Nico de Rooij
Expertise
Microsystems Technology, MEMS, Sensors & Actuators, Lab-on-a-Chip, Nanotools, Optical MEMS with applications in medicine, ecology, space research or watchmaking.
Nico de Rooij is Professor Emeritus of EPFL and former Vice-President of CSEM SA.
He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 2009 until 2016.
His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 300 published journal articles.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. From October 1990 until October 1996 and again from October 2002 until June 2008, he served as Director of the Institute of Microtechnology at the University of Neuchatel (IMT UniNE).
He also lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ) and since 1989, he was part-time full professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He was Director of EPFL's Institute of Microengineering (EPFL IMT) from 2009 to 2012, following the transfer of the IMT Uni-NE to EPFL's School of Engineering.
He was appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA.
Furthermore, he has directed and co-directed over 80 doctoral theses during his academic career. The components and microsystems created in his laboratory have given rise to several start-ups in the Neuchâtel region (Seyonic SA, Sercalo SA, 1Drop Diagnostics)
Nico de Rooij is a Fellow of the IEEE (2001) and a Fellow of the Institute of Physics (UK) (2004). He is recipient of the IEEE Jun-ichi Nishizawa Gold Medal (2007), the Schlumberger Prize (1992), the MNE Fellow Award 2016 and the Prix Gaîa (2022).
He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by A*STAR Science and Engineering Council (SERC), Singapore and hosted by SIMTech for the period 2005-2008.
Nico de Rooij is Corresponding Member of the Royal Netherlands Academy of Arts and Sciences (KNAW) and Individual Member of the Swiss Academy of Engineering Sciences (SATW). He was serving on the Editorial Boards of the IEEE/ASME Journal of Micro Electro Mechanical Systems (IEEE JMEMS), the IEEE Proceedings, the Journal of Micromechanics and Microengineering (JM&M), Sensors and Actuators and Sensors and Materials. He was Member of the Information and Communication Technology Jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 2009 until 2016.
His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 300 published journal articles.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. From October 1990 until October 1996 and again from October 2002 until June 2008, he served as Director of the Institute of Microtechnology at the University of Neuchatel (IMT UniNE).
He also lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ) and since 1989, he was part-time full professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He was Director of EPFL's Institute of Microengineering (EPFL IMT) from 2009 to 2012, following the transfer of the IMT Uni-NE to EPFL's School of Engineering.
He was appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA.
Furthermore, he has directed and co-directed over 80 doctoral theses during his academic career. The components and microsystems created in his laboratory have given rise to several start-ups in the Neuchâtel region (Seyonic SA, Sercalo SA, 1Drop Diagnostics)
Nico de Rooij is a Fellow of the IEEE (2001) and a Fellow of the Institute of Physics (UK) (2004). He is recipient of the IEEE Jun-ichi Nishizawa Gold Medal (2007), the Schlumberger Prize (1992), the MNE Fellow Award 2016 and the Prix Gaîa (2022).
He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by A*STAR Science and Engineering Council (SERC), Singapore and hosted by SIMTech for the period 2005-2008.
Nico de Rooij is Corresponding Member of the Royal Netherlands Academy of Arts and Sciences (KNAW) and Individual Member of the Swiss Academy of Engineering Sciences (SATW). He was serving on the Editorial Boards of the IEEE/ASME Journal of Micro Electro Mechanical Systems (IEEE JMEMS), the IEEE Proceedings, the Journal of Micromechanics and Microengineering (JM&M), Sensors and Actuators and Sensors and Materials. He was Member of the Information and Communication Technology Jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
Past PhD Students
Selected publications
Analysis of Lipoproteins by Capillary Zone Electrophoresis in Microfluidic Devices: Assey Development and Surfaces Roughness Measurements
B. Weiller, L. Ceriotti, T. Shibata, D. Rein, M.A. Roberts, J. Lichtenberg, J.B. German, N.F. de Rooij, E. Verpoorte
Published in Analytical Chemistry, Vol. 74, pp. 1702-1711, 2002, 2002 in
Detecting single molecules launched for liquid surfaces in a time-of-flight mass spectrometer using ultraviolet and infrared lasers.
D. Twerenbold, A. Netuschill, N.F. de Rooij, P. Luginbuhl, D. Gerber, D. Gritti, Y. Gonin, F. Rossel, J.L. Vuilleumier
Published in Proteomic's, Vol. 2, pp. 436-440, 2002, 2002 in
Detecting single molecules launched for liquid surfaces in a time-of-flight mass spectrometer using ultraviolet and infrared lasers
D. Twerenbold, N.F. de Rooij, P. Luginbuhl, D. Gerber, D. Gritti, Y. Gonin, F. Rossel, J.L. Vuilleumier
Published in Analytical Chemistry, Vol. 74, pp. 436-440, 2002, 2002 in
Infoscience
Welcome Message, General Chairman
IEEE-NEMS 2009, Shenzen, January 5-8, 2009.Fast Quality Control with Diffractive Micro-and Nanostructures
CTI Micro and Nano Technologies Event 2009, Neuchâtel, November 11, 2009.Epitaxial Thin Films on Silicon for MEMS devices
1st National Congress on Functional Oxide for Electronics - FOxE, Sorrento, March 25-27, 2009.Microsystems and Opportunities of Technology Transfer
Seminar ETH Zürich, Zürich, October 6, 2009.Colorimetric gas sensors based on optical waveguides made on plastic foil
2009. Eurosensors XXIII, Lausanne, September 6-9, 2009. p. 576 - 579. DOI : 10.1016/j.proche.2009.07.144.Microsystèmes, nanotechnologie et biologie: panorama, enjeux, difficultés
SMB2009 Sciences de la miniaturisation et biologie, Grenoble, June 8-12, 2009.Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivity
Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.023.Microfluidic System for Near- and Mid-Infrared Analysis of Human Saliva
Nano-Tera Workshop: Biosensors and Body Area Networks, Le Louverain, Switzerland, November 23-24, 2009.Linearly deformable micro membrane for dynamic laser beam shaping and homogenizing
EOS Conference on Manufacturing of Optical Components, Munich, Germany, June 15-17, 2009.Large micromirror array for multi-object spectroscopy in cryogenic environment
2009. Conference on MOEMS and Miniaturized Systems VIII, San Jose, CA, Jan 27-28, 2009. DOI : 10.1117/12.811117.Exploring Asian markets through research exchange
SwissnexDay 09, Winterthur, December 12, 2009.MEMS for Watches
EPMT Environnement Professionnel MicroTechnologies, Lausanne, May 12-15, 2009.Influence of the Adsorbent Material in the Performances of a Micro Gas Preconcentrator
2009. 13th International Symposium on Olfaction and Electronic Nose, Brescia, April 15-17, 2009. p. 323 - 326.Microfluidic connectors by ultrasonic welding
2009. The 34th International Conference on Micro- and Nano-Engineering (MNE), Athens, Greece, September 15-18, 2008. p. 1354 - 1357. DOI : 10.1016/j.mee.2009.01.048.A micro gas preconcentrator with improved performances for environmental monitoring
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 983 - 986. DOI : 10.1109/SENSOR.2009.5285982.Gas Detection with a Micro FTIR Spectrometer in the MIR Region
2009. Eurosensors XXIII Conference, Lausanne, Switzerland, September 6 - 9, 2009. p. 1379 - 1382. DOI : 10.1016/j.proche.2009.07.344.AFM measurements of Martian soil particles
2009. Workshop on the Microstructure of the Martian Surface, Copenhagen, August 27-29. 2009.PYROMEMS IGNITER BASED ON A TEMPERATURE GRADIENT: CONCEPT, FABRICATION AND CHARACTERIZATION
2009. The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, December 1-4, 2009. p. 108 - 111.Multi sensor platform on plastic foil for environmental monitoring
2009. Eurosensors XXIII, Lausanne, September 06-09, 2009. p. 597 - 600. DOI : 10.1016/j.proche.2009.07.149.Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguides
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.08.049.CPT spectroscopy on low-temperature sealed MEMS rubidium vapour cells
23rd European Frequency and Time Forum and 63rd consecutive meeting of the IEEE International Frequency Control Symposium, Besançon, France, April 20-24, 2009.MEMS for space
2009. Transducers 2009, Denver, June 21-25, 2009. p. 17 - 24. DOI : 10.1109/SENSOR.2009.5285575.Scanning gate microscopy measurements on a superconducting single-electron transistor
Physical Review B. 2009. DOI : 10.1103/PhysRevB.79.134530.Current developments in Microfabricated nanomaterials and device engineering
Les 2ème journéesTunisiennes des Nanosciences et Nanotechnologies, Tunis, July 11-13, 2009.Hybrid microfluidic cartridge formed by irreversible bonding of SU-8 and PDMS for multi-layer flow applications
2009. Eurosensors 2009, Lausanne, September 6-9, 2009. p. 381 - 384. DOI : 10.1016/j.proche.2009.07.095.Microcolumn design for a large scan field and pixel number
Journal of Vacuum Science & Technology B. 2009. DOI : 10.1116/1.3256265.Fabrication and Characterisation of 1-D diffusing elements
15th Microptics Conference (MOC 09), Tokyo, October 25-28, 2009.Biosensor Microprobe Functionalisation Using an On-Chip Dispensing Approach
2009. 23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009. p. 281 - 284. DOI : 10.1016/j.proche.2009.07.070.Simultaneous Chemical Recording and Stimulation in the Brain Using an Assembly of Biosensor Silicon Microprobes and SU-8 Microinjectors
2009. 23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009. p. 525 - 528. DOI : 10.1016/j.proche.2009.07.131.Tunable MEMS-based Optical Linear(1D)Diffusers for Dynamic Laser Beam Shaping and Homogenizing
2009. IEEE/LEOS International Conference of Optical MEMS & Nanophotonics, Clearwater Beach, August 17-20, 2009. p. 129 - 130. DOI : 10.1109/OMEMS.2009.5338551.Biosensor Probe Arrays for Real-Time Monitoring of Neurotransmitters
World Congress on Medical Physics and Biomedical Engineering, Munich, Germany, September 7-12, 2009.Restrictive dual capacitively coupled contactless conductivity detection for microchip electrophoresis
