Nico de Rooij
EPFL STI-DO
MC A3 274 (Bâtiment MC)
Rue de la Maladière 71b, CP 526
CH-2002 Neuchâtel 2
Unité: PH-STI
Biographie
Nico de Rooij is Professor Emeritus of EPFL and previous Vice-President of CSEM SA. He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 2009 to 2016. At CSEM SA he was responsible for the EPFL CSEM coordination from 2012 to 2016. His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 400 published journal papers in these areas.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. Since October 1990 till October 1996 and again from October 2002 until June 2008, he has been the director of the Institute of Microtechnology of the University of Neuchatel (IMT UniNE). He lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ), and since 1989, he has been a part-time professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He has been appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA, from 2008 until 2012. He was Director of EPFL's Institute of Microengineering (EPFL STI IMT) from 2009 to 2012, following the transfer of IMT Uni-NE to EPFL.
Dr. de Rooij is a Fellow of the IEEE and Fellow of the Institute of Physics (UK). He recieved the IEEE Jun-Ichi Nishizawa Gold Medal, the Schlumberger Prize as well as the MNE Fellow Award 2016. He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by the A*STAR Science and Engineering Council (SERC), Singapore, hosted by SIMTech, for the period 2005-2008.
Prof. de Rooij is Corresponding Member of the Royal Netherlands Academy of Arts and Sciences and Individual Member of the Swiss Academy of Engineering Sciences.
He has been serving on the Editorial Boards of the IEEE/ASME Journal of Microelectromechanical Systems (IEEE JMEMS), the IEEE proceedings, the Journal of Micromechanics and Microengineering, JM & M,, the Sensors and Actuators ,and Sensors and Materials. He was Member of the Information and Communication technology jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
Dr. de Rooij is (or was) Member of numerous international steering committees of conference series as well as
technical paper review panels including the steering committee of the International Conference on Solid-State
Sensors and Actuators and of Eurosensors. He acted as European Program Chairman of Transducers '87 and General Chairman of Transducers '89, Montreux, Switzerland.
He has supervised more than 70 Ph.D. students, who have successfully completed their Ph.D. thesis.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
Past PhD Students
Link to past PhD students
Compétences
Microsystems Technology
MEMS / NEMS
Bio MEMS
Lab-on-a-Chip
Nanotools
Optical MEMS
Power MEMS
Publications
Infoscience
Nombre de notices chargées.
2016
M. Camara; P. Breuil; C. Pijolat; J.-P. Viricelle; N. F. de Rooij et al. : Tubular gas preconcentrators based on inkjet printed micro-hotplates on foil; Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.121.
M. Rieu; M. Camara; G. Tournier; J.-P. Viricelle; C. Pijolat et al. : Fully inkjet printed SnO2 gas sensor on plastic substrate; Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.042.
A. Vasquez Quintero; F. Molina-Lopez; E. Smits; E. Danesh; J. van den Brand et al. : Smart RFID Label with a Printed Multisensor Platform for Environmental Monitoring; Flexible and Printed Electronics. 2016. DOI : 10.1088/2058-8585/1/2/025003.
C. Botteron; D. Briand; B. Mishra; G. Tasselli; P. Janphuang et al. : A low-cost UWB sensor node powered by a piezoelectric harvester or solar cells; Sensors and Actuators A: Physical. 2016. DOI : 10.1016/j.sna.2016.01.011.
2015
S. Talaei; P. D. van der Wal; S. Ahmed; M. Liley; N. F. de Rooij : Enzyme SU-8 microreactors: simple tools for cell-culture monitoring; Microfluidics and Nanofluidics. 2015. DOI : 10.1007/s10404-015-1562-8.
R. Lockhart; F. Friedrich; D. Briand; P. Margairaz; J.-P. Sandoz et al. : Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissue; Biomedical Microdevices. 2015. DOI : 10.1007/s10544-015-9981-6.
F. Loizeau; T. Akiyama; S. Gautsch; P. Vettiger; G. Yoshikawa et al. : Comparing membrane- and cantilever-based surface stress sensors for reproducibility; Sensors and Actuators A: Physical. 2015. DOI : 10.1016/j.sna.2015.02.039.
P. Janphuang; R. A. Lockhart; D. Isarakorn; S. Henein; D. Briand et al. : Harvesting Energy From a Rotating Gear Using an AFM-Like MEMS Piezoelectric Frequency Up-Converting Energy Harvester; Journal of Microelectromechanical Systems. 2015. DOI : 10.1109/JMEMS.2014.2349794.
