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Yves Bellouard

EPFL STI IMT GALATEA
MC A1 288 (Bâtiment MC)
Rue de la Maladière 71b, CP 526
2002 Neuchâtel 2

Expertise

Micromanufacturing
Optics, Laser processing
Smart materials
System engineering at the micro-scales
Dr. Yves Bellouard is Associate Professor in Microengineering at Ecole Polytechnique Fédérale de Lausanne (EPFL) in Switzerland, where he heads the Galatea lab and the Richemont Chair in micromanufacturing.

He received a BS in Theoretical Physics and a MS in Applied Physics from Université Pierre et Marie Curie in Paris, France in 1994-1995 and a PhD in Microengineering from Ecole Polytechnique Fédérale de Lausanne (EPFL) in Lausanne, Switzerland in 2000. Before joining EPFL in 2015, he was Associate Professor at Eindhoven University of Technologies (TU/e) in the Netherlands and prior to that, Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for about four years where he started working on femtosecond laser processing of glass materials.

 From 2010 until 2013, Yves Bellouard initiated and coordinated the Femtoprint project, a European research initiative aiming at investigating a table-top printer for microsystems ('3D printing of microsystems'). In 2013, he received an ERC Starting Grant (Consolidator-2012) and in 2018, an ERC Proof-of-Concept from the European Research Council. In 2013, he received a JSPS Fellowship from the Japan Society for the Promotion of Science.

His current research interests are in advanced manufacturing in general and more specifically on laser-based methods to tailor material properties including laser-based self-organization processes.
 

Journals

2025

High-speed femtosecond UV laser writing of low-loss waveguides in fused silica

L. AckermannB. HermannD. Talán EcharriE. GribaudoY. Bellouard

Optics Letters. 2025. DOI : 10.1364/OL.557978.

Sub-micron elastic properties measurement of single laser-affected volume in fused silica

Y. GaillardA. RadhakrishnanY. BellouardF. Amiot

Journal of Non-Crystalline Solids. 2025. DOI : 10.1016/j.jnoncrysol.2025.123399.

Sub-wavelength femtosecond laser based nanostructuring of complex patterns in the bulk of fused silica

E. GribaudoM. DeckartP. VlugterY. Bellouard

Optics Express. 2025. DOI : 10.1364/OE.555038.

Glass multifocal microlens array through laser-induced topological transformation

S. BenketafM. LentzY. Bellouard

Optics Express. 2025. DOI : 10.1364/OE.550321.

2024

Wide-Field Polarimetric Second-Harmonic Imaging for Rapid and Nondestructive Investigation of Laser-Induced Crystallization Phenomena

S. LeeT. KishiY. Bellouard

ACS Nano. 2024. DOI : 10.1021/acsnano.4c05554.

Influence of ionization and cumulative effects on laser-induced crystallization in multilayer dielectrics

R. RiccaV. BoureauY. Bellouard

Physical Review Materials. 2024. DOI : 10.1103/PhysRevMaterials.8.063402.

Femtosecond-laser direct-write photoconductive patterns on tellurite glass

G. TorunA. RomashkinaT. KishiY. Bellouard

Physical Review Applied. 2024. DOI : 10.1103/PhysRevApplied.21.014008.

High-magnification observation of flow and solidification processes of laser-melted metals in microchannels

S. HATAH. HIDAIS. ITOHY. BellouardS. MATSUSAKA

The Proceedings of The Manufacturing & Machine Tool Conference. 2024. DOI : 10.1299/jsmemmt.2024.15.b17.

2023

Formation Mechanism of Elemental Te Produced in Tellurite Glass Systems by Femtosecond Laser Irradiation

G. TorunT. KishiD. PuglieseD. MilaneseY. Bellouard

Advanced Materials. 2023. DOI : 10.1002/adma.202210446.

High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

B. HermannO. BernardL. MuscarellaY. Bellouard

Optics Express. 2023. DOI : 10.1364/OE.497584.

All-glass miniature GHz repetition rate femtosecond laser cavity

A. M. DelgoffeS. NazirS. HakobyanC. HönningerY. Bellouard

Optica. 2023. DOI : 10.1364/OPTICA.496503.

Third-harmonic generation monitoring of femtosecond-laser-induced in-volume functional modifications

O. BernardA. KraxnerA. BoukhaymaJ. A. SquierC. Enz  et al.

Optica. 2023. DOI : 10.1364/OPTICA.486746.

2022

Femtosecond laser-shockwave induced densification in fused silica

A. RadhakrishnanJ. GateauP. VlugterY. Bellouard

Optical Materials Express. 2022. DOI : 10.1364/OME.462915.

Ultrafast Laser Direct-Writing of Self-Organized Microstructures in Ge-Sb-S Chalcogenide Glass

G. TorunA. YadavK. A. RichardsonY. Bellouard

Frontiers in Physics. 2022. DOI : 10.3389/fphy.2022.883319.

Glass-in-glass infiltration for 3D micro-optical composite components

E. CasamentiG. TorunL. BorasiM. LautenbacherM. Bertrand  et al.

Optics Express. 2022. DOI : 10.1364/OE.451026.

Abnormal temperature dependent elastic properties of fused silica irradiated by ultrafast lasers

P. VlugterY. Bellouard

Physical Review Materials. 2022. DOI : 10.1103/PhysRevMaterials.6.033602.

On the behavior of uniaxial static stress loaded micro-scale fused silica beams at room temperature

S. I. NazirC. E. AthanasiouY. Bellouard

Journal of Non-Crystalline Solids: X. 2022. DOI : 10.1016/j.nocx.2022.100083.

Wavelength-multiplexed single-shot ptychography

J. BarolakD. GoldbergerJ. SquierY. BellouardC. Durfee  et al.

Ultramicroscopy. 2022. DOI : 10.1016/j.ultramic.2021.113418.

Ultrafast laser interaction with transparent multi-layer SiO2/Si3N4 films

R. RiccaV. BoureauY. Bellouard

Journal of Applied Physics. 2022. DOI : 10.1063/5.0065726.

2021

Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining

E. CasamentiS. PollonghiniY. Bellouard

Optics Express. 2021. DOI : 10.1364/OE.435163.

Highly motile nanoscale magnetic artificial cilia

T. u. IslamY. BellouardJ. M. J. den Toonder

Proceedings Of The National Academy Of Sciences Of The United States Of America (PNAS). 2021. DOI : 10.1073/pnas.2104930118.

3D metal freeform micromanufacturing

L. BorasiE. CasamentiR. CharvetC. DénéréazS. Pollonghini  et al.

Journal of Manufacturing Processes. 2021. DOI : 10.1016/j.jmapro.2021.06.002.

On the use of a digital twin to enhance femtosecond laser inscription of arbitrary phase patterns

O. BernardY. Bellouard

Journal of Physics: Photonics. 2021. DOI : 10.1088/2515-7647/abf743.

Contactless Optical Packaging Concept for Laser to Fiber Coupling

S. I. NazirY. Bellouard

IEEE Transactions on Components, Packaging and Manufacturing Technology. 2021. DOI : 10.1109/TCPMT.2021.3080513.

Direct-write laser-induced self-organization and metallization beyond the focal volume in tellurite glass

G. TorunT. KishiY. Bellouard

Physical Review Materials. 2021. DOI : 10.1103/PhysRevMaterials.5.055201.

Vibration monitoring based on optical sensing of mechanical nonlinearities in glass suspended waveguides

E. CasamentiT. YangP. VlugterY. Bellouard

Optics Express. 2021. DOI : 10.1364/OE.414191.

2020

Laser-induced densification of fused silica using spatially overlapping sub-30fs pulses

B. McMillenO. UtezaR. CladyN. SannerM. Sentis  et al.

Journal Of Applied Physics. 2020. DOI : 10.1063/5.0011317.

Lens aberration compensation in interference microscopy

R. SuM. ThomasM. LiuJ. DrsY. Bellouard  et al.

Optics and Lasers in Engineering. 2020. DOI : 10.1016/j.optlaseng.2020.106015.

