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Yves Bellouard

EPFL STI IMT GALATEA
MC A1 288 (Bâtiment MC)
Rue de la Maladière 71b, CP 526
2002 Neuchâtel 2

Expertise


Dr. Yves Bellouard is Associate Professor in Microengineering at Ecole Polytechnique Fédérale de Lausanne (EPFL) in Switzerland, where he heads the Galatea lab and the Richemont Chair in Multi-Scale Manufacturing Technologies. Before joining EPFL in 2015, he was Associate Professor at Eindhoven University of Technologies (TU/e) in the Netherlands and prior to that, Research Scientist at Rensselaer Polytechnic Institute (RPI) in Troy, New York for four years.
His current research interests are in advanced manufacturing in general and more specifically, on laser-based processes and methods to tailor material properties.

Journals

2024

Influence of ionization and cumulative effects on laser-induced crystallization in multilayer dielectrics

R. RiccaV. BoureauY. Bellouard

Physical Review Materials. 2024. DOI : 10.1103/PhysRevMaterials.8.063402.

Femtosecond-laser direct-write photoconductive patterns on tellurite glass

G. TorunA. RomashkinaT. KishiY. Bellouard

Physical Review Applied. 2024. DOI : 10.1103/PhysRevApplied.21.014008.

2023

Formation Mechanism of Elemental Te Produced in Tellurite Glass Systems by Femtosecond Laser Irradiation

G. TorunT. KishiD. PuglieseD. MilaneseY. Bellouard

Advanced Materials. 2023-02-07. DOI : 10.1002/adma.202210446.

All-glass miniature GHz repetition rate femtosecond laser cavity

A. M. DelgoffeS. NazirS. HakobyanC. HönningerY. Bellouard

Optica. 2023. DOI : 10.1364/OPTICA.496503.

High-efficiency non-ablative UV laser nano-scale processing of fused silica by stable filamentation

B. HermannO. BernardL. MuscarellaY. Bellouard

Optics Express. 2023. DOI : 10.1364/OE.497584.

Third-harmonic generation monitoring of femtosecond-laser-induced in-volume functional modifications

O. BernardA. KraxnerA. BoukhaymaJ. A. SquierC. Enz  et al.

Optica. 2023. DOI : 10.1364/OPTICA.486746.

Single-Layer Subwavelength Femtosecond-Laser-Induced Confined Nanocrystallization in Multistack Dielectrics

R. RiccaY. Bellouard

Physical Review Applied. 2023-04-12. DOI : 10.1103/PhysRevApplied.19.044035.

2022

Femtosecond laser-shockwave induced densification in fused silica

A. RadhakrishnanJ. GateauP. VlugterY. Bellouard

Optical Materials Express. 2022-07-01. DOI : 10.1364/OME.462915.

Ultrafast Laser Direct-Writing of Self-Organized Microstructures in Ge-Sb-S Chalcogenide Glass

G. TorunA. YadavK. A. RichardsonY. Bellouard

Frontiers in Physics. 2022-04-14. DOI : 10.3389/fphy.2022.883319.

Glass-in-glass infiltration for 3D micro-optical composite components

E. CasamentiG. TorunL. BorasiM. LautenbacherM. Bertrand  et al.

Optics Express. 2022-04-07. DOI : 10.1364/OE.451026.

Abnormal temperature dependent elastic properties of fused silica irradiated by ultrafast lasers

P. VlugterY. Bellouard

Physical Review Materials. 2022-03-04. DOI : 10.1103/PhysRevMaterials.6.033602.

On the behavior of uniaxial static stress loaded micro-scale fused silica beams at room temperature

S. I. NazirC. E. AthanasiouY. Bellouard

Journal of Non-Crystalline Solids: X. 2022-01-19. DOI : 10.1016/j.nocx.2022.100083.

Wavelength-multiplexed single-shot ptychography

J. BarolakD. GoldbergerJ. SquierY. BellouardC. Durfee  et al.

Ultramicroscopy. 2022. DOI : 10.1016/j.ultramic.2021.113418.

2021

Ultrafast laser interaction with transparent multi-layer SiO2/Si3N4 films

R. RiccaV. BoureauY. Bellouard

Journal of Applied Physics. 2021-12-29. DOI : 10.1063/5.0065726.

Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining

E. CasamentiS. PollonghiniY. Bellouard

Optics Express. 2021-10-12. DOI : 10.1364/OE.435163.

Highly motile nanoscale magnetic artificial cilia

T. u. IslamY. BellouardJ. M. J. den Toonder

Proceedings Of The National Academy Of Sciences Of The United States Of America. 2021-08-25. DOI : 10.1073/pnas.2104930118.

3D metal freeform micromanufacturing

L. BorasiE. CasamentiR. CharvetC. DénéréazS. Pollonghini  et al.

Journal of Manufacturing Processes. 2021-06-23. DOI : 10.1016/j.jmapro.2021.06.002.

On the use of a digital twin to enhance femtosecond laser inscription of arbitrary phase patterns

O. BernardY. Bellouard

Journal of Physics: Photonics. 2021-05-25. DOI : 10.1088/2515-7647/abf743.

Contactless Optical Packaging Concept for Laser to Fiber Coupling

S. I. NazirY. Bellouard

IEEE Transactions on Components, Packaging and Manufacturing Technology. 2021-05-18. DOI : 10.1109/TCPMT.2021.3080513.

Direct-write laser-induced self-organization and metallization beyond the focal volume in tellurite glass

G. TorunT. KishiY. Bellouard

Physical Review Materials. 2021-05-14. DOI : 10.1103/PhysRevMaterials.5.055201.

Vibration monitoring based on optical sensing of mechanical nonlinearities in glass suspended waveguides

E. CasamentiT. YangP. VlugterY. Bellouard

Optics Express. 2021-03-23. DOI : 10.1364/OE.414191.

2020

Laser-induced densification of fused silica using spatially overlapping sub-30fs pulses

B. McMillenO. UtezaR. CladyN. SannerM. Sentis  et al.

Journal Of Applied Physics. 2020-08-28. DOI : 10.1063/5.0011317.

Lens aberration compensation in interference microscopy

R. SuM. ThomasM. LiuJ. DrsY. Bellouard  et al.

Optics and Lasers in Engineering. 2020-05-01. DOI : 10.1016/j.optlaseng.2020.106015.

Elastic properties of self-organized nanogratings produced by femtosecond laser exposure of fused silica

P. VlugterY. Bellouard

Physical Review Materials. 2020-02-27. DOI : 10.1103/PhysRevMaterials.4.023607.

Ablation in Externally Applied Electric and Magnetic Fields

J. MaksimovicS.-H. NgT. KatkusN. H. A. An LeJ. W. M. Chon  et al.

Nanomaterials. 2020-01-21. DOI : 10.3390/nano10020182.

ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining

K. TomitaT. KishiT. YanoP. VlugterY. Bellouard

International Journal of Applied Glass Science. 2020-09-27. DOI : 10.1111/ijag.15857.

2019

A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser

S. I. NazirY. Bellouard

Micromachines. 2019-09-01. DOI : 10.3390/mi10090611.

Local tuning of fused silica thermal expansion coefficient using femtosecond laser

P. VlugterE. BlockY. Bellouard

Physical Review Materials. 2019-05-10. DOI : 10.1103/PhysRevMaterials.3.053802.

2018

Self-organized nanostructures forming under high-repetition rate femtosecond laser bulk-heating of fused silica

E. KissiY. Bellouard

Optics Express. 2018. DOI : 10.1364/OE.26.014024.

Effect of the Combination of Femtosecond Laser Pulses Exposure on the Etching Rate of Fused Silica in Hydrofluoric Acid

A. MouskeftarasY. Bellouard

JOURNAL OF LASER MICRO NANOENGINEERING. 2018. DOI : 10.2961/jlmn.2018.01.0006.