2009. p. 1351 - 1354. DOI : 10.1016/j.proche.2009.07.337.Memory effects of ion-selective electrodes: Theory and computer simulation of the time-dependent potential response to multiple sample changes
Journal of Electroanalytical Chemistry. 2009. DOI : 10.1016/j.jelechem.2009.05.004.Thermal Characterization of Polycrystalline CVD Diamond Thin Films
2009. Eurosensors 2009, Lausanne, September 6-9, 2009. DOI : 10.1016/j.proche.2009.07.152.6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
2009. Laser Beam Shaping X, San Diego, August 02-06, 2009. p. 74300H - 74300H. DOI : 10.1117/12.827663.Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 2. Thermal property and sensitivity
Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.024.Microsystems Technology and Opportunities for Technology Transfer
Nano Device Seminar, University of Pennsylvania, Philadelphia, April 1, 2009.Scalable cascaded snap-in actuators for large-stroke displacements
2009. Transducers 2009, Denver, June 21-25,2009. p. 1754 - 1757. DOI : 10.1109/SENSOR.2009.5285742.Micro-fabrication of polymeric devices using hot roller embossing
2009. 34th International Conference on Micro-and Nano-Engineering, Athens, September 15-18, 2008. p. 933 - 936. DOI : 10.1016/j.mee.2008.12.021.Complex nanostructures in PMMA made by a single process step using e-beam lithography
2009. 35th International Conference on Micro & Nano Engineering, Ghent, Belgium, September 28-October 01, 2009. p. 1139 - 1142. DOI : 10.1016/j.mee.2009.10.046.Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude
2009. MOEMS-MEMS SPIE Photonics West, San José, January 27-28, 2009. DOI : 10.1117/12.808162.Mars vue de Neuchâtel
Conférence Université de Neuchâtel, Neuchâtel, December 3, 2009.Ultra-low power metal oxide gas sensor on plastic foil
2009. Transducers 2009, Denver, USA, June 21-25, 2009. p. 584 - 587. DOI : 10.1109/SENSOR.2009.5285392.Packaged MEMS Micromirrors for Cyrogenic Environment
2008. p. 758 - 761. DOI : 10.1109/MEMSYS.2008.4443767.Dynamic behavior of the tuning fork AFM probe
2008. MNE 2007 Micro- and Nano-Engineering Conference, Copenhagen, Denmark, September 23-26, 2007. p. 1018 - 1021. DOI : 10.1016/j.mee.2008.01.100.Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods
Journal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.Microsystems Technology and Opportunities for technology Transfer
2008.Micro-mirror array for multi-object spectroscopy in cryogenic environment
2008. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany, August 11-14, 2008. p. 114 - 115. DOI : 10.1109/OMEMS.2008.4607855.Digital Micro-thrusters with simplified architecture and reliable ignition and combustion
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 157 - 160.Evaluation of spin-coatable colorimetric films for ammonia detection using optical waveguides
2008.Establishment of a technology platform for epitaxial piezoelectric MEMS
2008. Eurosensors XXII, Dresden, Germany, September 7-10, 2008. p. 819 - 822.Detection of Surface Stress Induced Deflections in Piezoelectric Cantilever Sensors Using a Charge Integrator
2008. ICCAS 2008, Seoul, October 14-17, 2008. p. 937 - 940. DOI : 10.1109/ICCAS.2008.4694629.Label-Free Dectection of Single Protein Molecules and Protein-Protein Interactions using Synthetic Nanopores
Analytical Chemistry. 2008. DOI : 10.1021/ac7025207.Country Review
2008.Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection
2008. Conference on PhD Research in Microelectronics and Electronics, Istanbul, TURKEY, June 22-25, 2008. p. 121 - 124. DOI : 10.1109/RME.2008.4595740.Integrated Temperature, Humidity and Gas Sensors on Plastic Substrates for RFID and Low-Power Applications
2008.Hybrid organic / inorganic sensing platforms on flexible plastic substrates
2008.Microfluidic Cartridge for the (Bio)Chemical Functionalization of Pt Microelectrodes Integrated on Silicon Microprobes
2008.Microhotplates with TiN heaters
Sensors and Actuators A: Physical. 2008. DOI : 10.1016/j.sna.2008.08.016.Ion-selective microelectrode arrays for cell culture mo
Université de Neuchâtel, 2008.Autonomous Sensors on flexible foils powered by RFID and energy scavenging for environmental and goods monitoring
2008. PowerMEMS 2008 + microEMS 2008, Sendai, November 9-12, 2008. p. 173 - 176.Intégration de l'IMT à l'EPFL - Perspectives d'avenir
2008.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.Study and fabrication of a micro scanner for optical applications
Université de Neuchâtel, 2008.Large linear micromirror array for UV femtosecond laser pulse shaping
2008. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, August 11-18, 2008. p. 39 - 40. DOI : 10.1109/OMEMS.2008.4607817.Conditions of Micromirror Lifted by Buckled Bridges Using Film Stress
International Display Workshop IWD'08, Niigata, Japan, December 3-5, 2008.Les méthodes d’investigations à l’échelle nanoscopique
Carrefour Alliance workshop, Nanotechnologies, supersmall is beautiful!, Lausanne, May 21, 2008.Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates
Journal of the Korean Physical Society. 2008. DOI : 10.3938/jkps.52.1378.Introduction to micro-technology
2008.Silicon Microprobe Arrays for the Amperometric Detection of Choline in Brain Tissue
2008.Applications of Bio-MEMS in Life Sciences
2008.Capacitive gas sensor arrays on plastic substrates for low power and mobiles applications
2008. p. 1431 - 1434.Thermally activated solvent bonding of polymers
Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2008. DOI : 10.1007/s00542-007-0459-1.Micromirrors for multiobject spectroscopy: optical and cryogenic characterization
2008. Conference on MOEMS and Miniaturized Systems VII, San Jose, California, USA, January 22-23, 2008. DOI : 10.1117/12.764381.MEMS for Space
2008.Micromirror array for multiobject spectroscopy in ground-based and space telescopes
2008. International Conference on Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, Marseille, FRANCE, Jun 23-28, 2008. DOI : 10.1117/12.790358.Conductive supports for combined AFM–SECM on biological membranes
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/38/384004.Disposable, Continuous-Flow Biosensor for Multi-Analyte Monitoring and Microfluidic Control of the Linear Range
International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS) XII, San Diego, October 12-16, 2008.Transfer of UV Glue patterned by Photolithography for Microsystems assembling and packaging
2008. p. 1317 - 1320.Multifunctional Micro-Optical Elements for Laser Beam Homogenizing and Beam Shaping
2008. Lasers and Applications in Science and Engineering, San Jose, California, United States. DOI : 10.1117/12.762923.Möglichkeiten und Anwendungen der Mikrosystemtechnologie
2008.Successful technology transfer of selected MEMS activities to the Watch Manufacturing Industry
2008.A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008. PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008. p. 269 - 272.On the thermal simulation and characterisation of microsystems: progress and status
2008. p. 133 - 136.Potentiometric platform for the quantification of cellular potassium efflux
Lab on a Chip. 2008. DOI : 10.1039/b801042k.MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008.Oerlikon Solar
2008.Large Deformation Balloon Micro-Actuator Based on Pyrotechnics on Chip
2008. 21st IEEE International Conference on Micro Electro Mechanical Systems, Tucson, AZ, 13-17 Jan. 2008. p. 535 - 538. DOI : 10.1109/MEMSYS.2008.4443711.Computer simulation and theory of the diffusion-and flow-induced concentration dispersion in microfluidic devices and HPLC systems based on rectangular microchannels
Analytica Chimica Acta. 2008. DOI : 10.1016/j.aca.2008.05.063.Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate
2008. p. 74 - 77. DOI : 10.1109/ICSENS.2008.4716386.Evaporation based micro pump integrated into a scanning force microscope probe
2008. Proceedings of the Conference on Micro- and Nano-Engineering, MNE 2007, Copenhagen, Denmark, September 23-26, 2007. p. 1302 - 1305. DOI : 10.1016/j.mee.2007.12.047.Möglichkeiten der Mikro-und Nanosystemtechnologie
2007.Piezoresistive cantilever array for life sciences applications
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/189.Aspects of the synthesis and characterization of diamond and diamond like carbon films
Université de Neuchâtel, 2007.Microfluidic Stand-Alone Device for the Calibration of Brain-Implantable Biosensor Microprobes
2007. 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Paris, France, Oct 7-11,2007. p. 1288 - 1290.Application of carbon nano-powders for a gas micro-preconcentrator
Sensors and Actuators B: Chemical. 2007. DOI : 10.1016/j.snb.2007.07.029.Recent Developments in Silicon-based MEMS Photonic Systems
2007.Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications
2007. p. 158 - 161. DOI : 10.1109/ICSENS.2007.4388360.Direct integration of carbon nanotubes on micromachined hotplates
Nanoengineering and nanosystems. 2007. DOI : 10.1243/17403499JNN104.Development of a platform for the monitoring of extracellular ionic activities
2007.Magnetohydrodynamic pumping in nuclear magnetic resonance environments
Sensors and Actuators B: Chemical. 2007. DOI : 10.1016/j.snb.2006.09.026.Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy
2007. MOEMS-MEMS 2007 Micro and Nanofabrication, San Jose, California, United States, 20-25 January 2007. DOI : 10.1117/12.702012.Reliability improvement of suspended platinum-based micro-heating elements
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.sna.2007.04.006.Potassium and calcium-selective microelectrode arrays
2007.Member of the co-chairs committee
2007.Perspectives d'avenir, collaboration IMT-EPFL, projet Nano-Tera
2007.Micro System Technologies for Implantable Applications: bi-stable MEMS switch
Université de Neuchâtel, 2007.SH-SAW dual delay line based e-tongue system with improved discrimination capabilities
2007.In situ measurements of human articular cartilage stiffness by means of a scanning force microscope
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/094.Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.sna.2006.07.023.Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System
