Marco Liffredo

EPFL STI IGM NEMS
MED 3 1426 (Bâtiment MED)
Station 9
1015 Lausanne

M.Sc.

Micro and Nanotechnologies for Integrated Systems

PoliTo/INPG/EPFL

2019

Ph.D.

Microsystems and Microelectronics

EPFL

2024

Publications

M. Liffredo, N. Xu, S. Stettler, F. Peretti and L.G. Villanueva Journal of Vacuum Science and Technology A	Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes
A. Lozzi, M. Liffredo, E. T. Yen, J. Segovia-Fernandez and L. G. Villanueva Journal of Microelectromechanical Systems	Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators