Ivo Utke
Enseignement & Phd
Doctorants
Jureddy Chinmai Sai, Minzoni Camilla,A dirigé les thèses EPFL de
Berger Luisa , Bernau Laurent , Friedli Vinzenz ,Cours
Nanofabrication with focused electron and ion beams
- Introduction to Scanning Electron / Ion Microscopes: SEM, Ga-FIB, He-FIB, AuSi-FIB
- Electron / Ion interaction with solids: concepts and simulations
- Analysis with focused electron and ion beams: EDX, EBIC, EBSD, tomography
- Nanofabrication with FIB and FEB: milling, deposition, etching, lithography
- Novel Add-Ons for Nanomanipulation