M. Camara; P. Breuil; D. Briand; J.-P. Viricelle; C. Pijolat et al. : Preconcentration Modeling for the Optimization of a Micro Gas Preconcentrator Applied to Environmental Monitoring; Analytical Chemistry. 2015. DOI : 10.1021/acs.analchem.5b00400.
A. Vasquez Quintero; D. Briand; N. F. de Rooij : Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist; Journal of Micromechanics and Microengineering. 2015. DOI : 10.1088/0960-1317/25/4/045013.
G. Mattana; D. Briand; A. Marette; A. Vásquez Quintero; N. F. de Rooij : Polylactic acid as a biodegradable material for all-solution-processed organic electronic devices; Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.11.010.
F. Molina-Lopez; D. Briand; N. F. de Rooij : Inkjet and microcontact printing of functional materials on foil for the fabrication of pixel-like capacitive vapor microsensors; Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.10.041.
2014
F. Molina-Lopez; R. E. De Araujo; M. Jarrier; J. Courbat; D. Briand et al. : Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates; Microelectronics Reliability. 2014. DOI : 10.1016/j.microrel.2014.06.015.
D. A. de Koninck; F. Molina-Lopez; D. Briand; N. F. de Rooij : Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation; Journal of Microelectromechanical Systems. 2014. DOI : 10.1109/Jmems.2014.2314702.
J. Salmeron; F. Molina-Lopez; A. Rivadeneyra; A. Vasquez Quintero; L. Capitan-Vallvey et al. : Design and development of sensing RFID Tags on flexible foil compatible with EPC Gen 2; IEEE Sensors Journal. 2014. DOI : 10.1109/JSEN.2014.2335417.
O. Frey; J. Rothe; F. Heer; P. D. van der Wal; N. F. de Rooij et al. : Multisite monitoring of choline using biosensor microprobe arrays in combination with CMOS circuitry; Biomedical Engineering-Biomedizinische Technik. 2014. DOI : 10.1515/bmt-2012-0098.
E. Danesh; F. Molina-Lopez; M. Camara; A. Bontempi; A. Vasquez-Quintero et al. : Development of a New Generation of Ammonia Sensors on Printed Polymeric Hotplates; Analytical Chemistry. 2014. DOI : 10.1021/ac501908c.
R. Straessle; M. Pellaton; C. Affolderbach; Y. Pétremand; D. Briand et al. : Microfabricated alkali vapor cell with anti-relaxation wall coating; Applied Physics Letters. 2014. DOI : 10.1063/1.4891248.
Y. Wu; T. Akiyama; S. Gautsch; P. Van der Wal; D. Peter et al. : In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments; Sensors And Actuators A-Physical. 2014. DOI : 10.1016/j.sna.2013.08.043.
P. Janphuang; R. Lockhart; N. Uffer; D. Briand; N. F. de Rooij : Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level; Sensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2014.01.032.
A. Vasquez Quintero; N. Besse; P. Janphuang; R. Lockhart; D. Briand et al. : Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates; Smart Materials and Structures. 2014. DOI : 10.1088/0964-1726/23/4/045041.
J. F. Salmeron; F. Molina-Lopez; D. Briand; J. J. Ruan; A. Rivadeneyra et al. : Properties and Printability of Inkjet and Screen-Printed Silver Patterns for RFID Antennas; Journal Of Electronic Materials. 2014. DOI : 10.1007/s11664-013-2893-4.
S. Talaei; Y. Fujii; F. Truffer; P. D. Van der Wal; N. F. de Rooij : Forward osmosis in a portable device for automatic osmolality adjustment of environmental water samples evaluated by cell-based biosensors; Journal of Membrane Science. 2014. DOI : 10.1016/j.memsci.2013.12.041.
P. Jouy; M. Mangold; B. Tuzson; L. Emmenegger; Y.-C. Chang et al. : Mid-infrared spectroscopy for gases and liquids based on quantum cascade technologies; The Analyst. 2014. DOI : 10.1039/c3an01462b.
2013
R. Gueye; S. W. Lee; T. Akiyama; D. Briand; C. Roman et al. : High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMS; Proceedings of SPIE - The International Society for Optical Engineering. 2013. DOI : 10.1117/12.2006216.
