Ivo Utke

Données administratives

Enseignement & Phd


Minzoni Camilla,

A dirigé les thèses EPFL de

Berger Luisa , Bernau Laurent , Friedli Vinzenz ,


Nanofabrication with focused electron and ion beams

  • Introduction to Scanning Electron / Ion Microscopes: SEM, Ga-FIB, He-FIB, AuSi-FIB
  • Electron / Ion interaction with solids: concepts and simulations
  • Analysis with focused electron and ion beams: EDX, EBIC, EBSD, tomography
  • Nanofabrication with FIB and FEB: milling, deposition, etching, lithography
  • Novel Add-Ons for Nanomanipulation