Japanese Journal of Applied Physics. 2007. DOI : 10.1143/JJAP.46.6458.The Scanning Force Arthroscope: Development and First Measurements
2007.Micro Gas Sensing Components on Flexible Substrates
2007.Optical beam steering using a 2D MEMS scanner
2007.Micro-Hotplate Devices for Micro-SOFC
2007. p. 421 - 427.Highly integrated wafer level packaged Mox gas sensors
2007. p. 2401 - 2404. DOI : 10.1109/SENSOR.2007.4300654.Perspectives de l'Institut de mictrotechnique de l'Université de Neuchâtel
2007.Microsystems for the Space and Transport Industries
2007.Tunable Optical Microsystems featuring Vertical Electrostatic Comb Drives
Université de Neuchâtel, 2007.A Calibration Tool for Passive Contact Temperature Probe
2007.Applications of Bio-MEMS in Life-Sciences
2007.Micromachined Platforms on Silicon for Micro-SOFC
2007. p. 157 - 160.Piezoresistive scanning probe arrays for operation in liquids
Journal of Physics: Conference Series. 2007. DOI : 10.1088/1742-6596/61/1/002.Recent Developments in Silicon-based MEMS Photonic Systems
2007.Development and Characterization of Choline and L-Glutamate Biosensor Integrated on Silicon Microprobes for In-Vivo Monitoring
2007. p. 6039 - 6042. DOI : 10.1109/IEMBS.2007.4353725.Micromirror arrays for object selection
2007.Integration of MOX gas sensors on polyimide hotplates
Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.snb.2007.09.013.Scanning Force Arthroscope
2007.Brain Implantable Biosensors Integrated on Silicon Microprobe Arrays
2007.Micro-hotplates-A platform for micro-solid oxide fuel cells
Journal of Power Sources. 2007. DOI : 10.1016/j.jpowsour.2006.12.072.Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation
Review of Scientific Instruments. 2007. DOI : 10.1063/1.2722386.Micromirrors for Multiobject Spectroscopy: Large Array Actuation and Cryogenic Compatibility
2007. p. 87 - 88. DOI : 10.1109/OMEMS.2007.4373853.Microsystem technologies for implantable applications
Journal of Micromechanics and Microengineering. 2007. DOI : 10.1088/0960-1317/17/5/R02.Beam steering system using a 2D MEMS scanner
2007. 20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society, Lake Buena Vista, Floride, USA, October 21-25, 2007. p. 916 - 917. DOI : 10.1109/LEOS.2007.4382708.Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration
2007. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, 10-14 06 2007. p. 249 - 252. DOI : 10.1109/SENSOR.2007.4300116.Optical MEMS for Future Instruments in Astronomy
2007. p. 191 - 192. DOI : 10.1109/OMEMS.2007.4373905.Micro- and nanosystems for biology and medicine
Microelectronic Engineering. 2007. DOI : 10.1016/j.mee.2007.01.244.Gas Detection using a Micromachined FTIR Spectrometer
2007. p. 1364 - 1367. DOI : 10.1109/ICSENS.2007.4388665.Precise Thermography of Microsystems in the Visible Region using a Standard CCD Camera
2007. p. 926 - 929. DOI : 10.1109/ICSENS.2007.4388554.Computer simulation of ion-selective membrane electrodes and related systems by finite-difference procedures
Journal of Electroanalytical Chemistry. 2007. DOI : 10.1016/j.jelechem.2006.11.025.Micropipette-based K+ and Ca2+ selective electrodes
2006.Micro- and Nano Technologies in Switzerland
2006.High-fill factor micro-mirror array for multi object spectroscopy
2006.Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature
Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.1992.Non-Piezoelectric Generation and Detection of High-Q Resonances in Acoustic Sensors
2006. p. 32 - 38.Scanning Probe Arrays for Liquid Operation
2006.Study on integration of carbon nanotube on micro-hotplates
2006. p. 155 - 157.Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
Thin Solid Films. 2006. DOI : 10.1016/j.tsf.2006.07.054.NEMS Need MEMS
2006.Design, Microfabrication and Characterization of MHD Pumps and their Applications in NMR Environments
Université de Neuchâtel, 2006.Electrical Conductivity of LSCF Thin Films for SOFC on Micro Hotplates
2006.Implantable Hearing Systems: Development and Evaluation of Two Concepts
Université de Neuchâtel, 2006.Matrix of 10 x 10 addressed solid propellant microthrusters: Review of the technologies
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2005.08.024.A microelectrode array (MEA) integrated with clustering structures for investigating in vitro neurodynamics in confined interconnected sub-populations of neurons
Sensors and Actuators B: Chemical. 2006. DOI : 10.1016/j.snb.2005.04.042.Microfabricated Platforms for the Study of Neuronal and Cellular Networks
2006.Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2005.11.069.The FAMARS Instrument: An Atomic Force Micrscope for the PHOENIX Mission
2006.Micro-hotplates on polyimide for sensors et actuators
Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2006.06.003.NEMS for MEMS
2006.Development of a platform for the monitoring of extracellular ionic activities
2006.Heterogeneous oligonucleotide-hybridization assay based on hot electron-induced eletrochemiluminescence of a rhodamine label at oxide-coated aluminium and silicon electrodes
Eletrochimica Acta. 2006. DOI : 10.1016/j.electacta.2006.02.017.Sensing Protein Molecules at Different pH using Nanofabricated Pores
2006.Metal oxide gas sensors on polyimide micro-hotplates
2006.Optical Read-out of Parallel Cantilever AFM arrays
2006.How much silicon can we put in mechanical watches?
2006.In Situ Stiffness Measurements of Human Articular Cartilage
2006.Microfluidics/CMOS orthogonal capabilities for cell bilogy
Biomed Microdevices. 2006. DOI : 10.1007/s10544-006-7711-9.NEMS need MEMS
2006.Optimization of the material composition of platinum micro-heating elements
2006. p. W1B - P1.Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors
2006. p. 139 - 144. DOI : 10.1109/FREQ.2006.275366.Application of ECAP on Cu-Ag and Cu-Cr Alloys
2006.CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs
2006.Scanning probe arrays for life sciences and nanobiology applications
2006. Micro and Nanoengineering MNE 2005, 31st International Conference on Micro- and Nano-Engineering, Vienna, Austria, 19-22 September 2005. p. 1698 - 1701. DOI : 10.1016/j.mee.2006.01.201.Space applications of micro hot plate chemical sensors
2006.Direct Integration of Carbon Nanotubes on Micro Gas Sensing Platforms
2006. p. 671 - 674. DOI : 10.1109/ICSENS.2007.355557.MEMS based Optical Cross Connects for Fiber Optical Communication
Université de Neuchâtel, 2006.Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
2006. p. 82 - 83. DOI : 10.1109/OMEMS.2006.1708275.Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
2006.The arthroscopic SFM
2006.Application of ESEM in Microtechnology, Biotechnology and Forensic
2006.Atomic Force Microscope Setup for Combined Electrochemical and Topographical Experiments in Structural Biology
2006.Vernieuwingen in mechanische en eletronische horloges
2006.Wafer level hermetic package and device testing of a SOI-MEMS switch for biomedical applications
Journal of Micromechanics and Microengineering. 2006. DOI : 10.1088/0960-1317/16/4/002.Cyro SEM: Application in Micro and Nanotechnology
2006.Characterization of Microfabricated Probes for Combined Atomic Force and High-Resolution Scanning Electrochemical Microscopy
Analytical Chemistry. 2006. DOI : 10.1021/ac0521495.Capteurs intégrés, historique et visions
2006.High Quality Micromachined Inductors for Integrated
Université de Neuchâtel, 2006.Magnetic direct generation of acoustic resonances in silicon membranes
Measurement Science and Technology. 2006. DOI : 10.1088/0957-0233/17/4/017.Mems and Nanotechnologies for Space
2006.Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
Advanced Materials. 2006. DOI : 10.1002/adma.200600718.Design, Simulation, Fabrication, and Characterization of a Digital Variable Optical Attenuator
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.879699.Piezoresistive Cantilever Array for Life Sciences Applications
2006.Combined AFM-SECM Experiments with Microfabricated Conductive Cantilevers P.L.T.M. Frederix et al
2006.Characterization of a microfluidic dispensing system for localised stimulation of cellular networks
Lab on a Chip. 2006. DOI : 10.1039/b511768b.Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication and Testing
Journal of Microelectromechanical Systems. 2006. DOI : 10.1109/JMEMS.2006.880232.Fabrication and electroosmotic flow measurements in micro- and nanofluidic channels
Journal of Microfluidics and Nanofluidics. 2006. DOI : 10.1007/s10404-005-0051-x.Paraffin-PDMS composite thermo microactuator with large vertical displacement capability
2006. p. 215 - 218.In vivo stiffness measurements of human articular cartilage ny means of a scanning force microscope
2006.Microfabricated platforms for the study of neuronal and cellular networks
Journal of Physics: Conference Series. 2006. DOI : 10.1088/1742-6596/34/1/001.Theoretical treatment and computer simulation of microelectrode arrays
Journal of Electroanalytical Chemistry. 2006. DOI : 10.1016/j.jelechem.2006.01.028.Electrochemiluminescent hybridization chip with electric field mismatch discrimination
Biosensors and Bioelectronics. 2006. DOI : 10.1016/j.bios.2006.02.013.Design and fabrication of nanofluidic devices by surfaces micromachining
Nanotechnology. 2006. DOI : 10.1088/0957-4484/17/10/010.Application of carbon "Nano" powders and porous silicon for gas preconcentration
2006. p. W1A - P11.Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever
Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.2099.Wafer Level Packaging of Micromachined Gas Sensors
IEEE Sensors. 2006. DOI : 10.1109/JSEN.2006.881355.MEMS compatible micro-GRIN lenses for fiber to chip coupling of light
Optics Express. 2006. DOI : 10.1364/OE.14.004237.High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy
2006. p. 48 - 49. DOI : 10.1109/OMEMS.2006.1708258.Sensing Protein Molecules Using Nanofabricated Pores
Applied Physics Letters. 2006. DOI : 10.1063/1.2180868.Development of an Array of Ion-Selective Microelectrodes Aimed for the Monitoring of Extracellular Ionic Activities
Analytical Chemistry. 2006. DOI : 10.1021/ac0609733.Highly integrated solid propellant micro-thrusters using SOI wafers
2006. p. 11013 - 6p..Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell development
