EPFL STI IMT GALATEA
MC A1 288 (Bâtiment MC)
Rue de la Maladière 71b, CP 526
CH-2002 Neuchâtel 2
+41 21 695 43 74
+41 21 695 43 75
Office: MC A1 288
EPFL > STI > IEM > GALATEA
Web site: Web site: https://galatea.epfl.ch
Fields of expertise
Femtosecond laser processing
System design at the microscale
BiographyDr. Yves Bellouard is Associate Professor in Microengineering at Ecole Polytechnique Fédérale de Lausanne (EPFL) in Switzerland, where he heads the Galatea lab and the Richemont Chair in micromanufacturing.
He received a BS in Theoretical Physics and a MS in Applied Physics from Université Pierre et Marie Curie in Paris, France in 1994-1995 and a PhD in Microengineering from Ecole Polytechnique Fédérale de Lausanne (EPFL) in Lausanne, Switzerland in 2000. Before joining EPFL in 2015, he was Associate Professor at Eindhoven University of Technologies (TU/e) in the Netherlands and prior to that, Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for about four years where he started working on femtosecond laser processing of glass materials. From 2010 until 2013, Yves Bellouard initiated and coordinated the Femtoprint project, a European research initiative aiming at investigating a table-top printer for microsystems ('3D printing of microsystems'). In 2013, he received an ERC Starting Grant (Consolidator-2012) and in 2018, an ERC Proof-of-Concept from the European Research Council. In 2013, he received a JSPS Fellowship from the Japan Society for the Promotion of Science.
His current research interests are in advanced manufacturing in general and more specifically on laser-based methods to tailor material properties including laser-based self-organization processes.
Best Teacher Award (Microengineering section)
European Research Council
Innovation Award in Laser Technology (ILT)
Arbeitskreis Lasertechnik AKL e.V. / Europea
JSPS Fellowship Science
Japan Society for the Promotion of Science
ERC Starting / Consolidator Grant (transition phase)
European Research Council
Eindhoven University of Technology
Omega Scientific Award
Fondation du Prix Omega
Femtosecond laser-shockwave induced densification in fused silicaOptical Materials Express. 2022-07-01. DOI : 10.1364/OME.462915.
Ultrafast Laser Direct-Writing of Self-Organized Microstructures in Ge-Sb-S Chalcogenide GlassFrontiers in Physics. 2022-04-14. DOI : 10.3389/fphy.2022.883319.
Glass-in-glass infiltration for 3D micro-optical composite componentsOptics Express. 2022-04-07. DOI : 10.1364/OE.451026.
Abnormal temperature dependent elastic properties of fused silica irradiated by ultrafast lasersPhysical Review Materials. 2022-03-04. DOI : 10.1103/PhysRevMaterials.6.033602.
On the behavior of uniaxial static stress loaded micro-scale fused silica beams at room temperatureJournal of Non-Crystalline Solids: X. 2022-01-19. DOI : 10.1016/j.nocx.2022.100083.
Wavelength-multiplexed single-shot ptychographyUltramicroscopy. 2022. DOI : 10.1016/j.ultramic.2021.113418.
Ultrafast laser interaction with transparent multi-layer SiO2/Si3N4 filmsJournal of Applied Physics. 2021-12-29. DOI : 10.1063/5.0065726.
Few pulses femtosecond laser exposure for high efficiency 3D glass micromachiningOptics Express. 2021-10-12. DOI : 10.1364/OE.435163.
Highly motile nanoscale magnetic artificial ciliaProceedings Of The National Academy Of Sciences Of The United States Of America. 2021-08-25. DOI : 10.1073/pnas.2104930118.
3D metal freeform micromanufacturingJournal of Manufacturing Processes. 2021-06-23. DOI : 10.1016/j.jmapro.2021.06.002.
On the use of a digital twin to enhance femtosecond laser inscription of arbitrary phase patternsJournal of Physics: Photonics. 2021-05-25. DOI : 10.1088/2515-7647/abf743.
Contactless Optical Packaging Concept for Laser to Fiber CouplingIEEE Transactions on Components, Packaging and Manufacturing Technology. 2021-05-18. DOI : 10.1109/TCPMT.2021.3080513.
Direct-write laser-induced self-organization and metallization beyond the focal volume in tellurite glassPhysical Review Materials. 2021-05-14. DOI : 10.1103/PhysRevMaterials.5.055201.
