Thomas Lehnert
EPFL STI IMT LMIS2
BM 3134 (Bâtiment BM)
Station 17
1015 Lausanne
Web site: Web site: https://lmis2.epfl.ch/
+41 21 693 66 05
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Publications
Infoscience publications
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Infoscience
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Teaching & PhD
Teaching
Microengineering
Past EPFL PhD Students
Cornaglia Matteo , Dahan Elodie Deborah , Dong Li , Krenger Roger Philippe , Liu Yang , Moser Yves , Padovani Rima , Viri Vittorio ,Courses
Materials and technology of microfabrication
The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on materials and multidisciplinarity.