Sensors and Actuators B: Chemical. 2006. DOI : 10.1016/j.snb.2006.04.031.Influence of cationic and anionic additives on the electrical properties of ionophore-based ion-selective membranes
Journal of Electroanalytical Chemistry. 2005. DOI : 10.1016/j.jelechem.2005.04.029.Microfluidics/CMOS Orthogonal Capabilities for Cell Biology
2005.Design and Evaluation of a polyimide spring system for the scanning force microscope of the Phoenix Mars Mission 2007
2005. p. 281 - 287.High-Performance Micromachined RF Planar Inductors
2005. p. 1084 - 1087. DOI : 10.1109/SENSOR.2005.1496644.Generic fabrication technology for transparent and suspend microfluidic and nanofluidic channels
2005. p. 1191 - 1194. DOI : 10.1109/SENSOR.2005.1497291.Compatibility of Screen-Printing Technology with Micro Hotplate for Gas Sensor and Solid Oxide Micro Fuel Cell Development
2005.Magnetohydrodynamic Pumping In Nuclear Magnetic Environments
2005.A high current density DC magnetohydrodynamic (MHD) micropump
Lab on a Chip. 2005. DOI : 10.1039/b417892k.Micromachining of thick Aluminium Films for RF Applications
2005.Post assembly alignment system
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2005.Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature
2005.Scanning Force Endoscope
2005.Microfabrication and characterization of an ion-selective microelectrode array platform
Sensors and Actuators B: Chemical. 2005. DOI : 10.1016/S0925-4005(04)00112-1.Filling Kinetics of Liquids in Nanochannels down to 27 nm Deep by Capillary Force
Journal of Colloid and Interface Sciences. 2005. DOI : 10.1016/j.jcis.2005.06.037.Microactuators based on ion-implanted dielectric Electroactive Polymer Membranes (EAP)
2005. p. 2048 - 2051. DOI : 10.1109/SENSOR.2005.1497505.Miniaturisation Of Solid Propellant Thrusters For Space Application
2005. p. 736 - 741.Cr particle refinement in Cu alloy by ECAP
2005.Tunable microcavities in two dimensional photonic crystal waveguides
2005. p. 109 - 110. DOI : 10.1109/OMEMS.2005.1540102.Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystems
Thin Solid Films. 2005. DOI : 10.1016/j.tsf.2005.03.021.New Opportunities for Measurement Systems Thanks to New Trends in Space Laboratories
CHIMIA. 2005. DOI : 10.2533/000942905777676533.Micro-Heat Generation for Chemical Reactions
2005.Opportunities of Micro-and Nanotechnology(MNT) in instrumentation and communication
2005.Voltammetric microelectrode array for trace element monitoring in natural waters
2005.MEMS compatible Micro-GRIN Lenses for in Plane Beam Manipulation
2005. p. 111 - 112. DOI : 10.1109/OMEMS.2005.1540103.Nanofabrication of protein-patterned substrates for future cell adhesion experiments
Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.073.MEMS Hotplates with TiN as a Heater Material
2005. p. 330 - 333. DOI : 10.1109/ICSENS.2005.1597703.Micro - and Nanotechnology in Switzerland
2005.IMT, 30 ans à l'avant-garde d'un domaine scientifique et technologique de pointe
2005.Towards a planar sample support for in situ experiments in structural biology
Microelectronic Engineering. 2005. DOI : 10.1016/j.mee.2004.12.072.Polymeric Hotplates for Sensors and Actuators
2005.Miniature Solid State Ion-Selective Electrodes with Solvent Polymeric Mebrane
2005.Ta2O5 and HfO2 as ion-sensitive materials in ISFETs
2005. p. 183 - 188.Assessment of insulated conductive cantilevers for biology and electrochemistry
Nanotechnology. 2005. DOI : 10.1088/0957-4484/16/8/001.Electrochemical microchip for hybridization detection of DNA using ruthenium complex as a non-covalent label
2005.Microstructural Evolution of Cu Alloys During ECAP:Approach For Nanofilament Formation
2005.Microfabrication of SixNy micropipettes for biochemical applications
2005.Quasi-dry Release for Micro Electro-Mechanical Systems
2005. p. 611 - 616.Local Oxidation of Titanium Using a Dynamic Mode Operated Tuning Fork Probe with Microfabricated Silicon Cantilever
2005.Fast microarray functionalization with probe beads for lab-on-chip affinity assay
2005. p. 1054 - 1056.Integration of robust fluidic interconnects using metal to glass anodic bonding
Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/9/007.Laterally Moving Bistable MEMS DC Switch for Biomedical Applications
Journal of Microelectromechanical Systems. 2005. DOI : 10.1109/JMEMS.2005.851843.MEMS and opportunities for University/Industry Technology Transfer
2005.Electrochemiluminescent hybridization chip with electric field aided mismatch discrimination
2005.High-density electrode array for imaging in vitro electrophysical activity
Biosensors and Bioelectronics. 2005. DOI : 10.1016/j.bios.2004.08.011.Generic technological platform for microfabricationg silicon nitride micro-and nanopipette arrays
Journal of Micromechanics and Microengineering. 2005. DOI : 10.1088/0960-1317/15/12/020.Titration-on-a-chip, chemical sensor-actuator systems from idea to commercial product
Sensors and Actuators B: Chemical. 2005. DOI : 10.1016/S0925-4005(04)00116-9.Failure Analysis of Micro-Heating Elements Suspended on Thin Membranes
2005. 16th European Symposium Realibility of Electron Devices, Failure Physics and Analysis. p. 1786 - 1789. DOI : 10.1016/j.microrel.2005.07.106.Fast immobilization of probe beads by dielectrophoresis-controlled adhesion in a versatile microfluidic platform for affinity assay
Electrophoresis. 2005. DOI : 10.1002/elps.200500401.Development of a multifunctional platform for cell cultures
2004.MEMS Opportunities & Challenges for Applied Research
2004. p. 37 - 76.Scanning Force Endoscope
2004.Microsystems for bioanalytical applications
2004.Sample preparation by means of electron beam lithography
2004.Modification of the surface roughness of platinum thin film electrodes by alloy formation with aluminium
2004.MEMS and Opportunities for University/Industry Technology Transfer
2004.Scanning Force Endoscope
2004.A Highly Parallel Piezoelectric Printing Device for Micro-Array Technology
2004. p. 466 - 469. DOI : 10.1109/MEMS.2004.1290623.Technology Transfer Opportunities for Chemical Measurement Systems inspired by the Space Bioreactor
2004.Fabrication and Measurement of a Circular Digital Variable Optical Attenuator
2004. p. 36 - 37.Scanning Force Endoscope
2004.Fabrication of Nanochannels Systems by Surface Micromachining
2004.MEMS Opportunities & Challenges for Applied Research
2004.Microfabrication process for the realization of a matrix of solid-propellant microthrusters
2004. p. 260 - 277.Developments of MEA devices for studying complex cellular networkds dynamics in-vitro
2004.Miniature lamellar grating interferometer based on silicon technology
Optics Letters. 2004. DOI : 10.1364/OL.29.001437.Development of Insulated Conductive Probes with Platinum Silicide Tips for Atomic Force Microscopy in Cell Biology
Japanese Journal of Applied Physics. 2004. DOI : 10.1143/JJAP.43.3865.Technology and Applications of Micro Electro Mechanical Systems
2004.Scanning Force Endoscope
2004.MEMS tilting platform for filter tuning in optical telecom
2004. p. 10 - 11.Application of Optical MEMS in Communication, Life Sciences and Instrumentations
2004.Scanning Force Endoscope
2004.Laterally Moving Bi-Stable MEMS DC-Switch for Biomedical Applications
2004. p. 854 - 860.Scanning Force Endoscope
2004.MEMS tunable filter for telecom applications
2004. Photonics Europe, Strasbourg, France. p. 240 - 251. DOI : 10.1117/12.545581.Two-Dimensional Massive Parallel Dispenser for Microarray Printing
Université de Neuchâtel, 2004.Manufacture and Characterization of an ISFET-probe for Deep-sea pH Measurements
2004. p. 730 - 731.Microelectrode arrays: materials, technology and applications
2004.MEMS Tilting Platform for Filter Tuning in Optical Telecom
2004. p. 253 - 254.Current response of ion-selective solvent polymeric membranes at controlled potential
Journal of Electroanalytical Chemistry. 2004. DOI : 10.1016/j.jelechem.2004.04.009.A high flow rate DC magnetohydrodynamic (MHD) micropumup
2004. p. 372 - 374.Introduction to Microtechnology
2004.A clean wafer-scale chip-release process without dicing based on vapor phase etching
2004. p. 717 - 720. DOI : 10.1109/MEMS.2004.1290685.Bonding properties of metals anodically bonded to glass
Sensors and Actuators A: Physical. 2004. DOI : 10.1016/j.sna.2003.10.070.Robust High Performance Planar Inductors on Glass Substrate
2004. p. 233 - 236.Characterization of a MEMS-based VIS and near-IR Lamellar Spectrometer
2004. p. 44 - 45.Silicon Liquid Flow Sensor Encapsulation using Metal to Glass Anodic Bonding
2004. p. 649 - 652.Using microtechnology to get to nanotechnology
Machine Design. 2004.Role of Universities in Industrialization of MEMS Technology
2004.Array of ion-selective microelectrodes designed for the detection of intracellular Ca2+ activities
2004.Neuchâtel: Transformation from Watch Industry to MEMS-based Cluster
2004.Electrochemiluminescence microfluid chip of heterogeneous assays
2004.Fabrication of Nanochannels Using Photolithography and Partial Etching of Sacrificial Layer
2004. p. 309 - 311.A microfluidic platform using molecular beacon-based temperature calibration for thermal dehybridization of surface-bound DNA
Analytical Chemistry. 2004. DOI : 10.1021/ac034377+.Scanning Force Endoscope
2004.Replication of optical MEMS structures in sol-gel materials
Microelectronic Engineering. 2004. DOI : 10.1016/S0167-9317(04)00091-7.Planar sample support for in situ Experiments in Structural Biology
2004.Scanning Force Endoscope
2004.MEMS for Watches
2004.MEMS: Opportunities and Challenges for Applied Research at Universities
2004.Development of MicroHeaters on SOI for MicroIgnition Application
2004. p. 309 - 312.Active Pixels Sensor Array for imagning Electrophysiological Cellular Activity
2004.Novel 2D MEMS based Optical Beamsteerer
2004. p. 58 - 59.Ion-Selective Microelectrode Array Platform for recording Calcium Ion Activities
2004.Development of microfluidic devices for chemical analysis and fluid handling
Université de Neuchâtel, 2004.Planar sample support for in situ Experiments in Structural Biology
2004.Nanofrabrication of Protein-Patterned Substrates for Future Cell Adhesion Experiments
2004.Hybridization assay based on the quenching of Ru(bpy) 3 2+ electrochemiluminescence by Cy5
2004.Planar sample support for in situ Experiments in Structural Biology
2004.From Chemical Sensors to Miniaturize Chemical Analysis
