Repeatability in laser material processing is challenging due to high-speed dynamics. To address this issue, the course provides an overview of laser theory, laser-material interaction, various types of sensors (acoustic & optic), data acquisition, online monitoring, and control via machine learning
Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these processes are developed based on the acquired understanding of the interactions.