Yves Bellouard
Biography
Dr. Yves Bellouard is Associate Professor in Microengineering at Ecole Polytechnique Fédérale de Lausanne (EPFL) in Switzerland, where he heads the Galatea lab and the Richemont Chair in micromanufacturing.
He received a BS in Theoretical Physics and a MS in Applied Physics from Université Pierre et Marie Curie in Paris, France in 1994-1995 and a PhD in Microengineering from Ecole Polytechnique Fédérale de Lausanne (EPFL) in Lausanne, Switzerland in 2000. For his PhD work, he received the Omega Scientific prize (2001) for outstanding contribution in the field of microengineering for his work on Shape Memory Alloys. Before joining EPFL in 2015, he was Associate Professor at Eindhoven University of Technologies (TU/e) in the Netherlands and prior to that, Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for about four years where he started working on femtosecond laser processing of glass materials.
From 2010 until 2013, Yves Bellouard initiated and coordinated the Femtoprint project, a European research initiative aiming at investigating a table-top printer for microsystems ('3D printing of microsystems').
Since January 2012, he is the editor-in-chief for the International Journal of Optomechatronics, edited by Taylor & Francis Ltd. In 2013, he received a prestigious ERC Starting Grant (Consolidator-2012) from the European Research Council and a JSPS Fellowship from the Japan Society for the Promotion of Science.
His current research interests are on new paradigms for system integration at the microscale and in particular laser-based methods to tailor material properties for achieving higher level of integration in microsystems, like for instance integrating optics, mechanics and fluidics in a single monolith. These approaches open new opportunities for direct-write methods of microsystems (3D printing).
Personal website
Publications
Journals
2018
E. Kissi; Y. Bellouard : Self-organized nanostructures forming under high-repetition rate femtosecond laser bulk-heating of fused silica; OPTICS EXPRESS. 2018. DOI : 10.1364/OE.26.014024.
A. Mouskeftaras; Y. Bellouard : Effect of the Combination of Femtosecond Laser Pulses Exposure on the Etching Rate of Fused Silica in Hydrofluoric Acid; JOURNAL OF LASER MICRO NANOENGINEERING. 2018. DOI : 10.2961/jlmn.2018.01.0006.
C. Athanasiou; Y. Bellouard : A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser; MICROMACHINES. 2018. DOI : 10.3390/mi9040164.
2017
C. E. Athanasiou; M.-O. Hongler; Y. Bellouard : Unraveling Brittle-Fracture Statistics from Intermittent Patterns Formed During Femtosecond Laser Exposure; Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.8.054013.
T. Tickunas; M. Perrenoud; S. Butkus; R. Gadonas; S. Rekstyte et al. : Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications; Optics Express. 2017. DOI : 10.1364/Oe.25.026280.
Y. Bellouard : Ultrafast Laser to Tailor Material Properties: An Enabling Tool in Advanced Three-dimensional Micromanufacturing; Chimia. 2017. DOI : 10.2533/chimia.2017.295.
T. Yang; Y. Bellouard : Laser-Induced Transition between Nonlinear and Linear Resonant Behaviors of a Micromechanical Oscillator; Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.7.064002.
Y. Bellouard; E. Block; J. Squier; J. Gobet : Plasmon-less surface enhanced Raman spectra induced by self-organized networks of silica nanoparticles produced by femtosecond lasers; Optics Express. 2017. DOI : 10.1364/Oe.25.009587.
2016
B. Mcmillen; C. Athanasiou; Y. Bellouard : Femtosecond laser direct-write waveplates based on stress-induced birefringence; Optics Express. 2016. DOI : 10.1364/Oe.24.027239.
Y. Bellouard; A. Champion; B. Mcmillen; S. Mukherjee; R. R. Thomson et al. : Stress-state manipulation in fused silica via femtosecond laser irradiation; Optica. 2016. DOI : 10.1364/Optica.3.001285.
2015
C. J. De Jong; A. Lajevardipour; M. Gecevicius; M. Beresna; G. Gervinskas et al. : Deep-UV fluorescence lifetime imaging microscopy; Photonics Research. 2015. DOI : 10.1364/Prj.3.000283.
T. Yang; Y. Bellouard : Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser; Journal Of Micromechanics And Microengineering. 2015. DOI : 10.1088/0960-1317/25/10/105009.
Y. Bellouard : Non-contact sub-nanometer optical repositioning using femtosecond lasers; Optics Express. 2015. DOI : 10.1364/Oe.23.029258.
S. Lardjane; M. A. P. Yazdi; N. Martin; C. Bellouard; N.-E. Fenineche et al. : Structural, electrical and magnetic characterization of in-situ crystallized ZnO:Co thin films synthesized by reactive magnetron sputtering; Materials Chemistry And Physics. 2015. DOI : 10.1016/j.matchemphys.2015.04.037.