2004.Novel Dynamic Scanning Microscope Probe and its Application to Local Electrical Measurement in an Ion Sensitive Field Effect Transistor
2004. p. 011.1.1 - 011.1.6.Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
2004. p. 23 - 28.High Quality Monolithic Planar Inductors for Integrated Communications Systems
2004.Three-Dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator
Selected Topics in quantum electronics. 2004. DOI : 10.1109/JSTQE.2004.830616.MEMS and Opportunities for University/Industry Technology Transfer
2004.4x4 & 8x8 Optical Matrix Switch with 250 um Mirror Pitch
2004. p. 162 - 163.Talk on MEMS for watches
2004. p. 147 - 168.From Chemical Sensors to Miniaturized Chemical Analysis Systems
2004.Microelectrodes Arrays (MEAs) for in-vitro Electrophysiology
2004. p. 84 - 85.4x4 & 8x8 Optical Cross connect for Fiber Optical Networks
2004. Photonics Europe, 2004, Strasbourg, France. p. 212 - 219. DOI : 10.1117/12.544915.High-k Dielectrics for Use as ISFET Gate Oxides
2004. p. 677 - 680. DOI : 10.1109/ICSENS.2004.1426257.Infra-red MEMS-based Lamellar Grating Spectrometer
2004. p. 1 - 8. DOI : 10.1117/12.545587.The quenching of electrochemiluminescence upon oligonucleotide hybridization
Luminescence. 2004. DOI : 10.1002/bio.786.MEMS for Watches
2004. DOI : 10.1109/MEMS.2004.1290507.Development of an electroless post-processing technique for depositing gold as electrode material on CMOS devices
Sensors and Actuators. 2004. DOI : 10.1016/j.snb.2003.12.078.2021
Editorial: Modeling and Applications of Optoelectronic Devices for Access Networks
Frontiers In Physics. 2021. DOI : 10.3389/fphy.2021.678269.2016
Tubular gas preconcentrators based on inkjet printed micro-hotplates on foil
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.121.Fully inkjet printed SnO2 gas sensor on plastic substrate
Sensors and Actuators B. 2016. DOI : 10.1016/j.snb.2016.06.042.Smart RFID Label with a Printed Multisensor Platform for Environmental Monitoring
Flexible and Printed Electronics. 2016. DOI : 10.1088/2058-8585/1/2/025003.2015
Preconcentration Modeling for the Optimization of a Micro Gas Preconcentrator Applied to Environmental Monitoring
Analytical Chemistry. 2015. DOI : 10.1021/acs.analchem.5b00400.Enzyme SU-8 microreactors: simple tools for cell-culture monitoring
Microfluidics and Nanofluidics. 2015. DOI : 10.1007/s10404-015-1562-8.Comparing membrane- and cantilever-based surface stress sensors for reproducibility
Sensors and Actuators A: Physical. 2015. DOI : 10.1016/j.sna.2015.02.039.Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissue
Biomedical Microdevices. 2015. DOI : 10.1007/s10544-015-9981-6.Polylactic acid as a biodegradable material for all-solution-processed organic electronic devices
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.11.010.Inkjet and microcontact printing of functional materials on foil for the fabrication of pixel-like capacitive vapor microsensors
Organic Electronics. 2015. DOI : 10.1016/j.orgel.2014.10.041.Harvesting Energy From a Rotating Gear Using an AFM-Like MEMS Piezoelectric Frequency Up-Converting Energy Harvester
Journal of Microelectromechanical Systems. 2015. DOI : 10.1109/JMEMS.2014.2349794.Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist
Journal of Micromechanics and Microengineering. 2015. DOI : 10.1088/0960-1317/25/4/045013.2014
Design and development of sensing RFID Tags on flexible foil compatible with EPC Gen 2
IEEE Sensors Journal. 2014. DOI : 10.1109/JSEN.2014.2335417.Properties and Printability of Inkjet and Screen-Printed Silver Patterns for RFID Antennas
Journal Of Electronic Materials. 2014. DOI : 10.1007/s11664-013-2893-4.Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates
Microelectronics Reliability. 2014. DOI : 10.1016/j.microrel.2014.06.015.Forward osmosis in a portable device for automatic osmolality adjustment of environmental water samples evaluated by cell-based biosensors
Journal of Membrane Science. 2014. DOI : 10.1016/j.memsci.2013.12.041.Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates
Smart Materials and Structures. 2014. DOI : 10.1088/0964-1726/23/4/045041.In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments
Sensors and Actuators A: Physical. 2014. DOI : 10.1016/j.sna.2013.08.043.Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
Journal of Microelectromechanical Systems. 2014. DOI : 10.1109/Jmems.2014.2314702.Multisite monitoring of choline using biosensor microprobe arrays in combination with CMOS circuitry
Biomedical Engineering-Biomedizinische Technik. 2014. DOI : 10.1515/bmt-2012-0098.Mid-infrared spectroscopy for gases and liquids based on quantum cascade technologies
The Analyst. 2014. DOI : 10.1039/c3an01462b.Development of a New Generation of Ammonia Sensors on Printed Polymeric Hotplates
Analytical Chemistry. 2014. DOI : 10.1021/ac501908c.Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level
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Applied Physics Letters. 2014. DOI : 10.1063/1.4891248.2013
A robust platform for textile integrated gas sensors
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.snb.2012.11.099.Microfluidic Droplet-Based Liquid–Liquid Extraction and On-Chip IR Spectroscopy Detection of Cocaine in Human Saliva
Analytical Chemistry. 2013. DOI : 10.1021/ac401606p.A portable lab-on-a-chip instrument based on MCE with dual topbottom capacitive coupled contactless conductivity detector in replaceable cell cartridge
Electrophoresis. 2013. DOI : 10.1002/elps.201200592.Decreasing the size of printed comb electrodes by the introduction of a dielectric interlayer for capacitive gas sensors on polymeric foil: Modeling and fabrication
Sensors And Actuators B-Chemical. 2013. DOI : 10.1016/j.sob.2013.01.008.A dual-axis pointing mirror with moving-magnet actuation
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025002.Towards fully printed capacitive gas sensors on flexible PET substrates based on Ag interdigitated transducers with increased stability
Sensors and Actuators B: Chemical. 2013. DOI : 10.1016/j.snb.2012.11.025.Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip-One-Channel Setup
Langmuir. 2013. DOI : 10.1021/la3046719.Foil-to-foil lamination and electrical interconnection of printed components on flexible substrates
Microelectronic Engineering. 2013. DOI : 10.1016/j.mee.2013.04.040.Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy
Optics Express. 2013. DOI : 10.1364/OE.21.022400.Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile Applications
IEEE Sensors Journal. 2013. DOI : 10.1109/JSEN.2013.2257167.Effect of low-temperature processing on dry film photoresist properties for flexible electronics
Journal of Polymer Science Part B: Polymer Physics. 2013. DOI : 10.1002/polb.23240.Flexprint Substrate Enzyme Sensor for Determination of Daily Glucose-Profiles of Diabetic Patients
ECS Transactions. 2013. DOI : 10.1149/05012.0089ecst.An Automatic Test Bench for Complete Characterization of Vibration-Energy Harvesters
IEEE Transactions on Instrumentation and Measurement. 2013. DOI : 10.1109/TIM.2013.2265452.Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks
Journal of Applied Physics. 2013. DOI : 10.1063/1.4789942.Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substrates
Journal Of Applied Physics. 2013. DOI : 10.1063/1.4829023.A miniature frequency-stabilized VCSEL system emitting at 795nm based on LTCC modules
Optics and Lasers in Engineering. 2013. DOI : 10.1016/j.optlaseng.2013.03.009.The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/5/055009.Batch fabrication of gold-gold nanogaps by E-beam lithography and electrochemical deposition
Nanotechnology. 2013. DOI : 10.1088/0957-4484/24/23/235302.Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)
Sensors and Actuators A: Physical. 2013. DOI : 10.1016/j.sna.2012.11.025.Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation
Journal of Micromechanics and Microengineering. 2013. DOI : 10.1088/0960-1317/23/2/025012.Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packaging
Journal Of Micromechanics And Microengineering. 2013. DOI : 10.1088/0960-1317/23/7/075007.2012
Residual Stress and Buckling Patterns of Free-standing Yttria-stabilized-zirconia Membranes Fabricated by Pulsed Laser Deposition
Fuel Cells. 2012. DOI : 10.1002/fuce.201200028.Environmental monitoring with a multisensor platform on polyimide foil
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.095.Two-dimensional cantilever array with varying spring constants and tip radii for life-science applications
Micro & Nano Letters. 2012. DOI : 10.1049/mnl.2011.0467.Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/2/025013.Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for Energy Harvesting Devices
Smart Materials Research. 2012. DOI : 10.1155/2012/426048.Characterization and modelling of low-pressure rf discharges at 2–500 MHz for miniature alkali vapour dielectric barrier discharge lamps
Journal of Physics D : Applied Physics. 2012. DOI : 10.1088/0022-3727/45/50/505205.Study of laser-pumped double-resonance clock signals using a microfabricated cell
Physica Scripta. 2012. DOI : 10.1088/0031-8949/2012/T149/014013.Two Dimensional Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) with Improved Sensitivity
Sensors. 2012. DOI : 10.3390/s121115873.Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors
Journal of Micromechanics and Microengineering. 2012. DOI : 10.1088/0960-1317/22/8/085034.Microfabricated chip-scale rubidium plasma light source for miniature atomic clocks
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 2012. DOI : 10.1109/TUFFC.2012.2214.Cocaine detection by a mid-infrared waveguide integrated with a microfluidic chip
Lab on a Chip. 2012. DOI : 10.1039/c2lc40601b.Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning
Advanced Functional Materials. 2012. DOI : 10.1002/adfm.201102789.All additive inkjet printed humidity sensors on plastic substrate
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.042.Label-free, direct DNA detection by means of a standard CMOS electronic chip
Sensors and Actuators B: Chemical. 2012. DOI : 10.1016/j.snb.2012.02.052.Development and validation of a low cost blood filtration element separating plasma from undiluted whole blood
