Nico de Rooij
Domaines de compétences
MEMS / NEMS
MEMS / NEMS
BiographieNico de Rooij is Professor Emeritus of EPFL and previous Vice-President of CSEM SA. He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 2009 to 2016. At CSEM SA he was responsible for the EPFL CSEM coordination from 2012 to 2016. His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 400 published journal papers in these areas.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. Since October 1990 till October 1996 and again from October 2002 until June 2008, he has been the director of the Institute of Microtechnology of the University of Neuchatel (IMT UniNE). He lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ), and since 1989, he has been a part-time professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He has been appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA, from 2008 until 2012. He was Director of EPFL's Institute of Microengineering (EPFL STI IMT) from 2009 to 2012, following the transfer of IMT Uni-NE to EPFL.
Dr. de Rooij is a Fellow of the IEEE and Fellow of the Institute of Physics (UK). He recieved the IEEE Jun-Ichi Nishizawa Gold Medal, the Schlumberger Prize as well as the MNE Fellow Award 2016. He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by the A*STAR Science and Engineering Council (SERC), Singapore, hosted by SIMTech, for the period 2005-2008.
Prof. de Rooij is Corresponding Member of the Royal Netherlands Academy of Arts and Sciences and Individual Member of the Swiss Academy of Engineering Sciences.
He has been serving on the Editorial Boards of the IEEE/ASME Journal of Microelectromechanical Systems (IEEE JMEMS), the IEEE proceedings, the Journal of Micromechanics and Microengineering, JM & M,, the Sensors and Actuators ,and Sensors and Materials. He was Member of the Information and Communication technology jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
Dr. de Rooij is (or was) Member of numerous international steering committees of conference series as well as
technical paper review panels including the steering committee of the International Conference on Solid-State
Sensors and Actuators and of Eurosensors. He acted as European Program Chairman of Transducers '87 and General Chairman of Transducers '89, Montreux, Switzerland.
He has supervised more than 70 Ph.D. students, who have successfully completed their Ph.D. thesis.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
Past PhD StudentsLink to past PhD students
Large micromirror array for multi-object spectroscopy in cryogenic environment2009. Conference on MOEMS and Miniaturized Systems VIII, San Jose, CA, Jan 27-28, 2009. p. 72080K. DOI : 10.1117/12.811117.
Simultaneous Chemical Recording and Stimulation in the Brain Using an Assembly of Biosensor Silicon Microprobes and SU-8 Microinjectors2009. 23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009. p. 525-528. DOI : 10.1016/j.proche.2009.07.131.
Biosensor Microprobe Functionalisation Using an On-Chip Dispensing Approach2009. 23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009. p. 281-284. DOI : 10.1016/j.proche.2009.07.070.
CPT spectroscopy on low-temperature sealed MEMS rubidium vapour cells23rd European Frequency and Time Forum and 63rd consecutive meeting of the IEEE International Frequency Control Symposium, Besançon, France, April 20-24, 2009.
Linearly deformable micro membrane for dynamic laser beam shaping and homogenizingEOS Conference on Manufacturing of Optical Components, Munich, Germany, June 15-17, 2009.
Biosensor Probe Arrays for Real-Time Monitoring of NeurotransmittersWorld Congress on Medical Physics and Biomedical Engineering, Munich, Germany, September 7-12, 2009.
Gas Detection with a Micro FTIR Spectrometer in the MIR Region2009. Eurosensors XXIII Conference, Lausanne, Switzerland, September 6 - 9, 2009. p. 1379-1382. DOI : 10.1016/j.proche.2009.07.344.
Restrictive dual capacitively coupled contactless conductivity detection for microchip electrophoresis2009. p. 1351-1354. DOI : 10.1016/j.proche.2009.07.337.
Microfluidic System for Near- and Mid-Infrared Analysis of Human SalivaNano-Tera Workshop: Biosensors and Body Area Networks, Le Louverain, Switzerland, November 23-24, 2009.
Microfluidic connectors by ultrasonic welding2009. The 34th International Conference on Micro- and Nano-Engineering (MNE), Athens, Greece, September 15-18, 2008. p. 1354-1357. DOI : 10.1016/j.mee.2009.01.048.