A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser

C. AthanasiouY. Bellouard

MICROMACHINES. 2018. DOI : 10.3390/mi9040164.

2017

Unraveling Brittle-Fracture Statistics from Intermittent Patterns Formed During Femtosecond Laser Exposure

C. E. AthanasiouM.-O. HonglerY. Bellouard

Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.8.054013.

Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications

T. TickunasM. PerrenoudS. ButkusR. GadonasS. Rekstyte  et al.

Optics Express. 2017. DOI : 10.1364/Oe.25.026280.

Ultrafast Laser to Tailor Material Properties: An Enabling Tool in Advanced Three-dimensional Micromanufacturing

Y. Bellouard

Chimia. 2017. DOI : 10.2533/chimia.2017.295.

Laser-Induced Transition between Nonlinear and Linear Resonant Behaviors of a Micromechanical Oscillator

T. YangY. Bellouard

Physical Review Applied. 2017. DOI : 10.1103/PhysRevApplied.7.064002.

Plasmon-less surface enhanced Raman spectra induced by self-organized networks of silica nanoparticles produced by femtosecond lasers

Y. BellouardE. BlockJ. SquierJ. Gobet

Optics Express. 2017. DOI : 10.1364/Oe.25.009587.

2016

Femtosecond laser direct-write waveplates based on stress-induced birefringence

B. McmillenC. AthanasiouY. Bellouard

Optics Express. 2016. DOI : 10.1364/Oe.24.027239.

Stress-state manipulation in fused silica via femtosecond laser irradiation

Y. BellouardA. ChampionB. McmillenS. MukherjeeR. R. Thomson  et al.

Optica. 2016. DOI : 10.1364/Optica.3.001285.

2015

Deep-UV fluorescence lifetime imaging microscopy

C. J. De JongA. LajevardipourM. GeceviciusM. BeresnaG. Gervinskas  et al.

Photonics Research. 2015. DOI : 10.1364/Prj.3.000283.

Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

T. YangY. Bellouard

Journal Of Micromechanics And Microengineering. 2015. DOI : 10.1088/0960-1317/25/10/105009.

Non-contact sub-nanometer optical repositioning using femtosecond lasers

Y. Bellouard

Optics Express. 2015. DOI : 10.1364/Oe.23.029258.

Structural, electrical and magnetic characterization of in-situ crystallized ZnO:Co thin films synthesized by reactive magnetron sputtering

S. LardjaneM. A. P. YazdiN. MartinC. BellouardN.-E. Fenineche  et al.

Materials Chemistry And Physics. 2015. DOI : 10.1016/j.matchemphys.2015.04.037.

Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiation

Y. LiaoW. PanY. CuiL. QiaoY. Bellouard  et al.

Optics Letters. 2015. DOI : 10.1364/Ol.40.003623.

A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser

C. E. AthanasiouY. Bellouard

Micromachines. 2015. DOI : 10.3390/mi6091365.

On the anisotropy of stress-distribution induced in glasses and crystals by non-ablative femtosecond laser exposure

B. McmillenY. Bellouard

Optics Express. 2015. DOI : 10.1364/OE.23.000086.

Tailored surface birefringence by femtosecond laser assisted wet etching

R. DrevinskasM. GecevičiusM. BeresnaY. BellouardP. G. Kazansky

Optics Express. 2015. DOI : 10.1364/OE.23.001428.

High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation

Y. LiaoJ. NiL. QiaoM. HuangY. Bellouard  et al.

Optica. 2015. DOI : 10.1364/OPTICA.2.000329.

Laser-assisted morphing of complex three dimensional objects

J. DrsT. KishiY. Bellouard

Optics Express. 2015. DOI : 10.1364/OE.23.017355.

Transition and self-healing process between chaotic and self-organized patterns observed during femtosecond laser writing

N. GroothoffM.-O. HonglerP. KazanskyY. Bellouard

Optics Express. 2015. DOI : 10.1364/OE.23.016993.