Vibration monitoring based on optical sensing of mechanical nonlinearities in glass suspended waveguidesOptics Express. 2021-03-23. DOI : 10.1364/OE.414191.
ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachiningInternational Journal of Applied Glass Science. 2020-09-27. DOI : 10.1111/ijag.15857.
Laser-induced densification of fused silica using spatially overlapping sub-30fs pulsesJournal Of Applied Physics. 2020-08-28. DOI : 10.1063/5.0011317.
Lens aberration compensation in interference microscopyOptics and Lasers in Engineering. 2020-05-01. DOI : 10.1016/j.optlaseng.2020.106015.
Elastic properties of self-organized nanogratings produced by femtosecond laser exposure of fused silicaPhysical Review Materials. 2020-02-27. DOI : 10.1103/PhysRevMaterials.4.023607.
Ablation in Externally Applied Electric and Magnetic FieldsNanomaterials. 2020-01-21. DOI : 10.3390/nano10020182.
A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond LaserMicromachines. 2019-09-01. DOI : 10.3390/mi10090611.
Local tuning of fused silica thermal expansion coefficient using femtosecond laserPhysical Review Materials. 2019-05-10. DOI : 10.1103/PhysRevMaterials.3.053802.
Self-organized nanostructures forming under high-repetition rate femtosecond laser bulk-heating of fused silicaOptics Express. 2018. DOI : 10.1364/OE.26.014024.
Effect of the Combination of Femtosecond Laser Pulses Exposure on the Etching Rate of Fused Silica in Hydrofluoric AcidJOURNAL OF LASER MICRO NANOENGINEERING. 2018. DOI : 10.2961/jlmn.2018.01.0006.
A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond LaserMICROMACHINES. 2018. DOI : 10.3390/mi9040164.
Unraveling Brittle-Fracture Statistics from Intermittent Patterns Formed During Femtosecond Laser ExposurePhysical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.8.054013.
Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applicationsOptics Express. 2017. DOI : 10.1364/Oe.25.026280.
Ultrafast Laser to Tailor Material Properties: An Enabling Tool in Advanced Three-dimensional MicromanufacturingChimia. 2017. DOI : 10.2533/chimia.2017.295.
Laser-Induced Transition between Nonlinear and Linear Resonant Behaviors of a Micromechanical OscillatorPhysical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.7.064002.
Plasmon-less surface enhanced Raman spectra induced by self-organized networks of silica nanoparticles produced by femtosecond lasersOptics Express. 2017. DOI : 10.1364/Oe.25.009587.
Femtosecond laser direct-write waveplates based on stress-induced birefringenceOptics Express. 2016. DOI : 10.1364/Oe.24.027239.
Stress-state manipulation in fused silica via femtosecond laser irradiationOptica. 2016. DOI : 10.1364/Optica.3.001285.
Deep-UV fluorescence lifetime imaging microscopyPhotonics Research. 2015. DOI : 10.1364/Prj.3.000283.
Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laserJournal Of Micromechanics And Microengineering. 2015. DOI : 10.1088/0960-1317/25/10/105009.
Non-contact sub-nanometer optical repositioning using femtosecond lasersOptics Express. 2015. DOI : 10.1364/Oe.23.029258.
Structural, electrical and magnetic characterization of in-situ crystallized ZnO:Co thin films synthesized by reactive magnetron sputteringMaterials Chemistry And Physics. 2015. DOI : 10.1016/j.matchemphys.2015.04.037.
Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiationOptics Letters. 2015. DOI : 10.1364/Ol.40.003623.
A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond LaserMicromachines. 2015. DOI : 10.3390/mi6091365.
On the anisotropy of stress-distribution induced in glasses and crystals by non-ablative femtosecond laser exposureOptics Express. 2015. DOI : 10.1364/OE.23.000086.
Tailored surface birefringence by femtosecond laser assisted wet etchingOptics Express. 2015. DOI : 10.1364/OE.23.001428.
High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiationOptica. 2015. DOI : 10.1364/OPTICA.2.000329.
Laser-assisted morphing of complex three dimensional objectsOptics Express. 2015. DOI : 10.1364/OE.23.017355.
Transition and self-healing process between chaotic and self-organized patterns observed during femtosecond laser writingOptics Express. 2015. DOI : 10.1364/OE.23.016993.