F. Molina-Lopez; T. Kinkeldei; D. Briand; G. Troester; N. F. de Rooij : Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substrates; Journal Of Applied Physics. 2013. DOI : 10.1063/1.4829023.
F. Molina-Lopez; D. Briand; N. F. de Rooij : Decreasing the size of printed comb electrodes by the introduction of a dielectric interlayer for capacitive gas sensors on polymeric foil: Modeling and fabrication; Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.sob.2013.01.008.
G. Mattana; T. Kinkeldei; D. Leuenberger; C. Ataman; J. J. Ruan et al. : Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile Applications; IEEE Sensors Journal. 2013. DOI : 10.1109/JSEN.2013.2257167.
M. D. Canonica; F. Zamkotsian; P. Lanzoni; W. Noell; N. de Rooij : Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy; Optics Express. 2013. DOI : 10.1364/OE.21.022400.
U. Altenberend; F. Molina-Lopez; A. Oprea; D. Briand; N. Bârsan et al. : Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stability; Sensors and Actuators B: Chemical. 2013. DOI : 10.1016/j.snb.2012.11.025.
R. Straessle; Y. Petremand; D. Briand; M. Dadras; N. F. de Rooij : Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packaging; Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/7/075007.
M. D. Canonica; F. Zamkotsian; P. Lanzoni; W. Noell; N. de Rooij : The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy; Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/5/055009.
K. Ansari; J. Y. S. Ying; P. C. Hauser; N. F. de Rooij; I. Rodriguez : A portable lab-on-a-chip instrument based on MCE with dual topbottom capacitive coupled contactless conductivity detector in replaceable cell cartridge; Electrophoresis. 2013. DOI : 10.1002/elps.201200592.
Y. Wu; W. Hong; T. Akiyama; S. Gautsch; V. Kolivoska et al. : Batch fabrication of gold-gold nanogaps by E-beam lithography and electrochemical deposition; Nanotechnology. 2013. DOI : 10.1088/0957-4484/24/23/235302.
G. Yoshikawa; F. Loizeau; C. J. Y. Lee; T. Akiyama; K. Shiba et al. : Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip-One-Channel Setup; Langmuir. 2013. DOI : 10.1021/la3046719.
J. J. Ruan; R. A. Lockhart; P. Janphuang; A. Vasquez Quintero; D. Briand et al. : An Automatic Test Bench for Complete Characterization of Vibration-Energy Harvesters; IEEE Transactions on Instrumentation and Measurement. 2013. DOI : 10.1109/TIM.2013.2265452.
P. Wägli; Y.-C. Chang; A. Homsy; L. Hvozdara; H. P. Herzig et al. : Microfluidic Droplet-Based Liquid–Liquid Extraction and On-Chip IR Spectroscopy Detection of Cocaine in Human Saliva; Analytical Chemistry. 2013. DOI : 10.1021/ac401606p.
A. Vásquez Quintero; B. Van Remoortere; E. C. P. Smits; J. Van Den Brand; D. Briand et al. : Foil-to-foil lamination and electrical interconnection of printed components on flexible substrates; Microelectronic Engineering. 2013. DOI : 10.1016/j.mee.2013.04.040.
P. D. Van der Wal; P. Hadvary; H.-J. Tschirky; N. F. de Rooij : Flexprint Substrate Enzyme Sensor for Determination of Daily Glucose-Profiles of Diabetic Patients; ECS Transactions. 2013. DOI : 10.1149/05012.0089ecst.
C. Ataman; T. Kinkeldei; G. Mattana; A. V. Quintero; F. Molina-Lopez et al. : A robust platform for textile integrated gas sensors; Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.snb.2012.11.099.
F. Gruet; F. Vecchio; C. Affolderbach; Y. Pétremand; N. de Rooij et al. : A miniature frequency-stabilized VCSEL system emitting at 795nm based on LTCC modules; Optics and Lasers in Engineering. 2013. DOI : 10.1016/j.optlaseng.2013.03.009.
C. Ataman; S. Lani; W. Noell; N. de Rooij : A dual-axis pointing mirror with moving-magnet actuation; Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025002.
R. Straessle; M. Pellaton; C. Affolderbach; Y. Pétremand; D. Briand et al. : Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks; Journal of Applied Physics. 2013. DOI : 10.1063/1.4789942.
