Rémy Juttin

Process Engineer
EPFL CMI
BM 1127 (Bâtiment BM)
Station 17
1015 Lausanne
+41 21 693 68 29
Office:
BM 1127
EPFL
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VPA
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VPA-AVP-CP
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CMI
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CMI-GE
Fields of expertise
- Physical Vapor Deposition (PVD)
- Etching
- Metrology
Publications
Other publications
2017
High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etchingY.Lisunova, M.Spieser, R.D.D.Juttin, F.Holzner, J.Brugger
DOI: 10.1016/j.mee.2017.04.006