Y. Liao; W. Pan; Y. Cui; L. Qiao; Y. Bellouard et al. : Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiation; Optics Letters. 2015. DOI : 10.1364/Ol.40.003623.
C. E. Athanasiou; Y. Bellouard : A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser; Micromachines. 2015. DOI : 10.3390/mi6091365.
B. Mcmillen; Y. Bellouard : On the anisotropy of stress-distribution induced in glasses and crystals by non-ablative femtosecond laser exposure; Optics Express. 2015. DOI : 10.1364/OE.23.000086.
R. Drevinskas; M. Gecevičius; M. Beresna; Y. Bellouard; P. G. Kazansky : Tailored surface birefringence by femtosecond laser assisted wet etching; Optics Express. 2015. DOI : 10.1364/OE.23.001428.
Y. Liao; J. Ni; L. Qiao; M. Huang; Y. Bellouard et al. : High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation; Optica. 2015. DOI : 10.1364/OPTICA.2.000329.
J. Drs; T. Kishi; Y. Bellouard : Laser-assisted morphing of complex three dimensional objects; Optics Express. 2015. DOI : 10.1364/OE.23.017355.
N. Groothoff; M.-O. Hongler; P. Kazansky; Y. Bellouard : Transition and self-healing process between chaotic and self-organized patterns observed during femtosecond laser writing; Optics Express. 2015. DOI : 10.1364/OE.23.016993.
2014
Y. Van De Burgt; Y. Bellouard; R. Mandamparambil : Kinetics of laser-assisted carbon nanotube growth; Physical Chemistry Chemical Physics. 2014. DOI : 10.1039/c4cp00061g.
Y. V. D. Burgt; W. van Loon; R. Mandamparambil; Y. Bellouard : Miniaturized Reaction Chamber for Optimized Laser-Assisted Carbon Nanotube Growth; Journal of Laser Micro/Nanoengineering. 2014. DOI : 10.2961/jlmn.2014.02.0007.
G. G. Melpignano; A. Schaap; Y. Bellouard : Design and Fabrication of a Prototype Actuator for Fourier Transform Interferometry; Progress in Optomechatronic Technologies. 2014. DOI : 10.1007/978-3-319-05711-8_10.
V. Tielen; Y. Bellouard : Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching; Micromachines. 2014. DOI : 10.3390/mi5030697.
2013
C. Corbari; A. Champion; M. Gecevičius; M. Beresna; Y. Bellouard et al. : Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass; Optics Express. 2013. DOI : 10.1364/OE.21.003946.
Y. Van De Burgt; A. Champion; Y. Bellouard : In-situ localized carbon nanotube growth inside partially sealed enclosures; AIP Advances. 2013. DOI : 10.1063/1.4821952.
A. Champion; M. Beresna; P. Kazansky; Y. Bellouard : Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation; Optics Express. 2013. DOI : 10.1364/OE.21.024942.
A. Schaap; Y. Bellouard : Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass; Optical Materials Express. 2013. DOI : 10.1364/OME.3.001428.
2012
Y. Van De Burgt; Y. Bellouard; R. Mandamparambil; M. Haluska; A. Dietzel : Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes; Journal of Applied Physics. 2012. DOI : 10.1063/1.4745874.
Y. Bellouard; A. Champion; B. Lenssen; M. Matteucci; A. Schaap et al. : The Femtoprint Project; Journal of Laser Micro/Nanoengineering. 2012. DOI : 10.2961/jlmn.2012.01.0001.
A. Champion; Y. Bellouard : Direct volume variation measurements in fused silica specimens exposed to femtosecond laser; Optical Materials Express. 2012. DOI : 10.1364/OME.2.000789.
A. Schaap; T. Rohrlack; Y. Bellouard : Lab on a chip technologies for algae detection: a review; Journal of Biophotonics. 2012. DOI : 10.1002/jbio.201200051.
A. Schaap; T. Rohrlack; Y. Bellouard : Optical classification of algae species with a glass lab-on-a-chip; Lab on a Chip. 2012. DOI : 10.1039/c2lc21091f.
B. Lenssen; Y. Bellouard : Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching; Applied Physics Letters. 2012. DOI : 10.1063/1.4750236.
2011
Y. Bellouard : On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]; Optical Materials Express. 2011. DOI : 10.1364/OME.1.000816.
A. Schaap; Y. Bellouard; T. Rohrlack : Optofluidic lab-on-a-chip for rapid algae population screening; Biomedical Optics Express. 2011. DOI : 10.1364/BOE.2.000658.
Y. Bellouard; M.-O. Hongler : Femtosecond-laser generation of self-organized bubble patterns in fused silica; Optics express. 2011. DOI : 10.1364/OE.19.006807.
2010
D. N. Vitek; E. Block; Y. Bellouard; D. E. Adams; S. Backus et al. : Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materials; Optics Express. 2010. DOI : 10.1364/OE.18.024673.
