Nanofabrication with focused electron and ion beams

• Introduction to Scanning Electron / Ion Microscopes: SEM, Ga-FIB, He-FIB, AuSi-FIB
  
• Electron / Ion interaction with solids: concepts and simulations
  
• Analysis with focused electron and ion beams: EDX, EBIC, EBSD, tomography
  
• Nanofabrication with FIB and FEB: milling, deposition, etching, lithography
  
• Novel Add-Ons for Nanomanipulation

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