DOI : 10.1016/j.msec.2007.10.077.
 Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuatorsSensors and Actuators A-Physical. 2008. DOI : 10.1016/j.sna.2007.11.007.
 3-D modulable PDMS-based microlens systemOptics Express. 2008. DOI : 10.1364/OE.16.004918.
 Nanobiosensors based on individual olfactory receptorsAnalog Integrated Circuits and Signal Processing. 2008. DOI : 10.1007/s10470-007-9114-0.
 Deep reactive ion etching and focused ion beam combination for nanotip fabricationMaterials Science & Engineering C-Biomimetic and Supramolecular Systems. 2006. DOI : 10.1016/j.msec.2006.01.002.
 Modified atomic force microscopy cantilever design to facilitate access of higher modes of oscillationReview of Scientific Instruments. 2006. DOI : 10.1063/1.2219738.
 Special cantilever geometry for the access of higher oscillation modes in atomic force microscopyApplied Physics Letters. 2006. DOI : 10.1063/1.2226993.
 T-shaped microcantilever sensor with reduced deflection offsetApplied Physics Letters. 2006. DOI : 10.1063/1.2345234.
 Polymeric MOEMS variable optical attenuatorIEEE Photonics Technology Letters. 2006. DOI : 10.1109/Lpt.2006.886134.
 Advances in the production, immobilization, and electrical characterization of olfactory receptors for olfactory nanobiosensor developmentSensors and Actuators B-Chemical. 2006. DOI : 10.1016/j.snb.2005.11.083.
 Production of structures for microfluidics using polymer imprint techniquesMicroelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.087.
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Teaching & PhD
Doctoral Program in Microsystems and Microelectronics
Doctoral Program in Electrical Engineering
Doctoral Program in Mechanics
Doctoral Program in Photonics