2014

Kinetics of laser-assisted carbon nanotube growth

Y. Van De BurgtY. BellouardR. Mandamparambil

Physical Chemistry Chemical Physics. 2014. DOI : 10.1039/c4cp00061g.

Miniaturized Reaction Chamber for Optimized Laser-Assisted Carbon Nanotube Growth

Y. V. D. BurgtW. van LoonR. MandamparambilY. Bellouard

Journal of Laser Micro/Nanoengineering. 2014. DOI : 10.2961/jlmn.2014.02.0007.

Design and Fabrication of a Prototype Actuator for Fourier Transform Interferometry

G. G. MelpignanoA. SchaapY. Bellouard

Progress in Optomechatronic Technologies. 2014. DOI : 10.1007/978-3-319-05711-8_10.

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

V. TielenY. Bellouard

Micromachines. 2014. DOI : 10.3390/mi5030697.

2013

Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass

C. CorbariA. ChampionM. GecevičiusM. BeresnaY. Bellouard  et al.

Optics Express. 2013. DOI : 10.1364/OE.21.003946.

In-situ localized carbon nanotube growth inside partially sealed enclosures

Y. Van De BurgtA. ChampionY. Bellouard

AIP Advances. 2013. DOI : 10.1063/1.4821952.

Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation

A. ChampionM. BeresnaP. KazanskyY. Bellouard

Optics Express. 2013. DOI : 10.1364/OE.21.024942.

Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

A. SchaapY. Bellouard

Optical Materials Express. 2013. DOI : 10.1364/OME.3.001428.

2012

Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes

Y. Van De BurgtY. BellouardR. MandamparambilM. HaluskaA. Dietzel

Journal of Applied Physics. 2012. DOI : 10.1063/1.4745874.

The Femtoprint Project

Y. BellouardA. ChampionB. LenssenM. MatteucciA. Schaap  et al.

Journal of Laser Micro/Nanoengineering. 2012. DOI : 10.2961/jlmn.2012.01.0001.

Direct volume variation measurements in fused silica specimens exposed to femtosecond laser

A. ChampionY. Bellouard

Optical Materials Express. 2012. DOI : 10.1364/OME.2.000789.

Lab on a chip technologies for algae detection: a review

A. SchaapT. RohrlackY. Bellouard

Journal of Biophotonics. 2012. DOI : 10.1002/jbio.201200051.

Optical classification of algae species with a glass lab-on-a-chip

A. SchaapT. RohrlackY. Bellouard

Lab on a Chip. 2012. DOI : 10.1039/c2lc21091f.

Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

B. LenssenY. Bellouard

Applied Physics Letters. 2012. DOI : 10.1063/1.4750236.

2011

On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]

Y. Bellouard

Optical Materials Express. 2011. DOI : 10.1364/OME.1.000816.

Optofluidic lab-on-a-chip for rapid algae population screening

A. SchaapY. BellouardT. Rohrlack

Biomedical Optics Express. 2011. DOI : 10.1364/BOE.2.000658.

Femtosecond-laser generation of self-organized bubble patterns in fused silica

Y. BellouardM.-O. Hongler

Optics Express. 2011. DOI : 10.1364/OE.19.006807.

2010

Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materials

D. N. VitekE. BlockY. BellouardD. E. AdamsS. Backus  et al.

Optics Express. 2010. DOI : 10.1364/OE.18.024673.

Dynamical Observation of Femtosecond-Laser-Induced Bubbles in Water Using a Single Laser Source for Probing and Sensing

D. TiwariY. BellouardA. DietzelM. RenE. Rubingh  et al.

Applied Physics Express. 2010. DOI : 10.1143/APEX.3.127101.

Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy

S. RajeshY. Bellouard

Optics Express. 2010. DOI : 10.1364/OE.18.021490.

Femtosecond laser micromachining of fused silica molds

F. Madani-GrassetY. Bellouard

Optics Express. 2010. DOI : 10.1364/OE.18.021826.