D. Tiwari; Y. Bellouard; A. Dietzel; M. Ren; E. Rubingh et al. : Dynamical Observation of Femtosecond-Laser-Induced Bubbles in Water Using a Single Laser Source for Probing and Sensing; Applied Physics Express. 2010. DOI : 10.1143/APEX.3.127101.
S. Rajesh; Y. Bellouard : Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy; Optics Express. 2010. DOI : 10.1364/OE.18.021490.
F. Madani-Grasset; Y. Bellouard : Femtosecond laser micromachining of fused silica molds; Optics Express. 2010. DOI : 10.1364/OE.18.021826.
T. Kniknie; Y. Bellouard; E. Homburg; H. Nijmeijer; X. Wang et al. : On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers; Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015039.
M. Haluška; Y. Bellouard; Y. Van De Burgt; A. Dietzel : In situ monitoring of single-wall carbon nanotube laser assisted growth; Nanotechnology. 2010. DOI : 10.1088/0957-4484/21/7/075602.
2008
X. Wang; Y. Bellouard; Z. Xue; J. J. Vlassak : Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films; Applied Physics A. 2008. DOI : 10.1007/s00339-007-4331-z.
Y. Bellouard; E. Barthel; A. A. Said; M. Dugan; P. Bado : Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to lowenergy femtosecond laser pulses; Optics Express. 2008. DOI : 10.1364/OE.16.019520.
M. Haluška; Y. Bellouard; A. Dietzel : Time dependent growth of vertically aligned carbon nanotube forest using a laser activated catalytical CVD method; physica status solidi (b). 2008. DOI : 10.1002/pssb.200879576.
2006
Y. Bellouard; M. Dugan; A. A. Said; P. Bado : Thermal conductivity contrast measurement of fused silica exposed to low-energy femtosecond laser pulses; Applied Physics Letters. 2006. DOI : 10.1063/1.2363957.
Y. Bellouard; T. Colomb; C. Depeursinge; M. Dugan; A. A. Said et al. : Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses; Optics Express. 2006. DOI : 10.1364/OE.14.008360.
2005
X. Wang; Y. Bellouard; J. Vlassak : Laser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory properties; Acta Materialia. 2005. DOI : 10.1016/j.actamat.2005.07.022.
B. Potsaid; Y. Bellouard; J. T. Wen : Adaptive Scanning Optical Microscope (ASOM): A multidisciplinary optical microscope design for large field of view and high resolution imaging; Optics Express. 2005. DOI : 10.1364/OPEX.13.006504.
Y. Bellouard; A. A. Said; P. Bado : Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica; Optics Express. 2005. DOI : 10.1364/OPEX.13.006635.
2004
Y. Bellouard; A. Said; M. Dugan; P. Bado : Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching; Optics Express. 2004. DOI : 10.1364/OPEX.12.002120.
Y. Bellouard; R. Clavel : Shape memory alloy flexures; Materials Science and Engineering: A. 2004. DOI : 10.1016/j.msea.2003.12.062.
2001
R. Clavel; P. Helmer; S. Bottinelli; S. Henein; C. Schmitt et al. : Contribution aux concepts de « micro et nanofactory »; Nano et Micro Technologies. 2001.
R. Clavel; P. Helmer; S. Bottinelli; S. Henein; C. Schmitt et al. : Contribution to the Micro- and Nanofactory Concepts; Nano and Micro Technologies. 2001.
1999
Y. Bellouard; T. Lehnert; J.-Bidaux; T. Sidler; R. Clavel et al. : Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices; Materials Science and Engineering: A. 1999. DOI : 10.1016/S0921-5093(99)00418-9.
Enseignement & Phd
Enseignement
Programmes doctoraux
- Doctoral Program in Microsystems and Microelectronics
- Doctoral Program in Photonics
- Doctoral program in advanced manufacturing
Doctorants
Bernard Olivier
Casamenti Enrico
Nazir Saood Ibni
Radhakrishnan Arunkrishnan
Ricca Ruben
Torun Gözden
Vlugter Pieter
Yang Tao ...
Casamenti Enrico
Nazir Saood Ibni
Radhakrishnan Arunkrishnan
Ricca Ruben
Torun Gözden
Vlugter Pieter
A dirigé les thèses de
Athanasiou Christos Edouardos ...Yang Tao ...
Cours
Physics of manufacturing
Ce cours propose une introduction aux méthodes de production et aux techniques de fabrication, pertinentes à la microtechnique. L'accent est donné sur la compréhension des phénomènes, sur le triangle matériaux/technique de fabrication/conception, mais éga... 
Products design & systems engineering
Ce cours couvre tous les aspects relatifs à la conception de produits, depuis l'apprentissage de méthodes de conception, de planification et d'organisation, jusqu'à la réalisation concrète d'un prototype.