Biomicrofluidics. 2012. DOI : 10.1063/1.3672188.2011
Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA
Microelectronic Engineering. 2011. DOI : 10.1016/j.mee.2011.02.012.Theoretical treatment and numerical simulation of potentiometric and amperometric enzyme electrodes and of enzyme reactors. Part 1: Steady-state concentration profiles, fluxes, and responses
Journal of Electroanalytical Chemistry. 2011. DOI : 10.1016/j.jelechem.2011.02.007.Theoretical treatment and numerical simulation of potentiometric and amperometric enzyme electrodes and of enzyme reactors. Part 2: Time-dependent concentration profiles, fluxes, and responses
Journal of Electroanalytical Chemistry. 2011. DOI : 10.1016/j.jelechem.2011.02.006.The measurement of biomechanical properties of porcine articular cartilage using atomic force microscopy
Archives of Histology and Cytology. 2011. DOI : 10.1679/aohc.72.251.Microcolumn with variable axis lens for large scan fields and pixel numbers
Microelectronic Engineering. 2011. DOI : 10.1016/j.mee.2010.12.120.Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper
Optics Express. 2011. DOI : 10.1364/OE.19.007580.A micro gas preconcentrator with improved performance for pollution monitoring and explosives detection
Analytica Chimica Acta. 2011. DOI : 10.1016/j.aca.2010.12.039.Ignition and Combustion Behavior in Solid Propellant Microsystems Using Joule-Effect Igniters
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Sensors and Actuators, B: Chemical. 2011. DOI : 10.1016/j.snb.2011.11.050.Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensing
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.09.001.Simultaneous neurochemical stimulation and recording using an assembly of biosensor silicon microprobes and SU-8 microinjectors
Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2010.01.034.Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude
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Sensors and Actuators B: Chemical. 2011. DOI : 10.1016/j.snb.2011.02.005.The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Smart Materials and Structures. 2011. DOI : 10.1088/0964-1726/20/2/025015.Electrochemical oxidation of ammonia (NH4+/NH3) on thermally and electrochemically prepared IrO2 electrodes
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Measurement Science and Technology. 2010. DOI : 10.1088/0957-0233/21/7/075801.Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy
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Optics Letters. 2010. DOI : 10.1364/OL.35.003102.Theoretical treatment and numerical simulation of potential and concentration profiles in extremely thin non-electroneutral membranes used for ion-selective electrodes
Journal of Electroanalytical Chemistry. 2010. DOI : 10.1016/j.jelechem.2010.01.001.Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.10.009.Foil level packaging of a chemical gas sensor
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055026.Micro gas preconcentrator in porous silicon filled with a carbon absorbent
Sensors and Actuators B: Chemical. 2010. DOI : 10.1016/j.snb.2010.05.054.Investigation of hot roller embossing for microfluidic devices
Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015017.Capacitively coupled contactless conductivity detection with dual top-bottom cell configuration for microchip electrophoresis
Electrophoresis. 2010. DOI : 10.1002/elps.200900578.Miniaturized Fourier transform spectrometer for gas detection in the MIR region
Sensors and Actuators B. 2010. DOI : 10.1016/j.snb.2010.03.050.A novel enzyme entrapment in SU-8 microfabricated films for glucose micro-biosensors
Biosensors and Bioelectronics. 2010. DOI : 10.1016/j.bios.2010.07.117.Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics
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Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/5/055008.Enzyme-based choline and l-glutamate biosensor electrodes on silicon microprobe arrays
Biosensors and Bioelectronics. 2010. DOI : 10.1016/j.bios.2010.07.073.3D Assembly Using Au-Si Eutectic and Au-Au Thermocompression Wafer Level Bonding for M(O)EMS Device Fabrication
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Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivity
Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.023.Temperature, humidity and gas sensors integrated on plastic foil for low power applications
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.04.019.Evaluation of pH indicator-based colorimetric films for ammonia detection using optical waveguides
Sensors and Actuators B: Chemical. 2009. DOI : 10.1016/j.snb.2009.08.049.Scanning gate microscopy measurements on a superconducting single-electron transistor
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Sensors and Actuators A: Physical. 2009. DOI : 10.1016/j.sna.2008.12.024.2008
Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods
Journal of Micromechanics and Microengineering. 2008. DOI : 10.1088/0960-1317/18/6/065005.Label-Free Dectection of Single Protein Molecules and Protein-Protein Interactions using Synthetic Nanopores
Analytical Chemistry. 2008. DOI : 10.1021/ac7025207.Microhotplates with TiN heaters
Sensors and Actuators A: Physical. 2008. DOI : 10.1016/j.sna.2008.08.016.Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates
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Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2008. DOI : 10.1007/s00542-007-0459-1.Conductive supports for combined AFM–SECM on biological membranes
Nanotechnology. 2008. DOI : 10.1088/0957-4484/19/38/384004.Potentiometric platform for the quantification of cellular potassium efflux
Lab on a Chip. 2008. DOI : 10.1039/b801042k.Computer simulation and theory of the diffusion-and flow-induced concentration dispersion in microfluidic devices and HPLC systems based on rectangular microchannels
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Sensors and Actuators B: Chemical. 2007. DOI : 10.1016/j.snb.2007.07.029.Direct integration of carbon nanotubes on micromachined hotplates
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Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.sna.2007.04.006.In situ measurements of human articular cartilage stiffness by means of a scanning force microscope
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Sensors and Actuators A: Physical. 2007. DOI : 10.1016/j.snb.2007.09.013.Micro-hotplates-A platform for micro-solid oxide fuel cells
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Microelectronic Engineering. 2007. DOI : 10.1016/j.mee.2007.01.244.Computer simulation of ion-selective membrane electrodes and related systems by finite-difference procedures
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Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.1992.Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering
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Sensors and Actuators A: Physical. 2006. DOI : 10.1016/j.sna.2005.08.024.A microelectrode array (MEA) integrated with clustering structures for investigating in vitro neurodynamics in confined interconnected sub-populations of neurons
Sensors and Actuators B: Chemical. 2006. DOI : 10.1016/j.snb.2005.04.042.Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
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Japanese Journal of Applied Physics. 2006. DOI : 10.1143/JJAP.45.2099.Wafer Level Packaging of Micromachined Gas Sensors
IEEE Sensors. 2006. DOI : 10.1109/JSEN.2006.881355.MEMS compatible micro-GRIN lenses for fiber to chip coupling of light
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Development of Insulated Conductive Probes with Platinum Silicide Tips for Atomic Force Microscopy in Cell Biology
Japanese Journal of Applied Physics. 2004. DOI : 10.1143/JJAP.43.3865.Current response of ion-selective solvent polymeric membranes at controlled potential
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Machine Design. 2004.A microfluidic platform using molecular beacon-based temperature calibration for thermal dehybridization of surface-bound DNA
Analytical Chemistry. 2004. DOI : 10.1021/ac034377+.Replication of optical MEMS structures in sol-gel materials
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CHIMIA. 2003. DOI : 10.2533/000942903777678704.High-Quality RF MEMS for Integrated Communication Systems
CSEM Scientific and Technical Report. 2003.Nanoscale dispensing of liquids through cantilevered probes
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IEEE Journal on Selected Topics in Quantum Electronics. 2002. DOI : 10.1109/2944.991410.Performance of an Integrated Microoptical System for Fluorescence Detection in Microfluidic Systems
Analytical Chemistry. 2002. DOI : 10.1021/ac0112465.Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy
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Electroanalysis. 1999. DOI : 10.1002/(SICI)1521-4109(199912)11:18<1361::AID-ELAN1361>3.0.CO;2-C.Effects of ion transport on the potential response of ionophore-based membrane electrodes: a theoretical approach
The Journal of Physical Chemistry B. 1999. DOI : 10.1021/jp9926443.Micromechanical relay with electrostatic actuation and metallic contacts
Journal of Micromechanics and Microengineering. 1999. DOI : 10.1088/0960-1317/9/4/307.Micromachined SPM probes with sub-100 nm features at tip apex
Surface and Interface Analysis. 1999. DOI : 10.1002/(SICI)1096-9918(199905/06)27:5/6<299::AID-SIA510>3.0.CO;2-V.High aspect ratio UV photolithography for electroplated structures
Journal of Micromechanics and Microengineering. 1999. DOI : 10.1088/0960-1317/9/2/001.Gas-dependent field effect transistor with an electrodeposited conducting polymer gate contact
Electrochemical and Solid-State Letters. 1999. DOI : 10.1149/1.1390761.Interferometric measurements of the position of a macroscopic body: Towards observation of quantum limits
Physical Review A. 1999. DOI : 10.1103/PhysRevA.59.1038.The development of a Nafion based amperometric carbon monoxide sensor for domestic safety
ANALUSIS. 1999. DOI : 10.1051/analusis:1999270347.Microfabricated chemical analysis systems for environmental applications
Biosensors and Bioarrays. 1999.Soft, entirely photoplastic probes for scanning force microscopy