Kinetics of laser-assisted carbon nanotube growthPhysical Chemistry Chemical Physics. 2014. DOI : 10.1039/c4cp00061g.
Miniaturized Reaction Chamber for Optimized Laser-Assisted Carbon Nanotube GrowthJournal of Laser Micro/Nanoengineering. 2014. DOI : 10.2961/jlmn.2014.02.0007.
Design and Fabrication of a Prototype Actuator for Fourier Transform InterferometryProgress in Optomechatronic Technologies. 2014. DOI : 10.1007/978-3-319-05711-8_10.
Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical EtchingMicromachines. 2014. DOI : 10.3390/mi5030697.
Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glassOptics Express. 2013. DOI : 10.1364/OE.21.003946.
In-situ localized carbon nanotube growth inside partially sealed enclosuresAIP Advances. 2013. DOI : 10.1063/1.4821952.
Stress distribution around femtosecond laser affected zones: effect of nanogratings orientationOptics Express. 2013. DOI : 10.1364/OE.21.024942.
Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glassOptical Materials Express. 2013. DOI : 10.1364/OME.3.001428.
Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubesJournal of Applied Physics. 2012. DOI : 10.1063/1.4745874.
The Femtoprint ProjectJournal of Laser Micro/Nanoengineering. 2012. DOI : 10.2961/jlmn.2012.01.0001.
Direct volume variation measurements in fused silica specimens exposed to femtosecond laserOptical Materials Express. 2012. DOI : 10.1364/OME.2.000789.
Lab on a chip technologies for algae detection: a reviewJournal of Biophotonics. 2012. DOI : 10.1002/jbio.201200051.
Optical classification of algae species with a glass lab-on-a-chipLab on a Chip. 2012. DOI : 10.1039/c2lc21091f.
Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etchingApplied Physics Letters. 2012. DOI : 10.1063/1.4750236.
On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]Optical Materials Express. 2011. DOI : 10.1364/OME.1.000816.
Optofluidic lab-on-a-chip for rapid algae population screeningBiomedical Optics Express. 2011. DOI : 10.1364/BOE.2.000658.
Femtosecond-laser generation of self-organized bubble patterns in fused silicaOptics Express. 2011. DOI : 10.1364/OE.19.006807.
Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materialsOptics Express. 2010. DOI : 10.1364/OE.18.024673.
Dynamical Observation of Femtosecond-Laser-Induced Bubbles in Water Using a Single Laser Source for Probing and SensingApplied Physics Express. 2010. DOI : 10.1143/APEX.3.127101.
Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energyOptics Express. 2010. DOI : 10.1364/OE.18.021490.
Femtosecond laser micromachining of fused silica moldsOptics Express. 2010. DOI : 10.1364/OE.18.021826.
On the use of shape memory alloy thin films to tune the dynamic response of micro-cantileversJournal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015039.
In situ monitoring of single-wall carbon nanotube laser assisted growthNanotechnology. 2010. DOI : 10.1088/0957-4484/21/7/075602.
Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin filmsApplied Physics A. 2008. DOI : 10.1007/s00339-007-4331-z.
Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to lowenergy femtosecond laser pulsesOptics Express. 2008. DOI : 10.1364/OE.16.019520.
Time dependent growth of vertically aligned carbon nanotube forest using a laser activated catalytical CVD methodphysica status solidi (b). 2008. DOI : 10.1002/pssb.200879576.
Thermal conductivity contrast measurement of fused silica exposed to low-energy femtosecond laser pulsesApplied Physics Letters. 2006. DOI : 10.1063/1.2363957.
Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulsesOptics Express. 2006. DOI : 10.1364/OE.14.008360.
Laser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory propertiesActa Materialia. 2005. DOI : 10.1016/j.actamat.2005.07.022.
Adaptive Scanning Optical Microscope (ASOM): A multidisciplinary optical microscope design for large field of view and high resolution imagingOptics Express. 2005. DOI : 10.1364/OPEX.13.006504.
Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silicaOptics Express. 2005. DOI : 10.1364/OPEX.13.006635.
Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etchingOptics Express. 2004. DOI : 10.1364/OPEX.12.002120.
Contribution aux concepts de « micro et nanofactory »Nano et Micro Technologies. 2001.
Contribution to the Micro- and Nanofactory ConceptsNano and Micro Technologies. 2001.
Teaching & PhD