On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

T. KniknieY. BellouardE. HomburgH. NijmeijerX. Wang  et al.

Journal of Micromechanics and Microengineering. 2010. DOI : 10.1088/0960-1317/20/1/015039.

In situ monitoring of single-wall carbon nanotube laser assisted growth

M. HaluškaY. BellouardY. Van De BurgtA. Dietzel

Nanotechnology. 2010. DOI : 10.1088/0957-4484/21/7/075602.

2008

Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films

X. WangY. BellouardZ. XueJ. J. Vlassak

Applied Physics A. 2008. DOI : 10.1007/s00339-007-4331-z.

Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to lowenergy femtosecond laser pulses

Y. BellouardE. BarthelA. A. SaidM. DuganP. Bado

Optics Express. 2008. DOI : 10.1364/OE.16.019520.

Time dependent growth of vertically aligned carbon nanotube forest using a laser activated catalytical CVD method

M. HaluškaY. BellouardA. Dietzel

physica status solidi (b). 2008. DOI : 10.1002/pssb.200879576.

2006

Thermal conductivity contrast measurement of fused silica exposed to low-energy femtosecond laser pulses

Y. BellouardM. DuganA. A. SaidP. Bado

Applied Physics Letters. 2006. DOI : 10.1063/1.2363957.

Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses

Y. BellouardT. ColombC. DepeursingeM. DuganA. A. Said  et al.

Optics Express. 2006. DOI : 10.1364/OE.14.008360.

2005

Laser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory properties

X. WangY. BellouardJ. Vlassak

Acta Materialia. 2005. DOI : 10.1016/j.actamat.2005.07.022.

Adaptive Scanning Optical Microscope (ASOM): A multidisciplinary optical microscope design for large field of view and high resolution imaging

B. PotsaidY. BellouardJ. T. Wen

Optics Express. 2005. DOI : 10.1364/OPEX.13.006504.

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica

Y. BellouardA. A. SaidP. Bado

Optics Express. 2005. DOI : 10.1364/OPEX.13.006635.

2004

Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

Y. BellouardA. SaidM. DuganP. Bado

Optics Express. 2004. DOI : 10.1364/OPEX.12.002120.

2001

Contribution aux concepts de « micro et nanofactory »

R. ClavelP. HelmerS. BottinelliS. HeneinC. Schmitt  et al.

Nano et Micro Technologies. 2001.

Contribution to the Micro- and Nanofactory Concepts

R. ClavelP. HelmerS. BottinelliS. HeneinC. Schmitt  et al.

Nano and Micro Technologies. 2001.

Doctorant·es actuel·les

Antoine Duret, Martin Thibaud Lentz, Ernesto Gribaudo, Chrysoula Stathaki, Camar Cheayto

A dirigé les thèses EPFL de

Tao Yang, Christos Edouardos Athanasiou, Pieter Vlugter, Saood Nazir, Arunkrishnan Radhakrishnan, Enrico Casamenti, Ruben Ricca, Olivier Bernard, Gözden Torun, Samuel Youcef Benketaf

Luciano Borasi

Cours

Advanced micro-/nano- manufacturing

MICRO-632

This course contains lectures covering the latest research and development done in the field of micro-/nano- manufacturing methods and processes. It consists on an intensive 5 days training and is done in the framework of a collaboration between FEMTO-ST in France and EPFL.

Manufacturing technologies

MICRO-301

Ce cours propose une introduction aux méthodes de production et aux techniques de fabrication, pertinentes à la microtechnique. L'accent est donné sur la compréhension des phénomènes, sur le triangle matériaux/technique de fabrication/conception, mais également sur les aspects économiques.

Products design & systems engineering

MICRO-406

Ce cours couvre tous les aspects relatifs à la conception de produits, depuis l'apprentissage de méthodes de conception, de planification et d'organisation, jusqu'à la réalisation concrète d'un prototype.

Selected topics in advanced manufacturing

MICRO-631

The course aims at providing a comprehensive overview of ongoing advanced manufacturing research topics and an opportunity for students to investigate current research trends in one particular topic of their choice.