F. Molina-Lopez; A. Vasquez Quintero; G. Mattana; D. Briand; N. F. de Rooij : Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation; Journal of Micromechanics and Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025012.
A. Vásquez Quintero; D. Briand; N. de Rooij : Effect of low-temperature processing on dry film photoresist properties for flexible electronics; Journal of Polymer Science Part B: Polymer Physics. 2013. DOI : 10.1002/polb.23240.
R. Gueye; T. Akiyama; D. Briand; N. F. de Rooij : Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs); Sensors and Actuators A: Physical. 2013. DOI : 10.1016/j.sna.2012.11.025.
2012
V. Venkatraman; Y. Pétremand; N. de Rooij; H. Shea : Characterization and modelling of low-pressure rf discharges at 2–500 MHz for miniature alkali vapour dielectric barrier discharge lamps; Journal of Physics D: Applied Physics. 2012. DOI : 10.1088/0022-3727/45/50/505205.
F. Molina-Lopez; D. Briand; N. F. de Rooij : Inkjet Printing of Interdigitated Capacitive Chemical Sensors with Reduced Size by the Introduction of a Dielectric Interlayer; Procedia Engineering. 2012. DOI : 10.1016/j.proeng.2012.09.360.
G. Yoshikawa; T. Akiyama; F. Loizeau; K. Shiba; S. Gautsch et al. : Two Dimensional Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) with Improved Sensitivity; Sensors. 2012. DOI : 10.3390/s121115873.
Y.-C. Chang; P. Wägli; V. Paeder; A. Homsy; L. Hvozdara et al. : Cocaine detection by a mid-infrared waveguide integrated with a microfluidic chip; Lab on a Chip. 2012. DOI : 10.1039/c2lc40601b.
A. Oprea; J. Courbat; D. Briand; N. Bârsan; U. Weimar et al. : Environmental monitoring with a multisensor platform on polyimide foil; Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.095.
T. Akiyama; D. Briand; N. F. de Rooij : Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors; Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/8/085034.
A. Evans; M. Prestat; R. Tölke; M. V. F. Schlupp; L. J. Gauckler et al. : Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser Deposition; Fuel Cells. 2012. DOI : 10.1002/fuce.201200028.
M. Pellaton; C. Affolderbach; Y. Petremand; N. de Rooij; G. Mileti : Study of laser-pumped double-resonance clock signals using a microfabricated cell; Physica Scripta. 2012. DOI : 10.1088/0031-8949/2012/T149/014013.
F. Loizeau; T. Akiyama; S. Gautsch; A. Meister; P. Vettiger et al. : Two-dimensional cantilever array with varying spring constants and tip radii for life-science applications; Micro & Nano Letters. 2012. DOI : 10.1049/mnl.2011.0467.
V. Lalgudi Venkatraman; Y. Petremand; C. Affolderbach; G. Mileti; N. De Rooij et al. : Microfabricated chip-scale rubidium plasma light source for miniature atomic clocks; IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 2012. DOI : 10.1109/TUFFC.2012.2214.
A. Sambri; D. Isarakorn; A. Torres-Pardo; S. Gariglio; P. Janphuang et al. : Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices; Smart Materials Research. 2012. DOI : 10.1155/2012/426048.
F. Molina-Lopez; D. Briand; N. F. de Rooij : All additive inkjet printed humidity sensors on plastic substrate; Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.042.
A. Homsy; P. D. van der Wal; W. Doll; R. Schaller; S. Korsatko et al. : Development and validation of a low cost blood filtration element separating plasma from undiluted whole blood; Biomicrofluidics. 2012. DOI : 10.1063/1.3672188.
Y. Pétremand; C. Affolderbach; R. Straessle; M. Pellaton; D. Briand et al. : Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications; Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/2/025013.
M. Barbaro; A. Caboni; D. Loi; S. Lai; A. Homsy et al. : Label-free, direct DNA detection by means of a standard CMOS electronic chip; Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.052.
C. Martin-Olmos; G. Villanueva; P. van der Wal; A. Llobera; N. de Rooij et al. : Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning; Advanced Functional Materials. 2012. DOI : 10.1002/adfm.201102789.
2011
J. Courbat; D. Briand; L. Yue; S. Raible; N. F. de Rooij : Drop-coated metal-oxide gas sensor on polyimide foil with reduced power consumption for wireless applications; Sensors and Actuators, B: Chemical. 2011. DOI : 10.1016/j.snb.2011.11.050.