6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping2009. Laser Beam Shaping X, San Diego, August 02-06, 2009. p. 74300H-74300H-8. DOI : 10.1117/12.827663.
Tunable MEMS-based Optical Linear(1D)Diffusers for Dynamic Laser Beam Shaping and Homogenizing2009. IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, August 17-20, 2009. p. 129-130. DOI : 10.1109/OMEMS.2009.5338551.
Fast Quality Control with Diffractive Micro-and NanostructuresCTI Micro and Nano Technologies Event 2009, Neuchâtel, November 11, 2009.
Mars vue de NeuchâtelConférence Université de Neuchâtel, Neuchâtel, December 3, 2009.
AFM measurements of Martian soil particles2009. Workshop on the Microstructure of the Martian Surface, Copenhagen, August 27-29. 2009. p. 37.
Epitaxial Thin Films on Silicon for MEMS devices1st National Congress on Functional Oxide for Electronics - FOxE, Sorrento, March 25-27, 2009.
Welcome Message, General ChairmanIEEE-NEMS 2009, Shenzen, January 5-8, 2009.
Microsystems and Opportunities of Technology TransferSeminar ETH Zürich, Zürich, October 6, 2009 .
MEMS for WatchesEPMT Environnement Professionnel MicroTechnologies, Lausanne, May 12-15, 2009.
Microsystems Technology and Opportunities for Technology TransferNano Device Seminar, University of Pennsylvania, Philadelphia, April 1, 2009.
Microsystèmes, nanotechnologie et biologie: panorama, enjeux, difficultésSMB2009 Sciences de la miniaturisation et biologie, Grenoble, June 8-12, 2009.
Current developments in Microfabricated nanomaterials and device engineeringLes 2ème journéesTunisiennes des Nanosciences et Nanotechnologies, Tunis, July 11-13, 2009.
Exploring Asian markets through research exchangeSwissnexDay 09, Winterthur, December 12, 2009.
Complex nanostructures in PMMA made by a single process step using e-beam lithography2009. 35th International Conference on Micro & Nano Engineering, Ghent, Belgium, September 28-October 01, 2009. p. 1139-1142. DOI : 10.1016/j.mee.2009.10.046.
Fabrication and Characterisation of 1-D diffusing elements15th Microptics Conference (MOC 09), Tokyo, October 25-28, 2009.
Hybrid microfluidic cartridge formed by irreversible bonding of SU-8 and PDMS for multi-layer flow applications2009. Eurosensors 2009, Lausanne, September 6-9, 2009. p. 381-384. DOI : 10.1016/j.proche.2009.07.095.
Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude2009. MOEMS-MEMS SPIE Photonics West, San José, January 27-28, 2009. p. 720805. DOI : 10.1117/12.808162.
Thermal Characterization of Polycrystalline CVD Diamond Thin Films2009. Eurosensors 2009, Lausanne, September 6-9, 2009. p. 108. DOI : 10.1016/j.proche.2009.07.152.
PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION2009. The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, December 1-4, 2009. p. 108-111.
A MICRO GAS PRECONCENTRATOR WITH IMPROVED PERFORMANCES FOR ENVIRONMENTAL MONITORING2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 983-986.
Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivitySensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.023.
Scanning gate microscopy measurements on a superconducting single-electron transistorPhysical Review B. 2009. DOI : 10.1103/PhysRevB.79.134530.
Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 2. Thermal property and sensitivitySensors and Actuators A-Physical. 2009. DOI : 10.1016/j.sna.2008.12.024.
Micro-fabrication of polymeric devices using hot roller embossing2009. 34th International Conference on Micro-and Nano-Engineering, Athens, September 15-18, 2008. p. 933-936. DOI : 10.1016/j.mee.2008.12.021.
Influence of the Adsorbent Material in the Performances of a Micro Gas Preconcentrator2009. 13th International Symposium on Olfaction and Electronic Nose, Brescia, April 15-17, 2009. p. 323-326.
Memory effects of ion-selective electrodes: Theory and computer simulation of the time-dependent potential response to multiple sample changesJournal of Electroanalytical Chemistry. 2009. DOI : 10.1016/j.jelechem.2009.05.004.