Elastic properties of self-organized nanogratings produced by femtosecond laser exposure of fused silica

P. VlugterY. Bellouard

Physical Review Materials. 2020. DOI : 10.1103/PhysRevMaterials.4.023607.

Ablation in Externally Applied Electric and Magnetic Fields

J. MaksimovicS.-H. NgT. KatkusN. H. A. An LeJ. W. M. Chon  et al.

Nanomaterials. 2020. DOI : 10.3390/nano10020182.

2019

A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser

S. I. NazirY. Bellouard

Micromachines. 2019. DOI : 10.3390/mi10090611.

Local tuning of fused silica thermal expansion coefficient using femtosecond laser

P. VlugterE. BlockY. Bellouard

Physical Review Materials. 2019. DOI : 10.1103/PhysRevMaterials.3.053802.

2017

Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications

T. TickunasM. PerrenoudS. ButkusR. GadonasS. Rekstyte  et al.

Optics Express. 2017. DOI : 10.1364/Oe.25.026280.

Unraveling Brittle-Fracture Statistics from Intermittent Patterns Formed During Femtosecond Laser Exposure

C. E. AthanasiouM.-O. HonglerY. Bellouard

Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.8.054013.

Plasmon-less surface enhanced Raman spectra induced by self-organized networks of silica nanoparticles produced by femtosecond lasers

Y. BellouardE. BlockJ. SquierJ. Gobet

Optics Express. 2017. DOI : 10.1364/Oe.25.009587.

Ultrafast Laser to Tailor Material Properties: An Enabling Tool in Advanced Three-dimensional Micromanufacturing

Y. Bellouard

Chimia. 2017. DOI : 10.2533/chimia.2017.295.

Laser-Induced Transition between Nonlinear and Linear Resonant Behaviors of a Micromechanical Oscillator

T. YangY. Bellouard

Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.7.064002.

2016

Femtosecond laser direct-write waveplates based on stress-induced birefringence

B. McmillenC. AthanasiouY. Bellouard

Optics Express. 2016. DOI : 10.1364/Oe.24.027239.

Stress-state manipulation in fused silica via femtosecond laser irradiation

Y. BellouardA. ChampionB. McmillenS. MukherjeeR. R. Thomson  et al.

Optica. 2016. DOI : 10.1364/Optica.3.001285.

2015

On the anisotropy of stress-distribution induced in glasses and crystals by non-ablative femtosecond laser exposure

B. McmillenY. Bellouard

Optics Express. 2015. DOI : 10.1364/OE.23.000086.

A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser

C. E. AthanasiouY. Bellouard

Micromachines. 2015. DOI : 10.3390/mi6091365.

Transition and self-healing process between chaotic and self-organized patterns observed during femtosecond laser writing

N. GroothoffM.-O. HonglerP. KazanskyY. Bellouard

Optics Express. 2015. DOI : 10.1364/OE.23.016993.

Non-contact sub-nanometer optical repositioning using femtosecond lasers

Y. Bellouard

Optics Express. 2015. DOI : 10.1364/Oe.23.029258.

Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

T. YangY. Bellouard

Journal Of Micromechanics And Microengineering. 2015. DOI : 10.1088/0960-1317/25/10/105009.

Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiation

Y. LiaoW. PanY. CuiL. QiaoY. Bellouard  et al.

Optics Letters. 2015. DOI : 10.1364/Ol.40.003623.

High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation

Y. LiaoJ. NiL. QiaoM. HuangY. Bellouard  et al.

Optica. 2015. DOI : 10.1364/OPTICA.2.000329.

Tailored surface birefringence by femtosecond laser assisted wet etching

R. DrevinskasM. GecevičiusM. BeresnaY. BellouardP. G. Kazansky

Optics Express. 2015. DOI : 10.1364/OE.23.001428.

Deep-UV fluorescence lifetime imaging microscopy

C. J. De JongA. LajevardipourM. GeceviciusM. BeresnaG. Gervinskas  et al.

Photonics Research. 2015. DOI : 10.1364/Prj.3.000283.