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Analytica Chimica Acta. 1999. DOI : 10.1016/S0003-2670(99)00251-2.Micro-opto-mechanical 2 x 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
Journal of Lightwave Technology. 1999. DOI : 10.1109/50.737413.Towards better scanning near-field optical microscopy probes - progress and new developments
Journal of Microscopy. 1999. DOI : 10.1046/j.1365-2818.1999.00567.x.A numerical simulation on a pneumatic air table realized by micro-EDM
Journal of Microelectromechanical Systems. 1999. DOI : 10.1109/84.809068.Wafer- and piece-wise Si tip transfer technologies for applications in scanning probe microscopy
Journal of Microelectromechanical Systems. 1999. DOI : 10.1109/84.749404.Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation
Journal of Microelectromechanical Systems. 1999. DOI : 10.1109/84.788627.A variable optical attenuator based on silicon micromechanics
IEEE Photonics Technology Letters. 1999. DOI : 10.1109/68.740714.Mounting of micromachined diamond tips and cantilevers
Surfaces and Interface Analysis. 1999. DOI : 10.1002/(SICI)1096-9918(199905/06)27:5/6<296::AID-SIA497>3.0.CO;2-E.Reflective duplexer based on silicon micromechanics for fiber-optic communication
Journal of Lightwave Technology. 1999. DOI : 10.1109/50.737430.Microfabricated double layer octupoles for microcolumn applications
Microelectronic Engineering. 1999. DOI : 10.1016/S0167-9317(99)00118-5.Introduction to the issue on microoptoelectromechanical systems (MOEMS)
IEEE Journal of Selected Topics in Quantum Electronics. 1999. DOI : 10.1109/JSTQE.1999.748097.1998
Gel integrated microelectrode arrays for direct voltammetric measurements of heavy metals in natural waters and other complex media
Analytical Chemistry. 1998. DOI : 10.1021/ac971194c.A pneumatic air table realized by microelectro-discharge machining
Journal of Microelectromechanical Systems. 1998. DOI : 10.1109/84.735345.Silicon micromechanics for the fiber-optic information highway
Sensors and Materials. 1998.Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
Sensors and Actuators A: Physical. 1998. DOI : 10.1016/S0924-4247(98)80051-4.Advanced deep reactive ion etching: a versatile tool for micromechanical systems
Journal of Micromechanics and Microengineering. 1998. DOI : 10.1088/0960-1317/8/4/003.On-chip generation and detection of electrochemiluminescence
Analytica Chimica Acta. 1998. DOI : 10.1016/S0003-2670(97)00689-2.Surface-micromachined Ta-Si-N beams for use in micromechanics
Journal of Micromechanics and Microengineering. 1998. DOI : 10.1088/0960-1317/8/2/011.Holographic refractive index detector for application in microchip-based separation systems
The Analyst. 1998. DOI : 10.1039/a801478g.Universal coulometric nanotitrators with potentiometric detection
Analytica Chimica Acta. 1998. DOI : 10.1016/S0003-2670(98)00034-8.Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
MICROSYSTEM TECHNOLOGIES. 1998. DOI : 10.1007/s005420050119.Low-cost PDMS seal ring for single-side wet etching of MEMS structures
Sensors and Actuators A: Physical. 1998. DOI : 10.1016/S0924-4247(98)00132-0.Fabrication of metallic probes by a new technology based on double molding
Microelectronic Engineering. 1998. DOI : 10.1016/S0167-9317(98)00127-0.Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
Sensors and Actuators A: Physical. 1998. DOI : 10.1016/S0924-4247(98)00110-1.Patterned thick photoresist layers for protection of protruding structures during wet and dry etching processes
Journal of Micromechanics and Microengineering. 1998. DOI : 10.1088/0960-1317/8/2/007.1997
Potentiometric response behavior of parallel arrays of cation- and anion-selective membrane electrodes as reference devices
Electroanalysis. 1997. DOI : 10.1002/elan.1140091207.Atomic Force Microscopy Using Cantilevers with Integrated Tips and Piezoelectric Layers for Actuation and Detection
Journal of Micromechanics and Microengineering. 1997. DOI : 10.1088/0960-1317/7/3/036.Reliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component
Sensors and Actuators A: Physical. 1997. DOI : 10.1016/S0924-4247(97)80304-4.Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications
Journal of Microelectromechanical Systems. 1997. DOI : 10.1109/84.623118.Self-Sharpening Tip Integrated on Micro Cantilevers with Self-Exciting Piezoelectric Sensor for Parallel Atomic Force Microscopy
Applied Physics Letters. 1997. DOI : 10.1063/1.118817.Microelectrode arrays for electrophysiological monitoring of hippocampal organotypic slice cultures
IEEE Transactions on Biomedical Engineering. 1997. DOI : 10.1109/10.641344.Use of Photopolymerizable Membranes Based on Polyacrylamide Hydrogels for Enzymatic Microsensor Construction
Analytica Chimica Acta. 1997. DOI : 10.1016/S0003-2670(97)00332-2.Principal Research Activities at SAMLAB, Switzerland
Bulletin Micromachine Center. 1997.A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor
IEEE/ASME Transactions on Mechatronics. 1997. DOI : 10.1109/3516.622967.Performance of amperometric sensors based on multiple microelectrode arrays
Sensors and Actuators B: Chemical. 1997. DOI : 10.1016/S0925-4005(97)00159-7.A New Fabrication Method for Borosilicate Glass Capillary Tubes with Lateral Inlets and Outlets
Sensors and Actuators A: Physical. 1997. DOI : 10.1016/S0924-4247(97)01360-5.Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM
Sensors and Actuators A: Physical. 1997. DOI : 10.1016/S0924-4247(96)01440-9.Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids
Journal of Microelectromechanical Systems. 1997. DOI : 10.1109/84.650131.1996
Electrochemical Deposition of Enzymes on Microelectrodes
Biocybernetics and Biomedical Engineering. 1996.Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
Journal of Vacuum Science & Technology B. 1996. DOI : 10.1116/1.589171.Micromachined Enzymatic Reactors
MST News. 1996.Ion-Selective Electrodes and Biosensors
Polymeric Materials Encyclopedia. 1996.Extremely Stable Nafion Based Carbon Monoxide Sensor
Sensors and Actuators B: Chemical. 1996. DOI : 10.1016/S0925-4005(97)80040-8.Interdigitated Microelectrode Arrays Based on Sputtered Carbon Thin-Films
Sensors and Actuators B: Chemical. 1996. DOI : 10.1016/S0925-4005(97)80063-9.Electrochemical Characterization of Thin-Film Carbon Interdigitated Electrode Arrays
Analytica Chimica Acta. 1996. DOI : 10.1016/0003-2670(96)00068-2.Fabrication of an Integrated Silicon-Based Lens for Low-Energy Miniaturized Electron Columns
Japanese Journal of Applied Physics. 1996. DOI : 10.1143/JJAP.35.6641.Piezoelectric cantilever beams actuated by PZT sol-gel thin film
Sensors and Actuators A: Physical. 1996. DOI : 10.1016/S0924-4247(95)01196-X.Glucose and Urea Measurement using micromachined open tubular heterogeneous enzyme reactors
DECHEMA Monographs. 1996.Megahertz Opto-Mechanical Modulator
Sensors and Actuators A: Physical. 1996. DOI : 10.1016/0924-4247(96)80124-5.1995
Electrochemical Techniques for the Modification of Microelectrodes
Biosensors and Bioelectronics. 1995. DOI : 10.1016/0956-5663(95)96794-Y.AFM imaging with an xy-micropositioner with integrated tip
Sensors and Actuators A: Physical. 1995. DOI : 10.1016/0924-4247(94)00962-H.Glucose Sensor Based on an Amperometric Microelectrode with a Photopolymerizable Enzyme Membrane
Sensors and Actuators B: Chemical. 1995. DOI : 10.1016/0925-4005(94)01631-Q.Micro-Adaptation of Chemical Sensor Materials
Sensors and Actuators A: Physical. 1995. DOI : 10.1016/0924-4247(95)01075-0.PZT films for micro-pumps
Integrated Ferroelectrics. 1995. DOI : 10.1080/10584589508012296.Numerical simulations of planar electrostatic wobble motors
Sensors and Actuators A: Physical. 1995. DOI : 10.1016/0924-4247(94)00978-Q.Hybrid ultrasonic elastic force motors micromachined in silicon
Integrated Ferroelectrics. 1995. DOI : 10.1080/10584589508012297.Integrated Circuit Compatible Electrostatic Polysilicon Microrelays
Journal of Micromechanics and Microengineering. 1995. DOI : 10.1088/0960-1317/5/2/026.A System to Measure 3-Directional Relative Displacements for a Biomedical Application
Microsystem Technologies. 1995. DOI : 10.1007/BF01624469.Integrated Array Sensor for Dectecting Organic Solvents
Sensors and Actuators B: Chemical. 1995. DOI : 10.1016/0925-4005(94)01573-Z.Glucose-Sensitive ENFET using Potassium Ferricyanide as an Oxidizing Substrate: the Effect of an Additional Lysozyme Membrane
Sensors and Actuators B: Chemical. 1995. DOI : 10.1016/0925-4005(95)85025-2.1994
Electrodeposited Electrostatic Rigid-Rotor Wobble Motors on Silicon
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(94)00706-3.Universal Approach for the Fabrication of Ca2+-, K+- and NO3- sensitive Membrane ISFETs
Sensors and Actuators B: Chemical. 1994. DOI : 10.1016/0925-4005(94)87084-5.Werkzeuge der Siliziumtechnologie
TR - Technische Rundschau. 1994.Recent Developments in Integrated Chemical Analyzing Systems
Chemical Sensor Technology. 1994.Line-Addressable Torsional Micromirrors for Light Modulator Arrays
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(94)80131-2.Silicon-Based Chemical Sensors and Chemical Analysis Systems
Sensors and Materials. 1994.Micromachined analyzers on a silicon chip
Clinical Chemistry. 1994. DOI : 10.1093/clinchem/40.9.1805.Three-Dimensional Micro-Flow Manifolds for Miniaturized Chemical Analysis Systems
Journal of Micromechanics and Microengineering. 1994. DOI : 10.1088/0960-1317/4/4/009.Organic Membranes for Miniaturized Electrochemical Sensors : Fabrication of a Combined pO2, pCO2 and pH Sensor
Journal of Electroanalytical Chemistry. 1994. DOI : 10.1016/0022-0728(94)87070-5.Integrated Shielding lines on Multilayer Polysilicon Resonators
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00710-L.Integrated flow-regulated silicon micropump
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00703-7.Microlever with combined integrated sensor/actuator functions for scanning force microscopy
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00701-5.A novel approach to ion separations in solution : synchronized cyclic capillary electrophoresis (SCCE)
Sensors and Actuators B: Chemical. 1994. DOI : 10.1016/0925-4005(93)01200-N.Glucose Measurement Using a Micromachined Open Tubular Heterogeneous Enzyme Reactor (MOTHER)