Microcolumn design for a large scan field and pixel numberJournal of Vacuum Science & Technology B. 2009. DOI : 10.1116/1.3256265.
MEMS FOR SPACE2009. Transducers 2009, Denver, June 21-25, 2009. p. 17-24.
SCALABLE CASCADED SNAP-IN ACTUATORS FOR LARGE-STROKE DISPLACEMENTS2009. Transducers 2009, Denver, June 21-25,2009. p. 1754-1757.
Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguidesSensors and Actuators B. 2009. DOI : 10.1016/j.snb.2009.08.049.
Ultra-low power metal oxide gas sensor on plastic foil2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 584-587.
Multi sensor platform on plastic foil for environmental monitoring2009. Eurosensors XXIII, Lausanne, September 06-09, 2009. p. 597-600. DOI : 10.1016/j.proche.2009.07.149.
Colorimetric gas sensors based on optical waveguides made on plastic foil2009. Eurosensors XXIII, Lausanne, September 6-9, 2009. p. 576-579. DOI : 10.1016/j.proche.2009.07.144.
Temperature, humidity and gas sensors integrated on plastic foil for low power applicationsSensors and Actuators B:Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.
Conditions of Micromirror Lifted by Buckled Bridges Using Film StressInternational Display Workshop IWD'08 , Niigata, Japan, December 3-5, 2008.
Micromirror array for multiobject spectroscopy in ground-based and space telescopes2008. International Conference on Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, Marseille, FRANCE, Jun 23-28, 2008. p. 70182S. DOI : 10.1117/12.790358.
Thermally activated solvent bonding of polymersMicrosystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2008. DOI : 10.1007/s00542-007-0459-1.
Micromirrors for multiobject spectroscopy: optical and cryogenic characterization2008. Conference on MOEMS and Miniaturized Systems VII, San Jose, California, USA, January 22-23, 2008. p. 68870B. DOI : 10.1117/12.764381.
Evaporation based micro pump integrated into a scanning force microscope probe2008. Proceedings of the Conference on Micro- and Nano-Engineering, MNE 2007, Copenhagen, Denmark, September 23-26, 2007. p. 1302-1305. DOI : 10.1016/j.mee.2007.12.047.
Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection2008. Conference on PhD Research in Microelectronics and Electronics, Istanbul, TURKEY, June 22-25, 2008. p. 121-124. DOI : 10.1109/RME.2008.4595740.
Micro-mirror array for multi-object spectroscopy in cryogenic environment2008. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany, August 11-14, 2008. p. 114-115. DOI : 10.1109/OMEMS.2008.4607855.
Dynamic behavior of the tuning fork AFM probe2008. MNE 2007 Micro- and Nano-Engineering Conference, Copenhagen, Denmark, September 23-26, 2007. p. 1018-1021. DOI : 10.1016/j.mee.2008.01.100.
Autonomous Sensors on flexible foils powered by RFID and energy scavenging for environmental and goods monitoring2008. PowerMEMS 2008 microEMS 2008, Sendai, November 9-12, 2008. p. 173-176.
Digital Micro-thrusters with simplified architecture and reliable ignition and combustion2008. PowerMEMS 2008 MicroEMS 2008, Sendai, November 9-12, 2008. p. 157-160.
Les méthodes d’investigations à l’échelle nanoscopiqueCarrefour Alliance workshop, Nanotechnologies, supersmall is beautiful! , Lausanne, May 21, 2008.
Disposable, Continuous-Flow Biosensor for Multi-Analyte Monitoring and Microfluidic Control of the Linear RangeInternational Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS) XII, San Diego, October 12-16, 2008.
Multifunctional Micro-Optical Elements for Laser Beam Homogenizing and Beam Shaping2008. Lasers and Applications in Science and Engineering, San Jose, California, United States. p. 68790Q. DOI : 10.1117/12.762923.
Large linear micromirror array for UV femtosecond laser pulse shaping2008. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, August 11-18, 2008. p. 39-40. DOI : 10.1109/OMEMS.2008.4607817.
Microhotplates with TiN heatersSensors and Actuators A. 2008. DOI : 10.1016/j.sna.2008.08.016.
Localized Growth and Integration of Carbon Nanotubes on Micro-HotplatesJournal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.
Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methodsJournal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.
Study and fabrication of a micro scanner for optical applicationsUniversité de Neuchâtel, 2008.
Packaged MEMS Micromirrors for Cyrogenic Environment2008. p. 758-761.
Ion-selective microelectrode arrays for cell culture moUniversité de Neuchâtel, 2008.
MEMS for Space2008.
Successful technology transfer of selected MEMS activities to the Watch Manufacturing Industry2008.
Applications of Bio-MEMS in Life Sciences2008.
Introduction to micro-technology2008.
Möglichkeiten und Anwendungen der Mikrosystemtechnologie2008.
Intégration de l'IMT à l'EPFL - Perspectives d'avenir2008.
Microsystems Technology and Opportunities for technology Transfer2008.
Integrated Temperature, Humidity and Gas Sensors on Plastic Substrates for RFID and Low-Power Applications2008.
Capacitive gas sensor arrays on plastic substrates for low power and mobiles applications2008. p. 1431-1434.
Computer simulation and theory of the diffusion-and flow-induced concentration dispersion in microfluidic devices and HPLC systems based on rectangular microchannelsAnalytica Chimica Acta. 2008. DOI : 10.1016/j.aca.2008.05.063.
Detection of Surface Stress Induced Deflections in Piezoelectric Cantilever Sensors Using a Charge Integrator2008. ICCAS 2008, Seoul, October 14-17, 2008. p. 937-940.
A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications2008. PowerMEMS 2008 MicroEMS 2008, Sendai, November 9-12, 2008. p. 269-272.
Establishment of a technology platform for epitaxial piezoelectric MEMS2008. Eurosensors XXII, Dresden, Germany, September 7-10, 2008. p. 819-822.
Label-Free Dectection of Single Protein Molecules and Protein-Protein Interactions using Synthetic NanoporesAnalytical Chemistry. 2008. DOI : 10.1021/ac7025207.
Potentiometric platform for the quantification of cellular potassium effluxLab on a chip. 2008. DOI : 10.1039/b801042k.
MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon2008.
MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon2008.
Silicon Microprobe Arrays for the Amperometric Detection of Choline in Brain Tissue2008.
Microfluidic Cartridge for the (Bio)Chemical Functionalization of Pt Microelectrodes Integrated on Silicon Microprobes2008.
Conductive supports for combined AFM–SECM on biological membranesNanotechnology. 2008. DOI : 10.1088/0957-4484/19/38/384004.
Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate2008. p. 74-77. DOI : 10.1109/ICSENS.2008.4716386.
Hybrid organic / inorganic sensing platforms on flexible plastic substrates2008.
Evaluation of spin-coatable colorimetric films for ammonia detection using optical waveguides2008.
On the thermal simulation and characterisation of microsystems: progress and status2008. p. 133-136.
Transfer of UV Glue patterned by Photolithography for Microsystems assembling and packaging2008. p. 1317-1320.
Large Deformation Balloon Micro-Actuator based on Pyrotechnics on Chip2008. p. 535-538.
Large Deformation Balloon Micro-Actuator Based on Pyrotechnics on Chip2008. 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, 13-17 Jan. 2008. p. 535-538. DOI : 10.1109/MEMSYS.2008.4443711.
Beam steering system using a 2D MEMS scanner2007. 20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society, Lake Buena Vista, Floride, USA, October 21-25, 2007. p. 916-917. DOI : 10.1109/LEOS.2007.4382708.
Optical MEMS for Future Instruments in Astronomy2007. p. 191-192. DOI : 10.1109/OMEMS.2007.4373905.
Micromirrors for Multiobject Spectroscopy: Large Array Actuation and Cryogenic Compatibility2007. p. 87-88. DOI : 10.1109/OMEMS.2007.4373853.
Micromirror arrays for object selection2007.
Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy2007. MOEMS-MEMS 2007 Micro and Nanofabrication, San Jose, California, United States, 20-25 January 2007. p. 646603. DOI : 10.1117/12.702012.
Direct integration of carbon nanotubes on micromachined hotplatesNanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.
Tunable Optical Microsystems featuring Vertical Electrostatic Comb DrivesUniversité de Neuchâtel, 2007.
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