J. Extermann; S. M. Weber; D. Kiselev; L. Bonacina; S. Lani et al. : Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper; Optics Express. 2011.
S. M. Weber; L. Bonacina; W. Noell; D. Kiselev; J. Extermann et al. : Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude; Review Of Scientific Instruments. 2011. DOI : 10.1063/1.3606440.
D. de Koninck; D. Briand; N. de Rooij : A shadow-mask evaporated pyroMEMS igniter; Journal of Micromechanics and Microengineering. 2011. DOI : 10.1088/0960-1317/21/10/104013.
D. A. de Koninck; D. Briand; L. Guillot; U. Bley; V. Gass et al. : Ignition and Combustion Behavior in Solid Propellant Microsystems Using Joule-Effect Igniters; Journal of Microelectromechanical Systems. 2011. DOI : 10.1109/JMEMS.2011.2167667.
J. Courbat; D. Briand; J. Wöllenstein; N. F. de Rooij : Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensing; Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.09.001.
O. Frey; P. D. Van der Wal; S. Spieth; O. Brett; K. Seidl et al. : Biosensor microprobes with integrated microfluidic channels for bi-directional neurochemical interaction; Journal of Neural Engineering. 2011. DOI : 10.1088/1741-2560/8/6/066001.
H. Weigand; S. Gautsch; W. Strohmaier; M. Blideran; U. Staufer et al. : Microcolumn with variable axis lens for large scan fields and pixel numbers; Microelectronic Engineering. 2011. DOI : 10.1016/j.mee.2010.12.120.
L. Gervais; N. de Rooij; E. Delamarche : Microfluidic Chips for Point-of-Care Immunodiagnostics; Advanced Materials. 2011. DOI : 10.1002/adma.201100464.
R. Imer; T. Akiyama; N. de Rooij; M. Stolz; U. Aebi et al. : The measurement of biomechanical properties of porcine articular cartilage using atomic force microscopy; Archives of Histology and Cytology. 2011.
P. Wägli; A. Homsy; N. F. de Rooij : Norland optical adhesive (NOA81) microchannels with adjustable wetting behavior and high chemical resistance against a range of mid-infrared-transparent organic solvents; Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.02.005.
W. E. Morf; P. D. Van Der Wal; E. Pretsch; N. F. de Rooij : Theoretical treatment and numerical simulation of potentiometric and amperometric enzyme electrodes and of enzyme reactors. Part 2: Time-dependent concentration profiles, fluxes, and responses; Journal of Electroanalytical Chemistry. 2011. DOI : 10.1016/j.jelechem.2011.02.006.
W. E. Morf; P. D. Van Der Wal; E. Pretsch; N. F. de Rooij : Theoretical treatment and numerical simulation of potentiometric and amperometric enzyme electrodes and of enzyme reactors. Part 1: Steady-state concentration profiles, fluxes, and responses; Journal of Electroanalytical Chemistry. 2011. DOI : 10.1016/j.jelechem.2011.02.007.
S. Gautsch; N. F. de Rooij : Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA; Microelectronic Engineering. 2011. DOI : 10.1016/j.mee.2011.02.012.
A. Kapałka; S. Fierro; Z. Frontistis; A. Katsaounis; S. Neodo et al. : Electrochemical oxidation of ammonia (NH4+/NH3) on thermally and electrochemically prepared IrO2 electrodes; Electrochimica Acta. 2011. DOI : 10.1016/j.electacta.2010.10.071.
D. Isarakorn; D. Briand; P. Janphuang; A. Sambri; S. Gariglio et al. : The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film; Smart Materials and Structures. 2011. DOI : 10.1088/0964-1726/20/2/025015.
O. Frey; T. Holtzman; R. M. Mcnamara; D. E. H. Theobald; P. D. Van der Wal et al. : Simultaneous neurochemical stimulation and recording using an assembly of biosensor silicon microprobes and SU-8 microinjectors; Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2010.01.034.
2010
S. Lani; M. Canonica; D. Bayat; C. Ataman; W. Noell et al. : 3D Assembly Using Au-Si Eutectic and Au-Au Thermocompression Wafer Level Bonding for M(O)EMS Device Fabrication; ECS Transactions. 2010. DOI : 10.1149/1.3483492.
D. Isarakorn; D. Briand; A. Sambri; S. Gariglio; J.-M. Triscone et al. : Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications; Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.10.009.