Laser-assisted morphing of complex three dimensional objects

J. DrsT. KishiY. Bellouard

Optics Express. 2015. DOI : 10.1364/OE.23.017355.

2014

Kinetics of laser-assisted carbon nanotube growth

Y. Van De BurgtY. BellouardR. Mandamparambil

Physical Chemistry Chemical Physics. 2014. DOI : 10.1039/c4cp00061g.

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

V. TielenY. Bellouard

Micromachines. 2014. DOI : 10.3390/mi5030697.

Miniaturized Reaction Chamber for Optimized Laser-Assisted Carbon Nanotube Growth

Y. V. D. BurgtW. van LoonR. MandamparambilY. Bellouard

Journal of Laser Micro/Nanoengineering. 2014. DOI : 10.2961/jlmn.2014.02.0007.

Design and Fabrication of a Prototype Actuator for Fourier Transform Interferometry

G. G. MelpignanoA. SchaapY. Bellouard

Progress in Optomechatronic Technologies. 2014. DOI : 10.1007/978-3-319-05711-8_10.

2013

Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass

C. CorbariA. ChampionM. GecevičiusM. BeresnaY. Bellouard  et al.

Optics Express. 2013. DOI : 10.1364/OE.21.003946.

In-situ localized carbon nanotube growth inside partially sealed enclosures

Y. Van De BurgtA. ChampionY. Bellouard

AIP Advances. 2013. DOI : 10.1063/1.4821952.

Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

A. SchaapY. Bellouard

Optical Materials Express. 2013. DOI : 10.1364/OME.3.001428.

Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation

A. ChampionM. BeresnaP. KazanskyY. Bellouard

Optics Express. 2013. DOI : 10.1364/OE.21.024942.

2012

Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

B. LenssenY. Bellouard

Applied Physics Letters. 2012. DOI : 10.1063/1.4750236.

Optical classification of algae species with a glass lab-on-a-chip

A. SchaapT. RohrlackY. Bellouard

Lab on a Chip. 2012. DOI : 10.1039/c2lc21091f.

Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes

Y. Van De BurgtY. BellouardR. MandamparambilM. HaluskaA. Dietzel

Journal of Applied Physics. 2012. DOI : 10.1063/1.4745874.

Direct volume variation measurements in fused silica specimens exposed to femtosecond laser

A. ChampionY. Bellouard

Optical Materials Express. 2012. DOI : 10.1364/OME.2.000789.

The Femtoprint Project

Y. BellouardA. ChampionB. LenssenM. MatteucciA. Schaap  et al.

Journal of Laser Micro/Nanoengineering. 2012. DOI : 10.2961/jlmn.2012.01.0001.

Lab on a chip technologies for algae detection: a review

A. SchaapT. RohrlackY. Bellouard

Journal of Biophotonics. 2012. DOI : 10.1002/jbio.201200051.

2011

Optofluidic lab-on-a-chip for rapid algae population screening

A. SchaapY. BellouardT. Rohrlack

Biomedical Optics Express. 2011. DOI : 10.1364/BOE.2.000658.

On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]

Y. Bellouard

Optical Materials Express. 2011. DOI : 10.1364/OME.1.000816.

Femtosecond-laser generation of self-organized bubble patterns in fused silica

Y. BellouardM.-O. Hongler

Optics Express. 2011. DOI : 10.1364/OE.19.006807.

2010

Dynamical Observation of Femtosecond-Laser-Induced Bubbles in Water Using a Single Laser Source for Probing and Sensing

D. TiwariY. BellouardA. DietzelM. RenE. Rubingh  et al.

Applied Physics Express. 2010. DOI : 10.1143/APEX.3.127101.

On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

T. KniknieY. BellouardE. HomburgH. NijmeijerX. Wang  et al.

Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015039.

In situ monitoring of single-wall carbon nanotube laser assisted growth

M. HaluškaY. BellouardY. Van De BurgtA. Dietzel

Nanotechnology. 2010. DOI : 10.1088/0957-4484/21/7/075602.

Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy

S. RajeshY. Bellouard

Optics Express. 2010. DOI : 10.1364/OE.18.021490.

Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materials

D. N. VitekE. BlockY. BellouardD. E. AdamsS. Backus  et al.

Optics Express. 2010. DOI : 10.1364/OE.18.024673.

Femtosecond laser micromachining of fused silica molds

F. Madani-GrassetY. Bellouard

Optics Express. 2010. DOI : 10.1364/OE.18.021826.

2008

Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films

X. WangY. BellouardZ. XueJ. J. Vlassak

Applied Physics A. 2008. DOI : 10.1007/s00339-007-4331-z.

Time dependent growth of vertically aligned carbon nanotube forest using a laser activated catalytical CVD method

M. HaluškaY. BellouardA. Dietzel

physica status solidi (b). 2008. DOI : 10.1002/pssb.200879576.

Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to lowenergy femtosecond laser pulses

Y. BellouardE. BarthelA. A. SaidM. DuganP. Bado

Optics Express. 2008. DOI : 10.1364/OE.16.019520.

2006

Thermal conductivity contrast measurement of fused silica exposed to low-energy femtosecond laser pulses

Y. BellouardM. DuganA. A. SaidP. Bado

Applied Physics Letters. 2006. DOI : 10.1063/1.2363957.

Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses

Y. BellouardT. ColombC. DepeursingeM. DuganA. A. Said  et al.

Optics Express. 2006. DOI : 10.1364/OE.14.008360.

2005

Adaptive Scanning Optical Microscope (ASOM): A multidisciplinary optical microscope design for large field of view and high resolution imaging

B. PotsaidY. BellouardJ. T. Wen

Optics Express. 2005. DOI : 10.1364/OPEX.13.006504.

Laser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory properties

X. WangY. BellouardJ. Vlassak

Acta Materialia. 2005. DOI : 10.1016/j.actamat.2005.07.022.

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica

Y. BellouardA. A. SaidP. Bado

Optics Express. 2005. DOI : 10.1364/OPEX.13.006635.

2004

Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

Y. BellouardA. SaidM. DuganP. Bado

Optics Express. 2004. DOI : 10.1364/OPEX.12.002120.

2001

Contribution aux concepts de « micro et nanofactory »

R. ClavelP. HelmerS. BottinelliS. HeneinC. Schmitt  et al.

Nano et Micro Technologies. 2001.

Contribution to the Micro- and Nanofactory Concepts

R. ClavelP. HelmerS. BottinelliS. HeneinC. Schmitt  et al.

Nano and Micro Technologies. 2001.

Teaching & PhD

Current Phd

Ernesto Gribaudo, Camar Cheayto, Antoine Duret, Chrysoula Stathaki, Martin Thibaud Lentz

Past Phd As Director

Tao Yang, Christos Edouardos Athanasiou, Pieter Vlugter, Saood Nazir, Arunkrishnan Radhakrishnan, Enrico Casamenti, Ruben Ricca, Olivier Bernard, Gözden Torun, Samuel Youcef Benketaf

Past Phd As Codirector

Luciano Borasi

Courses

Advanced micro-/nano- manufacturing

MICRO-632

This course contains lectures covering the latest research and development done in the field of micro-/nano- manufacturing methods and processes. It consists on an intensive 5 days training and is done in the framework of a collaboration between FEMTO-ST in France and EPFL.

Manufacturing technologies

MICRO-301

This course gives an introduction to production methods and manufacturing technologies used in microengineering. The focus is given on the understanding of physical phenomena underlying the processes, the relation between materials, manufacturing processes and design, as well as economical aspects.

Products design & systems engineering

MICRO-406

This course will cover all the aspects of product design and system engineering from learning relevant methods to the actual implementation in a hands-on practice of product development.

Selected topics in advanced manufacturing

MICRO-631

The course aims at providing a comprehensive overview of ongoing advanced manufacturing research topics and an opportunity for students to investigate current research trends in one particular topic of their choice.