Paul Muralt

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paul.muralt@epfl.ch +41 21 693 49 57

Nationalité : Swiss

Date de naissance : 16.07.1954

Unité: SMX-ENS

EPFL STI-DO
MXD 230 (Bâtiment MXD)
Station 12
CH-1015 Lausanne

EPFL SCI STI PM
MXD 230 (Bâtiment MXD)
Station 12
CH-1015 Lausanne

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Données administratives

Compétences

Thin Films
Piezoelectrics
Pyroelectrics
Ferroelectrics
Micro-Electro-Mechanical Systems
Micro Solid Oxide Fuel Cells

Publications

Autres publications

P. Muralt T. Maeder, L. Sagalowicz, S. Hiboux, S. Scalese, D. Naumovic, R.G.Agostino, N. Xanthopoulos, H. J. Mathieu, L. Patthey, E.L. Bullock
J. Appl. Phys. 83, 3835-3841 (1998)
Texture control of PbTiO3 and PZT thin films with TiO2 seeding
P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. G. Brooks, N. Setter, and R. Luthier
Sensors and Actuators A 48, 157-165 (1995)
Fabrication and characterization of PZT thin-film vibrators for micromotors
S. B�hlmann, P. Muralt, S. Von Allmen
Appl.Phys.Lett. 84, 2614-16 (2004)
Site controlled nucleation and growth of small ferroelectric PZT single crystals
M.-A. Dubois, P. Muralt
Appl. Phys. Lett. 74, 3032-34 (1999)
Properties of AlN thin films for piezoelectric transducers and microwave filter applications
M.-A. Dubois, P. Muralt
J.Appl.Phys. 89 (11), 6389-6395 (2001)
Stress and piezoelectric properties of AlN thin films deposited onto metal electrodes by pulsed direct current reactive sputtering
N. Ledermann, P. Muralt, J. Baborowski1, M. Forster and J-P. Pellaux
J. Micromech. Microeng. 14, 1650�1658 (2004)
Piezoelectric Pb(Zrx,Ti1-x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors
S. Hiboux, P. Muralt
J. Eur. Electroceramic Soc. 24, 1593-1596 (2004)
Mixed titania - lead oxide seed layers for PZT growth on Pt(111): a study on nucleation, texture and properties
S. B�hlmann, B. Dwir, J. Baborowski, P. Muralt
Appl.Phys.Lett. 80, 3195-3197 (2002)
Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size
B. Willing, M. Kohli, P. Muralt, and O. Oehler
Infrared Physics and Technology 39, 443-449 (1998)
Thin film pyroelectric array as a detector for an infrared gas spectrometer
P. Muralt
J.Micromech.Microeng. 10 (2), 136-146 (2000)
PZT thin films for micro sensors and actuators: a review
P. Muralt
Rep.Progr.Physics 64, 1339-1388 (2001)
Micromachined infrared detectors based on pyroelectric thin films
P. Muralt and D.W. Pohl
Appl.Phys.Lett. 48, 514-516 (1986)
Scanning tunneling potentiometry
P. Muralt, H. Meier, D.W. Pohl, and H.W. Salemink
Appl.Phys.Lett. 50, 1352-1354 (1987)
Semiconductor heterojunction studied by scanning tunneling microscopy and potentiometry
M.-A. Dubois, P. Muralt
Sensors and Actuators 77, 106-112 (1999)
Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1-x)O3 thin films
S. B�hlmann, E. Colla, P. Muralt
Phys.Rev.B 72, 214120 (2005)
Polarization reversal due to charge injection in ferroelectric thin films