J. Courbat; M. Canonica; D. Teyssieux; D. Briand; N. F. De Rooij : Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range; Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/21/1/015014.
S. D. Psoma; V. D. Wal; D. Peter; O. Frey; D. Rooij et al. : A novel enzyme entrapment in SU-8 microfabricated films for glucose micro-biosensors; Biosensors and Bioelectronics. 2010. DOI : 10.1016/j.bios.2010.07.117.
O. Frey; T. Holtzman; R. M. Mcnamara; D. E. H. Theobald; P. D. Van Der Wal et al. : Enzyme-based choline and l-glutamate biosensor electrodes on silicon microprobe arrays; Biosensors and Bioelectronics. 2010. DOI : 10.1016/j.bios.2010.07.073.
K. Suter; T. Akiyama; N. F. de Rooij; M. Huefner; T. Ihn et al. : Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy; Journal of Microelectromechanical Systems. 2010. DOI : 10.1109/JMEMS.2010.2067198.
S. M. Weber; J. Extermann; L. Bonacina; W. Noell; D. Kiselev et al. : Ultraviolet and near-infrared femtosecond temporal pulse shaping with a new high-aspect-ratio one-dimensional micromirror array; Optics Letters. 2010. DOI : 10.1364/OL.35.003102.
O. Frey; S. Talaei; P. D. van der Wal; M. Koudelka-Hep; N. F. de Rooij : Continuous-flow multi-analyte biosensor cartridge with controllable linear response range; Lab on a Chip. 2010. DOI : 10.1039/c004851h.
R. Bitterli; T. Scharf; H. P. Herzig; W. Noell; N. de Rooij et al. : Fabrication and characterization of linear diffusers based on concave micro lens arrays; Optics Express. 2010. DOI : 10.1364/OE.18.014251.
E. H. M. Camara; P. Breuil; D. Briand; L. Guillot; C. Pijolat et al. : Micro gas preconcentrator in porous silicon filled with a carbon absorbent; Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.05.054.
T. Akiyama; N. F. de Rooij; U. Staufer; M. Detterbeck; D. Braendlin et al. : Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy; Review of Scientific Instruments. 2010. DOI : 10.1063/1.3455219.
D. Isarakorn; M. Linder; D. Briand; N. de Rooij : Evaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detection; Journal of Measurement Science and Technology. 2010. DOI : 10.1088/0957-0233/21/7/075801.
T. Akiyama; S. Gautsch; D. Parrat; R. Imer; P. Vettiger et al. : Advanced Scanning Probes for Micro-Nano Science Researches; IEEJ Transactions On Electrical And Electronic Engineering. 2010. DOI : 10.1002/tee.20527.
D. Isarakorn; A. Sambri; P. Janphuang; D. Briand; S. Gariglio et al. : Epitaxial piezoelectric MEMS on silicon; Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055008.
T. Scharf; D. Briand; S. Bühler; O. Manzardo; H. P. Herzig et al. : Miniaturized Fourier transform spectrometer for gas detection in the MIR region; Sensors and Actuators B. 2010. DOI : 10.1016/j.snb.2010.03.050.
J. Courbat; D. Briand; N. F. de Rooij : Foil level packaging of a chemical gas sensor; Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055026.
K. A. Mahabadi; I. Rodriguez; C. Y. Lim; D. K. Maurya; P. C. Hauser et al. : Capacitively coupled contactless conductivity detection with dual top-bottom cell configuration for microchip electrophoresis; Electrophoresis. 2010. DOI : 10.1002/elps.200900578.
W. Morf; E. Pretsch; N. F. de Rooij : Theoretical treatment and numerical simulation of potential and concentration profiles in extremely thin non-electroneutral membranes used for ion-selective electrodes; Journal of Electroanalytical Chemistry. 2010. DOI : 10.1016/j.jelechem.2010.01.001.
M. Sasaki; K. Hane; D. Briand; W. Noel; N. F. de Rooij : Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics; IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING. 2010. DOI : 10.1002/tee.20507.
S. Gautsch; M. Studer; N. F. de Rooij : Complex nanostructures in PMMA made by a single process step using e-beam lithography; Journal of Microelectronic Engineering. 2010. DOI : 10.1016/j.mee.2009.10.046.
L. Yeo; S. Ng; Z. Wang; H. Xia; Z. Wang et al. : Investigation of hot roller embossing for microfluidic devices; Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015017.