Microsystem Technologies. 1994. DOI : 10.1007/BF01367760.Array of Individually Addressable Microelectrodes
Sensors and Actuators B: Chemical. 1994. DOI : 10.1016/0925-4005(93)01126-O.Development of a Miniature Bioreactor for Continuous Culture in a Space Laboratory
Journal of Biotechnology. 1994. DOI : 10.1016/0168-1656(94)90144-9.Glucose-Sensitive Enzyme Field Effect Transistor Using Potassium Ferricyanide as an Oxidizing Substrate
Analytical Chemistry. 1994. DOI : 10.1021/ac00074a005.Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(93)00699-5.Piezoelectric Position Sensor for Ultrasonic EFM motors
Sensors and Actuators A: Physical. 1994. DOI : 10.1016/0924-4247(94)80071-5.1993
Microfabricated tools for nanoscience
Journal of Micromechanics and Microengineering. 1993. DOI : 10.1088/0960-1317/3/4/001.Microsystems for Flow Injection Analysis
Analytical Methods and Instrumentation. 1993.Miniature Electrochemical Glucose Biosensors
Analytica Chimica Acta. 1993. DOI : 10.1016/0003-2670(93)85003-3.On-Wafer Fabricated Free-Chlorine Sensor with ppb Detection Limit for Drinking-Water Monitoring
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85410-C.Sensor Based on the Hot-Wire Principle
Sensors and Actuators A: Physical. 1993. DOI : 10.1016/0924-4247(93)80117-Y.Modular Setup for a Miniaturized Chemical Analysis System
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85053-D.Lifespan of Subcutaneous Glucose Sensors and their Performances During Dynamic Glycaemia Changes in Rats
Journal of Biomedical Engineering. 1993. DOI : 10.1016/0141-5425(93)90058-7.Comb Actuators for XY-Microstages
Sensors and Actuators A: Physical. 1993. DOI : 10.1016/0924-4247(93)80185-J.Synchronized Cyclic Capillary Electrophoresis - A Novel Approach to Ion Separations in Solution
Journal of High Resolution Chromatography. 1993. DOI : 10.1002/jhrc.1240161005.Microsystems Research and Development at IMT Neuchatel - Introduction
Journal of Micromachine Society. 1993.A Modular Miniaturized Chemical Analysis System
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85394-P.Micro Liquid Handling Using a Flow-Regulated Silicon Micropump
Journal of Micromechanics and Microengineering. 1993. DOI : 10.1088/0960-1317/3/4/011.Integrated Blood-Gas Sensor for pO2, pCO2 and pH
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85396-R.Spatially Controlled Membrane Depositions for Silicon-Based Sensors
CHIMIA. 1993. DOI : 10.2533/chimia.1993.241.Electrodeposition of glucose oxidase for the fabrication of miniature sensors
Sensors and Actuators B: Chemical. 1993. DOI : 10.1016/0925-4005(93)85323-3.1992
Micromachined silicon cantilevers and tips for bidirectional force microscopy
Ultramicroscopy. 1992. DOI : 10.1016/0304-3991(92)90469-Z.Damping of Piezoresistive Silicon Accelerometers
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)80015-U.Miniaturized Chemical Analysis Systems
Dechema-Monographien Band. 1992.A Silicon Integrated Miniature Chemical Analysis System
Sensors and Actuators B: Chemical. 1992. DOI : 10.1016/0925-4005(92)80030-2.A Silicon Flow Cell for Optical Detection in Miniaturized Total Chemical Analysis Systems
Sensors and Actuators B: Chemical. 1992. DOI : 10.1016/0925-4005(92)80032-S.A Study of a High-Pressure Micropump for Integrated Chemical Analysing Systems
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)80008-Q.Silicon cantilevers and tips for scanning force microscopy
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)85002-J.Biaxial Scanning Mirror Activated by Bimorph Structures for Medical Applications
Sensors and Actuators A: Physical. 1992. DOI : 10.1016/0924-4247(92)80076-F.Polymeric Membranes for Silicon Based (Bio)Sensors
Journal of Biomaterials Applications. 1992. DOI : 10.1177/088532829200700103.Surface Micromachining
Journal of Micromechanics and Microengineering. 1992. DOI : 10.1088/0960-1317/2/3/003.Electrocatalytic Oxidation of Methanol on Platinum Microparticles in Polypyrrole
Journal of Applied Electrochemistry. 1992. DOI : 10.1007/BF01024140.Micromachined atomic force microprobe with integrated capacitive read-out
Journal of Micromechanics and Microengineering. 1992. DOI : 10.1088/0960-1317/2/3/026.A Microfabricated Glucose Sensor : Fabrication, Characterization, In Vitro and In Vivo Performances and Related Problems
Advances in Biosensors. 1992.Micromechanical Comb Actuators with Low Driving Voltage
Journal of Micromechanics and Microengineering. 1992. DOI : 10.1088/0960-1317/2/4/006.Silicon-Based Chlorine Sensor with On-Wafer Deposited Chemically Anchored Diffusion Membrane
Analytica Chimica Acta. 1992. DOI : 10.1016/0003-2670(92)85135-S.1991
Capacitive Polysilicon Resonator with MOS Detection Circuit
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87056-9.Mechanical Sensors in Medicine
RBM-Revue européenne de technologie biomédicale. 1991.A Flow Injection Analysis System with Glass-Bonded ISFETs for the Simultaneous Detection of Calcium and Potassium Ions and pH
Sensors and Actuators B: Chemical. 1991. DOI : 10.1016/0925-4005(91)80116-2.ASEP : a CAD Program for Silicon Anisotropic Etching
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)80009-E.Realization of Different Polysilicon Resonators with Integrated Excitation and Detection Elements
Microelectronic Engineering. 1991. DOI : 10.1016/0167-9317(91)90253-A.Silicon Pressure Sensor Based on a Resonating Element
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87076-F.Zeta Potential Measurements of Ta2O5 and SiO2 Thin Films
Journal of Colloid and Interface Science. 1991. DOI : 10.1016/0021-9797(91)90130-Z.Microstructured ISFETs
Chemical Sensor Technology. 1991.Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
Microelectronic Engineering. 1991. DOI : 10.1016/0167-9317(91)90252-9.In-Vivo Behaviour of Hypodermically Implanted Microfabricated Glucose Sensors
Biosensors and Bioelectronics. 1991. DOI : 10.1016/0956-5663(91)85005-H.Design of an Integrated Electrostatic Stepper Motor with Axial Field
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87057-A.Characterization and Modelling of Silicon Piezoresistive Accelerometers Fabricated by a Bipolar-Compatible Process
Sensors and Actuators A: Physical. 1991. DOI : 10.1016/0924-4247(91)87058-B.1990
Investigations on Free-Standing Polysilicon Beams in View of their Application as Transducers
Sensors and Actuators A: Physical. 1990. DOI : 10.1016/0924-4247(90)87088-Z.Use of pH-ISFET Sensors during Extracorporal Circulation
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80254-W.Very High Q-Factor Resonators in Monocrystalline Silicon
Sensors and Actuators A: Physical. 1990. DOI : 10.1016/0924-4247(90)85064-B.A Micro-Volume Open Liquid-Junction Reference Electrode for pH-ISFETs
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80243-S.Réalisation d'un micro-calorimètre intégré dans le silicium
KOND. 1990.Microfabricated Sensors for Medical Applications
Biomedizinische Technik. 1990.Multi-ion Sensing System Based on Glass-encapsulated pH-ISFETs and a Pseudo-REFET
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80237-T.Distribution of Vt of Dual FETs in View of their Application to Differential Measurements with ISFET-MAOSFET Pairs
Sensors and Materials. 1990.Hysteresis in Al2O3 Gate ISFETs
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80018-U.Applications of Micromachined Sensors Integrated Micro-Motion Systems : Micromachining
Control and Applications. 1990.Prototype Structure for Systematic Investigations of Thin-Film Gas Sensors
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80195-6.Microstructured Solid-State Ion-Sensitive Membranes by Thermal Oxidation of Ta
Sensors and Actuators B: Chemical. 1990. DOI : 10.1016/0925-4005(90)80227-Q.1989
A Combined pH-Pressure Catheter for Gastro-Enterological Applications
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80043-5.Carbondioxide Gas Sensing Electrode Based on a pH-ISFET with Back-Side Contacts
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80091-5.Fabrication and Characterization of a Planar Electrochemical Cell and its Application as a Glucose Sensor
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)87025-8.In-Vivo Response of Microfabricated Glucose Sensors to Glycemia Changes in Normal Rats
Biomedica Biochimica Acta. 1989.Planar Amperometric Enzyme-Based Glucose Microelectrode
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)87015-5.Resonant Silicon Structures
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80074-5.A Planar Glucose Enzyme Electrode
Sensors and Actuators. 1989. DOI : 10.1016/0250-6874(89)80042-3.Study of Electrochemical Etch-Stop for High-Precision Thickness Control of Silicon Membranes
IEEE Transactions on Electron Devices. 1989. DOI : 10.1109/16.22472.1988
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Analusis. 1988.A Planar Glucose Enzyme Electrode
Technical Digest of Eurosensors. 1988.A pH-ISFET and an Integrated pH-Pressure Sensor with Back-Side Contacts
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The Potential Dependence of Silicon Anisotropic Etching in KOH at 60ÝC
Electroanalytical Chemistry. 1987. DOI : 10.1016/0022-0728(87)85168-9.1986
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The Influence of Counter-Ion Adsorption on the yo/pH Characteristics of Insulator Surfaces
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The Influence of the pH on the Electrolyte-SiO2-Si System Studied by Ion-sensitive Fet Measurements and Quasistatic C-V Measurements
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Influence of Positive Ions on the Current-Voltage Characteristics of MOS Structures
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An Investigation of the Hydration Properties of Chemically Vapour-deposited Silicon Dioxide Films by Means of Ellipsometry
Thin Solid Films. 1977. DOI : 10.1016/0040-6090(77)90036-0.Teaching & PhD
Past EPFL PhD Students
Grégoire Genolet, Jérôme Courbat, Nicolas Golay, Olivier Frey, Dara Zaman Bayat, Don Isarakorn, Luc Gervais, Michael David Canonica, Fabio Jutzi, Luca Ribetto, David de Koninck, Jonathan Masson, Philip Wägli, Blaise Guélat, Sara Talaei, Rahel Strässle, Rokhaya Gueye, Frédéric Loizeau, Francisco Molina Lopez, Pattanaphong Janphuang, Yexian Wu, Andres Felipe Vasquez Quintero